CN211358388U - Light-induced dielectrophoresis particle separation device based on continuous flow - Google Patents
Light-induced dielectrophoresis particle separation device based on continuous flow Download PDFInfo
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- CN211358388U CN211358388U CN201922107387.1U CN201922107387U CN211358388U CN 211358388 U CN211358388 U CN 211358388U CN 201922107387 U CN201922107387 U CN 201922107387U CN 211358388 U CN211358388 U CN 211358388U
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Abstract
The utility model belongs to micro-fluidic chip field specifically discloses a photoinduction dielectrophoresis particle separator based on continuous flow, including two entries, two exports, microfluid channel, two surge chambers and photoinduction dielectrophoresis chip. The light is applied to different positions of the light-induced dielectrophoresis chip, so that the conductivity of the corresponding position is changed, a non-uniform electric field is generated, and two particles in the microfluidic channel are driven to move. The radius and the dielectric constant of two kinds of particles are different, lead to the photoinduced dielectrophoresis power size difference that it received, based on this, we isolated different particles, the utility model has the advantages of: the separation efficiency is high; the needed collected particle samples are few; the two particles do not need to be marked respectively, and the damage to a separation object is small; the separation of two kinds of particles can be realized by applying illumination to different positions according to requirements without designing complex microfluidic channels and complex electrodes.
Description
Technical Field
The utility model relates to a micro-fluidic field, in particular to microfluid separation field mainly is a light-induced dielectrophoresis particle separation device based on continuous flow with novel structure.
Background
The micro-fluidic chip becomes a popular field of research by the characteristics of miniaturization, portability, high integration degree, low cost and the like, and the supported micro-fluidic technology becomes a brand-new technology applied to multiple fields of machinery, biomedicine, chemical engineering, aerospace and the like; the micro-fluidic chip can be applied to the control, separation and screening of biological cells and micro-nano particles, and particularly has important application in the research fields of tumor cell research, somatic cell research, genome drawing and the like; in the course of the diagnosis and treatment of diseases, it is of great importance to separate the target cells from their surrounding environment.
In the microfluidic technology, the separation of micro-nano particles and cells can be divided into two types: one is to separate by using a special micro-channel structure and micro-fluid dynamic characteristics, and the other is to separate micro-nano particles or cells with different physical characteristics in a micro-channel by using different physical fields; the latter control method for micro-nano particles mainly comprises fluid dynamic separation, ultrasonic separation, magnetic field aggregation, optical tweezer driving, dielectrophoresis control method and the like, wherein the dielectrophoresis control method is used as a non-contact control mode, not only can realize various complex controls such as separation, transportation, capture, classification and the like of biological particles, but also is easy to integrate compared with other micro-control technologies, and can realize single or large-area control. However, the design of the electrode structure is closely related to the implemented manipulation function, and a series of special electrode structures are required to be designed and matched to accomplish the complex manipulation of the particles. The physical electrode used by the traditional dielectrophoresis has the problems of long design and processing period, high manufacturing cost, incapability of being changed after forming and the like, and greatly limits the application of the dielectrophoresis in biological manipulation.
Optoelectronic Tweezers (OET), also known as optically induced dielectrophoresis (ODEP), is proposed by the Pei Yu child group and is a novel manipulation technique that combines optical electrodes with dielectrophoresis methods. The photoelectron tweezers is a tool which utilizes optical manipulation, realizes the manipulation of micro-nano-scale objects by projecting optical patterns on a photoconductive layer, is based on the principle of dielectrophoresis manipulation, realizes the non-contact and non-damage manipulation of substances, and simultaneously has the flexibility and the real-time property which are not possessed by the traditional dielectrophoresis manipulation, thereby greatly increasing the manipulability of particles. By using the application of the optical electrode in the field of xerography for reference, the optical electrode is used for replacing the traditional physical electrode for the first time, the period is extremely short from the determination of the operation function to the design and use of the electrode, the complex electrode manufacturing process is avoided, the particle operation flexibility is improved, and the processing cost is reduced. Because the dynamic optical virtual electrode can be generated, the particles can be more complicated to operate, the operation thought of the traditional dielectrophoresis is widened, and the dynamic optical virtual electrode has wide research value and application prospect.
Disclosure of Invention
An object of the utility model is to provide a based on photoinduction dielectrophoresis particle separator with novel structure compares with the traditional device that adopts the separation of dielectrophoresis technique, need not design complicated electrode structure, has further reduced the damage to the particle, has improved the separation efficiency of particle one and particle two.
