CN211208412U

CN211208412U - Prevent graphite boat shallow of striking

Info

Publication number: CN211208412U
Application number: CN201922483640.3U
Authority: CN
Inventors: 张琳; 缪爱群
Original assignee: Zhejiang Fortune Energy Co ltd
Current assignee: Zhejiang Fortune Energy Co ltd
Priority date: 2019-12-30
Filing date: 2019-12-30
Publication date: 2020-08-07
Anticipated expiration: 2029-12-30

Abstract

The utility model discloses a prevent graphite boat shallow of striking, including the car face of evenly distributed gas pocket, install the soft cushion of frame shape on the car face, be equipped with a plurality of soft support crossbands among the soft cushion of frame shape, the soft cushion of both ends fixed connection frame shape of soft support crossband, the gas pocket on the car face is avoided to soft support crossband. The utility model aims at providing a prevent graphite boat shallow contact project organization of striking reduces the impact of graphite boat small handcart and graphite boat contact effectively, prevents or reduces graphite boat leaf damage problem, reduction in production cost.

Description

Prevent graphite boat shallow of striking

Technical Field

The utility model belongs to the technical field of crystalline silicon solar cell production facility, concretely relates to prevent graphite boat shallow of striking.

Background

In the preparation process of the crystalline silicon solar cell, currently, the most common method is to deposit a passivation film or an antireflection film on the surface of a silicon wafer by tubular PECVD. The carrier for transporting the silicon wafers by the tubular PECVD is a graphite boat, and the transportation of the graphite boat is completed by a small cart. The existing cart for loading and transporting the graphite boat is provided with air holes on the surface of the cart, and then is connected with an air source to cool the graphite boat through the air holes. When the graphite boat is placed on the cart, collision occurs between the graphite boat and the cart. After PECVD coating is finished, the temperature of the graphite boat is very high, a large number of high-temperature silicon wafers are also loaded on the graphite boat, and the impact force generated at the moment of contact between the graphite boat and the cart easily causes serious damage to the boat blades of the graphite boat. Therefore, the graphite boat needs to be carefully transferred to the cart in the production process, even if a certain amount of graphite boat is damaged in the carrying process, the service life of the graphite boat is influenced, the cost is increased, and meanwhile, the production efficiency is influenced.

Disclosure of Invention

In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides a graphite boat shallow of anticollision, includes the car face that evenly distributed has the gas pocket, install the soft cushion of frame shape on the car face, be equipped with a plurality of soft support crossbands in the soft cushion of frame shape, the soft cushion of frame shape of both ends fixed connection of soft support crossband, soft support crossband avoid the gas pocket on the car face.

Preferably, the height of the upper end surface of the flexible supporting horizontal bar is lower than the height of the upper end surface of the frame-shaped flexible rubber mat.

Preferably, the frame-shaped soft rubber mat is located on a circle of air holes on the outermost side of the vehicle surface, a plurality of insertion rods are fixedly connected to the lower end face of the frame-shaped soft rubber mat, the insertion rods are respectively inserted into corresponding air holes of the circle of air holes on the outermost side of the vehicle surface, and the insertion rods are in interference fit with the air holes.

Preferably, the flexible support cross bar divides the interior of the frame-shaped flexible rubber mat into a plurality of square frame units, and a plurality of through holes respectively communicated with the square frame units are arranged on the side surface of the frame-shaped flexible rubber mat.

Preferably, in the above technical solution, the frame-shaped flexible rubber mat is formed by sequentially connecting four flexible rubber strips end to end, and each flexible rubber strip is formed by a trapezoidal table portion having a narrow upper portion and a wide lower portion and a rectangular parallelepiped portion located on an upper end surface of the trapezoidal table portion.

Preferably, the cross section of the flexible supporting horizontal bar is a trapezoid with a narrow top and a wide bottom.

Preferably, in the above-described aspect, an upper end surface of the flexible support cross bar is flush with an upper end surface of the trapezoidal table portion.

Preferably, in the above aspect, the insertion rod, the trapezoidal base, the rectangular base, and the flexible support bar are integrally molded.

The utility model has the advantages that: the utility model aims at providing a prevent graphite boat shallow contact project organization of striking reduces the impact of graphite boat small handcart and graphite boat contact effectively, prevents or reduces graphite boat leaf damage problem, reduction in production cost.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is a schematic cross-sectional view of the present invention.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-2, the impact-proof graphite boat cart comprises a cart surface 2 with air holes 1 uniformly distributed thereon, wherein a frame-shaped soft rubber mat 3 is mounted on the cart surface 2, a plurality of soft supporting transverse bars 4 are arranged in the frame-shaped soft rubber mat 3, two ends of each soft supporting transverse bar 4 are fixedly connected with the frame-shaped soft rubber mat 3, and the soft supporting transverse bars 4 avoid the air holes 1 on the cart surface 2. When the graphite boat is transferred to the cart, the periphery of the graphite boat is in contact with the frame-shaped soft rubber mat 3, and the bottom of the graphite boat is in contact with the soft supporting cross bar 4, so that the graphite boat is prevented from being directly in contact with the cart surface of the cart. Meanwhile, the graphite boat is cooled without influencing the air blowing of the air holes 1.

Furthermore, the height of the upper end surface of the flexible supporting horizontal bar 4 is lower than that of the upper end surface of the frame-shaped flexible rubber mat 3. When the graphite boat is pushed onto a cart, the frame-shaped soft rubber pad 3 forms an enclosing effect on the graphite boat, so that the stability of the graphite boat in the conveying process can be improved.

