CN211296594U - Micro-nano stroke amplification operation platform - Google Patents

Micro-nano stroke amplification operation platform Download PDF

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Publication number
CN211296594U
CN211296594U CN201922269995.2U CN201922269995U CN211296594U CN 211296594 U CN211296594 U CN 211296594U CN 201922269995 U CN201922269995 U CN 201922269995U CN 211296594 U CN211296594 U CN 211296594U
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China
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connecting rod
transverse connecting
stroke amplification
nano
micro
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Expired - Fee Related
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CN201922269995.2U
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Chinese (zh)
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申亚京
张铁山
郭栋
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City University of Hong Kong CityU
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City University of Hong Kong CityU
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Abstract

The utility model belongs to receive the precision drive field a little, specifically be a receive stroke amplification operation platform a little, which comprises a vertical plate, bottom plate and stroke amplification mechanism, the riser is fixed to be set up on the bottom plate, a side and riser fixed connection of stroke amplification mechanism, the bottom surface and the bottom plate contact of stroke amplification mechanism are connected, stroke amplification mechanism is including erecting the connecting rod, first transverse connecting rod, second transverse connecting rod and first mounting, the one end of erecting the connecting rod is passed through flexible hinge and is connected with the head end of first transverse connecting rod, the other end passes through flexible hinge and is connected with the head end of second transverse connecting rod, first mounting is located the below of second transverse connecting rod, and first mounting passes through flexible hinge and is connected with terminal surface under the second transverse connecting rod, be equipped with the piezoceramics piece between the tail end of second transverse connecting rod and the first mounting. The utility model can realize displacement amplification, and the proper lever proportion can realize a larger stroke amplification function; and the high-frequency expansion and contraction of the piezoelectric ceramics are matched, so that the function of quickly adjusting the pose of the movable platform can be realized.

