CN211199380U - Cooling roller mechanism applied to vacuum coating equipment - Google Patents
Cooling roller mechanism applied to vacuum coating equipment Download PDFInfo
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- CN211199380U CN211199380U CN201922306164.8U CN201922306164U CN211199380U CN 211199380 U CN211199380 U CN 211199380U CN 201922306164 U CN201922306164 U CN 201922306164U CN 211199380 U CN211199380 U CN 211199380U
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- chill roll
- cooling roller
- vacuum coating
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Abstract
The utility model belongs to the technical field of vacuum coating, especially, relate to be applied to the chill roll mechanism in the vacuum coating equipment. Including the chill roll, drive chill roll pivoted actuating mechanism and cooling structure, utilize the inner bag to become cooling channel and exhalant canal with the inside partition of chill roll, when the coolant liquid that flows in from the coolant liquid pipeline flows along cooling channel, with the contact of chill roll inner wall, thereby take away the temperature of chill roll, and finally flow from the exhalant canal in the inner bag, form the cooling circulation water route inside the chill roll, and business turn over water is two passageways mutual noninterferences respectively, guarantee that cooling water circulation is not influenced when the chill roll rotates.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of vacuum coating, especially, relate to be applied to the chill roll mechanism in the vacuum coating equipment.
[ background of the invention ]
During vacuum coating, the ion source releases energy, so that the temperature of the substrate is increased. The roller of the existing liquid in the process of conveying the base material is cooled by the cooling system, so that the temperature of the base material is reduced, and the effect of cooling is achieved.
The cooling route on the existing vacuum coating equipment is generally an independent system structure, and is mostly connected with a water pipe according to different product requirements, the cooling structure is suitable for the situation that the space is not limited, the structure is not very complex, and the cooling structure is hard to be apprehended against the complex environment with compact space and extremely high installation requirement.
[ summary of the invention ]
For solving among the prior art cooling system on the vacuum coating equipment mostly be independent system, can't correspond the problem of space compact installation, the utility model provides a be applied to the chill roll mechanism among the vacuum coating equipment.
The utility model discloses a realize through following technical scheme:
be applied to chill roll mechanism among vacuum coating equipment, including locate on the vacuum coating equipment and with substrate surface contact's chill roll, drive chill roll pivoted actuating mechanism and cooling structure, cooling structure is including locating inner bag in the chill roll, link in chill roll one side and with the coolant liquid pipeline of the inside UNICOM of chill roll, be equipped with water inlet and delivery port on the coolant liquid pipeline, just the inner bag extends to along the coolant liquid pipeline in the chill roll to relative with the delivery port, just inside be water channel of inner bag clearance between inner bag periphery and the chill roll inner wall forms the cooling channel with coolant liquid pipeline UNICOM, just be equipped with the UNICOM on the inner bag cooling channel and water channel's passway mouth.
The cooling roller mechanism applied to the vacuum coating equipment is characterized in that a temperature sensor is further arranged on the cooling roller.
The cooling roller mechanism applied to the vacuum coating equipment is characterized in that the inner container is a revolving body and is concentrically arranged with the cooling roller and can rotate along with the cooling roller.
The cooling roller mechanism applied to the vacuum coating equipment comprises an inner container and a water outlet pipe, wherein the inner container is provided with a water outlet channel, and the water outlet channel is communicated with the inner container.
The cooling roller mechanism applied to the vacuum coating equipment is characterized in that the channel opening is formed in one end, far away from the cooling liquid pipeline, of the inner container.
The cooling roller mechanism applied to the vacuum coating equipment as described above, the cooling liquid pipeline further comprises a rotary joint arranged at the end part of the cooling liquid pipeline.
The cooling roller mechanism applied to the vacuum coating equipment is characterized in that one end of the cooling liquid pipeline, which is connected with the cooling roller, is provided with a flange connection structure, and the water outlet pipe is fixedly connected in the inner container through a flange plate.
The cooling roller mechanism applied to the vacuum coating equipment is characterized in that the water outlet pipe is also provided with a sealing element.
The utility model also provides a vacuum coating equipment, include as above be applied to the chill roll mechanism in the vacuum coating equipment.
