CN112808121A - Photoinduction electroosmotic flow mixing method - Google Patents
Photoinduction electroosmotic flow mixing method Download PDFInfo
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- CN112808121A CN112808121A CN201911123789.9A CN201911123789A CN112808121A CN 112808121 A CN112808121 A CN 112808121A CN 201911123789 A CN201911123789 A CN 201911123789A CN 112808121 A CN112808121 A CN 112808121A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
- B01F33/305—Micromixers using mixing means not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/05—Mixers using radiation, e.g. magnetic fields or microwaves to mix the material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
- B01F35/32—Driving arrangements
- B01F35/32005—Type of drive
- B01F35/3205—Type of drive by using optical pressure force, e.g. produced by a laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/50—Mixing receptacles
- B01F35/514—Mixing receptacles the mixing receptacle or conduit being transparent or comprising transparent parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/23—Mixing of laboratory samples e.g. in preparation of analysing or testing properties of materials
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Abstract
The invention provides a light-induced electroosmotic flow mixing method which is characterized in that the top wall and the bottom wall of an electroosmotic flow mixing channel are made of transparent indium tin oxide glass, a light guide layer is continuously deposited on the inner side of a glass substrate by adopting a plasma enhanced chemical vapor deposition method, the signal generator is connected with the edge of the glass substrate to load electric signals, light is reflected and focused by the lens and the plane mirror and then irradiates the surface of the photoconductive layer, the conductivity of the photoconductive layer in an illumination area is increased rapidly by a photon-generated carrier, so that different partial pressures are generated in the illumination area and a dark area, so as to generate a non-uniform electric field in the electroosmosis mixed flow channel, the light spots on the surface of the light guide layer are the optical virtual electrodes, the electrode can induce and generate fluid disturbance perpendicular to the main flow direction of the sample reagent in an electroosmosis mixing flow channel under the action of electroosmosis, and generate vortex, and the vortex can enable two layered sample reagent fluids to be rapidly mixed. The invention realizes the high-efficiency mixing of microfluid in a straight channel without pre-arranging a fixed electrode.
Description
Technical Field
The invention relates to the field of microfluidics, in particular to the field of microfluidics mixing, and mainly relates to a photoinduction electroosmotic flow mixing method.
Background
A microfluidic chip (also known as Lab-on-a-chip) is used to integrate basic operation units related to biological and chemical fields, such as sample preparation, reaction, separation, detection, etc., onto a chip of several square centimeters, and form a network with microchannels to automatically complete the analysis process. Early, micro-laboratories in the biochemical applications industry generally required rapid mixing of different fluids. While conventional macroscopic fluids can be mixed by convection, the fluids in the microchannels are less well mixed by diffusion alone due to the lower reynolds number. Therefore, in microsystems, in order to achieve efficient mixing of fluids in microchannels, passive mixing devices relying on geometry and active mixing devices using moving parts or external forces are often employed.
The existing passive mixing device mainly depends on an internal complex geometric structure or the treatment of the surface of a channel to realize the mixing of fluid in a micro-channel, and is characterized in that the external power is not needed for driving, but the controllability of the fluid is poor, the fluid is extremely dependent on the geometric structure, and the mixing effect is poor. Most of active mixing devices mostly use moving parts to stir different reagents to realize mixing, the controllability of fluid is strong, the mixing effect is good, the efficiency is high, but the main moving parts are complex in structure and very fragile, the processing and the manufacturing are difficult, the cost is high, and a large amount of external energy is needed to be input, so that the active mixing devices are difficult to apply to harsh experimental environments. An alternative method is to use external energy such as sound, magnetic or electric fields to achieve mixing perpendicular to the main flow direction of different reagents, and most of them use methods relying on electric fields, such as electroosmotic flow technology, which has the characteristics of simple structure, no moving parts, and easy integration. However, the electroosmotic flow technology is based on the principle of induced charge electroosmosis, and mainly depends on a physical metal electrode fixed by the electroosmotic flow technology, and how to overcome the above disadvantages, which is complicated to manufacture, expensive to process and difficult to operate, has become one of the goals addressed by the persons skilled in the relevant art.
