CN211292632U - Illumination system for laser scattering imaging device for detecting surface defects of high-reflection mirror - Google Patents

Abstract

The utility model relates to a lighting system for detecting high reflection mirror surface flaw laser scattering image device, it can shine simultaneously from 180 angle within ranges and be surveyed the object, does not shine the angle blind area, can once form images the position and the shape of finding the flaw, effectively improves detection efficiency and precision. The utility model discloses a plurality of at the integral type light source of 180 within ranges formation focus light curtains for a plurality of light trapping ware that receive the reverberation use imaging device as center and integral type light source symmetric distribution. The three integrated light sources are uniformly arranged within 180 degrees, and the included angle between the optical axes of every two converged light curtains is 60 degrees. The integrated light source comprises a linear laser and a shaping lens group consisting of two lenses, and the integrated light source is fixedly clamped in the cuboid sleeve. The light trap is a cuboid, the interior of the light trap is a hollow cone, and the interior and the exterior of the light trap are subjected to blackening treatment. The imaging device is a CCD imaging device or a CMOS imaging device, and the imaging device, the supporting longitudinal rod and the mechanical arm form a movable assembly.

Description

Illumination system for laser scattering imaging device for detecting surface defects of high-reflection mirror

The technical field is as follows:

the utility model relates to an ultra-smooth lens surface flaw parameter detecting system especially relates to a lighting system for detecting high reflection mirror surface flaw laser scattering image device.

Background art:

the surface defects of the optical element mainly refer to pocks, scratches, split bubbles, broken points, broken edges and the like, and the surface defects can influence the performance of the element. At present, the detection methods for the surface defects of the optical elements at home and abroad comprise a visual method, a high-pass filtering imaging method, a low-pass filtering imaging method, dark field imaging and the like. In the dark field imaging method, according to the micron-scale defects such as scratches on a high reflecting mirror, when the projection direction of incident light and the direction of the scratches form an angle range of 75-90 degrees, scattered light imaging is clearer, when the projection direction of the incident light and the direction of the scratches form an angle range of 0-75 degrees, the scattered light imaging becomes less and less clearer, and particularly when the projection direction of the incident light and the direction of the scratches form an angle range of 0 degrees, bright images of the scratches are hardly seen. Dark field bright image measures occasion of mar type flaw, in order to solve the unclear problem of formation of image in certain angle range, generally adopt the incident light direction unchangeable, use the revolving stage to drive the sample rotatory and reach the purpose that the incident light shines on the sample surface that awaits measuring from each direction, but this kind of method is because the rotation that needs the revolving stage, on the one hand the structure is complicated, accurate revolving stage cost is higher, on the other hand every rotatory angle all need gather corresponding image, image processing is also very complicated, inevitably bring into rotation error simultaneously, lead to detection efficiency not high, detect the precision reduction.

The invention content is as follows:

an object of the utility model is to provide a lighting system for detecting high reflection mirror surface flaw laser scattering image device, it can shine simultaneously from 180 angle within ranges and be surveyed the object, does not shine the angle blind area, can once image the position and the shape of finding the flaw, effectively improves detection efficiency and precision.

In order to achieve the above object, the utility model adopts the following technical scheme:

an illumination system for a laser scattering imaging device for detecting surface defects of a high-reflectivity mirror, comprising: the integrated light source comprises a plurality of integrated light sources forming a focusing light curtain in a 180-degree range, and a plurality of light traps for receiving reflected light are symmetrically distributed with the integrated light sources by taking an imaging device as a center.

The three integrated light sources are uniformly arranged within 180 degrees, and the included angle between the optical axes of every two converged light curtains is 60 degrees.

The integrated light source comprises a linear laser and a shaping lens group consisting of two lenses, and the integrated light source is fixedly clamped in the cuboid sleeve.

The light trap is a cuboid, the interior of the light trap is a hollow cone, and the interior and the exterior of the light trap are subjected to blackening treatment.

The imaging device is a CCD imaging device or a CMOS imaging device, and the imaging device, the supporting longitudinal rod and the mechanical arm form a movable assembly.