Description

Micro-nano stroke amplification operation platform
Technical Field
The utility model belongs to receive the precision drive field a little, specifically be a receive stroke amplification operation platform a little.
Background
With the development of science and the progress of technology, the micro-nano field is also undergoing rapid development, for example, the micro-nano technology is more and more widely applied in the fields of bioengineering, biomedicine, semiconductors and the like, in the fields, the micro-nano operation platform with micron-scale precision is one of the core components, the micro-nano operation platform is driven by piezoelectric ceramics, the piezoelectric ceramics has the advantages of high precision, high output force, rapid response, capability of being used in a normal temperature environment and the like, and becomes a better choice of a driver of the micro-nano operation platform, but the output displacement which can be provided by the piezoelectric ceramics is limited, so that the motion size range of the micro-nano operation platform is smaller, and the micro-nano technology does not have.
Therefore, how to solve the problems that the conventional micro-nano operation platform has a small stroke and does not have a rapid pose adjustment function is a problem which needs to be solved by technical personnel in the field at present.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems in the background art, the utility model provides a micro-nano stroke amplification operation platform, which can realize displacement amplification and realize a larger stroke amplification function by setting a proper lever proportion; and the function of fast pose adjustment of the movable micro-nano operation platform can be realized by matching with the high-frequency extension and retraction of the piezoelectric ceramics.
The utility model adopts the following technical scheme: the utility model provides a receive stroke amplification operation platform a little, which comprises a vertical plate, bottom plate and stroke amplification mechanism, the riser is fixed to be set up on the bottom plate, a side and riser fixed connection of stroke amplification mechanism, the bottom surface and the bottom plate contact of stroke amplification mechanism are connected, stroke amplification mechanism is including erecting the connecting rod, first transverse connecting rod, second transverse connecting rod and first mounting, the one end of erecting the connecting rod is passed through flexible hinge and is connected with the head end of first transverse connecting rod, the other end passes through flexible hinge and is connected with the head end of second transverse connecting rod, first transverse connecting rod is located the top of second transverse connecting rod, first mounting is located the below of second transverse connecting rod, and first mounting passes through flexible hinge and is connected with second transverse connecting rod lower extreme face, be equipped with the piezoceramics piece between the tail end of second transverse connecting rod and the first mounting.
Furthermore, the bottom plate is in a flat cylindrical shape, the circular array on the cylindrical bottom plate is provided with three vertical plates, three stroke amplification mechanisms and three piezoelectric ceramic blocks, and the included angle between every two adjacent vertical plates, the included angle between every two adjacent stroke amplification mechanisms and the included angle between every two adjacent vertical plates and the included angle between every two adjacent stroke amplification mechanisms and the included angle between every two.
Furthermore, the stroke amplification mechanism further comprises a second fixing piece, the second fixing piece is located between the second transverse connecting rod and the first transverse connecting rod and is connected with the lower end face of the first transverse connecting rod through a flexible hinge, and the stroke amplification mechanism is fixedly connected with the vertical plate through the first fixing piece and the second fixing piece.
Furthermore, the first transverse connecting rod, the second transverse connecting rod and the vertical connecting rod form a C-shaped structure, and the length of the first transverse connecting rod is larger than that of the second transverse connecting rod.
Furthermore, a groove is formed in the middle of the first fixing piece and located below the second transverse connecting rod, a through threaded hole is formed in the groove, a through hole is formed in the position, opposite to the threaded hole, of the bottom plate, and the piezoelectric ceramic block is fixed between the groove and the second transverse connecting rod through a screw.
Furthermore, the hinge joint position of the second fixing piece and the first transverse connecting rod is close to the vertical connecting rod, and the hinge joint position of the first fixing piece and the second transverse connecting rod is close to the piezoelectric ceramic block.
Furthermore, first fixed orifices are arranged on the first fixed part and the second fixed part, second fixed orifices corresponding to the first fixed orifices are arranged on the vertical plate, and the bolts penetrate through the first fixed orifices and the second fixed orifices to fixedly connect the vertical plate with the stroke amplifying mechanism.
Furthermore, a conical thimble is arranged on the upper end face of the tail end of the first transverse connecting rod, and a cover plate is arranged above the conical thimble.
Furthermore, the vertical plate is fixedly connected with the bottom plate through welding.
Furthermore, the device also comprises a movable platform, and the bottom plate is fixedly arranged on the movable platform.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model discloses a receive stroke amplification operation platform a little and can realize that the displacement enlargies, can realize great stroke amplification function through adjusting suitable lever proportion.
