CN211374509U - Integrated terahertz generation and focusing device and near-field terahertz scanning system - Google Patents
Integrated terahertz generation and focusing device and near-field terahertz scanning system Download PDFInfo
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- CN211374509U CN211374509U CN201921918566.7U CN201921918566U CN211374509U CN 211374509 U CN211374509 U CN 211374509U CN 201921918566 U CN201921918566 U CN 201921918566U CN 211374509 U CN211374509 U CN 211374509U
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Abstract
The utility model discloses an integration terahertz is produced and focusing device and near field terahertz scanning system now, include: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the terahertz generation unit is used for generating terahertz waves; the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the focusing unit is used for focusing the parallel light beams to a preset position, and the terahertz generating unit, the converting unit and the focusing unit are correspondingly fixed inside and outside the light path pipeline. The utility model provides a technical scheme produces unit, conversion unit and the focusing unit integration is fixed and realize the integration terahertz through the light path pipeline now, realizes reducing the purpose of device volume for the device is convenient for use in narrow spaces such as strong magnetic field, utmost point low temperature, has the significance in the measurement in restricted space is used.
Description
Technical Field
The utility model relates to a microsystem technical field, more specifically say, relate to an integration terahertz is produced and focusing device and near field terahertz scanning system now.
Background
The existing terahertz wave imaging is influenced by the diffraction limit corresponding to the long wavelength, the resolution is lower than that of visible light, only has the magnitude order of several microns, and is far larger than the dimensions of micro-nano structure materials or biological tissues and cells, the requirement of high-precision observation cannot be met, along with the development of experimental physics, a near-field imaging method is developed, terahertz light is creatively combined with a scanning probe microscope, the diffraction limit can be broken through, and a sub-wavelength resolution image can be obtained.
Researchers hope to apply terahertz light in combination with scanning probe microscopy in narrow spaces: such as a magnet with small aperture or an environment with extremely low temperature and ultra-high vacuum, so as to achieve the purpose of testing the physical properties under extreme conditions. However, when the terahertz light and the scanning probe microscope are combined together, the existing terahertz generation optical path and the existing focusing optical path are both complex and large in occupied volume, and the combination mode is not suitable for being applied to a narrow space.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides an integration terahertz is produced and focusing device and near field terahertz scanning system now integrates terahertz generation unit and focusing unit now through the converting unit, simplifies terahertz and produces and focusing device's structure now, and then reduces its volume, enlarges its application scope.
In order to achieve the above purpose, the utility model provides a technical scheme as follows:
an integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;
the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;
the conversion unit is arranged on a light emitting path of the terahertz generation unit, and is used for splitting the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam with phase difference after the terahertz wave is converted into the parallel light beam, and guiding and emitting the first sub-parallel light beam and the second sub-parallel light beam to the focusing unit; wherein the conversion unit includes: the terahertz generation unit is arranged on a light emitting path of the terahertz generation unit and is fixed on the convex lens in the input pipeline; the third reflector is arranged on the light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the beam splitter is arranged on the light emitting path of the third reflector and is fixed in the middle pipeline; the fourth reflector is arranged on a first beam splitting optical path of the beam splitter and fixed in the middle pipeline, and the phase adjusting subunit is arranged on a second beam splitting optical path of the beam splitter and fixed outside the middle pipeline, wherein the second beam splitting optical path corresponds to an optical path hole of the middle pipeline; the fourth reflector is used for guiding and emitting the first sub-parallel light beam to the focusing unit after reflecting the first sub-parallel light beam; and the phase adjustment subunit include: the displacement device drives the fifth reflector to displace so as to adjust the phase of the second sub-parallel light beams incident to the fifth reflector, and the fifth reflector reflects the second sub-parallel light beams to the focusing unit; the focusing unit is fixed outside the output port of the output pipeline;
the focusing unit is used for focusing the first sub-parallel light beam and the second sub-parallel light beam to a preset position.
