CN211284615U - Feeding device of zone-melting single crystal furnace - Google Patents
Feeding device of zone-melting single crystal furnace Download PDFInfo
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- CN211284615U CN211284615U CN201921315574.2U CN201921315574U CN211284615U CN 211284615 U CN211284615 U CN 211284615U CN 201921315574 U CN201921315574 U CN 201921315574U CN 211284615 U CN211284615 U CN 211284615U
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- single crystal
- bevel gear
- feeding device
- zone
- plate
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- 239000013078 crystal Substances 0.000 title claims abstract description 29
- 238000004857 zone melting Methods 0.000 title claims abstract description 23
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 25
- 239000002994 raw material Substances 0.000 abstract description 24
- 239000000463 material Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000007246 mechanism Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 210000000245 forearm Anatomy 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
Images
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a feeding device of a zone-melting single crystal furnace, which comprises a fixed plate; a small bevel gear is arranged on the fixed plate, the small bevel gear is meshed with the large bevel gear, and the small bevel gear is coaxially and rotatably connected with a vertically arranged lead screw; the screw rod is in threaded connection with a nut sliding block, a guide rail is arranged beside the screw rod, and the nut sliding block is in sliding connection with the guide rail; the nut sliding block is fixed with a bracket, the bracket is provided with a movable plate and two turning plates, the outer end of each turning plate is connected to the movable plate through a turning plate mandrel, the top ends of the movable plate and the turning plates are provided with spring fixing columns, and a spring is arranged between the movable plate and the spring fixing column on the turning plate on the same side; the openings of the two turning plates are provided with bolts. A zone-melting single crystal growing furnace loading attachment, the cooperation uses mechanical mechanism to replace the manual work to carry out the material loading work of polycrystalline silicon rod raw materials, not only reduces the harm of material loading work to the operative employee healthy, has also improved the security and the reliability of production, provides very big convenience for the material loading work of zone-melting single crystal growing furnace.
Description
Technical Field
The utility model belongs to the technical field of machinery, especially, relate to a zone-melting single crystal growing furnace loading attachment.
Background
The application range of the zone-melting monocrystalline silicon is wider and wider due to the unique characteristics of electricity and the like, and the requirement on the large size of the zone-melting monocrystalline silicon piece is more and more urgent. In order to produce large-size zone-melting monocrystalline silicon, large-size polycrystalline silicon rod raw materials have to be used, the diameter, length and weight of the polycrystalline silicon raw materials are larger and larger, and the large length and high weight cause the difficult problem of difficult polycrystalline rod raw material feeding.
In the material loading in-process in the past, the production workman need tie up polycrystalline silicon rod raw materials at the forearm with the rope and carry out the material loading, and the high weight polycrystalline silicon rod raw materials of tying up at the workman forearm not only can cause the harm to workman's health, and this kind of artifical material loading mode also can cause a great deal of potential safety hazard in addition, for example at the material loading and hang the in-process, the polycrystalline silicon rod raw materials can rock, hits the heater block of furnace body inner wall and well furnace chamber easily, has the polycrystalline silicon rod raw materials even and draws the risk that the knot dropped.
Disclosure of Invention
In view of this, the utility model aims at providing a zone-melting single crystal growing furnace loading attachment has solved the problem among the prior art, and the cooperation uses mechanical mechanism to replace the manual work to carry out the material loading work of polycrystalline silicon rod raw materials, not only reduces the harm of material loading work to the operative employee healthy, has also improved the security and the reliability of production, provides very big convenience for the material loading work of zone-melting single crystal growing furnace.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
a feeding device of a zone-melting single crystal furnace comprises a fixed plate; a small bevel gear is arranged on the fixed plate, the small bevel gear is meshed with the large bevel gear, and the small bevel gear is coaxially and rotatably connected with a vertically arranged lead screw; the screw rod is in threaded connection with a nut sliding block, a guide rail is arranged beside the screw rod, and the nut sliding block is in sliding connection with the guide rail; the nut sliding block is fixed with a bracket, the bracket is provided with a movable plate and two turning plates, the outer end of each turning plate is connected to the movable plate through a turning plate mandrel, the top ends of the movable plate and the turning plates are provided with spring fixing columns, and a spring is arranged between the movable plate and the spring fixing column on the turning plate on the same side; the openings of the two turning plates are provided with bolts.
