CN220568643U - Optical detection device and optical detection system - Google Patents
Optical detection device and optical detection system Download PDFInfo
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- CN220568643U CN220568643U CN202322095212.XU CN202322095212U CN220568643U CN 220568643 U CN220568643 U CN 220568643U CN 202322095212 U CN202322095212 U CN 202322095212U CN 220568643 U CN220568643 U CN 220568643U
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Abstract
The utility model relates to the field of visual detection, and particularly discloses an optical detection device and an optical detection system, wherein the optical detection device comprises an objective lens, a first light source, a second light source, a first image collector and a second image collector, the first light source and the second light source are used for irradiating an object to be detected to form reflected light and scattered light respectively, the optical detection device further comprises a first spectroscope, a second spectroscope, a first optical filter, a second optical filter and two beam expanding modules, the reflected light and the scattered light can penetrate through the first spectroscope to the second spectroscope, the second spectroscope is used for dividing the reflected light and the scattered light into two beams to be respectively conducted to the first image collector and the second image collector, the first optical filter is used for filtering the scattered light, and the second optical filter is used for filtering the reflected light, and the two beam expanding modules are respectively arranged between the first spectroscope and the second spectroscope and between the second spectroscope and the second image collector. The utility model can detect the object to be detected in bright field and dark field at the same time.
Description
Technical Field
The utility model relates to the field of visual detection, in particular to an optical detection device and an optical detection system.
Background
In the technical field of visual detection, two detection modes, namely a bright field mode and a dark field mode, are generally adopted to detect an object to be detected, and have the advantages of being more accurate in measurement to be detected when the bright field mode is adopted, and the detection capability of a visual detection system can be improved when the dark field mode is adopted.
In the existing optical detection system, one-time exposure imaging can only acquire images of an object to be detected in one detection mode, for example, images of the object to be detected in the dark field mode are acquired when an image acquisition device is used for long exposure and a dark field light source is turned on, images of the object to be detected in the bright field mode are acquired when the image acquisition device is used for short exposure and the bright field light source is turned on, one-time exposure needs to be changed by the image acquisition device when the same object to be detected has two detection requirements, and the two light sources are switched on and off, so that the detection is long in time consumption, and the production cost is increased.
Disclosure of Invention
The utility model aims to provide an optical detection device and an optical detection system capable of detecting bright field and dark field of an object to be detected at the same time.
In order to achieve the above object, the present utility model provides an optical detection device, including an objective lens, a first light source, a second light source, a first image collector and a second image collector, where the first light source and the second light source are used for irradiating an object to be detected to form reflected light and scattered light, respectively, the optical detection device further includes a first spectroscope, a second spectroscope, a first optical filter, a second optical filter and two beam expanding modules, the first spectroscope is used for reflecting a light beam emitted by the first light source to a position below the objective lens and the reflected light and the scattered light can pass through the first spectroscope to the second spectroscope, the second spectroscope is used for dividing the reflected light and the scattered light into two beams to be respectively conducted to the first image collector and the second image collector, the first optical filter is arranged between the second spectroscope and the first image collector to filter the scattered light, the second optical filter is arranged between the second spectroscope and the second image collector to filter the reflected light, and the two beam expanding modules are respectively arranged between the first spectroscope and the second optical filter and the second image collector.
As a further improvement of the utility model, the beam expanding module comprises two first convex lenses which are arranged at intervals.
As a further improvement of the utility model, the second image collector is located at an oblique side of the second optical filter, and the optical detection device further comprises a first reflecting mirror arranged at a side of the second optical filter away from the second beam splitter, and the first reflecting mirror is used for reflecting the scattered light transmitted through the second optical filter to the second image collector.
As a further development of the utility model, the distance of the objective lens to the first image collector is equal to the focal length of the objective lens, and the distance of the second beam splitter to the first image collector is equal to the distance of the second beam splitter to the first mirror plus the distance of the first mirror to the second image collector.
As a further improvement of the present utility model, the first light source is located at an oblique side of the first beam splitter, and the optical detection device further includes a second reflecting mirror disposed at one side of the first light source in a vertical direction, where the second reflecting mirror is used for reflecting the light beam emitted by the first light source to the first beam splitter.
As a further improvement of the present utility model, the first light source is a point light source, and the optical detection device further includes a second convex lens for condensing the light beam provided between the first light source and the second reflecting mirror.
As a further improvement of the present utility model, the first filter is a filter with ND attenuation function.
As a further improvement of the utility model, the second light source is an annular light source and is arranged above the objective lens.
As a further development of the utility model, the angle and/or the position of the first mirror relative to the second filter can be adjusted such that the distance from the objective to the first image collector is equal to the distance from the objective to the second image collector when an image is acquired.