The technical scheme of the utility model is that: a continuous flow-based light-induced dielectrophoresis particle separation device comprises a reagent inlet to be separated, a carrier fluid inlet, two buffer chambers, a microfluid channel, a light-induced dielectrophoresis chip, a first particle outlet and a second particle outlet; injecting a reagent to be separated from a reagent inlet to be separated, injecting a carrier fluid (potassium chloride solution) from a carrier fluid inlet, and enabling the reagent to be separated and the carrier fluid to flow through a first buffer chamber, a microfluidic channel and a second buffer chamber in sequence after meeting; the separated first particles flow out from the first particle outlet, and the second particles flow out from the second particle outlet.
The utility model discloses a income lies in: compared with other micro-separation devices, the light-induced dielectrophoresis chip can avoid the damage of the electrode with complex shape to the particles; in addition, in order to ensure that two fragile particles are damaged less in the flowing process, a part of the first buffer chamber is reserved at the joint of the reagent inlet to be separated, the carrier fluid inlet and the microfluidic channel, so that the two particles are well ensured not to be damaged greatly due to rapid structural change when passing through, and the structural integrity of the separated particles can be ensured; similarly, a second buffer chamber is arranged at the connection part of the particle first outlet, the particle second outlet and the microfluidic channel; considering the manufacturability of chip processing, the separation device is designed into a bilateral symmetry structure, the two inlets and the two outlets are the same in structure, the light guide layer is positioned above the microfluidic channel, and the light guide layer can ensure that two types of particles can be subjected to light-induced dielectrophoresis force at each stage when flowing through the microfluidic channel through certain illumination, so that the separation quality and efficiency are ensured.
Drawings
Fig. 1 is a schematic two-dimensional structure diagram of a continuous flow-based light-induced dielectrophoresis particle separation device, in the way: 1. the method comprises a reagent inlet to be separated, 2 a carrier fluid inlet, 3 a first buffer chamber, 4 a light-induced dielectrophoresis chip, 5 a microfluidic channel, 6 a second buffer chamber, 7 a first particle outlet, and 8 a second particle outlet.
Fig. 2 is a two-dimensional potential distribution diagram of a continuous flow-based light-induced dielectrophoresis particle separation device, wherein white is 5V, black is 0V, lighter color indicates that the potential is larger, the light-induced dielectrophoresis chip is divided into two parts, the first part is an illumination area which is respectively positioned at the left side, the right side and the middle, the second part is a non-illumination area which is positioned between every two illumination areas, and the illumination causes the electrical conductivity in the light-induced dielectrophoresis chip to change, thereby generating an uneven electric field in the space in the microfluidic channel.
FIG. 3 is a two-dimensional graph of the separation effect of a continuous flow-based light-induced dielectrophoresis particle separation device, wherein the small-diameter particles are first particles and flow out from an upper particle first outlet, the large-diameter particles are second particles and flow out from a lower particle second outlet, and the separation effect is expected.
Detailed Description
The present invention will be further described with reference to the accompanying drawings, but the embodiments of the present invention are not limited thereto.
As shown in the attached figure 1, the continuous flow-based light-induced dielectrophoresis particle separation device comprises a reagent inlet (1) to be separated, a carrier fluid inlet (2), a first buffer chamber (3), a light-guide layer (4), a microfluidic channel (5), a second buffer chamber (6), a first particle outlet (7) and a second particle outlet (8).
Specifically, the to-be-separated reagent inlet (1), the carrier fluid inlet (2) and the microfluidic channel (5) can be synchronously designed and simultaneously manufactured by a Micro Electro-Mechanical System (MEMS) micromachining process, which is an industrial technology integrating a microelectronic technology and a Mechanical engineering, and the operating range is in a micrometer range.
Specifically, the to-be-separated reagent inlet (1), the carrier fluid inlet (2), the micro-particle first outlet (7) and the micro-particle second outlet (8) of the micro-fluid channel (5) are made of polydimethylsiloxane or polymethyl methacrylate by using a standard technology of a template hot pressing method or a template pouring method, in order to generate an alternating current electric field in the micro-fluid channel (5), the top wall and the bottom wall of the micro-fluid channel (5) are required to be made of transparent ITO glass, and the ITO glass has good light transmittance and electric conductivity, so that electric signals can be loaded on the surfaces of the top wall and the bottom wall of the micro-fluid channel (5), namely, reactive ion etching is carried out on the edges of the two ITO glass at the same side to connect copper wires, so that the copper wires can be connected to a signal generator to provide voltage signals with certain.
Specifically, the reagent to be separated is injected from the inlet of the reagent to be separated, and the initial flow rate is 300 mu m/s; the specific preparation method comprises the steps of taking a proper amount of purified water, adding a proper amount of potassium chloride into the purified water, and detecting the conductivity of the solution by using a conductivity meter to meet the requirement; the carrier fluid was injected from the carrier fluid inlet at an initial flow rate of 700 μm/s.