(2) The utility model discloses a receive stroke amplification operation platform a little and have three stroke mechanism of amplification in the array on the bottom plate, and the contained angle of two adjacent stroke mechanisms of amplification is 120 degrees, and three stroke mechanism of amplification is integrated on the base, and the bottom plate is fixed again on moving the platform, and cooperation piezoceramics's high frequency is flexible, can realize moving the three degree of freedom motion of platform.
(3) The utility model discloses a receive stroke amplification operation platform a little and adopt piezoceramics piece to directly drive the mode, easily motion control, and positioning accuracy is higher, can realize the flexible volume of high frequency to realize moving the high frequency position appearance adjustment function of platform.
Drawings
For a clearer explanation of the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is an overall structure diagram of the micro-nano stroke amplification operation platform of the utility model;
fig. 2 is a bottom view of the overall structure of the micro-nano stroke amplification operation platform of the utility model;
FIG. 3 is a bottom plate and vertical plate installation structure diagram of the micro-nano stroke amplification operation platform of the utility model;
fig. 4 is a schematic diagram of a stroke amplifying mechanism of the micro-nano stroke amplifying operation platform of the utility model;
FIG. 5 is an enlarged schematic diagram of the micro-nano stroke enlarging operation platform of the utility model;
the device comprises a base plate 1, a through hole 11, a vertical plate 2, a first plane 21, a second plane 22, a second fixing hole 23, a stroke amplifying mechanism 3, a vertical connecting rod 31, a first transverse connecting rod 32, a conical thimble 321, a second transverse connecting rod 33, a first fixing piece 34, a first fixing hole 341, a groove 342, a threaded hole 343, a second fixing piece 35, a flexible hinge 36, a first fulcrum 37, a second fulcrum 38, a piezoelectric ceramic block 4 and a cover plate 5.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the present application, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1-4, the utility model provides a receive stroke amplification operation platform a little, including riser 2, bottom plate 1 and stroke amplification mechanism 3, wherein, riser 2 is the cuboid shape for the platelike structure of platykurtic, including first plane 21 and second plane 22, riser 2 is fixed through first plane 21 and is set up on bottom plate 1, through a side fixed connection of second plane 22 and stroke amplification mechanism 3, the bottom surface and the bottom plate 1 contact of stroke amplification mechanism 3 are connected, and here stroke amplification mechanism 3's bottom surface need not to be fixed with bottom plate 1, and the contact can.
Specifically, as shown in fig. 4, the stroke enlarging mechanism 3 includes a vertical link 31, a first transverse link 32, a second transverse link 33, and a first fixing member 34, one end of the vertical link 31 is connected to a head end of the first transverse link 32 through a flexible hinge, the other end of the vertical link 31 is connected to a head end of the second transverse link 33 through a flexible hinge, the first transverse link 32 is located above the second transverse link 33, the first fixing member 34 is located below the second transverse link 33, the first fixing member 34 is connected to a lower end face of the second transverse link 33 through a flexible hinge, a piezoelectric ceramic block 4 is disposed between a tail end of the second transverse link 33 and the first fixing member 34, specifically, a bottom face of the piezoelectric ceramic block 4 is in contact with the first fixing member 34, a top face of the piezoelectric ceramic block 4 is in contact with a lower end face of the second transverse link 33, the piezoelectric ceramic block 4 is energized to generate an elongation and an upward thrust in a micrometer level, the piezoelectric ceramic block 4 acts on the second transverse link 33, and the second transverse link 33 transmits the displacement to the first transverse link 32 through the vertical link 31, so that the amplification of the displacement is realized.
Specifically, bottom plate 1 is flat cylinder shape, and cylindrical bottom plate 1 goes up circular array has three riser 2, three stroke mechanism of amplification 3 and three piezoceramics piece 4, and every two adjacent risers 2, stroke mechanism of amplification 3 and piezoceramics piece 4's contained angle are 120, and with three stroke mechanism of amplification 3 integration on a bottom plate 1 to with the bottom plate fixed set up on one moves the platform, switch on three piezoceramics piece 4 simultaneously, can realize the utility model discloses operation platform's three degree of freedom motion.
Specifically, the stroke amplification mechanism 3 further includes a second fixing member 35, the second fixing member 35 is located between the second transverse link 33 and the first transverse link 32, and is connected to the lower end face of the first transverse link 32 through a flexible hinge, and the stroke amplification mechanism 3 is fixedly connected to the vertical plate 2 through the first fixing member 34 and the second fixing member 35.
It should be noted that, through the connection fixing mode of the flexible hinge, under the condition that the positions and sizes of the flexible hinge and the vertical connecting rod, the first transverse connecting rod, the second transverse connecting rod, the first fixing piece and the second fixing piece are accurate, the displacement can be amplified more accurately, the design structure is simple and concise, and the occupied space is smaller than that of the design in the prior art.