Compared with the prior art, the utility model discloses there is following advantage:
1. the utility model provides a be applied to chill roll mechanism among vacuum coating equipment, through the chill roll, the inner bag, with the structure of coolant liquid pipeline, utilize the inner bag to become cooling channel and exhalant canal with the inside partition of chill roll, when coolant liquid that flows in from the coolant liquid pipeline flows along cooling channel, with the contact of chill roll inner wall, thereby take away the temperature of chill roll, and finally flow from the exhalant canal in the inner bag, at the inside cooling cycle water route that forms of chill roll, and business turn over water is two routes mutual noninterferences respectively, guarantee that the cooling water circulation is not influenced when the chill roll rotates. The scheme is suitable for the winding type vacuum coating equipment, the space is narrow, the structure is compact, even cooling is ensured when coating is carried out, and the installation is easy, so that the working requirement is met.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural view of a cooling roller mechanism applied to a vacuum coating apparatus of the present invention;
FIG. 2 is a cross-sectional view A-A of FIG. 1 taken in entirety;
fig. 3 is a sectional view a-a of fig. 1.
[ detailed description ] embodiments
In order to make the technical problem, technical solution and advantageous effects solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to further explain the present invention in detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The utility model discloses a realize through following technical scheme:
as shown in fig. 1 to 3, the cooling roller mechanism applied to the vacuum coating apparatus includes a cooling roller 1 disposed on the vacuum coating apparatus and contacting with the surface of the substrate, a driving mechanism 2 for driving the cooling roller 1 to rotate, and a cooling structure, where the cooling structure includes an inner container 3 disposed in the cooling roller 1, and a cooling liquid pipeline 31 linked to one side of the cooling roller 1 and communicated with the inside of the cooling roller 1, the cooling liquid pipeline 31 is provided with a water inlet 32 and a water outlet 33, the inner container 3 extends from the inside of the cooling roller 1 along the cooling liquid pipeline 31 to be opposite to the water outlet 33, the inside of the inner container 3 is a water outlet channel 301, a gap between the periphery of the inner container 3 and the inner wall of the cooling roller 1 forms a cooling channel 311 communicated with the cooling liquid pipeline 31, and the inner container 3 is provided with a channel opening 302 communicated with the cooling channel 311 and the water outlet channel 301. The utility model provides a be applied to chill roll mechanism among vacuum coating equipment, through chill roll, inner bag, with the structure of coolant liquid pipeline, utilize the inner bag to become cooling channel and exhalant canal with the inside partition of chill roll, when the coolant liquid that flows in from the coolant liquid pipeline flows along cooling channel, with the contact of chill roll inner wall to take away the temperature of chill roll, realize when the chill roll transmits the substrate, cool down the substrate. And finally, the water flows out of the water outlet channel in the inner container, a cooling circulation water channel is formed in the cooling roller, the water inlet and the water outlet are respectively two channels which are not interfered with each other, and the cooling water circulation is not influenced when the cooling roller rotates. The scheme is suitable for the winding type vacuum coating equipment, the space is narrow, the structure is compact, even cooling is ensured when coating is carried out, and the installation is easy, so that the working requirement is met.
Further, a temperature sensor is also arranged on the cooling roller 1. The temperature sensor can detect the surface temperature of the cooling roller, namely the temperature of the base material, and the cooling system can be controlled to be started at any time or automatically. In addition, the temperature of the roll surface can be accurately controlled by matching with a control system and a temperature sensor.
Specifically, the inner container 3 is a revolving body, and is concentrically arranged with the cooling roll 1 and can rotate along with the cooling roll 1. The cooling roller is simple in structure, easy to manufacture and install, compact in overall structure and good in cooling effect.
In the scheme, the driving mechanism 2 is a servo motor and drives the cooling roller and the inner container inside to rotate through a belt wheel and a transmission belt.
And, still be equipped with magnetic fluid sealing device 4 outside the coolant liquid pipeline, use under the vacuum environment of convenient installation inside the vacuum coating machine. And the mechanism can be arranged on vacuum coating equipment through a cooling roller 5.
