CN211348523U - Automatic tool for testing semiconductor device and testing box body - Google Patents

Abstract

The utility model discloses an automatic frock of semiconductor device test, including casing, warm table, drive arrangement, guider, linear slide rail and fixing device, wherein, the inboard bolt fastening of casing is provided with linear slide rail, linear slide rail and fixing device's the outer wall sliding connection in both sides, the last guider that is provided with a plurality of and is used for accurate erection site of fixing device, fixing device's top surface is the fixed warm table that is provided with still, the warm table matches with drive arrangement and merges by drive arrangement drive motion, drive arrangement and casing fixed connection. The utility model also discloses a semiconductor test box. The positioning is carried out through the guide device, the fixing device is convenient to install, the fixing device is driven to slide and limit under the driving of the driving device, multi-directional movement is realized, the movement precision is high, the fixing mode is reliable, and therefore stability and rapidness are realized.

Description

Automatic tool for testing semiconductor device and testing box body

Technical Field

The utility model relates to a power electronic device tests technical field, more specifically relates to an automatic frock of semiconductor device test and test box.

Background

The rapid development of the industry has led to the corresponding development of many industries, the semiconductor industry is the most important one, and the research on semiconductor products is going deep, and the performance of the semiconductor products is further improved. In the process of researching and analyzing semiconductors, higher requirements are put on the tests of the semiconductors in order to ensure that the functions of the semiconductors in the application process can be fully exerted. In the process of testing the semiconductor, a reasonable clamping mode and a reasonable movement mode of processes before and after the test of the device are adopted, so that an efficient mode is achieved.

In the characteristic research of semiconductors (such as IGBTs), the semiconductors need to be placed in a test box body for dynamic and static test, the test box body comprises a semiconductor test tool and a test fixture matched with the semiconductor test tool for use, and after the semiconductor test tool is connected with the semiconductors through the fixture in the test, the semiconductor test tool obtains the relevant physical characteristics of the semiconductors, so as to analyze the characteristics of the semiconductors; the existing semiconductor testing tool adopts a push-pull clamp which can do repeated linear motion, but the motion precision and the fixing mode are not reliable, and the stable and quick mode cannot be met.

The patent with application number "CN 201710004029.0" discloses an IGBT module testing arrangement, including having probe and fixed position's test fixture, still include the hot plate that is used for fixed IGBT module, the hot plate can drive the IGBT module to test fixture's direction motion, in order to realize the needle-like terminal of IGBT module with the probe contact, the needle-like terminal with set up the conducting strip between the probe, just the conducting strip including be used for with the slope end that the needle-like terminal contacted with be used for with the horizontal end that the probe contacted. However, the patent scheme also has a reasonable movement mode, so that the test effect cannot meet the working requirement.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that an automatic frock of semiconductor device test and test box body is provided to solve the unreasonable problem of semiconductor test frock motion mode.

In order to solve the above problem, the utility model provides a following technical scheme:

the utility model provides an automatic frock of semiconductor device test, includes casing, warm table, drive arrangement, guider, linear slide rail and fixing device, wherein, the inboard bolt fastening of casing is provided with linear slide rail, linear slide rail and fixing device's the outer wall sliding connection in both sides, the last guider that is provided with a plurality of and is used for accurate installation location of fixing device, fixing device's top surface is the fixed warm table that is provided with still, the warm table matches with drive arrangement and is merged by drive arrangement drive motion, drive arrangement and casing fixed connection.

The positioning is carried out through the guide device, the fixing device is convenient to install, the fixing device is driven to slide and limit under the driving of the driving device, multi-directional movement is realized, the movement precision is high, the fixing mode is reliable, and therefore stability and rapidness are realized.

As a further aspect of the present invention: the casing includes bottom plate, curb plate, posterior lateral plate, the bottom plate top is provided with the curb plate along the both ends symmetry bolt fastening on long limit, the top of bottom plate is the bolt fastening still and is provided with the posterior lateral plate, and the both ends of posterior lateral plate laminate mutually with two curb plates respectively and just through bolted connection become an organic whole structure, dismantle when convenient like this not using.

The bottom plate, the side plates and the rear side plate are all made of alloy materials, and have the advantages of light weight, high strength, easiness in processing and the like.