With the development of photosensitive materials and Digital Micromirror Devices (DMD), light-induced technology has come into use. On the basis, a technology for promoting fluid mixing by photoinduced electroosmotic flow is provided, and the technology is a technology combining an optical virtual electrode with an electroosmotic flow method. Therefore, the optical virtual electrode can generate an electroosmotic effect as a conventional physical metal electrode, thereby promoting efficient mixing of fluids. In addition, the optical virtual electrode replaces the traditional fixed metal electrode, the required period from the step of determining the chip function to the step of designing the chip and putting the chip into use is extremely short, the complex chip manufacturing process is avoided, the chip processing cost is reduced, more importantly, after the mixing function of the reagent is completed, the patterns of the optical virtual electrode can be flexibly switched, other subsequent steps such as the reaction of the reagent and the detection of signals can be further completed, and the simultaneous centralized completion of multiple functions on the same chip can be possible.
Disclosure of Invention
Technical problem to be solved
The invention aims to solve the technical problem of how to overcome the limitation that complicated physical metal electrodes need to be pre-arranged in the existing different fluid mixing devices, and provides a photoinduced electroosmotic flow mixing method which at least has the advantages of simple structure, low cost, flexible operation and the like.
(II) technical scheme
In order to solve the technical problem, the invention provides a light-induced electroosmotic flow mixing method which comprises an electroosmotic mixing flow channel (1), a first sample reagent flow channel (2), a second sample reagent flow channel (3), a photoconductive layer (4) and a signal generator (5).
The top and bottom walls of the electroosmosis mixed flow channel (1) are made of transparent Indium Tin Oxide (ITO) glass coated with the light guide layer (4) by a Plasma Enhanced Chemical Vapor Deposition (PECVD) method, and the signal generator (5) can be connected between the two ITO glasses due to good light transmittance and electrical conductivity of the ITO glass so as to generate an alternating current electric field in the electroosmosis mixed flow channel (1).
One end of the electroosmosis mixing flow channel (1) is respectively connected with the first sample reagent flow channel (2) and the second sample reagent flow channel (3), and the other end is provided with a mixed fluid outlet (11).
Wherein the end of the first sample reagent flow channel (2) is provided with a first sample reagent inlet (21), and the end of the second sample reagent flow channel (3) is provided with a second sample reagent inlet (31).
The first sample reagent flow channel (2) and the second sample reagent flow channel (3) are identical in size and specification, and the electroosmosis mixing flow channel (1), the first sample reagent flow channel (2) and the second sample reagent flow channel (3) are equal in width and located on the same plane.
The electroosmosis mixing flow channel (1), the first sample reagent flow channel (2) and the second sample reagent flow channel (3) are made of polydimethylsiloxane or polymethyl methacrylate by standard technologies such as a template hot pressing method or a template casting method.
The photoconductive layer (4) is of a multilayer film structure, and the materials of the photoconductive layer are heavily doped hydrogenated amorphous silicon with the thickness of 50 nanometers, intrinsic hydrogenated amorphous silicon with the thickness of 1.5 micrometers and silicon carbide with the thickness of 25 nanometers from bottom to top in sequence. Because the hydrogenated amorphous silicon has good photosensitive characteristics, under the non-illumination condition, the hydrogenated amorphous silicon is used as an insulator to occupy more potential difference, so that an electric field in the electroosmosis mixed flow channel (1) is quite weak, but under the illumination condition, the photon-generated carriers increase the local conductivity of the illuminated area of the hydrogenated amorphous silicon, so that the hydrogenated amorphous silicon becomes a good conductor. When light is projected to the light guide layer (4), an optical pattern (light spot) is projected on the surface of the light guide layer (4), namely the optical virtual electrode (41), which can be designed according to actual requirements, and can induce and generate an electroosmotic vortex perpendicular to the main flow direction of the sample reagent in the electroosmotic mixing flow channel (1), so that the mixing of two layered sample reagent fluids is realized.