The integrated light source is arranged on the light source support, the light trap is arranged on the light trap support, and the light source support and the light trap support are provided with components with adjustable angles and heights.

Compared with the prior art, the utility model has the advantages and the effect as follows:

1. the utility model provides a lighting source for detecting high reflection mirror surface defect, a plurality of straight line type lasers pass through after the plastic composite mounting make the incident light form the laser focusing light curtain in 180 within ranges, and the sample that awaits measuring is shone to the focusing light curtain, and the light curtain that the reverberation formed the symmetry is absorbed by the light trapper that corresponds respectively. The beneficial effects are that: when the light curtain irradiates a sample after focusing, the CCD can detect defects through one-time imaging, a rotating table is not needed to be used for changing the included angle between incident light and the defects for multiple imaging, meanwhile, the cost is reduced, and the detection efficiency and the detection precision are improved.

2. The utility model discloses can be used to the laser light source lighting system that high reflector flaw detected, need show improvement detection efficiency and measurement accuracy to sample or laser beam at the complicated operation of 180 within ranges internal rotations and the rotation error that produces when having avoided single beam to shine.

Description of the drawings:

FIG. 1 is a schematic diagram of the system of the present invention;

FIG. 2 is a top plan view of the system optical path;

FIG. 3 is a top plan view of a single set of optical paths of the system;

FIG. 4 is a front view of a single set of optical paths of the system;

FIG. 5 is a schematic diagram of a laser light trap.

In the figure: the device comprises a support longitudinal rod 1, a mechanical arm 2, an imaging device 3, a light trap 4, a light trap support 5, a sample to be detected 6, a sample seat 7, a base 8, an integrated light source 9, a light source support 10, a linear laser 11 and a shaping lens group 12.

The specific implementation mode is as follows:

the utility model relates to a laser scattering imaging device lighting system for detecting high speculum surface defect is a semi-annular light source, and laser shines the sample that awaits measuring with the form of focus light curtain at 180 within ranges, and the light curtain that the reverberation formed the symmetry is absorbed by the trapper that corresponds respectively, and when having the defect, the scattered light finally forms dark field light image through the CCD device.

The utility model discloses a semi-annular light source incident light curtain and the reflection light curtain and the semi-annular light trap that correspond, light trap be used for receiving the reverberation of semi-annular incident light curtain, semi-annular light curtain by a plurality of integral type light sources at 180 within ranges evenly distributed, its emergent light curtain all assembles in same facula department. And arranging a plurality of groups (for example, 3 groups) of lenses (plano-convex or biconvex) to shape the laser emitted by the plurality of linear laser light sources to form a laser focusing light curtain irradiating the sample within the range of 180 degrees. A measured sample is placed at the position of the focusing light spot, when the surface of the measured sample has defects, the scattered light is finally received and imaged by a CCD imaging device or a CMOS imaging device, and the reflected light forms symmetrical light curtains which are respectively absorbed by corresponding light traps. Every integral type light source includes a straight line type laser instrument and two lenses, and fixed clamping is in the cuboid sleeve, places the direction through changing telescopic space, the incident angle of very convenient change light curtain. A flat plane light curtain is emitted by a linear laser, is shaped into a parallel plane light curtain through a lens I, and then is focused by utilizing the lens II to form a convergent light curtain. And placing a sample to be detected at the position of the convergent light spot, and absorbing reflected light by a corresponding light trap. Each group of light sources has the same composition, a linear laser and a shaping lens group are fixedly clamped in a cuboid sleeve to emit light to obtain a focusing light curtain with a certain angle, and a plurality of groups (for example, 3 groups) of light curtains are combined to form a converging light curtain within the range of 180 degrees.