The utility model also provides an optical detection system which comprises a processing device and the optical detection device, wherein the processing device is used for processing the images acquired by the first image acquisition device and the second image acquisition device.
The utility model has the beneficial effects that:
according to the optical detection device and the optical detection system, the first light source and the second light source can be turned on simultaneously to respectively carry out bright field illumination and dark field illumination on the object to be detected, and the first image collector and the second image collector can respectively obtain images of the object to be detected during bright field illumination and dark field illumination, so that the optical detection device and the optical detection system can carry out bright field detection and dark field detection on the object to be detected simultaneously.
Drawings
FIG. 1 is a schematic diagram of an optical path structure of an optical detection device according to the present utility model;
FIG. 2 is a schematic diagram of an optical path structure of the optical detection device according to the present utility model;
fig. 3 is a schematic diagram of a structure of an optical detection device provided by the present utility model.
Detailed Description
The present utility model will be described in detail below with reference to embodiments shown in the drawings. The embodiments are not intended to limit the utility model, but all mechanical, method, or functional modifications of the utility model based on the embodiments are within the scope of the utility model.
Terms such as "upper," "lower," "left," "right," "front," "rear," and the like as used herein to refer to a spatial relative position are used for ease of description to describe one feature's relationship to another feature as illustrated in the figures. It will be appreciated that the term spatially relative position is intended to encompass different orientations than those depicted in the figures, depending on the product placement location, and should not be construed as limiting the claims. In addition, the term "horizontal" as used herein is not entirely equivalent to being oriented perpendicular to gravity, allowing for some degree of tilt.
As shown in fig. 1, an embodiment of the present utility model provides an optical detection device 10 capable of performing bright field detection and dark field detection on an object 15 to be detected at the same time, where the optical detection device 10 includes an objective lens 1, a first light source 2, a second light source 3, a first image collector 4, and a second image collector 5. During detection, the object 15 to be detected is placed below the objective lens 1, the first light source 2 is used for carrying out bright field illumination on the object 15 to be detected, the emitted light beam can vertically irradiate the object 15 to be detected to form reflected light, the second light source 3 is used for carrying out dark field illumination on the object 15 to be detected, the emitted light beam can obliquely irradiate the object 15 to be detected to form scattered light, the first image collector 4 is used for receiving the reflected light to obtain an image of the object 15 to be detected during bright field illumination, and the second image collector 5 is used for receiving the scattered light to obtain an image of the object 15 to be detected during dark field illumination.
The optical detection device 10 further includes a first spectroscope 6, a second spectroscope 7, a first optical filter 8, and a second optical filter 9. The first beam splitter 6 is specifically located above the objective lens 1, and can change the direction of the light beam emitted by the first light source 2, reflect the light beam emitted by the first light source 2 to the lower side of the objective lens 1 to vertically irradiate the object 15 to be measured, and the reflected light and the scattered light emitted from the object 15 to be measured can also pass through the first beam splitter 6 to the second beam splitter 7. The second beam splitter 7 is specifically located above the first beam splitter 6, and can split the reflected light and the scattered light into two beams for respectively conducting to the first image collector 4 and the second image collector 5. The above-mentioned "the reflected light and the scattered light are divided into two beams" is to be understood as that the reflected light and the scattered light are divided into two beams each including the reflected light and the scattered light, specifically, one of the two beams is transmitted through the second beam splitter 7 to the first image collector 4, and the other beam is reflected by the second beam splitter 7 to the second image collector 5. The first optical filter 8 is disposed between the second beam splitter 7 and the first image collector 4 to filter the scattered light, so that the first image collector 4 only receives the reflected light to obtain an image of the object 15 to be measured when illuminated in the dark field, and the second optical filter 9 is disposed between the second beam splitter 7 and the second image collector 5 to filter the reflected light, so that the second image collector 5 only receives the reflected light to obtain an image of the object 15 to be measured when illuminated in the dark field. In this embodiment, the first beam splitter 6 and the second beam splitter 7 are both configured as two-sided half mirror, and are capable of transmitting one part of the light beam and reflecting the other part of the light beam.
The optical detection device 10 further includes two beam expansion modules 10, where the two beam expansion modules 10 are respectively disposed between the first beam splitter 6 and the second beam splitter 7 and between the second beam splitter 7 and the second image collector 5, and the beam expansion modules 10 can expand the diameter of the light beam passing through them, so as to increase the use efficiency of the first light source 2 and the second light source 3. In this embodiment, the beam expanding module 10 includes two first convex lenses 11 disposed at intervals.
As a preferred solution of this embodiment, the second image collector 5 is located on the oblique side of the second optical filter 9, and the optical detection device 10 further includes a first reflecting mirror 12 disposed on the side of the second optical filter 9 away from the second beam splitter 7, where the first reflecting mirror 12 can change the direction of the scattered light passing through the second optical filter 9, and reflect the scattered light to the second image collector 5.