The preparation process of the chip comprises the following steps:
(1) adopting a plasma enhanced chemical vapor deposition method to continuously deposit a photoconductive layer on one or two glass substrates with ITO films;
(2) processing a channel mold by using a standard soft lithography technology, further pouring Polydimethylsiloxane (PDMS) on the channel mold, and processing a PDMS spacing layer with a channel structure;
(3) drilling a first sample reagent inlet and a second sample reagent inlet at corresponding inlet positions respectively on the ITO glass substrate by using an electric drill, and drilling a mixed fluid outlet at an outlet position;
(4) and bonding the PDMS spacing layer and the ITO glass substrate plated with the light guide layer after hydrophilic treatment.
(III) advantageous effects
Compared with the prior art, the invention has the following advantages because the optical virtual electrode is used for replacing the traditional physical metal electrode:
1. the structure is simple, does not depend on a complex geometric structure, and is directly suitable for a straight channel;
2. due to the silicon carbide film in the photoconductive layer, the hydrolysis phenomenon in the channel can be greatly weakened;
3. the mixing device is simple to manufacture, low in cost and short in period;
4. after the mixing is completed, the functions can be conveniently switched to other functions, so that the integration of multiple functions in the same chip becomes possible.
The invention has the characteristics of reasonable design, simple structure, easy processing, flexible operation and the like, thereby having good popularization and use values.
Drawings
The invention is further described below with reference to the accompanying drawings. It is noted that, in accordance with standard practice in the industry, the various features of the drawings are not to scale and, in fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
FIG. 1 is a schematic structural diagram of a device for a photo-induced electroosmotic flow mixing method;
FIG. 2A and FIG. 2B are the simulation diagrams of the flow line and concentration without electric field and illumination, respectively;
FIGS. 3A, 3B and 3C are graphs of simulations of the streamline, potential and concentration, respectively, with and without an applied electric field;
fig. 4A, 4B and 4C are graphs of simulations of the streamline, potential and concentration when an electric field is applied and light is applied, respectively.
Detailed Description
The invention is further described with reference to the following figures and specific examples. It should be appreciated, however, that the embodiments provide many applicable concepts that can be embodied in a wide variety of specific contexts. The embodiments discussed and disclosed are merely illustrative and are not intended to limit the scope of the invention.
Also, spatially relative terms, such as central, longitudinal, lateral, upper, lower, front, rear, left, right, top, bottom, inner, outer, vertical, horizontal, surface, and the like, are used for ease of explaining the relationship of one element or feature to another element or feature in the figures. These spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. These devices may also be rotated (e.g., by 90 degrees or to other orientations) and the spatially relative descriptors used herein interpreted accordingly. Furthermore, the terms first, second, third and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
It is to be understood that unless otherwise expressly specified or limited, the terms mounted, connected and the like are to be construed broadly, as they may be fixedly connected, detachably connected or integrally connected, for example; can be mechanically or electrically connected; either directly or through an intermediary, or may be internal to both elements or features. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Fig. 1 is a schematic structural diagram of an apparatus for a light-induced electroosmotic flow mixing method according to the present invention, which includes an electroosmotic mixing flow channel (1), a first sample reagent flow channel (2), a second sample reagent flow channel (3), a photoconductive layer (4), and a signal generator (5).
The electroosmosis mixing flow channel (1), the first sample reagent flow channel (2) and the second sample reagent flow channel (3) can be synchronously designed and manufactured by Micro-Electro-Mechanical System (MEMS) micromachining technology, the electroosmosis mixing flow channel is an industrial technology which integrates microelectronic technology and Mechanical engineering, and the operating range is in a micrometer range.
Specifically, the channels such as the electroosmotic mixing channel (1), the first sample reagent channel (2) and the second sample reagent channel (3) can be manufactured by standard techniques such as a template hot pressing method or a template casting method.