Optionally, the integrated terahertz generation and focusing apparatus further includes: the beam splitter is arranged on the light emitting path of the filter lens, and the filter lens is fixed in the intermediate pipeline;
or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter lens of convex lens's light-emitting optical path, the third speculum set up in the light-emitting optical path of filter lens, just the filter lens is fixed in the input pipeline.
Optionally, the optical path pipeline is provided with a slit for fixing the component, wherein the terahertz generating unit, the convex lens, the third reflector, the beam splitter, the fourth reflector and the filter lens are all inserted into the corresponding slit for fixing.
Correspondingly, the utility model also provides an integration terahertz is produced and focusing device now, include: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;
the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;
the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the terahertz generation unit is arranged on a light-emitting path of the terahertz generation unit and is fixed on a convex lens in the input pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the first reflector is arranged on a light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the second reflecting mirror is arranged on the light emitting path of the first reflecting mirror and is fixed at the corner of the output pipeline and the middle pipeline; the focusing unit is arranged on the light-emitting path of the second reflecting mirror and fixed outside the output port of the output pipeline;
the focusing unit is used for focusing the parallel light beams to a preset position.
Optionally, the integrated terahertz generation and focusing apparatus further includes: the second reflecting mirror is arranged on the light-emitting path of the optical filter, and the optical filter is fixed in the intermediate pipeline;
or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter of convex lens's light-emitting optical path, first speculum set up in the light-emitting optical path of filter, just the filter is fixed in the input pipeline.
Optionally, the optical path pipeline is provided with a slit for fixing the component, wherein the terahertz generating unit, the convex lens, the first reflecting mirror, the second reflecting mirror and the filter lens are all inserted into the corresponding slit for fixing.
Correspondingly, the utility model also provides an integration terahertz is produced and focusing device now, a serial communication port, include: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: a vertical pipe;
the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the vertical pipeline;
the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; wherein the conversion unit includes: the convex lens is arranged on a light emitting path of the terahertz generation unit and fixed in the vertical pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the focusing unit is arranged on a light emitting path of the convex lens and fixed outside the output port of the vertical pipeline;
the focusing unit is used for focusing the parallel light beams to a preset position.
Optionally, the integrated terahertz generation and focusing apparatus further includes: set up in filter on convex lens's the light-emitting optical path, the focus unit set up in filter's light-emitting optical path, just filter is fixed in the vertical pipeline.
Optionally, the optical conduit is provided with a slit for fixing the component, wherein the terahertz generating unit, the convex lens and the filter lens are all inserted into the corresponding slit for fixing.
Correspondingly, the utility model also provides a near field terahertz scanning system now, include:
the integrated terahertz generation and focusing device is described above;
a sample stage;
the scanning probe microscope is used for focusing the parallel light beams to a probe tip of the scanning probe microscope in a scanning process;
and the integrated terahertz generation and focusing device, the sample stage and the scanning probe microscope are all fixed on the integral support.
Compared with the prior art, the utility model provides a technical scheme has following advantage at least:
the utility model provides an integration terahertz is produced and focusing device and near field terahertz scanning system now, include: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the terahertz generation unit is used for generating terahertz waves; the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the focusing unit is used for focusing the parallel light beams to a preset position, and the terahertz generating unit, the converting unit and the focusing unit are correspondingly fixed inside and outside the light path pipeline. According to the above, the utility model provides a technical scheme simplifies terahertz and produces and focusing device's component device now, produces unit, converting unit and focusing unit integration fixedly and realize the integration now terahertz through the light path pipeline simultaneously, finally realizes reducing the purpose of device volume, and then makes the device be convenient for use in narrow spaces such as strong magnetic field, utmost point low temperature, has important meaning in the measurement application in restricted space. Meanwhile, the integration of the device is realized through the optical path pipeline, the integrated terahertz generation is integrally fixed with the focusing device, the sample stage and the scanning probe microscope through the integral support, and on the basis of ensuring the firm integral structure of the device, the optical path deviation phenomenon caused by vibration and the like can be reduced, and the adverse effect during test measurement is reduced. And, the conversion unit provided by the utility model can realize two modes of beam splitting and beam non-splitting of the parallel light beam; the mode without beam splitting can be suitable for test measurement without optical path delay; and for the mode of splitting the parallel light beams, the delay time of the light path is adjusted through the phase adjusting subunit, so as to meet the requirements of different test measurements.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an integrated terahertz generation and focusing apparatus according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of an integrated terahertz generation and focusing apparatus according to a second embodiment of the present application;
fig. 3 is a schematic structural diagram of an integrated terahertz generation and focusing apparatus according to a third embodiment of the present application;
fig. 4 is a schematic structural diagram of a near-field terahertz scanning system according to a fourth embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As described in the background, researchers hope to apply terahertz light in conjunction with scanning probe microscopy in narrow spaces: such as a magnet with small aperture or an environment with extremely low temperature and ultra-high vacuum, so as to achieve the purpose of testing the physical properties under extreme conditions. However, when the terahertz light and the scanning probe microscope are combined together, the existing terahertz generation optical path and the existing focusing optical path are both complex and large in occupied volume, and the combination mode is not suitable for being applied to a narrow space.
