CN211209929U - Dustproof anti-blowing micro-electromechanical microphone chip - Google Patents
Dustproof anti-blowing micro-electromechanical microphone chip Download PDFInfo
- Publication number
- CN211209929U CN211209929U CN201921881455.3U CN201921881455U CN211209929U CN 211209929 U CN211209929 U CN 211209929U CN 201921881455 U CN201921881455 U CN 201921881455U CN 211209929 U CN211209929 U CN 211209929U
- Authority
- CN
- China
- Prior art keywords
- plate
- valve
- back plate
- shielding plate
- microphone chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007664 blowing Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 230000000903 blocking effect Effects 0.000 claims description 4
- 239000000428 dust Substances 0.000 abstract description 12
- 230000009471 action Effects 0.000 abstract description 2
- 239000002245 particle Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
- H04R1/04—Structural association of microphone with electric circuitry therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/26—Damping by means acting directly on free portion of diaphragm or cone
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The utility model discloses a dustproof anti micro-electromechanical microphone chip that blows, including the substrate with set gradually vibrating diaphragm and the back plate at the substrate upside, be provided with the snuffle valve on the vibrating diaphragm, on the back plate with the vibrating diaphragm on the corresponding position of snuffle valve be provided with disappointing hole, disappointing hole keep away from and be provided with the subassembly that shelters from that hinders snuffle valve and extend completely on one side of vibrating diaphragm. The utility model discloses a setting hinders the subassembly that shelters from that the snuffle valve extends completely, when the snuffle valve received the air current and assaulted, the snuffle valve was opened, but owing to shelter from the setting of subassembly, the snuffle valve can not be stretched out completely, and the micronic dust is blockked in the outside of back of the body board owing to receive the snuffle valve and shelter from the combined action of subassembly, effectively prevents that the micronic dust from entering into the inside of microphone. The utility model has the advantages of simple structure is small and exquisite, has good dustproof ability when guaranteeing anti blast capacity.
Description
Technical Field
The utility model relates to a microphone technical field, concretely relates to dustproof anti micro-electromechanical microphone chip that blows.
Background
Many micro-electro-mechanical microphones all have the structural design of an air release valve on the vibrating diaphragm, and holes are formed in the corresponding positions of the back plate, so that the air release valve can be completely opened without barriers when the air release valve is subjected to blowing pressure, an air release path is generated, and the pressure borne by the vibrating diaphragm is reduced. However, when the size of the opening of the air release valve after opening is larger than the size of the dust particles in the air, the dust particles can easily enter the microphone, and the dust particles can fall on the microphone and even between the diaphragm and the back polar plate, so that the performance and reliability of the product are affected.
Therefore, there is a need for an improvement to overcome the deficiencies of the prior art.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problem among the prior art, provide a compromise and lose heart and prevent that the micronic dust particle from entering into the inside dustproof anti micro-electromechanical microphone chip that blows of microphone.
The technical scheme of the utility model is that:
the utility model provides a dustproof anti micro-electromechanical microphone chip of blowing, includes the substrate and sets gradually vibrating diaphragm and the back plate at the substrate upside, is provided with the snuffle valve on the vibrating diaphragm, on the back plate with the vibrating diaphragm on the corresponding position of snuffle valve be provided with the hole of disappointing, the hole of disappointing be provided with the subassembly that shelters from that hinders snuffle valve to extend completely on keeping away from one side of vibrating diaphragm.
Preferably, the shutter assembly includes a top shutter for blocking the top of the release valve from fully extending.
As a preferred technical scheme, a gap is arranged between the top shielding plate and the back plate, and at least one side edge of the top shielding plate is connected to the back plate through an extension plate.
As a preferred technical scheme, one end of the top baffle plate, which is along the opening direction of the air release valve and deviates from the end part of the air release valve, is connected to the back pole plate through an extension plate.
As a preferred technical scheme, one end of the top baffle plate, which is close to the end part of the air release valve along the opening direction of the air release valve, is connected to the back pole plate through an extension plate.