Furthermore, a supporting cover is arranged on the fixed plate, the large bevel gear and the small bevel gear are both arranged in the supporting cover, a bearing seat is arranged in the supporting cover, and the rocker shaft is coaxially and rotatably connected with the large bevel gear through the bearing seat.
Furthermore, a hand wheel is arranged at one end of the rocker shaft extending out of the support cover.
Furthermore, the top end of the guide rail is fixedly connected with the fixed plate through a locking nut.
Further, the screw rod penetrates through a combined bearing on the fixed plate to be connected with the bevel pinion.
Further, the bottom plate is arranged at the bottom ends of the guide rail and the lead screw.
The bottom plate connects the two guide rails with the lower end of the screw rod through the spring washer and the nut.
Furthermore, the top end of the supporting cover is provided with a through hole.
Furthermore, two turn over all to be equipped with the semicircle through-hole on the relative one side of board, be equipped with the tetrafluoride ring around the semicircle through-hole.
The tetrafluoride ring can play a role in buffering when receiving the polycrystalline silicon rod raw material, and can prevent the polycrystalline silicon rod raw material from being polluted after the aluminum alloy is directly contacted with the polycrystalline silicon rod raw material.
Furthermore, a bolt hole is formed in one side of the fixed plate in the vertical direction.
Can utilize the bolt hole to fix this device and the bolt hole of last furnace chamber together, guaranteed the stability of this device in the course of the work.
Furthermore, the lower sides of the two turning plates are provided with baffle plates.
The baffle limits the two turning plates to rotate downwards, and plays a role in supporting the turning plates.
Compared with the prior art, the feeding device of the zone-melting single crystal furnace has the following advantages:
the feeding device of the zone-melting single crystal furnace is matched with a mechanical mechanism to replace manual work to carry out feeding work of the polycrystalline silicon rod raw materials, so that the damage of the feeding work to the health of an operator is reduced, the production safety is improved, and great convenience is provided for the feeding work of the zone-melting single crystal furnace;
the lead screw is driven to rotate by the bevel gear set, the lead screw drives the polycrystalline silicon rod on the support to move up and down, the working efficiency is greatly improved, the reliability of the structure during working is improved, and the polycrystalline silicon rod is transported by using the support, and the turning plate, the spring and the bolt on the support;
the utility model has the characteristics of efficient, easy operation, practical convenient etc, can be used to the zone-melting single crystal growing furnace of different models, application prospect is very wide.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation.
In the drawings:
FIG. 1 is a schematic structural view of a feeding device of a zone-melting single crystal furnace according to an embodiment of the present invention;
FIG. 2 is a top view of a feeding device of a zone-melting single crystal furnace according to an embodiment of the present invention;
FIG. 3 is a side view of a feeding device of a zone-melting single crystal furnace according to an embodiment of the present invention;
FIG. 4 is a front view of a feeding device of a zone-melting single crystal furnace according to an embodiment of the present invention.
Description of reference numerals:
1-supporting a cover; 2-rocker shaft; 3-hand wheel; 4-fixing the plate; 5-a nut slider; 6-a bottom plate; 7-a jackscrew hole; 8-a scaffold; 9-large bevel gear; 10-bevel pinion; 11-a combination bearing; 12-bolt holes; 13-a guide rail; 14-a lead screw; 15-moving plate; 16-turning over the board; 17-a flap mandrel; 18-spring fixing post; 19-a spring; 20-tetrafluoro ring; 21-a latch; 22-baffle.