Based on this, the embodiment of the application provides an integrated terahertz generation and focusing device and a near-field terahertz scanning system, wherein the terahertz generation unit and the focusing unit are integrated through the conversion unit, so that the structure of the terahertz generation and focusing device is simplified, the size of the terahertz generation and focusing device is further reduced, and the application range of the terahertz generation and focusing device is expanded. In order to achieve the above object, the technical solutions provided by the embodiments of the present application are described in detail below, specifically with reference to fig. 1 to 4.
Example one
Referring to fig. 1, a schematic structural diagram of an integrated terahertz generation and focusing apparatus provided in an embodiment of the present application is shown, where the integrated terahertz generation and focusing apparatus includes: the terahertz generation unit 100, the conversion unit, the focusing unit 300 and the optical path pipeline; the optical path pipe includes: a middle pipeline 520 horizontally arranged, and an input pipeline 510 and an output pipeline 530 respectively vertically arranged at two ends of the middle pipeline 520;
the terahertz generation unit 100 is used for generating terahertz waves and is fixed in an input port of the input pipeline 510;
the conversion unit is disposed on an outgoing light path of the terahertz generation unit 100, and is configured to split the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam having a phase difference after the terahertz wave is converted into the parallel light beam, and guide and emit the first sub-parallel light beam and the second sub-parallel light beam to the focusing unit 300;
the focusing unit 300 focuses both the first sub-parallel beam and the second sub-parallel beam to a preset position.
Referring to fig. 1, the conversion unit provided in the embodiment of the present application includes:
the convex lens 210 is arranged on the light outgoing path of the terahertz generating unit 100 and fixed in the input pipeline 510, and the terahertz generating unit 100 is located at the focus of the convex lens 210;
a third reflector 240 disposed on the light-emitting path of the convex lens 210 and fixed at the corner of the input pipe 510 and the middle pipe 520;
the beam splitter 250 is arranged on the light outgoing path of the third reflector 240 and fixed in the middle pipeline 520;
and a fourth reflecting mirror 260 disposed on the first beam splitting path (generating the first sub-parallel beam) of the beam splitter 250 and fixed in the middle pipe 520, and a phase adjusting subunit 270 disposed on the second beam splitting path (generating the second sub-parallel beam) of the beam splitter 250 and fixed outside the middle pipe 520 (for example, fixed on the outer wall of the middle pipe), wherein the fourth reflecting mirror 260 is configured to reflect the first sub-parallel beam and guide the reflected first sub-parallel beam to the focusing unit 300, and the phase adjusting subunit 270 is configured to guide the phase adjusted second sub-parallel beam to the focusing unit 300.
As shown in fig. 1, the phase adjustment subunit 270 provided by the present application includes:
a displacement device 271;
and a fifth mirror 272 disposed on the displacement device 271, wherein the displacement device 271 drives the fifth mirror 272 to displace so as to adjust the phase of the second sub-parallel light beam incident on the fifth mirror 272, and the fifth mirror 272 reflects the second sub-parallel light beam to the focusing unit 300; the focusing unit 300 is fixed outside the output port of the output pipe 530.
