CN110453275B - Feeding device of zone-melting single crystal furnace - Google Patents
Feeding device of zone-melting single crystal furnace Download PDFInfo
- Publication number
- CN110453275B CN110453275B CN201910749147.3A CN201910749147A CN110453275B CN 110453275 B CN110453275 B CN 110453275B CN 201910749147 A CN201910749147 A CN 201910749147A CN 110453275 B CN110453275 B CN 110453275B
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- China
- Prior art keywords
- zone
- single crystal
- plate
- bevel gear
- feeding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004857 zone melting Methods 0.000 title claims abstract description 28
- 239000013078 crystal Substances 0.000 title claims abstract description 25
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 24
- 239000002994 raw material Substances 0.000 abstract description 23
- 230000036541 health Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000007246 mechanism Effects 0.000 abstract description 3
- 229920005591 polysilicon Polymers 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 210000000245 forearm Anatomy 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The invention provides a feeding device of a zone-melting single crystal furnace, which comprises a fixed plate; a small bevel gear is arranged on the fixed plate and meshed with the large bevel gear, and the small bevel gear is coaxially and rotatably connected with a vertically arranged screw rod; the screw is connected with a nut sliding block through threads, a guide rail is arranged beside the screw, and the nut sliding block is in sliding connection with the guide rail; the nut sliding block is provided with a fixed bracket, a movable plate and two turning plates are arranged on the bracket, the outer end of each turning plate is connected to the movable plate through a turning plate mandrel, spring fixing columns are arranged at the top ends of the movable plate and the turning plate, and springs are arranged between the movable plate on the same side and the spring fixing columns on the turning plate; the openings of the two turning plates are provided with bolts. According to the feeding device of the zone-melting single crystal furnace, disclosed by the invention, the mechanical mechanism is used for replacing manual feeding work of the polycrystalline silicon rod raw material, so that the damage of the feeding work to the health of operators is reduced, the safety and the reliability of production are improved, and great convenience is provided for the feeding work of the zone-melting single crystal furnace.
Description
Technical Field
The invention belongs to the technical field of machinery, and particularly relates to a feeding device of a zone-melting single crystal furnace.
Background
Because of the unique electrical characteristics and the like, the application range of the zone-melting monocrystalline silicon is wider and wider, and the large-size requirement on the zone-melting monocrystalline silicon is more and more urgent. In order to produce large-size zone-melting monocrystalline silicon, large-size polycrystalline silicon rod raw materials have to be used, the diameters, the lengths and the weights of the polycrystalline silicon raw materials are larger and larger, and the large lengths and the high weights cause the difficult problem of feeding the polycrystalline rod raw materials.
In the past material loading in-process, production workman need tie up polycrystalline silicon rod raw materials with the rope and carry out the material loading at the forearm, and the high weight polycrystalline silicon rod raw materials of tying up at workman's forearm not only can cause harm to workman's health, and this kind of artifical material loading mode also can cause a great deal of potential safety hazards moreover, for example in the material loading suspension process, polycrystalline silicon rod raw materials can rock, bump into the heating element in furnace body inner wall and the well furnace chamber easily, even have polycrystalline silicon rod raw materials to scratch the risk that detains and drop.
Disclosure of Invention
In view of the above, the invention aims to provide a feeding device of a zone-melting single crystal furnace, which solves the problems in the prior art, and is matched with a mechanical mechanism to replace manual feeding work of polycrystalline silicon rod raw materials, so that the damage of the feeding work to the health of operators is reduced, the safety and the reliability of production are improved, and great convenience is provided for the feeding work of the zone-melting single crystal furnace.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
a feeding device of a zone-melting single crystal furnace comprises a fixed plate; a small bevel gear is arranged on the fixed plate and meshed with the large bevel gear, and the small bevel gear is coaxially and rotatably connected with a vertically arranged screw rod; the screw is connected with a nut sliding block through threads, a guide rail is arranged beside the screw, and the nut sliding block is in sliding connection with the guide rail; the nut sliding block is provided with a fixed bracket, a movable plate and two turning plates are arranged on the bracket, the outer end of each turning plate is connected to the movable plate through a turning plate mandrel, spring fixing columns are arranged at the top ends of the movable plate and the turning plate, and springs are arranged between the movable plate on the same side and the spring fixing columns on the turning plate; the openings of the two turning plates are provided with bolts.