Detailed Description
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in FIGS. 1 to 4, a feeding device of a zone-melting single crystal furnace comprises a fixed plate 4; a small bevel gear 10 is arranged on the fixed plate 4, the small bevel gear 10 is meshed with the large bevel gear 9, and the small bevel gear 10 is coaxially and rotatably connected with a vertically arranged screw 14; the screw 14 is in threaded connection with the nut slider 5, a guide rail 13 is arranged beside the screw 14, and the nut slider 5 is in sliding connection with the guide rail 13; a bracket 8 is fixed on the nut sliding block 5, a movable plate 15 and two turning plates 16 are arranged on the bracket 8, the outer end of each turning plate 16 is connected to the movable plate 15 through a turning plate mandrel 17, spring fixing columns 18 are arranged at the top ends of the movable plate 15 and the turning plates 16, and a spring 19 is arranged between the spring fixing columns 18 on the movable plate 15 and the turning plates 16 on the same side; the openings of the two flaps 16 are provided with latches 21.
The two guide rails 13 are respectively arranged on two sides of the screw rod 14 in parallel, the nut slider 5 can move up and down along the guide rails 13 and the screw rod 14 simultaneously, a copper sleeve is arranged between the guide rails 13 and the nut slider 5, a jackscrew hole 7 is formed in the nut slider 5, and the copper sleeve is fixed on the nut slider 5 by utilizing a jackscrew arranged in the jackscrew hole 7.
The utility model discloses a zone-melting single crystal furnace loading attachment in practical application, place this device in last furnace door gate department, put into last furnace chamber with support 8 place one side, drive lead screw 14 through big bevel gear 9, bevel pinion 10 rotation and rotate, make nut slider 5 along guide rail 13 upward movement to the highest point on lead screw 14, close turning plate 16 and close bolt 21 simultaneously, put the head of polycrystalline silicon rod raw materials on turning plate 16, make nut slider 5 drive the polycrystalline silicon rod raw materials on support 8 and move down at this moment, polycrystalline silicon rod raw materials will move to the middle furnace indoor of downside along with support 8 together, until putting polycrystalline silicon rod raw materials vertically into the stove, hoist the afterbody of polycrystalline silicon rod raw materials on the lifting disk of last furnace chamber upper portion afterwards, after accomplishing the hoist and mount, open bolt 21, turning plate 16 is under spring 19's effect, the automatic turn-over is opened, the turning plate 16 is conveniently separated from the polysilicon rod raw material, so that the device is taken down.
As shown in fig. 1-4, a supporting cover 1 is arranged on the fixed plate 4, the large bevel gear 9 and the small bevel gear 10 are both arranged in the supporting cover 1, a bearing seat is arranged in the supporting cover 1, and the rocker shaft 2 is coaxially and rotatably connected with the large bevel gear 9 through the bearing seat.
As shown in fig. 1-4, a hand wheel 3 is arranged at one end of the rocker shaft 2 extending out of the support cover 1.
As shown in fig. 1-4, the top end of the guide rail 13 is fixedly connected with the fixed plate 4 through a lock nut.
As shown in fig. 1-4, a lead screw 14 is connected with the bevel pinion 10 through a combined bearing 11 on the fixed plate 4.
As shown in fig. 1-4, the bottom ends of the guide rail 13 and the lead screw 14 are provided with a bottom plate 6.
The bottom plate 6 connects the two guide rails 13 to the lower end of the lead screw 14 by means of spring washers and nuts.
As shown in fig. 1-4, the top end of the support cover 1 is provided with a through hole.
When polycrystalline silicon rod raw materials cannot be placed into the semicircular through hole on the turning plate 16 at one time, the polycrystalline silicon rod raw materials can be temporarily placed at the through hole at the top of the support cover 1 and then transferred onto the turning plate 16.
As shown in fig. 1-4, two opposite sides of the turning plate 16 are respectively provided with a semicircular through hole, and a tetrafluoride ring 20 is arranged around the semicircular through holes.
The tetrafluoride ring 20 can play a role in buffering when receiving the polycrystalline silicon rod raw material, and can prevent the polycrystalline silicon rod raw material from being polluted after the aluminum alloy directly contacts with the polycrystalline silicon rod raw material.
As shown in fig. 1 to 4, a bolt hole 12 is provided on one side of the stationary plate 4 in the vertical direction.
The bolt holes 12 can be used for fixing the device and the bolt holes of the upper furnace chamber together, and the stability of the device in the working process is ensured.