As a preferred technical scheme, both ends of the top baffle plate along the opening direction of the air release valve are connected to the back plate through extension plates.
As a preferred technical scheme, both ends of the top baffle plate along the direction vertical to the opening direction of the air release valve are connected to the back plate through extension plates.
As a preferred technical scheme, the shielding assembly comprises a middle shielding plate used for preventing the middle part of the air release valve from being completely stretched, and the middle shielding plate is flatly attached to the back plate.
As a preferred technical scheme, one end of the middle shielding plate, which is far away from the end part of the air escape valve, is connected to the back plate, and a gap exists between the other end of the middle shielding plate and the back plate.
As a preferred technical scheme, the middle shielding plate is connected to the back plate along two ends perpendicular to the opening direction of the air escape valve, and intervals exist between two sides of the middle shielding plate and the back plate.
The utility model also provides an electronic equipment, including the aforesaid dustproof anti micro-electromechanical microphone chip that blows. Has the advantages that: the utility model discloses a setting hinders the subassembly that shelters from that the snuffle valve extends completely, when the snuffle valve received the air current and assaulted, the snuffle valve was opened, but owing to shelter from the setting of subassembly, the snuffle valve can not be stretched out completely, and the micronic dust is blockked in the outside of back of the body board owing to receive the snuffle valve and shelter from the combined action of subassembly, effectively prevents that the micronic dust from entering into the inside of microphone. The utility model has the advantages of simple structure is small and exquisite, has good dustproof ability when guaranteeing anti blast capacity.
Drawings
FIG. 1 is a schematic view of the structure of a bleed valve;
FIG. 2 is a schematic cross-sectional view of the first embodiment;
FIG. 3 is a schematic top view of the first embodiment;
FIG. 4 is a schematic sectional view of the second embodiment;
FIG. 5 is a schematic top view of the second embodiment;
FIG. 6 is a schematic sectional view of a third embodiment;
FIG. 7 is a schematic top view of the third embodiment;
FIG. 8 is a schematic sectional view of a fourth embodiment;
FIG. 9 is a schematic top view of the fourth embodiment;
FIG. 10 is a schematic sectional view of the fifth embodiment;
FIG. 11 is a schematic top view of the fifth embodiment;
FIG. 12 is a schematic sectional view of a sixth embodiment;
FIG. 13 is a schematic top view of the sixth embodiment;
wherein: 1. the device comprises a back plate, 2, a vibrating diaphragm, 3, an air escape valve, 4, dust particles, 5, airflow, 6, an extension plate, 7, a top baffle plate, 8, a middle baffle plate, 1-1 and an air escape hole.
Detailed Description
In order to make the utility model realize that the technical means, technical characteristics, utility model purpose and technological effect are easily understood and known, combine specific figure below, further explain the utility model.
The microphone usually includes the substrate, vibrating diaphragm 2 and backplate 1 set gradually the upside at the substrate, in order to let vibrating diaphragm 2 have good anti impact ability of blowing, as shown in fig. 1, can set up a plurality of sets of snuffles 3 on vibrating diaphragm 2 usually, snuffles 3's structure is like tongue structure, and in order to avoid influencing opening of snuffles 3, the position that corresponds snuffles 3 on backplate 1 can be provided with out-of-air hole 1-1, in order to avoid snuffles 3 when receiving the impact of air current and open, the micronic dust can enter into the microphone in, this application provides following several kinds of snuffles hole 1-1 keep away from being provided with the subassembly that shelters from that hinders snuffles 3 and extend completely on one side of vibrating diaphragm 2.