It can be understood that, with reference to fig. 1, the displacement device 271 drives the fifth reflecting mirror 272 to move up and down in the vertical direction, so as to change the phase of the second sub-parallel light beam incident on the fifth reflecting mirror 272.
In an embodiment of the present application, the displacement device provided by the present application may be a motor.
In an embodiment of the present application, the terahertz generation unit provided by the present application includes a photoconductive antenna or an optical crystal. And the focusing unit provided in the embodiment of the present application is a reflective focusing mirror, which is not particularly limited in this application.
In an embodiment of the present application, as shown in fig. 1, the integrated terahertz generating and focusing apparatus provided by the present application further includes: the filter 220 is disposed on the light-emitting path of the third reflector 240, the beam splitter 250 is disposed on the light-emitting path of the filter 220, and the filter 220 is fixed in the intermediate pipe 520;
or, the optical filter that this application embodiment provided can also be located the light-emitting path of convex lens, promptly integration terahertz is produced and focusing device still includes: set up in the last filter lens of convex lens's light-emitting optical path, the third speculum set up in the light-emitting optical path of filter lens, just the filter lens is fixed in the input pipeline.
It can be understood that the device provided by the embodiment of the present application is a terahertz generation and focusing device, and since the external environment light and the stray light have a large influence on the terahertz generation and focusing device, the optical path pipeline included by the device provided by the embodiment of the present application can be a sealed optical path pipeline, and the component thereof is hermetically wrapped, so that the external environment or other stray light is prevented from influencing the optical path of the device. Wherein, the optical path pipeline can be a Z-shaped pipeline composed of an input pipeline, an intermediate pipeline and an output pipeline. And, this application provides the light path pipeline is provided with the slot that fixed subassembly was used, wherein, terahertz produces unit, convex lens, third speculum, beam splitter, fourth speculum and filter and all inserts in corresponding slot fixedly, effectively reduces miscellaneous light and produces with focusing device's influence to terahertz.
In an embodiment of the present application, an included angle between the third reflector and the convex lens provided by the present application is set to be 45 degrees;
the third reflector and the beam splitter form an included angle of 90 degrees,
and the fourth reflector and the included angle between the beam splitters are set at 45 degrees, the fourth reflector reflects the first sub parallel beams to the beam splitters, and the beam splitters reflect the first sub parallel beams to the focusing unit.
Specifically, as shown in fig. 1, a terahertz generation unit 100 is disposed at a pipe orifice of an input pipe 510, a convex lens 210 coaxially disposed in the input pipe 510 is disposed above the terahertz generation unit 100, and the terahertz generation unit 100 is disposed at a focus of the convex lens 210. At a corner between the vertically disposed input duct 510 and the horizontally disposed intermediate duct 520, a 135 degree third reflecting mirror 240 is disposed, and the third reflecting mirror 240 reflects the parallel light beams in the vertical direction into parallel light beams in the horizontal direction. And, at a corner between the vertically disposed output duct 530 and the horizontally disposed intermediate duct 520, a 45 degree angled beam splitter 250 is disposed. The beam splitter 250 is vertically arranged in the middle pipeline 520 along the light transmitting and beam splitting direction and provided with a fourth reflector 260; the intermediate duct 520 is provided with an optical path hole in the beam splitting direction reflected by the beam splitter 250, a fifth mirror 272 provided in the horizontal direction is provided below the optical path hole, and a displacement device 271 is provided below the fifth mirror 272. A focusing unit 300 is disposed at the orifice of the output duct 530. And a vertically disposed filter 220 coaxially disposed in the intermediate pipe 520 is provided between the third reflector 240 and the beam splitter 250.