As shown in fig. 1-4, the two flaps 16 are provided with baffles 22 on the underside.
The baffle 22 limits the downward rotation of the two flaps 16 and serves to support the flaps 16.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A feeding device of a zone-melting single crystal furnace is characterized in that: comprises a fixed plate (4); a small bevel gear (10) is arranged on the fixed plate (4), the small bevel gear (10) is meshed with the large bevel gear (9), and the small bevel gear (10) is coaxially and rotatably connected with a vertically arranged lead screw (14); the screw rod (14) is in threaded connection with a nut sliding block (5), a guide rail (13) is arranged beside the screw rod (14), and the nut sliding block (5) is in sliding connection with the guide rail (13); a bracket (8) is fixed on the nut sliding block (5), a movable plate (15) and two turning plates (16) are arranged on the bracket (8), the outer end of each turning plate (16) is connected to the movable plate (15) through a turning plate mandrel (17), spring fixing columns (18) are arranged at the top ends of the movable plate (15) and the turning plates (16), and a spring (19) is arranged between the movable plate (15) and the spring fixing columns (18) on the turning plates (16) on the same side; and the openings of the two turning plates (16) are provided with bolts (21).
2. The feeding device of the float-zone single crystal furnace according to claim 1, characterized in that: the fixed plate (4) is provided with a supporting cover (1), the large bevel gear (9) and the small bevel gear (10) are arranged in the supporting cover (1), a bearing seat is arranged in the supporting cover (1), and the rocker shaft (2) is coaxially and rotatably connected with the large bevel gear (9) through the bearing seat.
3. The feeding device of the float-zone single crystal furnace of claim 2, wherein: and a hand wheel (3) is arranged at one end of the rocker shaft (2) extending out of the support cover (1).
4. The feeding device of the float-zone single crystal furnace according to claim 1, characterized in that: the top end of the guide rail (13) is fixedly connected with the fixed plate (4) through a locking nut.
5. The feeding device of the float-zone single crystal furnace according to claim 1, characterized in that: the lead screw (14) passes through the combined bearing (11) on the fixed plate (4) and is connected with the small bevel gear (10).
6. The feeding device of the float-zone single crystal furnace according to claim 1, characterized in that: the bottom ends of the guide rail (13) and the lead screw (14) are respectively provided with a bottom plate (6).
7. The feeding device of the float-zone single crystal furnace of claim 2, wherein: the top end of the support cover (1) is provided with a through hole.
8. The feeding device of the float-zone single crystal furnace according to claim 1, characterized in that: and semicircular through holes are formed in the opposite sides of the two turning plates (16), and a tetrafluoride ring (20) is arranged around each semicircular through hole.
9. The feeding device of the float-zone single crystal furnace according to claim 1, characterized in that: and a bolt hole (12) is formed in one side of the fixed plate (4) in the vertical direction.
10. The feeding device of the float-zone single crystal furnace according to claim 1, characterized in that: the lower sides of the two turning plates (16) are provided with baffle plates (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921315574.2U CN211284615U (en) | 2019-08-14 | 2019-08-14 | Feeding device of zone-melting single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921315574.2U CN211284615U (en) | 2019-08-14 | 2019-08-14 | Feeding device of zone-melting single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211284615U true CN211284615U (en) | 2020-08-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921315574.2U Active CN211284615U (en) | 2019-08-14 | 2019-08-14 | Feeding device of zone-melting single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211284615U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110453275A (en) * | 2019-08-14 | 2019-11-15 | 天津中环领先材料技术有限公司 | A kind of zone melting single-crystal furnace feeding device |
-
2019
- 2019-08-14 CN CN201921315574.2U patent/CN211284615U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110453275A (en) * | 2019-08-14 | 2019-11-15 | 天津中环领先材料技术有限公司 | A kind of zone melting single-crystal furnace feeding device |
| CN110453275B (en) * | 2019-08-14 | 2024-01-05 | 天津中环领先材料技术有限公司 | Feeding device of zone-melting single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220510 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region before: China Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. |