Example one
As shown in fig. 2 and 3, the shielding assembly of this embodiment includes a top shielding plate 7 for preventing the top of the release valve 3 from being fully extended, a space is provided between the top shielding plate 7 and the back plate 1, the height of the interval is lower than the maximum height of the air escape valve 3 in the opening state, the top baffle 7 is connected to the back plate 1 through the extension plate 6 along the opening direction of the air escape valve 3 and the end deviating from the end part of the air escape valve 3, certain intervals are arranged between other edges of the top baffle 7 and the edge of the air escape hole 1-1, and the intervals are used as air escape channels, the interval is related to the height of the top shielding plate 7 and the size of the top shielding plate 7, so that the interval is smaller than the particle size of the dust-proof level when the height of the top shielding plate 7 and the size of the top shielding plate 7 are set. When the air release valve 3 is opened by the impact of the air flow 5, the end part of the air release valve 3 can be blocked and folded, the air flow 5 passes through the gap between the top baffle plate 7 and the air release hole 1-1, and the micro dust is blocked at the outer side of the back plate 1, so that the dustproof and air blowing resistant effects are achieved.
Example two
As shown in fig. 4 and 5, the main difference of the second embodiment compared with the first embodiment is that: top shielding plate 7 open the direction and pass through extension plate 6 connection on back plate 1 along the one end of 3 tip of snuffle valve 3, the structural principle of this embodiment is the same with the structural principle of embodiment one, top shielding plate 7 sets up at the start of opening of snuffle valve 3, dustproof effect is better.
EXAMPLE III
As shown in fig. 6 and 7, the main difference of the third embodiment compared with the first embodiment is that: the both ends of top shielding plate 7 along the run-flat valve opening direction all connect on the back plate through the extension plate, the setting mode of above-mentioned embodiment one and the setting mode of embodiment two are synthesized to this embodiment, and the passageway that loses air is located the both sides of top shielding plate 7.
Example four
As shown in fig. 8 and 9, the main difference of the fourth embodiment compared with the first embodiment is that: the two ends of the top baffle plate 7 in the opening direction perpendicular to the air release valve 3 are connected to the back plate 1 through the extension plates 6, compared with the three phases of the embodiment, the top baffle plate plane of the third embodiment is equivalently rotated by 90 degrees, and the air release channel of the embodiment is mainly the opening end of the top baffle plate 7 close to the air release valve 3.
EXAMPLE five
As shown in fig. 10 and 11, the main difference of the fifth embodiment compared with the first embodiment is that: the subassembly of sheltering from including being used for hindering 3 middle parts of snuffle valve to extend the middle part shielding plate 8 that opens completely, middle part shielding plate 8 flat paste on back of the body polar plate 1, flat paste the position relation between referring to middle part shielding plate 8 and back of the body polar plate 1, the interval between middle part shielding plate 8 and the back of the body polar plate 1 is zero promptly, middle part shielding plate 8 deviate from the one end connection of 3 tip of snuffle valve on back of the body polar plate 1, and there is the interval between the opposite side of middle part shielding plate 8 and the back of the body polar plate 1. Compare in aforementioned embodiment, there is not the interval between middle part shielding plate 8 and the back plate 1, middle part shielding plate 8 lug connection is on back plate 1, when snuffle valve 3 is strikeed and is opened by the air current, because middle part shielding plate 8 highly lower, the middle part of snuffle valve 3 receives shelters from folding, the tip of snuffle valve 3 can stretch into in the interval between middle part shielding plate 8 and the disappointing hole 1-1, and snuffle valve 3 can occupy certain space, can block inside the micronic dust enters into the microphone.
EXAMPLE six
As shown in fig. 12 and 13, the main difference of the sixth embodiment compared with the fifth embodiment is that: the middle shielding plate is connected to the back plate along two ends perpendicular to the opening direction of the air escape valve, and intervals exist between two sides of the middle shielding plate and the back plate. As the evolution of the installation mode of the middle shielding plate in the fifth embodiment, referring to the first embodiment to the fourth embodiment, the middle shielding plate cannot be arranged at the opening end of the air suction valve due to being flatly attached to the back plate, and the air leakage efficiency can be seriously affected, so that the middle shielding plate is arranged in the direction perpendicular to the opening direction of the air leakage valve, the air leakage efficiency is not affected, and a good dustproof effect can be achieved.