Further, be equipped with the support cover on the fixed plate, big bevel gear and little bevel gear all set up in the support cover, are equipped with the bearing frame in the support cover, and the rocker shaft passes through the bearing frame and is connected with big bevel gear coaxial rotation.
Further, a hand wheel is arranged at one end of the rocker shaft extending out of the supporting cover.
Further, the top end of the guide rail is fixedly connected with the fixed plate through a locking nut.
Further, the lead screw passes through a combined bearing on the fixed plate and is connected with the bevel pinion.
Further, the bottom of the guide rail and the bottom of the screw rod are provided with bottom plates.
The bottom plate connects the two guide rails with the lower end of the screw rod through the spring washer and the nut.
Further, a through hole is arranged at the top end of the supporting cover.
Furthermore, the opposite sides of the two turning plates are respectively provided with a semicircular through hole, and a tetrafluoro ring is arranged around each semicircular through hole.
The tetrafluoro ring can play a role in buffering when receiving the polycrystalline silicon rod raw material, and can prevent the aluminum alloy from polluting the polycrystalline silicon rod raw material after directly contacting the polycrystalline silicon rod raw material.
Further, a bolt hole is formed in one side of the fixed plate in the vertical direction.
The bolt hole of this device and upper furnace chamber can be fixed together with the bolt hole, has guaranteed the stability of this device in the course of the work.
Further, the lower sides of the two turning plates are provided with baffle plates.
The baffle limits the two turning plates to rotate downwards, and plays a role in supporting the turning plates.
Compared with the prior art, the feeding device of the zone-melting single crystal furnace has the following advantages:
according to the feeding device of the zone-melting single crystal furnace, disclosed by the invention, the mechanical mechanism is used for replacing manual feeding work of the polycrystalline silicon rod raw material, so that the damage of the feeding work to the health of operators is reduced, the production safety is improved, and great convenience is provided for the feeding work of the zone-melting single crystal furnace;
the lead screw is driven to rotate through the bevel gear set, the lead screw drives the polycrystalline silicon rod on the bracket to move up and down, so that the working efficiency is greatly improved, the reliability of the structure in working is improved, and the transportation work of the polycrystalline silicon rod is realized through the bracket and the turning plate, the spring and the bolt on the bracket;
the invention has the characteristics of high efficiency, simple operation, practicality, convenience, and the like, can be used for zone-melting single crystal furnaces of different models, and has very broad application prospect.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
In the drawings:
FIG. 1 is a schematic diagram of a feeding device of a zone-melting single crystal furnace according to an embodiment of the invention;
FIG. 2 is a top view of a feeding device of a zone-melting single crystal furnace according to an embodiment of the invention;
FIG. 3 is a side view of a feeding device of a zone-melting single crystal furnace according to an embodiment of the invention;
fig. 4 is a front view of a feeding device of a zone-melting single crystal furnace according to an embodiment of the invention.
Reference numerals illustrate:
1-a support cover; 2-rocker shaft; 3-a hand wheel; 4-fixing the plate; 5-nut sliding blocks; 6-a bottom plate; 7-a top thread hole; 8-a bracket; 9-big bevel gears; 10-bevel pinion; 11-a combination bearing; 12-bolt holes; 13-a guide rail; 14-a lead screw; 15-a movable plate; 16-turning plate; 17-a flap spindle; 18-a spring fixing column; 19-a spring; a 20-tetrafluoro ring; 21-a bolt; 22-baffle.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1-4, a feeding device of a zone-melting single crystal furnace comprises a fixed plate 4; the fixed plate 4 is provided with a small bevel gear 10, the small bevel gear 10 is meshed with the large bevel gear 9, and the small bevel gear 10 is coaxially and rotatably connected with a vertically arranged screw rod 14; the screw rod 14 is in threaded connection with the nut sliding block 5, a guide rail 13 is arranged beside the screw rod 14, and the nut sliding block 5 is in sliding connection with the guide rail 13; the nut sliding block 5 is provided with a fixed bracket 8, the bracket 8 is provided with a movable plate 15 and two turning plates 16, the outer end of each turning plate 16 is connected to the movable plate 15 through a turning plate mandrel 17, the top ends of the movable plate 15 and the turning plates 16 are respectively provided with a spring fixing column 18, and a spring 19 is arranged between the movable plate 15 on the same side and the spring fixing column 18 on the turning plates 16; the openings of the two turning plates 16 are provided with bolts 21.