As a preferable scheme of the embodiment, the angle and/or the position of the first reflecting mirror 12 relative to the second optical filter 9 can be adjusted, including the whole angle rotation along the optical path direction, or the moving adjustment of the positions such as up, down, left and right in the optical path direction is realized, when the image is acquired, the distance from the objective lens 1 to the first image collector 4 is equal to the distance from the objective lens 1 to the second image collector 5, so that the consistency of the imaging definition of the two image collectors is ensured.
Further, as shown in fig. 2, the distance from the objective lens 1 to the first image collector 4 is equal to the distance a from the objective lens 1 to the second beam splitter 7 plus the distance b from the second beam splitter 7 to the first image collector 4, the distance from the objective lens 1 to the second image collector 5 is equal to the distance a plus the distance c from the second beam splitter 7 to the first reflecting mirror 12 and the distance d from the first reflecting mirror 12 to the second image collector 5, and in this embodiment, the distance b is equal to the distance c plus the distance d, so that the distance from the objective lens 1 to the first image collector 4 and the distance from the objective lens 1 to the second image collector 5 are equal, and may be equal to the focal length of the objective lens 1 to ensure that the imaging sharpness of the first image collector 4 and the second image collector 5 is consistent. The above distance is understood to be the transmission distance of the reflected or scattered light. In this embodiment, the focal length of the objective lens 1 is 180mm.
In this embodiment, the exposure times of the first image collector 4 and the second image collector 5 are set within the minimum exposure time, so that the exposure times of the first image collector 4 and the second image collector 5 are the same as much as possible, and thus, the first image collector 4 and the second image collector 5 can receive the same trigger signal, so that the optical detection device 10 can be suitable for a scene that flies at a high speed.
The first light source 2 is located at an oblique side of the first spectroscope 6, the optical detection device 10 further includes a second reflecting mirror 13 disposed at one side of the first light source 2 in a vertical direction, and the second reflecting mirror 13 can change a direction of a light beam emitted by the first light source 2 and reflect the light beam to the first spectroscope 6.
Further, the first light source 2 is a point light source, the optical detection device 10 further includes a second convex lens 14 disposed between the first light source 2 and the second reflecting mirror 13, and the second convex lens 14 can collect the light beam emitted by the first light source 2, so as to improve the service efficiency of the first light source 2. The second light source 3 is a ring light source and is disposed above the objective lens 1, and the ring light source obliquely irradiates the object 15 to be measured, so as to generate reflected light to form dark field illumination.
The first light source 2 is used for bright field illumination, the light source utilization rate is higher than that of the second light source 3 used for dark field illumination, namely, the light intensity of reflected light generated by the first light source 2 irradiating the object 15 to be measured is higher, and the first optical filter 8 is an optical filter with an ND attenuation function and can reduce the light intensity of the reflected light transmitted through the optical filter to a proper level.
In this embodiment, the wavelength of the light beam emitted by the first light source 2 is 300nm-400nm, the wavelength of the light beam emitted by the second light source 3 differs from the wavelength of the light beam emitted by the first light source 2 by not less than 50nm, the wavelength of the light beam that the first filter 8 can pass through corresponds to the wavelength of the light beam emitted by the first light source 2 by 300nm-400nm, and the wavelength of the light beam that the second filter 9 can pass through corresponds to the wavelength of the light beam emitted by the second light source 3.
As shown in fig. 3, the optical detection device 10 further includes a first lens barrel 16 disposed between the objective lens 1 and the first image collector 4, a second lens barrel 17 disposed on a first side of the first lens barrel 16 in a lateral direction, and a third lens barrel 18 disposed on a second side of the first lens barrel 16, the first lens barrel 16 is disposed vertically, the first image collector 4 is disposed above the first lens barrel 16, the objective lens 1 is disposed below the first lens barrel 16, and the first beam splitter 6, one beam expanding module 10, the second beam splitter 7, and the first optical filter 8 are disposed in the first lens barrel 16 from bottom to top. The second lens barrel 17 is also vertically arranged, the first light source 2 is arranged above the second lens barrel 17, the second convex lens 14 and the second reflecting mirror 13 are arranged in the second lens barrel 17 from top to bottom, and the second reflecting mirror 13 and the first spectroscope 6 are oppositely arranged in the transverse direction. The third barrel 18 is substantially L-shaped, including a horizontal barrel extending laterally from the first barrel 16 and a vertical barrel extending upwardly from the horizontal barrel, the second image pickup 5 is provided above the vertical barrel, one beam expanding module 10, the second optical filter 9 and the first reflecting mirror 12 are provided in the horizontal barrel in this order along the extending direction of the horizontal barrel, and the second image pickup 5 and the first reflecting mirror 12 are disposed opposite to each other in the up-down direction.