As can be seen from the above, according to the technical scheme provided by the embodiment of the application, the terahertz generation unit, the conversion unit and the focusing unit are integrated through the optical path pipeline, so that the structure of the terahertz generation and focusing device is simplified, the size of the terahertz generation and focusing device is further reduced, and the application range of the terahertz generation and focusing device is expanded. In the integrated terahertz generation and focusing device provided by the first embodiment of the application, the conversion unit can also split the parallel light beam into two sub-parallel light beams with a preset phase difference, and the two sub-parallel light beams are guided into the focusing unit; that is to say, the conversion unit provided in the embodiment of the present application is further configured to split the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam having a phase difference after converting the terahertz wave into the parallel light beam, and guide and emit both the first sub-parallel light beam and the second sub-parallel light beam to the focusing unit; the focusing unit is used for focusing the first sub-parallel light beam and the second sub-parallel light beam to a preset position, so that the application range of the device is further expanded, and the device is suitable for the experimental requirements of a pump detection light coupling scanning probe microscope.
Example two
Referring to fig. 2, a schematic structural diagram of another integrated terahertz generation and focusing apparatus provided in an embodiment of the present application is shown, where the integrated terahertz generation and focusing apparatus includes: the terahertz generation unit 100, the conversion unit 200, the focusing unit 300 and the optical path pipeline; the optical path pipe includes: a middle pipeline 520 horizontally arranged, and an input pipeline 510 and an output pipeline 530 respectively vertically arranged at two ends of the middle pipeline 520;
the terahertz generation unit 100 is used for generating terahertz waves and is fixed in an input port of the input pipeline 510;
the conversion unit is disposed on a light-emitting path of the terahertz generation unit 100, and is configured to convert the terahertz waves into parallel beams and guide the parallel beams to exit to the focusing unit 300;
the focusing unit 300 is used for focusing the parallel light beams to a preset position.
The conversion unit provided by the embodiment of the application comprises:
the convex lens 210 is arranged on the light outgoing path of the terahertz generating unit 100 and fixed in the input pipeline 510, and the terahertz generating unit 100 is located at the focus of the convex lens 210;
a first reflector 231 disposed on the light-emitting path of the convex lens 210 and fixed at the corner of the input pipe 510 and the middle pipe 520;
a second reflecting mirror 232 disposed on the light-emitting path of the first reflecting mirror 231 and fixed at the corner of the output pipe 530 and the middle pipe 520; the focusing unit 300 is disposed on the light-emitting path of the second reflecting mirror 232 and fixed outside the output port of the output pipeline 530;
in an embodiment of the present application, the terahertz generation unit provided by the present application includes a photoconductive antenna or an optical crystal. And the focusing unit provided in the embodiment of the present application is a reflective focusing mirror, which is not particularly limited in this application.
In an embodiment of the present application, as shown in fig. 2, the integrated terahertz generating and focusing apparatus provided by the present application further includes: a filter 220 disposed on the light-emitting path of the first reflector 231, the second reflector 232 disposed on the light-emitting path of the filter 220, and the filter 220 fixed in the intermediate pipe 520;
or, the optical filter that this application embodiment provided can also be located the light-emitting path of convex lens, promptly integration terahertz is produced and focusing device still includes: set up in the last filter of convex lens's light-emitting optical path, first speculum set up in the light-emitting optical path of filter, just the filter is fixed in the input pipeline.
It can be understood that the device provided by the embodiment of the present application is a terahertz generation and focusing device, and since the external environment light and the stray light have a large influence on the terahertz generation and focusing device, the optical path pipeline included by the device provided by the embodiment of the present application can be a sealed optical path pipeline, and the component thereof is hermetically wrapped, so that the external environment or other stray light is prevented from influencing the optical path of the device. Wherein, the optical path pipeline can be a Z-shaped pipeline composed of an input pipeline, an intermediate pipeline and an output pipeline. And, the application provides the light path pipeline is provided with the slot that fixed subassembly was used, wherein, terahertz produces unit, convex lens, first speculum, second mirror and filter and all inserts in corresponding slot fixedly now, effectively reduces the stray light and produces with focusing device's influence to terahertz.
In an embodiment of the present application, the first mirror and the second mirror provided in the present application may be disposed in parallel;
and an included angle between the first reflector and the convex lens is 45 degrees.