As a further aspect of the present invention: the bottom of the heating table is fixedly connected with the fixing device through a heat insulation plate, the bottom of the heating table is provided with the heat insulation plate which is attached to the bottom of the heating table, the heat insulation plate is fixedly connected with the top of the fixing device, a heating hole is formed in the side face, close to the rear side plate, of the heating table, the heating hole is used for placing a heating rod, a tested piece is placed on the heating table, and dynamic and static tests are conducted.

The length of the heating hole can be set according to actual work needs, and the heating rod is connected with an external power supply through a wire, so that the heating of the heating table is realized.

As a further aspect of the present invention: the driving device comprises a first cylinder, a second cylinder, a third cylinder and a pneumatic finger, wherein the first cylinder is fixedly arranged at the top of the bottom plate through bolts and is far away from one side of the rear side plate, the first cylinder is extended and shortened and is used for limiting the sliding of the fixing device through the joint, the second cylinder is arranged between the rear side plate and the first cylinder and is fixedly connected with the bottom plate through bolts, the second cylinder works and drives the fixing device to move up and down along the guide device, one end, close to the rear side plate, of the fixing device is connected with the pneumatic finger, the pneumatic finger is fixedly arranged at the telescopic end of the third cylinder, the third cylinder is connected with the rear side plate through bolts, the telescopic end of the third cylinder penetrates through the rear side plate to move in a telescopic mode, and the pneumatic finger drives the fixing device to horizontally reciprocate in a matched.

One end of the pneumatic finger close to the fixing device is provided with two clamping rods, and the distance between the two clamping rods is matched with the fixing device to clamp the fixing device; the first cylinder, the second cylinder and the third cylinder are all electrically connected with an external PLC control system.

As a further aspect of the present invention: the guide device comprises a guide pillar and a guide sleeve, and the guide pillar penetrates through the guide sleeve and is connected with the fixing device;

the linear slide rail is fixedly connected with the inner wall bolt of the side plate and is used for being matched with the fixing device to slide.

As a further aspect of the present invention: the fixing device comprises guide sleeve fixing plates and guide pillar fixing plates, the number of the guide pillar fixing plates is two, the guide pillar fixing plates are L-shaped, the transverse parts of the guide pillar fixing plates are used for being connected with the guide sleeve fixing plates, the longitudinal parts of the guide pillar fixing plates are close to the side wall surfaces of the side plates and are in sliding connection with the linear slide rails, a limiting plate is further arranged between the two guide pillar fixing plates, two ends of the limiting plate are respectively in bolted connection with the guide pillar fixing plates, cavities matched with the telescopic end positions and the sizes of first air cylinders are formed in the limiting plate, the first air cylinders stretch and penetrate through the cavities to realize clamping limiting with the limiting plate; blind holes are formed in four corners of the guide pillar fixing plate, through holes coincident with the blind holes are formed in four corners of the guide sleeve fixing plate, and the guide sleeve fixing plate is fixedly connected with the guide sleeve bolts; the guide pillar runs through the through hole and is inserted into the blind hole to be connected with the fixing device.

A semiconductor device test box comprises a laminated busbar connecting device, a semiconductor device test fixture, a box body and a semiconductor device test automation tool; the automatic semiconductor device testing tool is arranged inside the box body, a laminated busbar connecting device is arranged on the rear side of the box body, the laminated busbar connecting device is connected with the semiconductor device testing clamp, the semiconductor device testing clamp is connected with a tested piece, the semiconductor device testing clamp is arranged at the top of the automatic semiconductor device testing tool and fixedly connected with the inner wall of the box body, and the tested piece is placed on the automatic semiconductor device testing tool.