Furthermore, the frame-shaped soft rubber mat 3 is positioned on a circle of air holes 5 on the outermost side of the vehicle surface 1, the lower end face of the frame-shaped soft rubber mat 3 is fixedly connected with a plurality of inserting rods 6, the inserting rods 6 are respectively inserted into the corresponding air holes 5 of the circle of air holes 5 on the outermost side of the vehicle surface 2, and the inserting rods 6 are in interference fit with the air holes 5. Utilize the soft cushion 3 of fixed frame shape of inserted bar 6, need not to carry out processing such as drilling on car face 2, can set up the size of the soft cushion 3 of frame shape like this according to current shallow, directly change the graphite boat shallow of the cost of shaping utility model's that prevents the striking with current shallow, saving equipment renewal cost. And the frame-shaped soft rubber mat 3 can be quickly replaced after aging or damage.

Furthermore, the soft supporting cross bars 4 divide the interior of the frame-shaped soft rubber mat 3 into a plurality of square frame units 7, and the side surface of the frame-shaped soft rubber mat 3 is provided with a plurality of through holes 8 which are respectively communicated with the square frame units 7. When the graphite boat is placed on the vehicle surface 2, a gap is formed between the bottom of the graphite boat and the vehicle surface, the square frame unit 7 forms a cavity, so that the air hole 1 can be prevented from being blocked, the through hole 8 is favorable for gas circulation, and the heat can be quickly taken away.

Further, the frame-shaped soft rubber mat 3 is formed by sequentially connecting four soft rubber strips end to end, and each soft rubber strip is formed by a trapezoidal table part 9 with a narrow upper part and a wide lower part and a rectangular body part 10 positioned on the upper end face of the trapezoidal table part 9. The inner side of the trapezoid table part 9 inclined is faced to the periphery of the graphite boat to form a supporting and limiting function, and the rectangular body part 10 plays a role in protecting the side face of the graphite boat. The through hole 8 is close to the lower end of the trapezoidal base 9, and preferably, the lower end of the through hole 8 communicates with the lower end surface of the trapezoidal base 9, and a through groove is formed in the lower end surface of the trapezoidal base 9, so that the through hole 8 is not blocked by the graphite boat.

Furthermore, the cross section of the flexible supporting horizontal bar 4 is a trapezoid with a narrow upper part and a wide lower part.

Furthermore, the upper end surface of the flexible supporting transverse bar 4 is flush with the upper end surface of the trapezoidal table part 9.

Further, the insert rod 6, the trapezoidal table portion 9, the rectangular parallelepiped portion 10, and the flexible support cross bar 4 are integrally formed. The material is the existing high-temperature resistant soft material on the market, such as elastic plastic with certain hardness. The material can also be a composite material, for example, a layer of high-temperature resistant leather material with certain thickness is covered on the surface of a wood material.

It is worth mentioning that, the utility model discloses a evenly distributed that the patent application relates to has car face 2, high temperature resistant soft material, elastic plastic, the high temperature resistant leather material of gas pocket 1, wait technical characteristics should be regarded as prior art, and the shallow is inside to set up the fan, and the fan rotates to produce the air current and flows out from gas pocket 1, and the concrete structure of these technical characteristics, theory of operation and the control mode that may involve, spatial arrangement mode adopt the conventional selection in this field can, should not be regarded as the utility model discloses an invention point place, the utility model discloses a do not do further specifically expand the detailing.

Having described in detail preferred embodiments of the present invention, it is to be understood that modifications and variations can be made by persons skilled in the art without inventive faculty, and therefore all technical solutions which can be obtained by a person skilled in the art based on the concepts of the present invention through logic analysis, reasoning or limited experimentation will fall within the scope of protection defined by the claims.

Claims

1. The utility model provides a graphite boat shallow of anticollision, includes the car face that evenly distributed has the gas pocket, its characterized in that, install the soft cushion of frame shape on the car face, be equipped with a plurality of soft support crossbands in the soft cushion of frame shape, the soft cushion of frame shape of both ends fixed connection of soft support crossband, soft support crossband keep away from the gas pocket on the car face.

2. The impact-resistant graphite boat cart of claim 1, wherein the upper end surface of the flexible support cross bar is lower than the upper end surface of the frame-shaped flexible rubber mat.

3. The impact-resistant graphite boat cart of claim 2, wherein the frame-shaped soft rubber pad is located on the outermost circle of air holes of the cart surface, a plurality of insertion rods are fixedly connected to the lower end surface of the frame-shaped soft rubber pad, the insertion rods are respectively inserted into the corresponding air holes of the outermost circle of air holes of the cart surface, and the insertion rods are in interference fit with the air holes.

4. The crash-proof graphite boat cart of claim 3, wherein the flexible support bars divide the interior of the frame-shaped flexible rubber mat into a plurality of square units, and the side of the frame-shaped flexible rubber mat is provided with a plurality of through holes respectively communicating with the square units.

5. The crash-proof graphite boat cart of claim 4, wherein said frame-shaped soft rubber mat is formed by four soft rubber strips connected end to end in sequence, said soft rubber strips are formed by a trapezoidal platform portion having a narrow top and a wide bottom and a rectangular parallelepiped portion located on the top end surface of said trapezoidal platform portion.

6. The crash-proof graphite boat cart of claim 5, wherein the cross-section of said flexible support cross-bars is trapezoidal with a narrow top and a wide bottom.

7. The impact-resistant graphite boat cart of claim 6, wherein the upper end surface of said flexible support cross bar is flush with the upper end surface of said trapezoidal platform.

8. The crash-proof graphite boat cart of claim 7, wherein said plunger, trapezoidal table portion, rectangular parallelepiped portion and flexible support cross-bars are integrally formed.