The two guide rails 13 are respectively arranged at two sides of the screw rod 14 in parallel, the nut sliding block 5 can move up and down along the guide rails 13 and the screw rod 14 at the same time, a copper sleeve is arranged between the guide rails 13 and the nut sliding block 5, the nut sliding block 5 is provided with a top thread hole 7, and the copper sleeve is fixed on the nut sliding block 5 by using a top thread arranged in the top thread hole 7.
In practical application, the device is placed at the door of an upper furnace door, one side of a bracket 8 is placed in the upper furnace chamber, a screw rod 14 is driven to rotate through rotation of a large bevel gear 9 and a small bevel gear 10, a nut sliding block 5 moves upwards to the highest position on the screw rod 14 along a guide rail 13, a turning plate 16 is closed, a bolt 21 is closed, the head of a polysilicon rod raw material is placed on the turning plate 16, the nut sliding block 5 drives the polysilicon rod raw material on the bracket 8 to move downwards at the moment, the polysilicon rod raw material moves downwards along with the bracket 8 into a middle furnace chamber at the lower side until the tail of the polysilicon rod raw material is vertically placed in the furnace, then the bolt 21 is opened after the lifting is completed, the turning plate 16 is automatically turned up under the action of a spring 19, and the turning plate 16 is conveniently separated from the polysilicon rod raw material, so that the device is taken down.
As shown in fig. 1-4, the fixed plate 4 is provided with a supporting cover 1, the big bevel gear 9 and the small bevel gear 10 are arranged in the supporting cover 1, a bearing seat is arranged in the supporting cover 1, and the rocker shaft 2 is coaxially and rotatably connected with the big bevel gear 9 through the bearing seat.
As shown in fig. 1-4, the end of the rocker shaft 2 extending out of the support housing 1 is provided with a hand wheel 3.
As shown in fig. 1-4, the top end of the guide rail 13 is fixedly connected with the fixed plate 4 through a lock nut.
As shown in fig. 1-4, the lead screw 14 is connected to the bevel pinion 10 through a combination bearing 11 on the fixed plate 4.
As shown in fig. 1-4, the bottom ends of the guide rail 13 and the screw rod 14 are respectively provided with a bottom plate 6.
The bottom plate 6 connects the two guide rails 13 with the lower end of the screw 14 through spring washers and nuts.
As shown in fig. 1-4, the top end of the supporting cover 1 is provided with a through hole.
When the polycrystalline silicon rod raw material cannot be placed into the semicircular through hole on the turning plate 16 at one time, the polycrystalline silicon rod raw material can be temporarily placed at the through hole at the top of the supporting cover 1 and then transferred to the turning plate 16.
As shown in fig. 1 to 4, the opposite sides of the two turning plates 16 are provided with semicircular through holes, and a tetrafluoro ring 20 is arranged around each semicircular through hole.
The tetrafluoro ring 20 can not only play a role of buffering when receiving the polycrystalline silicon rod raw material, but also can prevent the aluminum alloy from polluting the polycrystalline silicon rod raw material after directly contacting the polycrystalline silicon rod raw material.
As shown in fig. 1 to 4, the fixed plate 4 is provided with a bolt hole 12 on one side in the vertical direction.
The bolt holes 12 can be utilized to fix the device with the bolt holes of the upper furnace chamber, so that the stability of the device in the working process is ensured.
As shown in fig. 1-4, the underside of two flaps 16 is provided with a baffle 22.