Through female connecting device, semiconductor device test fixture, the automatic industry of semiconductor device test of arranging of stromatolite and go into the line cooperation, semiconductor device test fixture links to each other with female connecting device of arranging of stromatolite, the piece of being surveyed respectively, will be surveyed the piece again and place on the automatic industry of semiconductor device test dress and test, simple to operate tests more accurately.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses an among the semiconductor device test box, the second cylinder is with fixing device jack-up, it is reliable to be connected by female connecting device of arranging of measuring piece and stromatolite, first cylinder extension and limiting plate cooperate fixed warm table simultaneously, after the test, first cylinder shrink, the second cylinder descends simultaneously, the warm table position descends, then third cylinder work makes the tight guide pin bushing fixed plate of clamp, then the third cylinder continues to extend, two clamping bars that are provided with on the pneumatic finger, distance between two clamping bars cooperatees with the guide pin bushing fixed plate, be used for driving guide pin bushing fixed plate motion, the guide pin bushing fixed plate takes the guide pillar fixed plate to slide, release heating platform, conveniently take out the measured piece, and a plurality of cylinders can realize the multidirectional motion of the piece to be measured, the motion precision is high, fixed mode is reliable, thereby realize stably and swiftly.

2. Through female connecting device, semiconductor device test fixture, the automatic industry of semiconductor device test of arranging of stromatolite and go into the line cooperation, semiconductor device test fixture links to each other with female connecting device of arranging of stromatolite, the piece of being surveyed respectively, will be surveyed the piece again and place on the automatic industry of semiconductor device test dress and test, simple to operate tests more accurately.

Drawings

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the drawings that are needed in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention.

Fig. 1 is a first axis side view of the automated tooling of embodiment 2 of the present invention.

Fig. 2 is a schematic view of the connection between the third cylinder and the pneumatic finger of the present invention.

Fig. 3 is a second axial view of the automated tooling of embodiment 2 of the present invention.

Fig. 4 is a third axial view of the automated tooling of embodiment 2 of the present invention.

Fig. 5 is a schematic view of the connection between the middle linear slide rail and the guide pillar fixing plate of the present invention.

Fig. 6 is an enlarged schematic view of a in fig. 6.

Fig. 7 is an isometric view of a semiconductor device test enclosure.

Fig. 8 is an enlarged rear view of a in fig. 7.

In the figure: 11-shell, 1101-bottom plate, 1102-side plate, 1103-rear side plate, 12-heating table, 13-driving device, 1301-first air cylinder, 1302-second air cylinder, 1303-third air cylinder, 1304-pneumatic finger, 14-guiding device, 1401-guide pillar, 1402-guide sleeve, 15-linear sliding rail, 16-fixing device, 1601-guide sleeve fixing plate, 1602-guide pillar fixing plate, 17-heat insulation plate, 18-clamping rod, 19-rolling plate, 21-laminated busbar connecting device, 22-semiconductor device testing fixture, 23-box body and 24-limiting plate.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Example 1

Referring to fig. 1, 3 and 4, fig. 1 is a first axial view of an automated tooling apparatus according to embodiment 2 of the present invention; fig. 3 is a second axial view of the automated tooling of embodiment 2 of the present invention; fig. 4 is a third axial view of the automated tooling of embodiment 2 of the present invention; an automatic tool for testing semiconductor devices comprises a shell 11, a heating table 12 for placing a tested piece, a driving device 13, a guiding device 14, a linear slide rail 15 and a fixing device 16, wherein,

the top of casing 11 is provided with semiconductor test fixture, semiconductor test fixture passes through the inner wall fixed connection of bolt and semiconductor device test box, the inboard bolt fastening of casing 11 is provided with linear slide rail 15, linear slide rail 15 and fixing device 16's both sides outer wall sliding connection, the last guider 14 that is provided with a plurality of and is used for the accurate installation location of fixing device 16, fixing device 16's top surface is the fixed warm table 12 that is provided with still, warm table 12 matches with drive arrangement 13 and is incorporated by drive arrangement 13 drive motion, drive arrangement 13 and casing 11 fixed connection.

Referring to fig. 5, fig. 5 is a schematic view illustrating the connection between the linear slide rail and the guide post fixing plate of the present invention; preferably, in this embodiment, the linear sliding rail 15 is in a shape like a Chinese character 'ao', two symmetrical transverse portions of the linear sliding rail 15 are in an arc shape and are provided with a plurality of balls, the 'arc shape' can be matched with and place the balls and prevent the balls from falling off, a bolt on the outer side wall of the fixing device 16 is provided with a rolling plate 19 which is matched with the linear sliding rail 15 and is in rolling connection, the rolling plate 19 is in a shape like a Chinese character 'ao', and the transverse portion of the rolling plate 19 is also in an arc shape, so that the rolling plate can better match with the balls for rolling.