In order to generate an alternating current electric field in the electroosmosis mixing flow channel (1), the top wall and the bottom wall of the electroosmosis mixing flow channel (1) are required to be made of transparent ITO glass, and due to the fact that the ITO glass has good light transmittance and electrical conductivity, electric signals can be loaded on the surfaces of the top wall and the bottom wall of the electroosmosis mixing flow channel (1), namely, reactive ion etching is carried out on the edges of the two ITO glass on the same side to connect copper wires, so that the two ITO glass can be connected into the signal generator (5) and used for providing voltage signals with certain amplitude and frequency.
In order to form a microelectrode, a heavily doped hydrogenated amorphous silicon layer with the thickness of 50 nanometers, an eigenstate hydrogenated amorphous silicon layer with the thickness of 1.5 micrometers and a silicon carbide insulating film layer with the thickness of 25 nanometers are continuously deposited on the inner side surface of the ITO glass substrate of the top wall and/or the bottom wall of the electroosmosis mixed flow channel (1) through a plasma enhanced chemical vapor deposition method, and the multilayer film structure is the light guide layer (4).
It should be noted that, the light guide layer (4) is deposited on the inner side surface of the top and/or bottom ITO glass substrate of the electroosmotic mixing channel (1), that is, the light guide layer (4) is deposited on the inner side surface of the top and bottom ITO glass substrate of the electroosmotic mixing channel (1), or the light guide layer (4) is deposited on the inner side surface of the top ITO glass substrate of the electroosmotic mixing channel (1), or the light guide layer (4) is deposited on the inner side surface of the bottom ITO glass substrate of the electroosmotic mixing channel (1), which can all achieve the requirement of the invention for the light guide layer (4).
Because the intrinsic hydrogenated amorphous silicon has good photosensitive characteristics, under the non-illumination condition, the hydrogenated amorphous silicon as an insulator occupies more potential difference, so that an electric field in the electroosmosis mixed flow channel (1) is quite weak, but under the illumination condition (as shown by an arrow in the attached figure 1), electron hole pairs (photogenerated carriers) increase the local conductivity of the illuminated area of the hydrogenated amorphous silicon to become a good conductor. Therefore, different partial pressures are generated in the illumination area and the dark area, a non-uniform electric field is further generated in the electroosmosis mixing flow channel (1), light spots (optical patterns) at the illumination position are optical virtual electrodes (41), and the electrodes can induce and generate vortex perpendicular to the main flow direction of the sample reagent in the electroosmosis mixing flow channel (1) under the electroosmosis effect, so that the mixing of two layered sample reagent fluids is further realized. Meanwhile, the silicon carbide insulating film can weaken the hydrolysis phenomenon occurring in the electroosmosis mixed flow channel (1), and the heavily doped hydrogenated amorphous silicon can reduce the contact resistance between the ITO glass substrate and the intrinsic state hydrogenated amorphous silicon layer.
There are many means for generating the spatial micron Light spot, and an optical geometric lens, a digital micromirror device, a Light Emitting Diode (LED) or a Liquid Crystal Display (LCD) device can be generally used. In addition, the schematic view of the optical dummy electrode (41) shown in fig. 1 may be a ring-shaped pattern or a stripe-shaped pattern, or the like. It should be noted that the projection pattern is only an example, and in practical operation, the light projection can be controlled to form a corresponding pattern to the light guide layer (4) according to various operation factors, and the planar projection pattern projected to the light guide layer (4) is not limited to the pattern shown in fig. 1.
One end of the electroosmosis mixing flow channel (1) is respectively connected with the first sample reagent flow channel (2) and the second sample reagent flow channel (3), and the other end is provided with a mixed fluid outlet (11). The first sample reagent flow channel (2) and the second sample reagent flow channel (3) are arranged in a Y shape with the electroosmosis mixing flow channel (1), a first sample reagent inlet (21) is formed in the end portion of the first sample reagent flow channel (2), a second sample reagent inlet (31) is formed in the end portion of the second sample reagent flow channel (3), the first sample reagent and the second sample reagent respectively flow into the first sample reagent flow channel (2) and the second sample reagent flow channel (3) through the first sample reagent inlet (21) and the second sample reagent inlet (31) under the action of external pump pressure, and then the first sample reagent and the second sample reagent are mixed under electroosmosis driving after being converged at the inlet of the electroosmosis mixing flow channel (1).