EXAMPLE seven
The present embodiment provides an electronic device, including the dustproof anti-blowing micro-electromechanical microphone chip as claimed in the above claims, where the electronic device may be a mobile phone, a tablet computer, a portable handheld computer, and the like.
In summary, the preferred embodiments of the present invention are only described, and the scope of the present invention is not limited thereto. All equivalent changes and modifications made according to the content of the claims of the present invention shall fall within the technical scope of the present invention.
Claims (10)
1. The utility model provides a dustproof anti micro-electromechanical microphone chip that blows, includes the substrate and fixed vibrating diaphragm and the back plate that sets up on the substrate, is provided with the snuffle valve on the vibrating diaphragm, is provided with out the hole, its characterized in that with the corresponding position of snuffle valve on the vibrating diaphragm on the back plate: one side of the air leakage hole far away from the vibrating diaphragm is provided with a shielding assembly for blocking the air leakage valve from completely extending.
2. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 1, characterized in that: the shutter assembly includes a top shutter for blocking the free end of the bleed valve from fully extending.
3. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 2, characterized in that: an interval is arranged between the top shielding plate and the back plate, and at least one side edge of the top shielding plate is connected to the back plate through an extension plate.
4. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 3, characterized in that: the one end that the edge snuffle valve opening direction of top shielding plate just deviates from the snuffle valve tip passes through the extension plate to be connected on the back plate.
5. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 3, characterized in that: the top shielding plate is connected to the back plate through the extension plate along the opening direction of the air release valve and close to one end of the end part of the air release valve.
6. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 3, characterized in that: the two ends of the top shielding plate in the opening direction of the air escape valve are connected to the back plate through extension plates.
7. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 3, characterized in that: the top shielding plate is connected to the back plate through the extension plate along two ends perpendicular to the opening direction of the air escape valve.
8. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 1, characterized in that: the shielding assembly comprises a middle shielding plate for blocking the middle part of the air escape valve from being completely extended, and the middle shielding plate is flatly attached to the back plate.
9. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 8, characterized in that: one end of the middle shielding plate, which deviates from the end part of the air escape valve, is connected to the back plate, and a gap exists between the other end of the middle shielding plate and the back plate.
10. The dustproof anti-blowing micro-electromechanical microphone chip according to claim 8, characterized in that: the middle shielding plate is connected to the back plate along two ends perpendicular to the opening direction of the air escape valve, and intervals exist between two sides of the middle shielding plate and the back plate.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921881455.3U CN211209929U (en) | 2019-11-04 | 2019-11-04 | Dustproof anti-blowing micro-electromechanical microphone chip |
| PCT/CN2019/130229 WO2021088241A1 (en) | 2019-11-04 | 2019-12-31 | Dustproof and anti-air-blowing micro-electro-mechanical microphone chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921881455.3U CN211209929U (en) | 2019-11-04 | 2019-11-04 | Dustproof anti-blowing micro-electromechanical microphone chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211209929U true CN211209929U (en) | 2020-08-07 |