Specifically, the first buffer chamber (3) is formed by intersecting a reagent inlet (1) to be separated, a carrier fluid inlet (2) and a micro-fluid channel (5); the second buffer chamber (6) is formed by the intersection of a first particle outlet (7), a second particle outlet (8) and a micro-fluid channel (5); the included angle between the axial lines of the inlet (1) and the first particle outlet (7) of the reagent to be separated and the axial line of the microfluidic channel (5) is 45 degrees; the included angle between the axes of the carrier fluid inlet (2) and the particle secondary outlet (8) and the axis of the microfluid channel (5) is 45 degrees; the inlet (1) for the reagent to be separated and the inlet (2) for the carrier fluid, the first particle outlet (7) and the second particle outlet (8) are geometrically symmetrical with respect to the axis of the microfluidic channel (5); the microfluidic channel (5) has a structure length of 560 μm, a width of 50 μm and a height of 50 μm; the separation device is of a left-right symmetrical structure, and the total length of the separation device is 832 microns; the light guide layer (4) is positioned above the micro-fluid channel (5), and has the same length and width as the micro-fluid channel and the height of 3 mu m.
Specifically, the nonuniform electric field in the microfluidic channel is generated by illuminating the photoconductive layer, specifically, signal generators are connected to the upper end of the photoconductive layer and the lower end of the microfluidic channel, and the voltage is 5V alternating current; the light guide layer is divided into two parts, the first part is an illumination area which is respectively positioned at the left side, the right side and the middle part, the length of each section is 111 micrometers, the second part is a non-illumination area which is positioned between every two illumination areas, and the length of each section is 71 micrometers; the spatial potential profile is shown in figure 2.
Specifically, in order to form a microelectrode, the inner side surface of indium tin oxide glass is coated with the photoconductive layer (4) by spraying by a plasma enhanced chemical vapor deposition method, the photoconductive layer (4) is of a multilayer film structure, and the materials of the photoconductive layer are heavily doped hydrogenated amorphous silicon, intrinsic hydrogenated amorphous silicon and silicon carbide from outside to inside in sequence.
Specifically, because the intrinsic hydrogenated amorphous silicon has good photosensitive characteristics, under non-illumination conditions, the hydrogenated amorphous silicon serves as an insulator to occupy more potential difference, so that an electric field in the microfluidic channel (5) is quite weak, but under illumination conditions (as shown in fig. 2), electron hole pairs (photogenerated carriers) increase the local conductivity of the illuminated area of the hydrogenated amorphous silicon, so that the hydrogenated amorphous silicon becomes a good conductor. A common projector light source is adopted, light is focused and reflected to the light guide layer (4) through an optical lens and a plane mirror, under the illumination condition, the optical virtual electrode is generated by projection on the surface of the light guide layer (4), the pattern shape of the optical virtual electrode can be designed according to actual requirements, different partial pressures are generated in an illumination area and a dark area, then a non-uniform electric field is generated in the microfluidic channel (5), light spots (optical patterns) at the illumination position are the optical virtual electrode, and dielectrophoresis forces borne by the electric field are different due to the fact that the radius and the dielectric constant of the first particle and the second particle are different, and then the first particle and the second particle are separated. Meanwhile, the silicon carbide insulating film can weaken the hydrolysis phenomenon occurring in the microfluidic channel (5), and the heavily doped hydrogenated amorphous silicon can reduce the contact resistance between the ITO glass substrate and the intrinsic hydrogenated amorphous silicon layer.
Specifically, the conductivity of the first particle is 0.25S/m, and the dielectric constant is 50; the conductivity of the second particles is 0.31S/m, and the dielectric constant is 59; if two particles are considered as a micro-nano particle, the density of the micro-nano particle in the reagent to be separated is 1050kg/m3(ii) a The dynamic viscosity of the reagent to be separated was 0.001 pas.
Specifically, as shown in the separation effect diagram of fig. 3, the reagent to be separated flows in from the upper reagent inlet (1) to be separated, the carrier fluid flows in from the lower carrier fluid inlet (2), and is merged in the microfluidic channel (2), and under the action of photo-induced dielectrophoresis, the two particles start to be separated. The small-diameter particles are first particles and flow out from an upper particle first outlet (7), the large-diameter particles are second particles and flow out from a lower particle second outlet (8), and the separation effect is obvious and expected.
In particular, the length of the microfluidic channel and the length of the light guide layer are not limited thereto, and the length of the microfluidic channel and the length of the light guide layer can be appropriately shortened or lengthened according to actual needs, and the illumination condition can be changed to meet the actual separation needs as a standard.