Specifically, as shown in fig. 2, a terahertz generation unit 100 is disposed at a pipe orifice of an input pipe 510, a convex lens 210 coaxially disposed in the input pipe 510 is disposed above the terahertz generation unit 100, and the terahertz generation unit 100 is disposed at a focus of the convex lens 210. At a corner between the vertically disposed input duct 510 and the horizontally disposed intermediate duct 520, a first reflecting mirror 231 disposed at an angle of 135 degrees is disposed, and the first reflecting mirror 231 reflects the parallel light beams in the vertical direction into parallel light beams in the horizontal direction. And, a second reflector 232 disposed at an angle of 45 degrees is provided at a corner between the vertically disposed output pipe 530 and the horizontally disposed intermediate pipe 520, and a vertically disposed filter 220 coaxially disposed on the intermediate pipe 520 is provided between the first reflector 231 and the second reflector 232; wherein the second mirror 232 reflects the horizontal parallel light beam into the vertical parallel light beam and is output from the output duct 530 to the focusing unit 300 at the port of the output duct 530.
As can be seen from the above, according to the technical scheme provided by the embodiment of the application, the terahertz generation unit, the conversion unit and the focusing unit are integrated through the optical path pipeline, so that the structure of the terahertz generation and focusing device is simplified, the size of the terahertz generation and focusing device is further reduced, and the application range of the terahertz generation and focusing device is expanded.
EXAMPLE III
Referring to fig. 3, a schematic structural diagram of an integrated terahertz generation and focusing apparatus provided in an embodiment of the present application is shown, where the integrated terahertz generation and focusing apparatus includes: the terahertz generation unit 100, the conversion unit 200, the focusing unit 300 and the optical path pipeline; the optical path pipe includes: a vertical pipe 400;
the terahertz generation unit 100 is used for generating terahertz waves and is fixed in an input port of the vertical pipe 400;
the conversion unit is disposed on a light-emitting path of the terahertz generation unit 100, and is configured to convert the terahertz waves into parallel beams and guide the parallel beams to exit to the focusing unit 300;
the focusing unit 300 is used for focusing the parallel light beams to a preset position.
And, the conversion unit provided by the embodiment of the present application includes:
the convex lens 210 is arranged on the light outgoing path of the terahertz generation unit 100 and fixed in the vertical pipeline 400, the terahertz generation unit 100 is located at the focus of the convex lens 210, and the terahertz waves are converted into parallel light beams by the convex lens 210; the focusing unit 300 is disposed on the light emitting path of the convex lens 210 and fixed outside the output port of the vertical pipe 400.
In an embodiment of the present application, the terahertz generation unit provided by the present application includes a photoconductive antenna or an optical crystal. And the focusing unit provided in the embodiment of the present application is a reflective focusing mirror, which is not particularly limited in this application.
In an embodiment of the present application, as shown in fig. 3, the integrated terahertz generating and focusing apparatus provided by the present application further includes: set up in filter 220 on the light-emitting optical path of convex lens 210, focus unit 300 set up in on the light-emitting optical path of filter 220, just filter 220 is fixed in the vertical pipeline 400.
It can be understood that the device provided by the embodiment of the present application is a terahertz generation and focusing device, and since the external environment light and the stray light have a large influence on the terahertz generation and focusing device, the optical path pipeline included by the device provided by the embodiment of the present application can be a sealed optical path pipeline, and the component thereof is hermetically wrapped, so that the external environment or other stray light is prevented from influencing the optical path of the device. And, the light path pipeline that this application embodiment provided is provided with the slot that fixed subassembly was used, wherein, terahertz produces unit, convex lens and filter lens and all inserts in corresponding slot fixedly, effectively reduces the influence of stray light to terahertz production and focusing device.
As shown in fig. 2 in particular, a terahertz generation unit 100 is disposed at a lower pipe orifice of the vertical pipe 400, and a convex lens 210 horizontally disposed is disposed above the terahertz generation unit 100, wherein the terahertz generation unit 100 is located at a focus of the convex lens 210. And a filter 220 disposed in a horizontal direction is disposed above the convex lens 210, and a focusing unit 300 is disposed above the filter 220.