Family
ID=71881517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921881455.3U Active CN211209929U (en) | 2019-11-04 | 2019-11-04 | Dustproof anti-blowing micro-electromechanical microphone chip |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN211209929U (en) |
| WO (1) | WO2021088241A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112333617A (en) * | 2020-11-19 | 2021-02-05 | 青岛歌尔智能传感器有限公司 | MEMS chip and MEMS microphone |
| CN113316052A (en) * | 2021-07-30 | 2021-08-27 | 山东新港电子科技有限公司 | MEMS microphone chip with dustproof structure and manufacturing method thereof |
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008099212A (en) * | 2006-10-16 | 2008-04-24 | Yamaha Corp | Capacitor microphone and its manufacturing method |
| CN101516053A (en) * | 2008-02-20 | 2009-08-26 | 歌尔声学股份有限公司 | Capacitor type microphone chip |
| JP2010114776A (en) * | 2008-11-07 | 2010-05-20 | Toshiba Corp | Acoustic transducer |
| CN105263851B (en) * | 2013-05-31 | 2017-10-13 | 罗伯特·博世有限公司 | The film being limited |
| JP6149628B2 (en) * | 2013-09-13 | 2017-06-21 | オムロン株式会社 | Acoustic transducer and microphone |
| US8921957B1 (en) * | 2013-10-11 | 2014-12-30 | Robert Bosch Gmbh | Method of improving MEMS microphone mechanical stability |
| CN205283815U (en) * | 2015-11-30 | 2016-06-01 | 歌尔声学股份有限公司 | MEMS microphone chip and MEMS microphone |
| KR101700571B1 (en) * | 2016-06-24 | 2017-02-01 | (주)이미지스테크놀로지 | MEMS microphone |
| CN107770707A (en) * | 2016-08-22 | 2018-03-06 | 上海微联传感科技有限公司 | A kind of MEMS microphone |
| CN207061862U (en) * | 2017-03-09 | 2018-03-02 | 歌尔科技有限公司 | A kind of MEMS chip |
| CN207070353U (en) * | 2017-06-26 | 2018-03-02 | 歌尔科技有限公司 | A kind of MEMS microphone |
-
2019
- 2019-11-04 CN CN201921881455.3U patent/CN211209929U/en active Active
- 2019-12-31 WO PCT/CN2019/130229 patent/WO2021088241A1/en active Application Filing
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112333617A (en) * | 2020-11-19 | 2021-02-05 | 青岛歌尔智能传感器有限公司 | MEMS chip and MEMS microphone |
| CN113316052A (en) * | 2021-07-30 | 2021-08-27 | 山东新港电子科技有限公司 | MEMS microphone chip with dustproof structure and manufacturing method thereof |
| CN113316052B (en) * | 2021-07-30 | 2021-11-05 | 山东新港电子科技有限公司 | MEMS microphone chip with dustproof structure and manufacturing method thereof |
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
| CN114125664B (en) * | 2021-11-15 | 2024-03-19 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021088241A1 (en) | 2021-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211209929U (en) | Dustproof anti-blowing micro-electromechanical microphone chip | |
| CN108391188A (en) | A kind of loudspeaker assembly and electronic equipment | |
| CN104469640B (en) | Sound converter and microphone | |
| US20180206011A1 (en) | Loudspeaker module and terminal device | |
| US11197089B2 (en) | Sound generating device | |
| CN205754738U (en) | A kind of Radix Saposhnikoviae noise cancelling headphone mike | |
| WO2018157516A1 (en) | Microphone wind noise preventing apparatus and electronic device | |
| CN207124764U (en) | A kind of MEMS microphone | |
| CN201153325Y (en) | Silicon capacitor microphone | |
| JP4199037B2 (en) | Acoustic drainage structure | |
| US20230199406A1 (en) | MEMS Microphone | |
| CN212086457U (en) | Earphone wind-proof noise reduction structure and earphone | |
| CN207765677U (en) | Socket formula usb hub protective device | |
| CN110166903A (en) | Terminal device | |
| CN203193893U (en) | MEMS (micro-electromechanical systems) microphone | |
| US10958999B2 (en) | Loudspeaker | |
| CN208905143U (en) | A kind of speaker net dust cover facilitating folding | |
| CN203193890U (en) | MEMS (micro-electromechanical systems) microphone | |
| CN202957979U (en) | Micro-electromechanical system (MEMS) microphone | |
| US11146889B2 (en) | Diaphragm | |
| CN208821086U (en) | A kind of MEMS microphone package structure | |
| CN209571736U (en) | A kind of dust-proof and pest-proof distribution box | |
| CN209593684U (en) | Terminal device | |
| CN208862927U (en) | Mobile terminal | |
| CN208386852U (en) | A kind of microphone wind-noise reduction structure and headset |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |