CN211219406U - Full-automatic wafer scribing machine positioning device - Google Patents
Full-automatic wafer scribing machine positioning device Download PDFInfo
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- CN211219406U CN211219406U CN201922274217.2U CN201922274217U CN211219406U CN 211219406 U CN211219406 U CN 211219406U CN 201922274217 U CN201922274217 U CN 201922274217U CN 211219406 U CN211219406 U CN 211219406U
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Abstract
The utility model discloses a positioning device of a full-automatic wafer scribing machine, which comprises a backing plate, wherein the middle part of the upper part of the backing plate is provided with a convex plate, three groups of chutes are arranged on the convex plate, the inner part of each chute is provided with a slide block in a sliding way, two sides of each slide block are provided with limiting bulges, the inner sides of the chutes are provided with limiting grooves, sliding limiting arrangements are arranged between the limiting grooves and the limiting bulges, the upper part of each slide block is provided with an embedded groove, a positioning column is embedded in the embedded groove, the slide block is provided with a threaded hole, a threaded rod is connected in the threaded hole in a penetrating threaded way by screw threads, one end of the threaded rod penetrates through the side surface of the convex plate, a positioning plate is arranged above the convex plate, a circular clamping groove is arranged above the positioning plate, three positioning holes are arranged below the, the wafer of the dicing saw is convenient to position and fix, and the position of the positioning column is convenient to adjust.
Description
Technical Field
The utility model relates to a wafer scriber positioner technical field specifically is a full-automatic wafer scriber positioner.
Background
The wafer scribing machine on the market at present is divided into a blade wheel machine and a laser scribing machine from the aspect of scribing process. The front surface of the wafer is provided with crystal grains and crystal grain grooves, and the back surface of the wafer is provided with alignment etching grooves and non-alignment etching grooves. Scribing is to scribe the back side of the die, and meanwhile, laser scribing on the back side is guaranteed to scribe along the center direction of the die groove on the front side of the wafer. A wafer laser scribing machine in the current market adopts a positioning mode that a positioning back surface is provided with a contraposition etching slot, and a CCD image recognition positioning system is arranged on a carrying platform; the positioning back surface does not need to be provided with an alignment etching slot, the crystal grain slot is positioned from the front surface of the wafer, and the CCD image identification positioning system is arranged below the carrier, but the positioning of the existing positioning plate is inconvenient to adjust, so that the positioning device of the full-automatic wafer scribing machine is needed to solve the problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a full-automatic wafer scriber positioner to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a full-automatic wafer scriber positioner, includes the backing plate, the top middle part of backing plate is provided with the protrusion board, and the protrusion board that sets up is used for the effect of installation fixed position board. Open on the protrusion board and have three spout of group, the inside slip of spout is provided with the slider, the both sides of slider are provided with spacing arch, open the inboard of spout has the spacing groove, it is spacing to slide between spacing groove and the spacing arch, and the spacing groove and the spacing arch of setting can play spacing effect, and the slider of being convenient for can slide in the spout. Open the top of slider has the caulking groove, the caulking groove is embedded to have the reference column, and the reference column of setting can play the effect to the locating plate location, open threaded hole on the slider, threaded hole runs through threaded connection has the threaded rod, the one end of threaded rod runs through the side of protrusion board, through rotatory threaded rod, the threaded rod can drive the removal of slider, and the removal of slider is used for adjusting the position of reference column, and the convenience is fixed to the locating plate. The top of protrusion board is provided with the locating plate, the top of locating plate is provided with circular clamping groove, and the circular clamping groove that sets up is used for fixed location to the wafer, open the below of locating plate has three locating hole, mutual location joint between locating hole and the reference column, the locating hole location of setting realizes the fixed of locating plate on the reference column.
Preferably, the four corners below the base plate are in threaded connection with supporting legs, and rubber pads are arranged below the supporting legs.
Preferably, the inner end of the sliding groove is fixedly welded with a bearing seat, and the inner end of the threaded rod is fixedly connected with the inner ring of the bearing seat.
Preferably, the protruding plate is provided with an opening, and the threaded rod penetrates through the opening.
Preferably, the three sets of sliding chutes are spaced at an angle of 120 °.
Preferably, the outer end of the threaded rod is fixedly connected with a rotating handle, and anti-skid grains are arranged on the outer surface of the rotating handle.
Compared with the prior art, the beneficial effects of the utility model are as follows: this full-automatic wafer scribing machine positioner, reasonable in design, moreover, the steam generator is simple in structure, the protruding board of setting is used for installing the effect of fixed locating plate, the spacing groove of setting can play spacing effect with spacing arch, the slider of being convenient for can slide in the spout, through rotatory threaded rod, the threaded rod can drive the removal of slider, the removal of slider is used for adjusting the position of reference column, the convenience is fixed to the locating plate, the circular draw-in groove of setting is used for fixed location to the wafer, the locating hole location of setting is on the reference column, realize the fixed of locating plate, the utility model discloses a, it is fixed to being convenient for fix a position the wafer of scribing machine, be convenient for adjust the position of reference.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
fig. 3 is a schematic view of a partial structure of the present invention.
In the figure: 1. a base plate; 2. a protruding plate; 3. a chute; 4. a limiting groove; 5. a slider; 6. a limiting bulge; 7. caulking grooves; 8. a positioning column; 9. a threaded hole; 10. a bearing seat; 11. a threaded rod; 12. opening a hole; 13. rotating the handle; 14. positioning a plate; 15. a circular slot; 16. supporting legs; 17. a rubber pad; 18. and (7) positioning the holes.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, a positioning device for a full-automatic wafer dicing saw includes a backing plate 1, wherein a protruding plate 2 is disposed at the middle part of the top of the backing plate 1, and the protruding plate 2 is used for mounting and fixing a positioning plate 14.
It has three group's spouts 3 to open on the protruding board 2, the inside slip of spout 3 is provided with slider 5, the both sides of slider 5 are provided with spacing arch 6, open the inboard of spout 3 has spacing groove 4, it is spacing to slide between spacing groove 4 and the spacing arch 6, and spacing groove 4 and the spacing arch 6 that set up can play spacing effect, and the slider 5 of being convenient for can slide in spout 3.
The top of protruding board 2 is provided with locating plate 14, the top of locating plate 14 is provided with circular draw-in groove 15, and the circular draw-in groove 15 that sets up is used for fixed location to the wafer, open the below of locating plate 14 has three locating hole 18, mutual location joint between locating hole 18 and the reference column 8, the locating hole 18 of setting is fixed a position on reference column 8, realizes that locating plate 14 is fixed.
Specifically, the below four corners threaded connection of backing plate 1 has supporting legs 16, the below of supporting legs 16 is provided with rubber pad 17, and the supporting legs 16 of setting are used for supporting backing plate 1, the inner fixed welding of spout 3 has bearing frame 10, the inner of threaded rod 11 and the inner circle fixed connection of bearing frame 10, it has trompil 12 to open on the protruding board 2, threaded rod 11 runs through trompil 12, interval angle between three group's spouts 3 is 120, the outer end fixedly connected with rotation handle 13 of threaded rod 11, be provided with anti-skidding line on rotation handle 13's the surface.
It should be noted that, this full-automatic wafer scriber positioner, reasonable in design, moreover, the steam generator is simple in structure, the protruding board 2 that sets up is used for installing the effect of fixed position board 14, the spacing groove 4 and the spacing arch 6 that set up can play spacing effect, be convenient for slider 5 can slide in spout 3, through rotatory threaded rod 11, threaded rod 11 can drive slider 5's removal, slider 5's removal is used for adjusting the position of reference column 8, the convenience is fixed to locating plate 14, the circular clamping groove 15 that sets up is used for fixing the location of wafer, the locating hole 18 that sets up is fixed a position on reference column 8, realize the fixed of locating plate 14, the utility model discloses, be convenient for fix a position fixedly to the wafer of scriber, be convenient for adjust the position of reference column 8.
The basic principles, main features and advantages of the present invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a full-automatic wafer scriber positioner, includes backing plate (1), its characterized in that: the upper middle part of the backing plate (1) is provided with a convex plate (2), the convex plate (2) is provided with three groups of sliding grooves (3), the inside of each sliding groove (3) is provided with a sliding block (5) in a sliding manner, two sides of each sliding block (5) are provided with limiting bulges (6), the inner side of each sliding groove (3) is provided with a limiting groove (4), the limiting grooves (4) and the limiting bulges (6) are arranged in a sliding manner in a limiting manner, an embedded groove (7) is arranged above each sliding block (5), a positioning column (8) is embedded in each embedded groove (7), the sliding block (5) is provided with a threaded hole (9), a threaded rod (11) is connected in each threaded hole (9) in a penetrating manner through a thread, one end of each threaded rod (11) penetrates through the side surface of the convex plate (2), a positioning plate (14) is arranged above the convex plate (2), and a circular clamping groove, three positioning holes (18) are formed below the positioning plate (14), and the positioning holes (18) are mutually positioned and clamped with the positioning columns (8).
2. The positioning device of claim 1, wherein: supporting legs (16) are connected to four corners below the base plate (1) in a threaded mode, and rubber pads (17) are arranged below the supporting legs (16).
3. The positioning device of claim 1, wherein: the inner fixed welding of spout (3) has bearing frame (10), the inner of threaded rod (11) and the inner circle fixed connection of bearing frame (10).
4. The positioning device of claim 1, wherein: the protruding plate (2) is provided with an opening (12), and the threaded rod (11) penetrates through the opening (12).
5. The positioning device of claim 1, wherein: the interval angle between the three groups of sliding chutes (3) is 120 degrees.
6. The positioning device of claim 1, wherein: the outer end fixedly connected with of threaded rod (11) is rotatory handle (13), be provided with anti-skidding line on the surface of rotatory handle (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922274217.2U CN211219406U (en) | 2019-12-18 | 2019-12-18 | Full-automatic wafer scribing machine positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922274217.2U CN211219406U (en) | 2019-12-18 | 2019-12-18 | Full-automatic wafer scribing machine positioning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211219406U true CN211219406U (en) | 2020-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922274217.2U Active CN211219406U (en) | 2019-12-18 | 2019-12-18 | Full-automatic wafer scribing machine positioning device |
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| CN (1) | CN211219406U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059280A (en) * | 2021-03-25 | 2021-07-02 | 深圳市尚鼎芯科技有限公司 | Cutting device for chip wafer processing |
-
2019
- 2019-12-18 CN CN201922274217.2U patent/CN211219406U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113059280A (en) * | 2021-03-25 | 2021-07-02 | 深圳市尚鼎芯科技有限公司 | Cutting device for chip wafer processing |
| CN113059280B (en) * | 2021-03-25 | 2022-12-06 | 深圳市尚鼎芯科技有限公司 | Cutting device for chip wafer processing |
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