The first sample reagent flow channel (2) and the second sample reagent flow channel (3) are identical in size and specification, and the electroosmosis mixing flow channel (1), the first sample reagent flow channel (2) and the second sample reagent flow channel (3) are equal in width and located on the same plane.
Wherein the flow rates of the first sample reagent and the second sample reagent are equal and are both 0.2 mm/s. The first sample reagent has a solute concentration of 1 mole/cubic meter and the second sample reagent has a solute concentration of 0 mole/cubic meter.
The preparation process of the chip comprises the following steps:
(1) adopting a plasma enhanced chemical vapor deposition method to continuously deposit a photoconductive layer on one or two glass substrates with ITO films;
(2) processing a channel mold by using a standard soft lithography technology, further pouring PDMS (polydimethylsiloxane) on the channel mold, and processing a PDMS spacing layer with a channel structure;
(3) drilling a first sample reagent inlet and a second sample reagent inlet at corresponding inlet positions respectively on the ITO glass substrate by using an electric drill, and drilling a mixed fluid outlet at an outlet position;
(4) and bonding the PDMS spacing layer and the ITO glass substrate plated with the light guide layer after hydrophilic treatment.
A mixing model is established by using open source finite element software, and the flow field, the potential and the concentration distribution in the flow channel are described through numerical calculation, so that the mixing effect of the invention is demonstrated.
As shown in FIGS. 2A and 2B, the streamline and concentration profile in the electroosmotic mixing flow channel (1) when no electric field is applied and no light is applied are shown (i.e., example 1). The first sample reagent and the second sample reagent flow respectively flow into the first sample reagent flow channel (2) and the second sample reagent flow channel (3) from the first sample reagent inlet (21) and the second sample reagent inlet (31), are merged at the inlet of the electroosmotic mixing flow channel (1), and then flow out from the mixed fluid outlet (11). As can be seen from the figure, the two fluids have obvious demixing in the electroosmotic mixing flow channel (1), no convection is generated between the fluids, and the fluids are mixed only by virtue of the diffusion action of a small number of fluid molecules at the fluid interface, so that the mixing effect is obviously poor.
Figures 3A, 3B and 3C show the streamline, potential and concentration profiles, respectively, in the electroosmotic mixing flow channel (1) with the electric field applied but without illumination (i.e., example 2). It can be seen that, at this time, the uniform electric field exists in the electroosmotic mixing flow channel (1), and the mixing still depends on the diffusion of a small amount of fluid molecules at the fluid interface, and the mixing effect is almost not.
The streamline, potential and concentration profiles in the electroosmotic mixing flow channel (1) when the electric field is applied and light is applied (i.e., example 3) are shown in fig. 4A, 4B and 4C, respectively. It can be seen from the figure that the electron-hole pairs (photo-generated carriers) generated by illumination at this time increase the local conductivity of the illuminated area on the photoconductive layer (4), so that a non-uniform electric field is generated in the electroosmotic mixing flow channel (1), and the electric field generates large disturbance to the flow of the fluid. On one hand, rotating eddy currents are generated between a pair of upper and lower opposite virtual electrodes, so that the convection action of the fluid flow speed between the eddy currents is greatly enhanced. On the other hand, due to the two pairs of virtual electrodes which are adjacent left and right, the vortexes are compactly distributed, the flow velocity of the fluid is rapidly increased between the vortexes, and the fluid mixing speed is improved. The eddy current is generated because a large potential gradient is formed between the opposite optical virtual electrodes (41), and the potential gradient proves that the generated electric field force can be applied to the fluid in the flow channel, so that the wall surface of the flow channel generates electroosmosis speed, and further electroosmotic flow eddy is generated, and the eddy plays a good mixing role.
In embodiments 2 and 3 of the present invention, the signal generator provides an ac voltage having a peak value of 5 volts and a frequency of 5 hz.