The positioning is carried out through the guide device 14, the fixing device 16 is convenient to install, the fixing device 16 is driven to slide and limit under the driving of the driving device 13, multi-directional movement is realized, the movement precision is high, the fixing mode is reliable, and therefore stability and rapidness are realized.

Further, in this embodiment, the housing 11 includes a bottom plate 1101, a pair of side plates 1102, and a rear side plate 1103, the top of the bottom plate 1101 is provided with the side plates 1102 along two symmetrical bolt fastening on the long side, the top of the bottom plate 1101 is also provided with the rear side plate 1103 in a bolt fastening manner, and two ends of the rear side plate 1103 are respectively attached to the two side plates 1102 and are connected into an integral structure through bolts, so that the housing is convenient to detach when not in use.

Preferably, in this embodiment, the bottom plate 1101, the side plate 1102 and the rear side plate 1103 are all made of 6061 alloy material, and have the advantages of light weight, high strength, easy processing and the like.

Further, as shown in fig. 6, fig. 6 is an enlarged schematic view of a in fig. 4; the bottom of warm table 12 is passed through heat insulating board 17 and is fixed continuous with fixing device 16, the bottom of warm table 12 is provided with the heat insulating board 17 of laminating mutually, heat insulating board 17 and fixing device 16's top fixed connection, just the warm hole has been seted up to the side that warm table 12 is close to posterior lateral plate 1103, and the warm hole is used for placing the heating rod, will be surveyed the piece and place on warm table 12 for carry out the static test.

The heating table 12 can be fixed with a tested piece through bolts, and the tested piece can also be prevented from sliding due to inertia when the heating table 12 moves by arranging a plurality of screws and the like on the heating table 12 for limiting; or a block-up block is fixedly arranged on the heating table 12 through bolts, and a screw is arranged on the block-up block and used for limiting the tested piece, so that the tested piece is better protected in the moving process.

Preferably, in this embodiment, the heat insulation board 17 is bolted to the top of the fixing device 16, the heating platform 12 is bolted to the heat insulation board 17, the length of the heating hole can be set according to actual working requirements, and the heating rod is connected to an external power supply (not shown in the figure) through a wire, so as to heat the heating platform.

The driving device 13 comprises a first cylinder 1301, a second cylinder 1302, a third cylinder 1303, a pneumatic finger 1304, the first cylinder 1301 is fixedly bolted to the top of the bottom plate 1101 at a side away from the rear side plate 1103, the first cylinder 1301 can be extended and shortened to be clamped with the fixing device 16 so as to limit the sliding of the fixing device 16, the second cylinder 1302 is disposed between the rear plate 1103 and the first cylinder 1301, and is fixedly connected with the bolt of the bottom plate 1101, the second air cylinder 1302 works to drive the fixing device 16 to move up and down along the guide device 14, the end of the fixture 16 near the rear plate 1103 is also connected to a pneumatic finger 1304, the pneumatic finger 1304 is fixedly arranged at the telescopic end of a third cylinder 1303, the third cylinder 1303 is connected with a rear side plate 1103 through a bolt, and the telescopic end of the third cylinder 1303 penetrates through the rear plate 1103 to perform telescopic motion, and is matched with the pneumatic finger 1304 to drive the fixing device 16 to perform horizontal reciprocating motion.

Further, as shown in fig. 2, fig. 2 is a schematic connection perspective view of a third cylinder and a pneumatic finger in the present invention; the pneumatic finger 1304 is provided with two clamping bars 18 at an end thereof adjacent to the fixture 16, and the distance between the two clamping bars 18 and the fixture 16 is matched for clamping the fixture 16.

Preferably, in this embodiment, first cylinder 1301, second cylinder 1302, third cylinder 1303 all with external PLC control system electric connection, control the cylinder work through PLC and be prior art, do not the utility model discloses a protection scope.

The guiding device 14 comprises a guide pillar 1401 and a guide sleeve 1402, the guide pillar 1401 penetrates through the guide sleeve 1402, and both the guide pillar 1401 and the guide sleeve 1402 are connected with the fixing device 16.

The linear sliding rail 15 is fixedly connected with the inner wall bolt of the side plate 1102 and is used for matching with the fixing device 16 to slide.