Specifically, first transverse link 32, second transverse link 33 and vertical link 31 form the C style of calligraphy structure, and the length of first transverse link 32 is greater than the length of second transverse link 33, and the articulated position of first mounting 34 and second transverse link 33, the articulated position of second mounting 35 and first transverse link 32 are connected to first transverse link 32 and second transverse link 33 length setting and first mounting, the enlarged proportion of direct influence stroke, and the technical staff in the art can specifically confirm as required, the utility model discloses do not limit to specific proportion.
Specifically, a groove 342 is formed in the middle of the first fixing member 34, the groove 342 is located below the second transverse connecting rod 33, a through threaded hole 343 is formed in the groove 342, the threaded hole 343 is used for fastening the piezoelectric ceramic block 4, a through hole 11 is formed in the position, opposite to the threaded hole 343, of the bottom plate 1, the piezoelectric ceramic block 4 is fixed between the groove 343 and the second transverse connecting rod 33 through a screw (namely, the screw penetrates through the threaded hole 343 from the through hole 11 to be tightly connected with the piezoelectric ceramic block), the through hole 11 in the bottom plate 1 is used for reserving an adjusting space of the screw, and a lead is led out from the piezoelectric ceramic block 4 and is connected with a control system to control the stroke amplification mechanism.
Specifically, the hinge position of the second fixing member 35 and the first transverse link 32 is adjacent to the vertical link 31, and the hinge position of the first fixing member 34 and the second transverse link 33 is adjacent to the piezoelectric ceramic block 4. For the convenience of understanding, in the present invention, the hinge position of the second fixing member 35 and the first transverse link 32 is referred to as a first fulcrum 37, the hinge position of the first fixing member 34 and the second transverse link 33 is referred to as a second fulcrum 38, the positions of the first fulcrum 37 and the second fulcrum 38 are different, and the stroke amplification ratio is different, and a person skilled in the art can adjust the positions of the first fulcrum 37 and the second fulcrum 38 as needed to achieve the required stroke amplification amount, and the link structure formed by the first transverse link 32, the vertical link 31 and the second transverse link 33, and the first fulcrum 37 and the second fulcrum 38 in this embodiment can be regarded as a dual-lever mechanism, and the amplification of the displacement can be achieved by the dual-lever mechanism.
Specifically, first fixing part 34 and second fixing part 35 are provided with first fixing hole 341, riser 2 is provided with second fixing hole 23 corresponding to first fixing hole 341, the bolt passes through first fixing hole 341 and second fixing hole 23 and fixedly connects riser 2 with stroke amplification mechanism 3, and through a plurality of fixed positions, riser 2 and stroke amplification mechanism 3 are fixed more firmly, and service life is longer.
Specifically, a tapered thimble 321 is disposed at the end of the first cross link 32, and a cover plate 5 is disposed above the tapered thimble 321.
Specifically, the vertical plate 2 is fixedly connected with the bottom plate 1 through welding, and the vertical plate 2 is connected with the bottom plate 1 in a large strength in a welding fixing mode and is not easy to separate and separate.
Fig. 5 is a working principle diagram of the micro-nano stroke amplification operation platform of the utility model:
when the piezoelectric ceramic block 4 is energized, micron-level elongation and upward thrust are generated, as shown by arrows in fig. 5, the tail end of the second transverse connecting rod 33 is forced to cause the head end to move downwards, so that the head end of the first transverse connecting rod 32 is driven by the vertical connecting rod 31 to generate downward displacement, and the tail end of the first transverse connecting rod 32 tilts upwards under the action of the first fulcrum 37. The stroke amplification ratio of the end of the first transverse link 32 relative to the elongation of the piezoelectric ceramic block is:
Figure DEST_PATH_GDA0002562952040000051
specifically, the utility model discloses still include one and move the platform, with three stroke mechanism integration of amplification after the bottom plate part, with bottom plate fixed mounting on moving the platform, can realize moving the three degree of freedom motion of platform. Namely, the center of the movable platform is taken as the origin of a Cartesian rectangular coordinate system, the direction of the bottom plate pointing to the movable platform is taken as the positive direction of a Z axis, and three degrees of freedom of the movable platform are rotation around an X axis, rotation around a Y axis and translation in the direction of the Z axis respectively.
The micro-nano stroke amplification operation platform can realize the displacement amplification function at the micron level, and can realize the space motion of the movable platform through the linkage control of the three branched chains.
The present invention has been further described with reference to specific embodiments, but it should be understood that the specific description herein should not be construed as limiting the spirit and scope of the present invention, and that various modifications to the above-described embodiments, which would occur to persons skilled in the art after reading this specification, are within the scope of the present invention.