Example (b):

referring to the figure 1, the utility model relates to a high speculum surface flaw laser scattering imaging device lighting system, a plurality of light source support 10 and the light trapping device support 5 that have angle of regulation and height distribute at 180 within range align to grid separately in the above-mentioned system, be equipped with integral type light source 9 and light trapping device 4 on it respectively, integral type light source 9 is a cuboid sleeve, inside fixed clamping straight line type laser instrument 11 and plastic lens group 12, form the focus light curtain by a plurality of integral type light source 9 at 180 within ranges, it is regional to await measuring the sample to follow each angle irradiation, the unclear problem of flaw formation of image when avoiding single angle to shine. The light trap 4 is symmetrically distributed with the integrated light source 9 by taking the CCD imaging device 3 as a center, is used for receiving reflected light, and is subjected to blackening treatment inside and outside, so that the influence caused by stray light is avoided. The light trap 4 may also be other known light traps as long as the light curtain is absorbed. Adjust the 9 incident angles of integral type light source to assemble the sample 6 that awaits measuring of light curtain irradiation installation on sample seat 7, install image device 3 directly over it, constitute movable assembly with support vertical pole 1, arm 2, through adjusting and the height of the sample 6 that awaits measuring, carry out clear formation of image to the fault.

Referring to fig. 2, the utility model discloses semi-annular light source comprises integral type light source 9 and light trapping device 4 among the high reflector surface flaw laser scattering imaging device lighting system, three integral type light source is align to grid in 180, two liang of contained angles that assemble between the light curtain optical axis are 60, it places the sample that awaits measuring to assemble facula coincidence department, the light curtain can follow 180 within range each angle and shine the sample that awaits measuring, the problem of defect formation of image unsharpness under possible certain angle in the single angle illumination has been solved, light trapping device 4 and integral type light source 9 symmetric distribution, constitute approximate annular, the reflection light curtain is absorbed by the light trapping device that corresponds the distribution.

Referring to fig. 3 and 4, fig. 3 and 4 are the utility model discloses high speculum surface defect laser scattering imaging device lighting system's single group light path overlook plan view and front view, integral type light source 9 includes a line type laser instrument 11 and plastic lens group 12, and a line type laser instrument 11 sends out the plane laser and becomes the focus light curtain through plastic lens group 12 back plastic, and the facula that assembles that obtains shines on the sample that awaits measuring.

Referring to fig. 5, fig. 5 is that the utility model discloses light trapping device 4 among the high speculum surface defect laser scattering imaging device lighting system wholly is the cuboid, and inside is hollow cone, and the reverberation of being convenient for is absorbed by light trapping device 4.

The above embodiments are merely illustrative of the principles and effects of the present invention, and some embodiments may be applied, and it will be apparent to those skilled in the art that a plurality of modifications and improvements may be made without departing from the inventive concept of the present invention, and all of these modifications and improvements fall within the protection scope of the present invention.

Claims (6)

1. An illumination system for a laser scattering imaging device for detecting surface defects of a high-reflectivity mirror, comprising: the device comprises a plurality of integrated light sources (9) forming a focusing light curtain in a range of 180 degrees, and a plurality of light traps (4) for receiving reflected light are symmetrically distributed with the integrated light sources (9) by taking an imaging device (3) as a center.

2. The illumination system for a laser scattering imaging device for detecting high-reflectivity mirror surface defects according to claim 1, wherein: the three integrated light sources (9) are uniformly arranged within 180 degrees, and the included angle between the optical axes of every two converging light curtains is 60 degrees.

3. The illumination system for a laser scattering imaging apparatus for detecting high-reflectivity mirror surface defects according to claim 1 or 2, wherein: the integrated light source (9) comprises a linear laser (11) and a shaping lens group (12) formed by two lenses, and is fixedly clamped in the cuboid sleeve.

4. The illumination system for a laser scattering imaging device for detecting high-reflectivity mirror surface defects according to claim 3, wherein: the light trap (4) is a cuboid, the interior of the light trap is a hollow cone, and the interior and the exterior of the light trap are subjected to blackening treatment.

5. The illumination system for a laser scattering imaging device for detecting high-reflectivity mirror surface defects according to claim 4, wherein: the imaging device (3) is a CCD imaging device or a CMOS imaging device, and the imaging device (3), the supporting longitudinal rod (1) and the mechanical arm (2) form a movable assembly.

6. The illumination system for a laser scattering imaging device for detecting high-reflectivity mirror surface defects according to claim 5, wherein: the integrated light source (9) is arranged on the light source support (10), the light trap (4) is arranged on the light trap support (5), and the light source support (10) and the light trap support (5) are provided with components for adjusting the angle and the height.

Images