The fixing device 16 comprises a guide sleeve fixing plate 1601 and guide post fixing plates 1602, the number of the guide sleeve fixing plates 1602 is two, the guide post fixing plates 1602 are L-shaped, the transverse parts of the guide sleeve fixing plates 1602 are used for being connected with the guide sleeve fixing plates 1601 and supporting the guide sleeve fixing plates 1601, the longitudinal parts of the guide sleeve fixing plates 1602 close to the side wall surfaces of the side plates 1102 are in sliding connection with the linear slide rails 15, a limiting plate 24 is further arranged between the two guide post fixing plates 1602, two ends of the limiting plate 24 are respectively in bolted connection with the guide post fixing plates 1602, a cavity matched with the telescopic end position and size of the first air cylinder 1301 is formed in the limiting plate 24, the first air cylinder 1301 stretches and penetrates through the cavity to realize clamping limiting with the limiting plate; blind holes are formed in four corners of the guide pillar fixing plate 1602, through holes coinciding with the blind holes are formed in four corners of the guide sleeve fixing plate 1601, and the guide sleeve fixing plate 1601 is fixedly connected with the guide sleeve 1402 through bolts; the guide pillar 1401 extends through the through hole and into the blind hole to connect with the fixture 16.

The working principle is as follows: when the device is used specifically, a test fixture is connected with a laminated busbar connecting device, a tested piece is placed on a heating table 12 for action static test, a second air cylinder 1302 jacks up a fixing device 16, the tested piece is reliably connected with each circuit, meanwhile, a first air cylinder 1301 extends to be matched with a limiting plate 24 to fix the heating table 12, after the test is finished, the first air cylinder 1301 contracts, meanwhile, the second air cylinder 1302 descends, the heating table descends, then a third air cylinder 1303 works to enable 1304 to clamp a guide sleeve fixing plate 1601, then the third air cylinder 1303 continues to extend, two clamping rods 18 are arranged on a pneumatic finger 1304, the distance between the two clamping rods 18 is matched with the guide sleeve fixing plate 1601 and used for driving the guide sleeve fixing plate 1601 to move, the guide sleeve fixing plate 1601 drives the guide sleeve fixing plate 1602 to slide to push a heating platform out, the tested piece is convenient to take out, multidirectional movement is realized, and the movement precision is high, the fixing mode is reliable, so that the stability and the rapidness are realized, the tested piece can be connected with the semiconductor test fixture above the tested piece through the probe after the tested piece is moved, and the connection is convenient and reliable.

Example 2

The difference between the embodiment 2 and the embodiment 1 is that the third cylinder 1303 and the pneumatic finger 1304 are replaced by an electromagnet and a magnet, the electromagnet is fixedly connected to the rear side plate 1103, the electromagnet is further connected to an external power source, the magnet is fixed to the rear side of the guide post fixing plate 1602 by a bolt, and when the electromagnet is powered on (and the current direction can be changed), magnetism generated can repel or attract the magnet, so that the guide post fixing plate 1602 moves.

Example 3

Referring to fig. 7-8, fig. 7 is an isometric view of a semiconductor device test enclosure; FIG. 8 is an enlarged rear view of A in FIG. 7; a semiconductor device test box comprises a laminated busbar connecting device 21, a semiconductor device test fixture 22 and a box body 23; the automatic frock of semiconductor device test is provided with in box body 23 inside, box body 23 rear side is provided with female connecting device 21 of arranging of stromatolite, female connecting device 21 of arranging of stromatolite with semiconductor device test fixture 22 links to each other, semiconductor device test fixture 22 links to each other with being surveyed the piece, semiconductor device test fixture 22 set up in the top of the automatic frock of semiconductor device test and with box body 23 inner wall fixed connection, it places on the automatic frock of semiconductor device test to be surveyed the piece.

In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (8)

1. An automatic tool for testing a semiconductor device is characterized by comprising a shell (11), a heating table (12) for placing a tested piece (6), a driving device (13), a guiding device (14), a linear slide rail (15) and a fixing device (16),

the inboard of casing (11) is fixed and is provided with linear slide rail (15), the outer wall sliding connection in both sides of linear slide rail (15) and fixing device (16), be provided with guider (14) that a plurality of is used for accurate installation location on fixing device (16), the top surface of fixing device (16) is the fixed warm table (12) that is provided with still, warm table (12) cooperate with drive arrangement (13) to be connected and by drive arrangement (13) drive motion, drive arrangement (13) and casing (11) fixed connection.