From the above, the integrated terahertz generation and focusing device shown in fig. 1 of the present application is composed of a terahertz generation unit, a convex lens, a filter and a focusing unit, and the terahertz generation and focusing device has a simple structure and a small volume, so that the application range of the terahertz generation and focusing device is expanded.
Example four
Correspondingly, an embodiment of the present application further provides a near field terahertz scanning system, which is shown in fig. 4 and is a schematic structural diagram of the near field terahertz scanning system provided in the embodiment of the present application, wherein the near field terahertz scanning system includes:
the integrated terahertz generation and focusing device 1000 provided by any one of the above embodiments;
a sample stage 2000;
a scanning probe microscope 3000, the focusing unit 300 being configured to focus the parallel light beam to a probe tip 3001 of the scanning probe microscope 3000 during scanning;
and an integral support 4000, to which the integrated terahertz generating and focusing apparatus 1000, the sample stage 2000 and the scanning probe microscope 3000 are fixed.
In any of the above embodiments of the present application, the present application does not specifically limit the fixing manner of the terahertz generating unit, the convex lens, the filter, the reflector, and the beam splitter to the optical path pipeline. The terahertz generating unit, the convex lens, the filter lens, the reflector and the beam splitter can be inserted into corresponding slots, and after the positions of all devices in the slots are adjusted, the terahertz generating unit, the convex lens, the filter lens, the reflector and the beam splitter are fixed in a bonding mode and the like, on the basis of ensuring that the device is firmer, the position fixation is realized only by fine adjustment in the slots, and the manufacturing and assembling processes are simpler; or, the light path pipeline that this application provided comprises two halves structure along the light path direction is cut apart, wherein, treat to be fixed in the intraductal back of half structure among them with terahertz generation unit, convex lens, optical filter, speculum and beam splitter, and it is fixed to coincide with another half structure to fix the device in the pipeline of light path pipeline, do not do specific restriction to this application.
The utility model provides an integration terahertz is produced and focusing device and near field terahertz scanning system now, include: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the terahertz generation unit is used for generating terahertz waves; the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the focusing unit is used for focusing the parallel light beams to a preset position, and the terahertz generating unit, the converting unit and the focusing unit are correspondingly fixed inside and outside the light path pipeline. According to the technical scheme, the terahertz generation and focusing device has the advantages that the component devices of the terahertz generation and focusing device are simplified, the terahertz generation unit, the conversion unit and the focusing unit are integrated and fixed through the optical path pipeline to realize integration, the purpose of reducing the size of the device is finally realized, and the size of the device can be as low as 60 mm; and further, the device is convenient to use in narrow spaces such as a strong magnetic field, extremely low temperature and the like, and has important significance in the measurement application of a limited space. Meanwhile, the integration of the device is realized through the optical path pipeline, the integrated terahertz generation is integrally fixed with the focusing device, the sample stage and the scanning probe microscope through the integral support, and on the basis of ensuring the firm integral structure of the device, the optical path deviation phenomenon caused by vibration and the like can be reduced, and the adverse effect during test measurement is reduced. The conversion unit can realize two modes of splitting and not splitting parallel beams; the mode without beam splitting can be suitable for test measurement without optical path delay; and for the mode of splitting the parallel light beams, the delay time of the light path is adjusted through the phase adjusting subunit, so as to meet the requirements of different test measurements.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;
the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;
the conversion unit is arranged on a light emitting path of the terahertz generation unit, and is used for splitting the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam with phase difference after the terahertz wave is converted into the parallel light beam, and guiding and emitting the first sub-parallel light beam and the second sub-parallel light beam to the focusing unit; wherein the conversion unit includes: the terahertz generation unit is arranged on a light emitting path of the terahertz generation unit and is fixed on the convex lens in the input pipeline; the third reflector is arranged on the light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the beam splitter is arranged on the light emitting path of the third reflector and is fixed in the middle pipeline; the fourth reflector is arranged on a first beam splitting optical path of the beam splitter and fixed in the middle pipeline, and the phase adjusting subunit is arranged on a second beam splitting optical path of the beam splitter and fixed outside the middle pipeline, wherein the second beam splitting optical path corresponds to an optical path hole of the middle pipeline; the fourth reflector is used for guiding and emitting the first sub-parallel light beam to the focusing unit after reflecting the first sub-parallel light beam; and the phase adjustment subunit include: the displacement device drives the fifth reflector to displace so as to adjust the phase of the second sub-parallel light beams incident to the fifth reflector, and the fifth reflector reflects the second sub-parallel light beams to the focusing unit; the focusing unit is fixed outside the output port of the output pipeline;
the focusing unit is used for focusing the first sub-parallel light beam and the second sub-parallel light beam to a preset position.