In embodiment 3 of the present invention, the light source is generated by a light emitting element capable of emitting light including visible light wavelength, the light emitting element may be a light emitting diode or a halogen lamp, and the light may be projected onto the surface of the light guide layer by converging, reflecting, and the like, and the projection pattern may be conveniently designed by using DMD, but not limited thereto.
The geometry of the mixing device and the light source used are the same as in example 3, but the examples for adjusting the ac voltage and frequency of the signal generator are shown in the following table:
in the above table, a mixing index σ based on point concentration integration is used to characterize the mixing efficiency of the reagents, with σ =1 indicating that no mixing has occurred between the fluids and σ =0 indicating complete mixing between the fluids. The calculation formula is as follows:
wherein c is the local fluid concentration, c0Is the average fluid concentration, Γ is the mixed fluid exit boundary line, and L is the length of the mixed fluid exit boundary line.
It can be seen from the above examples that the present invention for the first time achieves efficient mixing of microfluids in a straight channel without pre-placing fixed physical metal electrodes. More importantly, after the mixing function of the reagent is completed, other subsequent works such as reaction of the reagent, detection of signals and the like can be further completed by flexibly switching the patterns of the optical virtual electrode, so that the simultaneous integration of multiple functions on the same chip becomes possible, and the method has the characteristic of flexible operation.
The present invention can be easily implemented by those skilled in the art from the above embodiments. It should be understood, however, that the intention is not to limit the invention to the particular embodiments described. On the basis of the disclosed embodiments, a person skilled in the art can combine different technical features at will, thereby implementing different technical solutions.
In addition to the technical features described in the specification, the technology is known to those skilled in the art.
Claims (7)
1. A light-induced electroosmotic flow mixing method comprises an electroosmotic mixing flow channel (1), a first sample reagent flow channel (2), a second sample reagent flow channel (3), a photoconductive layer (4) and a signal generator (5).
2. A method of photo-induced electroosmotic flow mixing according to claim 1, wherein: the top and bottom walls of the electroosmosis mixing flow channel (1) are made of transparent indium tin oxide glass, and the signal generator (5) is connected between the two indium tin oxide glasses so as to generate an alternating current electric field in the electroosmosis mixing flow channel (1).
3. A method of photo-induced electroosmotic flow mixing according to claim 1, wherein: the inner side surface of the indium tin oxide glass is coated with the light guide layer (4) by spraying by adopting a plasma enhanced chemical vapor deposition method, the light guide layer (4) is of a multilayer film structure, and the materials of the light guide layer (4) are heavily doped hydrogenated amorphous silicon, intrinsic hydrogenated amorphous silicon and silicon carbide in sequence from outside to inside.
4. A method of photo-induced electroosmotic flow mixing according to claim 1, wherein: a common projector light source is adopted, light is focused and reflected to the photoconductive layer (4) through an optical lens and a plane mirror, the optical virtual electrode (41) is generated by projection on the surface of the photoconductive layer (4) under the illumination condition, and the pattern shape of the optical virtual electrode (41) can be designed according to the actual requirement.
5. A method of photo-induced electroosmotic flow mixing according to claim 1, wherein: the end part of the first sample reagent flow channel (2) is provided with a first sample reagent inlet (21), the end part of the second sample reagent flow channel (3) is provided with a second sample reagent inlet (31), one end of the electroosmosis mixing flow channel (1) is respectively connected with the first sample reagent flow channel (2) and the second sample reagent flow channel (3), and the other end of the electroosmosis mixing flow channel is provided with a mixed fluid outlet (11).
6. A method of photo-induced electroosmotic flow mixing according to claim 1, wherein: the first sample reagent flow channel (2) and the second sample reagent flow channel (3) are identical in size and specification, and the electroosmosis mixing flow channel (1), the first sample reagent flow channel (2) and the second sample reagent flow channel (3) are equal in width and located on the same plane.
7. A method of photo-induced electroosmotic flow mixing according to claim 1, wherein: the electroosmosis mixed flow channel (1), the first sample reagent flow channel (2) and the second sample reagent flow channel (3) are made of polydimethylsiloxane or polymethyl methacrylate by standard technologies such as a template hot pressing method or a template casting method.
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