Claims (10)

1. A micro-nano stroke amplification operating platform is characterized by comprising a vertical plate, a bottom plate and a stroke amplification mechanism, the vertical plate is fixedly arranged on the bottom plate, one side surface of the stroke amplification mechanism is fixedly connected with the vertical plate, the bottom surface of the stroke amplification mechanism is in contact connection with the bottom plate, the stroke amplification mechanism comprises a vertical connecting rod, a first transverse connecting rod, a second transverse connecting rod and a first fixing piece, one end of the vertical connecting rod is connected with the head end of the first transverse connecting rod through a flexible hinge, the other end of the vertical connecting rod is connected with the head end of the second transverse connecting rod through a flexible hinge, the first transverse connecting rod is positioned above the second transverse connecting rod, the first fixing piece is positioned below the second transverse connecting rod, and the first fixing piece is connected with the lower end face of the second transverse connecting rod through a flexible hinge, and a piezoelectric ceramic block is arranged between the tail end of the second transverse connecting rod and the first fixing piece.
2. The micro-nano stroke amplification operating platform according to claim 1, wherein the bottom plate is a flat cylinder, three vertical plates, three stroke amplification mechanisms and three piezoelectric ceramic blocks are arranged on the bottom plate in an annular array, and the included angle between every two adjacent vertical plates, the included angle between every two adjacent stroke amplification mechanisms and the included angle between every two adjacent piezoelectric ceramic blocks are 120 degrees.
3. The micro-nano stroke amplification operating platform according to claim 1, wherein the stroke amplification mechanism further comprises a second fixing member, the second fixing member is located between the second transverse connecting rod and the first transverse connecting rod and is connected with the lower end face of the first transverse connecting rod through a flexible hinge, and the stroke amplification mechanism is fixedly connected with the vertical plate through the first fixing member and the second fixing member.
4. The micro-nano stroke amplification operating platform according to claim 1, wherein the first transverse connecting rod, the second transverse connecting rod and the vertical connecting rod form a C-shaped structure, and the length of the first transverse connecting rod is greater than that of the second transverse connecting rod.
5. The micro-nano stroke amplification operating platform according to claim 1, wherein a groove is formed in the middle of the first fixing piece, the groove is located below the second transverse connecting rod, a through threaded hole is formed in the groove, a through hole is formed in the bottom plate at a position opposite to the threaded hole, and the piezoelectric ceramic block is fixed between the groove and the second transverse connecting rod through a screw.
6. The micro-nano stroke amplification operating platform according to claim 3, wherein the hinge joint of the second fixing member and the first transverse connecting rod is adjacent to the vertical connecting rod, and the hinge joint of the first fixing member and the second transverse connecting rod is adjacent to the piezoelectric ceramic block.
7. The micro-nano stroke amplification operating platform according to claim 3, wherein the first fixing member and the second fixing member are both provided with first fixing holes, the vertical plate is provided with second fixing holes corresponding to the first fixing holes, and bolts penetrate through the first fixing holes and the second fixing holes to fixedly connect the vertical plate and the stroke amplification mechanism.
8. The micro-nano stroke amplification operating platform according to claim 2, wherein a conical ejector pin is arranged at the tail end of the first transverse connecting rod, and a cover plate is arranged above the conical ejector pin.
9. The micro-nano stroke amplification operating platform according to claim 1, wherein the vertical plate is fixedly connected with the bottom plate in a welding manner.
10. The micro-nano stroke amplification operating platform according to claim 1, further comprising a moving platform, wherein the bottom plate is fixedly arranged on the moving platform.
CN201922269995.2U 2019-12-17 2019-12-17 Micro-nano stroke amplification operation platform Expired - Fee Related CN211296594U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922269995.2U CN211296594U (en) 2019-12-17 2019-12-17 Micro-nano stroke amplification operation platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922269995.2U CN211296594U (en) 2019-12-17 2019-12-17 Micro-nano stroke amplification operation platform

Publications (1)

Publication Number Publication Date
CN211296594U true CN211296594U (en) 2020-08-18

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Application Number Title Priority Date Filing Date
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Granted publication date: 20200818

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