When the optical detection device 10 provided in this embodiment works, the first light source 2 and the second light source 3 irradiate the object 15 to be detected at the same time, and respectively form reflected light and scattered light, the reflected light and the scattered light penetrate the first beam splitter 6 to the second beam splitter 7, at the second beam splitter 7, part of the reflected light and the scattered light penetrate the second beam splitter 7 to the first optical filter 8, the first optical filter 8 filters the scattered light therein, so that the first image collector 4 only receives the reflected light to collect an image of the object 15 to be detected when illuminated in the bright field, the other part of the reflected light and the scattered light reflect from the second beam splitter 7 to the second optical filter 9, and the second optical filter 9 filters the reflected light therein, so that the second image collector 5 only receives the scattered light to collect an image of the object 15 to be detected when illuminated in the dark field.
The utility model also provides an optical detection system, which comprises a processing device and the optical detection device 10, wherein the processing device can process the images acquired by the first image acquisition device 4 and the second image acquisition device 5 according to an image processing algorithm to judge whether the object 15 to be detected has defects.
It should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is for clarity only, and that the skilled artisan should recognize that the embodiments may be combined as appropriate to form other embodiments that will be understood by those skilled in the art.
The above list of detailed descriptions is only specific to practical embodiments of the present utility model, and they are not intended to limit the scope of the present utility model, and all equivalent embodiments or modifications that do not depart from the spirit of the present utility model should be included in the scope of the present utility model.
Claims (10)
1. The optical detection device is characterized by comprising an objective lens, a first light source, a second light source, a first image collector and a second image collector, wherein the first light source and the second light source are used for irradiating an object to be detected to form reflected light and scattered light respectively, the optical detection device further comprises a first spectroscope, a second spectroscope, a first optical filter, a second optical filter and two beam expanding modules, the first spectroscope is used for reflecting light beams emitted by the first light source to the lower part of the objective lens and enabling the reflected light and the scattered light to penetrate through the first spectroscope to the second spectroscope, the second spectroscope is used for dividing the reflected light and the scattered light into two beams to be respectively conducted to the first image collector and the second image collector, the first optical filter is arranged between the second spectroscope and the first image collector to filter the scattered light, the second optical filter is arranged between the second spectroscope and the second image collector to filter the reflected light, and the two beam expanding modules are respectively arranged between the first spectroscope and the second image collector.
2. The optical detection device of claim 1, wherein the beam expansion module comprises two first convex lenses disposed at a distance from each other.
3. The optical detection device according to claim 1, wherein the second image collector is located on an oblique side of the second optical filter, and the optical detection device further comprises a first reflecting mirror disposed on a side of the second optical filter away from the second beam splitter, and the first reflecting mirror is configured to reflect the scattered light transmitted through the second optical filter to the second image collector.
4. The optical detection device of claim 3, wherein the distance from the objective lens to the first image collector is equal to the focal length of the objective lens, and the distance from the second beam splitter to the first image collector is equal to the distance from the second beam splitter to the first mirror plus the distance from the first mirror to the second image collector.
5. The optical detection device according to claim 1, wherein the first light source is located at an oblique side of the first beam splitter, and the optical detection device further comprises a second reflecting mirror disposed at a side of the first light source in a vertical direction, and the second reflecting mirror is configured to reflect the light beam emitted by the first light source to the first beam splitter.
6. The optical detection device of claim 5, wherein the first light source is a point light source, and further comprising a second convex lens disposed between the first light source and the second mirror for focusing the light beam.
7. The optical detection device of claim 1, wherein the first filter is a filter with ND attenuation.
8. The optical detection device according to claim 1, wherein the second light source is a ring light source and is disposed above the objective lens.
9. An optical detection device according to claim 3, wherein the angle and/or position of the first mirror relative to the second filter is adjustable such that the distance of the objective lens from the first image collector is equal to the distance of the objective lens from the second image collector when an image is acquired.
10. An optical detection system comprising processing means for processing images acquired by the first and second image acquisitors and an optical detection apparatus as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322095212.XU CN220568643U (en) | 2023-08-04 | 2023-08-04 | Optical detection device and optical detection system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322095212.XU CN220568643U (en) | 2023-08-04 | 2023-08-04 | Optical detection device and optical detection system |
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| CN220568643U true CN220568643U (en) | 2024-03-08 |
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| CN202322095212.XU Active CN220568643U (en) | 2023-08-04 | 2023-08-04 | Optical detection device and optical detection system |
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- 2023-08-04 CN CN202322095212.XU patent/CN220568643U/en active Active
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