Specifically, the utility model discloses the motion of two kinds of particles should not be hindered or too much be influenced to the concrete structure of surge chamber, should guarantee that two kinds of particles receive as little as possible impact in the motion process to the relatively fragile particle of protection.
Above-mentioned can not be right the utility model discloses carry out comprehensive injecing, other any changes or equivalent replacement mode that do not deviate from the utility model discloses technical scheme is all within the protection scope of the utility model.
Claims (7)
1. A continuous flow-based light-induced dielectrophoresis particle separation device comprises a reagent inlet (1) to be separated, a carrier fluid inlet (2), a first buffer chamber (3), a light guide layer (4), a microfluidic channel (5), a second buffer chamber (6), a first particle outlet (7) and a second particle outlet (8).
2. A continuous flow-based light-induced dielectrophoresis particle separation device according to claim 1, wherein: the reagent to be separated is injected from the reagent inlet (1) to be separated, and the potassium chloride solution is used as a carrier fluid and is injected from the carrier fluid inlet (2); after the reagent to be separated and the carrier fluid are intersected, the reagent flows through a first buffer chamber (3), a micro-fluid channel (5) and a second buffer chamber (6) in sequence; the separated first particle flows out from a first particle outlet (7), and the second particle flows out from a second particle outlet (8).
3. A continuous flow-based light-induced dielectrophoresis particle separation device according to claim 1, wherein: the to-be-separated reagent inlet (1), the carrier fluid inlet (2), the microfluidic channel (5), the first particle outlet (7) and the second particle outlet (8) are made of polydimethylsiloxane or polymethyl methacrylate by using a template hot pressing method or a template casting method.
4. A continuous flow-based light-induced dielectrophoresis particle separation device according to claim 1, wherein: the microfluidic channel (5) has a structure length of 560 μm, a width of 50 μm and a height of 50 μm; the separation device is of a left-right symmetrical structure, and the total length of the separation device is 832 microns; the light guide layer (4) is positioned above the micro-fluid channel (5), and has the same length and width as the micro-fluid channel and the height of 3 mu m. .
5. A continuous flow-based light-induced dielectrophoresis particle separation device according to claim 1, wherein: the inner side surface of the indium tin oxide glass is coated with the light guide layer (4) by spraying by adopting a plasma enhanced chemical vapor deposition method, the light guide layer (4) is of a multilayer film structure, and the materials of the light guide layer (4) are heavily doped hydrogenated amorphous silicon, intrinsic hydrogenated amorphous silicon and silicon carbide in sequence from outside to inside.
6. A continuous flow-based light-induced dielectrophoresis particle separation device according to claim 1, wherein: the first buffer chamber (3) is formed by the intersection of a reagent inlet (1) to be separated, a carrier fluid inlet (2) and a microfluid channel (5); the second buffer chamber (6) is formed by the intersection of a first particle outlet (7), a second particle outlet (8) and the microfluidic channel (5).
7. A continuous flow-based light-induced dielectrophoresis particle separation device according to claim 1, wherein: the included angle between the axial lines of the inlet (1) and the first particle outlet (7) of the reagent to be separated and the axial line of the microfluidic channel (5) is 45 degrees; the included angle between the axes of the carrier fluid inlet (2) and the particle secondary outlet (8) and the axis of the microfluid channel (5) is 45 degrees; the inlet (1) for the reagent to be separated and the inlet (2) for the carrier fluid, the first outlet (7) for the particles and the second outlet (8) for the particles are geometrically symmetrical with respect to the axis of the microfluidic channel (5).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113189180A (en) * | 2021-03-29 | 2021-07-30 | 大连海事大学 | Microalgae characterization and identification device and method based on alternating current-dielectrophoresis |
| CN113312829A (en) * | 2021-05-26 | 2021-08-27 | 江南大学 | Micro-nano particle movement control method based on data-driven ODEP kinematic model |
| CN115000706A (en) * | 2021-03-02 | 2022-09-02 | 上海天马微电子有限公司 | Phased array antenna and electronic device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115000706A (en) * | 2021-03-02 | 2022-09-02 | 上海天马微电子有限公司 | Phased array antenna and electronic device |
| CN115000706B (en) * | 2021-03-02 | 2024-05-07 | 上海天马微电子有限公司 | Phased array antenna and electronic device |
| CN113189180A (en) * | 2021-03-29 | 2021-07-30 | 大连海事大学 | Microalgae characterization and identification device and method based on alternating current-dielectrophoresis |
| CN113189180B (en) * | 2021-03-29 | 2022-09-16 | 大连海事大学 | Microalgae characterization and identification device and method based on alternating current-dielectrophoresis |
| CN113312829A (en) * | 2021-05-26 | 2021-08-27 | 江南大学 | Micro-nano particle movement control method based on data-driven ODEP kinematic model |
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