The baffle 22 restricts the downward rotation of the two flaps 16, and serves to support the flaps 16.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (7)
1. A feeding device of a zone-melting single crystal furnace is characterized in that: comprises a fixed plate (4); a small bevel gear (10) is arranged on the fixed plate (4), the small bevel gear (10) is meshed with the large bevel gear (9), and the small bevel gear (10) is coaxially and rotatably connected with a vertically arranged screw rod (14); the screw rod (14) is connected with the nut sliding block (5) through threads, a guide rail (13) is arranged beside the screw rod (14), and the nut sliding block (5) is in sliding connection with the guide rail (13); the nut sliding block is characterized in that a support (8) is fixed on the nut sliding block (5), a movable plate (15) and two turning plates (16) are arranged on the support (8), the outer end of each turning plate (16) is connected to the movable plate (15) through a turning plate mandrel (17), spring fixing columns (18) are arranged at the tops of the movable plate (15) and the turning plates (16), and springs (19) are arranged between the movable plate (15) and the spring fixing columns (18) on the turning plates (16) on the same side; the openings of the two turning plates (16) are provided with bolts (21);
the fixed plate (4) is provided with a supporting cover (1), the big bevel gear (9) and the small bevel gear (10) are arranged in the supporting cover (1), a bearing seat is arranged in the supporting cover (1), and the rocker shaft (2) is coaxially and rotatably connected with the big bevel gear (9) through the bearing seat;
one end of the rocker shaft (2) extending out of the supporting cover (1) is provided with a hand wheel (3);
and semicircular through holes are formed in one side, opposite to the turning plates (16), of each turning plate, and tetrafluoro rings (20) are arranged around the semicircular through holes.
2. The feeding device of a zone-melting single crystal furnace according to claim 1, wherein: the top end of the guide rail (13) is fixedly connected with the fixed plate (4) through a locking nut.
3. The feeding device of a zone-melting single crystal furnace according to claim 1, wherein: the screw rod (14) passes through a combined bearing (11) on the fixed plate (4) to be connected with the bevel pinion (10).
4. The feeding device of a zone-melting single crystal furnace according to claim 1, wherein: the bottom ends of the guide rail (13) and the screw rod (14) are respectively provided with a bottom plate (6).
5. The feeding device of a zone-melting single crystal furnace according to claim 1, wherein: the top end of the supporting cover (1) is provided with a through hole.
6. The feeding device of a zone-melting single crystal furnace according to claim 1, wherein: and one side of the fixed plate (4) in the vertical direction is provided with a bolt hole (12).
7. The feeding device of a zone-melting single crystal furnace according to claim 1, wherein: the lower sides of the two turning plates (16) are provided with baffle plates (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910749147.3A CN110453275B (en) | 2019-08-14 | 2019-08-14 | Feeding device of zone-melting single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910749147.3A CN110453275B (en) | 2019-08-14 | 2019-08-14 | Feeding device of zone-melting single crystal furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110453275A CN110453275A (en) | 2019-11-15 |
| CN110453275B true CN110453275B (en) | 2024-01-05 |
Family
ID=68486426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910749147.3A Active CN110453275B (en) | 2019-08-14 | 2019-08-14 | Feeding device of zone-melting single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110453275B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102925961A (en) * | 2012-10-24 | 2013-02-13 | 北京京运通科技股份有限公司 | Raw material rod clamping device and raw material rod |
| CN205974740U (en) * | 2016-07-29 | 2017-02-22 | 天津市环欧半导体材料技术有限公司 | A device for zone -melting bar is feeded |
| JP2017039634A (en) * | 2015-08-18 | 2017-02-23 | 蒲池 豊 | Production method of silicon crystal |
| CN211284615U (en) * | 2019-08-14 | 2020-08-18 | 天津中环领先材料技术有限公司 | Feeding device of zone-melting single crystal furnace |
-
2019
- 2019-08-14 CN CN201910749147.3A patent/CN110453275B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102925961A (en) * | 2012-10-24 | 2013-02-13 | 北京京运通科技股份有限公司 | Raw material rod clamping device and raw material rod |
| JP2017039634A (en) * | 2015-08-18 | 2017-02-23 | 蒲池 豊 | Production method of silicon crystal |
| CN205974740U (en) * | 2016-07-29 | 2017-02-22 | 天津市环欧半导体材料技术有限公司 | A device for zone -melting bar is feeded |
| CN211284615U (en) * | 2019-08-14 | 2020-08-18 | 天津中环领先材料技术有限公司 | Feeding device of zone-melting single crystal furnace |
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| Publication number | Publication date |
|---|---|
| CN110453275A (en) | 2019-11-15 |
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Effective date of registration: 20240131 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region before: China |
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