2. The integrated terahertz generation and focusing apparatus of claim 1, further comprising: the beam splitter is arranged on the light emitting path of the filter lens, and the filter lens is fixed in the intermediate pipeline;
or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter lens of convex lens's light-emitting optical path, the third speculum set up in the light-emitting optical path of filter lens, just the filter lens is fixed in the input pipeline.
3. The integrated terahertz generation and focusing device according to claim 2, wherein the optical path pipe is provided with a slit for fixing the component, wherein the terahertz generation unit, the convex lens, the third reflector, the beam splitter, the fourth reflector and the filter are inserted into the corresponding slits for fixing.
4. An integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;
the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;
the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the terahertz generation unit is arranged on a light-emitting path of the terahertz generation unit and is fixed on a convex lens in the input pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the first reflector is arranged on a light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the second reflecting mirror is arranged on the light emitting path of the first reflecting mirror and is fixed at the corner of the output pipeline and the middle pipeline; the focusing unit is arranged on the light-emitting path of the second reflecting mirror and fixed outside the output port of the output pipeline;
the focusing unit is used for focusing the parallel light beams to a preset position.
5. The integrated terahertz generation and focusing apparatus of claim 4, further comprising: the second reflecting mirror is arranged on the light-emitting path of the optical filter, and the optical filter is fixed in the intermediate pipeline;
or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter of convex lens's light-emitting optical path, first speculum set up in the light-emitting optical path of filter, just the filter is fixed in the input pipeline.
6. The integrated terahertz generation and focusing device according to claim 5, wherein the optical path pipe is provided with a slit for fixing the component, wherein the terahertz generation unit, the convex lens, the first reflecting mirror, the second reflecting mirror and the optical filter are inserted into the corresponding slits and fixed.
7. An integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: a vertical pipe;
the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the vertical pipeline;
the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; wherein the conversion unit includes: the convex lens is arranged on a light emitting path of the terahertz generation unit and fixed in the vertical pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the focusing unit is arranged on a light emitting path of the convex lens and fixed outside the output port of the vertical pipeline;
the focusing unit is used for focusing the parallel light beams to a preset position.
8. The integrated terahertz generation and focusing apparatus of claim 7, further comprising: set up in filter on convex lens's the light-emitting optical path, the focus unit set up in filter's light-emitting optical path, just filter is fixed in the vertical pipeline.
9. The integrated terahertz generation and focusing device according to claim 8, wherein the optical path pipe is provided with a slit for fixing the component, wherein the terahertz generation unit, the convex lens and the filter are inserted into the corresponding slits for fixing.
10. A near-field terahertz scanning system, comprising:
the integrated terahertz generation and focusing device of any one of claims 1 to 9;
a sample stage;
the scanning probe microscope is used for focusing the parallel light beams to a probe tip of the scanning probe microscope in a scanning process;
and the integrated terahertz generation and focusing device, the sample stage and the scanning probe microscope are all fixed on the integral support.
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| CN113938365A (en) * | 2021-09-03 | 2022-01-14 | 北京邮电大学 | Energy limit detection method and device of THz communication and detection integrated system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113938365A (en) * | 2021-09-03 | 2022-01-14 | 北京邮电大学 | Energy limit detection method and device of THz communication and detection integrated system |
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