2. The semiconductor device testing automation tool of claim 1, wherein the housing (11) comprises a bottom plate (1101), side plates (1102) and a rear side plate (1103), the side plates (1102) are symmetrically and fixedly arranged at the top of the bottom plate (1101) along two ends of a long side, the rear side plate (1103) is further fixedly arranged at the top of the bottom plate (1101), two ends of the rear side plate (1103) are respectively attached to the two side plates (1102) and connected into an integral structure, and a linear sliding rail (15) is fixedly connected to the inner wall of each side plate (1102).

3. The automatic frock of claim 2, characterized in that, the bottom of warm table (12) is provided with the heat insulating board (17) of laminating mutually, heat insulating board (17) and the top fixed connection of fixing device (16).

4. The automatic frock of claim 3, characterized in that, the driving device (13) comprises a first cylinder (1301), a second cylinder (1302), a third cylinder (1303), a pneumatic finger (1304), wherein,

the first air cylinder (1301) is fixedly arranged at the top of the bottom plate (1101) through a bolt and far away from one side of the rear side plate (1103), and the first air cylinder (1301) is stretched and shortened and clamped with the fixing device (16) to limit the sliding of the fixing device (16);

the second air cylinder (1302) is arranged between the rear side plate (1103) and the first air cylinder (1301) and is fixedly connected with the bottom plate (1101), the second air cylinder (1302) works to drive the fixing device (16) to move up and down along the guide device (14), and one end, close to the rear side plate (1103), of the fixing device (16) is further connected with the pneumatic finger (1304);

pneumatic finger (1304) is fixed to be set up in the flexible end of third cylinder (1303), third cylinder (1303) link to each other with posterior lateral plate (1103), and the flexible end of third cylinder (1303) runs through posterior lateral plate (1103) and is concertina movement, cooperation pneumatic finger (1304) drive fixing device (16) horizontal reciprocating motion.

5. The semiconductor device test automation tool of claim 4, wherein the guiding device (14) comprises a guide pillar (1401) and a guide sleeve (1402), the guide pillar (1401) penetrates through the guide sleeve (1402), and both the guide pillar (1401) and the guide sleeve (1402) are connected with the fixing device (16).

6. The semiconductor device testing automated tooling of claim 5, wherein the fixture (16) comprises a guide sleeve fixing plate (1601) and a guide post fixing plate (1602), the guide post fixing plate (1602) is L-shaped, the transverse part of the fixture (16) is used for connecting with the guide sleeve fixing plate (1601) and supporting the guide sleeve fixing plate (1601), the longitudinal part of the guide post fixing plate (1602) is connected with the linear slide rail (15) near the side wall surface of the side plate (1102) in a sliding manner;

blind holes are formed in four corners of the guide pillar fixing plate (1602), through holes coinciding with the blind holes are formed in four corners of the guide sleeve fixing plate (1601), and the guide sleeve fixing plate (1601) is fixedly connected with the guide sleeve (1402); the guide pillar (1401) penetrates through the through hole and is inserted into the blind hole.

7. The automatic fixture for testing the semiconductor device according to claim 6, wherein a limiting plate (24) is further arranged between the two guide post fixing plates (1602); the first air cylinder (1301) stretches and retracts to penetrate through the limiting plate (24) and limits the fixing device (16).

8. A test box based on the semiconductor device test automation tool of any one of claims 1 to 7, characterized by further comprising a laminated busbar connection device (21), a semiconductor device test fixture (22), and a box body (23); the automatic frock of semiconductor device test is provided with in box body (23) inside, box body (23) rear side is provided with female connecting device (21) of arranging of stromatolite, female connecting device (21) of arranging of stromatolite with semiconductor device test fixture (22) link to each other, semiconductor device test fixture (22) link to each other with being surveyed the piece, semiconductor device test fixture (22) set up in the top of the automatic frock of semiconductor device test and with box body (23) inner wall fixed connection, it places on the automatic frock of semiconductor device test to be surveyed the piece.

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