Still further, the inner container 3 further comprises a water outlet pipe 3011 communicated with the internal water outlet channel 301. The liquid in the cooling liquid pipeline is led out to the water outlet 33 through the water outlet pipeline 3011, so that the space in the cooling liquid pipeline is fully utilized, an independent water outlet channel is not needed to be additionally arranged for draining, the whole structure is more compact, and the cooling liquid pipeline is convenient to apply to equipment with effective space.
Furthermore, the passage opening 302 is provided at an end of the inner vessel 3 remote from the coolant line 31. So that the cooling liquid can flow in from one end of the cooling roller and flow to the other end along the whole cooling roller, and a good cooling effect is ensured.
Still further, the coolant pipe 31 further includes a rotary joint 34 provided at an end thereof. The cooling roller can be cooled in the process of being tightly attached to the base material and rotating.
Specifically, a flange connection structure is arranged at one end of the cooling liquid pipeline 31 connected with the cooling roller 1, and the water outlet pipe 3011 is fixedly connected in the inner container 3 through a flange plate 3012. And the structure is simple, the installation is convenient, and the structure is compact.
In addition, a sealing element is arranged on the water outlet pipe 3011.
The working principle of the scheme is as follows:
as shown in fig. 3, the cooling water flows into the cooling liquid pipe 31 from the water inlet 32, enters the cooling passage 311 along the gap between the outer periphery of the water outlet pipe 3011 and the inner wall of the cooling liquid pipe, and contacts the inner wall of the cooling roller (in the direction of the arrow with the solid line in the figure) during the flowing process in the cooling passage, thereby taking away the heat on the surface of the cooling roller, flows to the other end, flows into the water outlet passage 301 in the inner container 3 from the passage port 302, and is discharged after being led out from the water outlet pipe 3011 to the water outlet (in the direction of the arrow with the dotted line in the figure), and the cooling water with the solid.
The utility model also provides a vacuum coating equipment, include as above be applied to the chill roll mechanism in the vacuum coating equipment.
The utility model provides a be applied to chill roll mechanism among vacuum coating equipment, through the chill roll, the inner bag, with the structure of coolant liquid pipeline, utilize the inner bag to become cooling channel and exhalant canal with the inside partition of chill roll, when coolant liquid that flows in from the coolant liquid pipeline flows along cooling channel, with the contact of chill roll inner wall, thereby take away the temperature of chill roll, and finally flow from the exhalant canal in the inner bag, at the inside cooling cycle water route that forms of chill roll, and business turn over water is two routes mutual noninterferences respectively, guarantee that the cooling water circulation is not influenced when the chill roll rotates. The scheme is suitable for the winding type vacuum coating equipment, the space is narrow, the structure is compact, even cooling is ensured when coating is carried out, and the installation is easy, so that the working requirement is met.
The foregoing is illustrative of one or more embodiments provided in connection with the detailed description and is not to be construed as limiting the invention to the precise embodiments disclosed herein. All with the utility model discloses a method, structure etc. are similar, the same, or to the utility model discloses make a plurality of technological deductions under the design prerequisite, or the replacement should all regard as the utility model discloses a protection scope.
Claims (9)
1. The cooling roller mechanism applied to the vacuum coating equipment is characterized by comprising a cooling roller (1) which is arranged on the vacuum coating equipment and is in contact with the surface of a base material, a driving mechanism (2) for driving the cooling roller (1) to rotate and a cooling structure, wherein the cooling structure comprises an inner container (3) arranged in the cooling roller (1), and a cooling liquid pipeline (31) which is linked to one side of the cooling roller (1) and is communicated with the inside of the cooling roller (1), the cooling liquid pipeline (31) is provided with a water inlet (32) and a water outlet (33), the inner container (3) extends to be opposite to the water outlet (33) from the inside of the cooling roller (1) along the cooling liquid pipeline (31), a water outlet channel (301) is arranged inside the inner container (3), and a cooling channel (311) communicated with the cooling liquid pipeline (31) is formed by a gap between the periphery of the inner container (3) and the inner wall of the cooling roller (1), and a channel opening (302) communicated with the cooling channel (311) and the water outlet channel (301) is arranged on the inner container (3).
2. The cooling roller mechanism applied to the vacuum coating equipment according to claim 1, wherein a temperature sensor is further arranged on the cooling roller (1).
3. The cooling roller mechanism applied to the vacuum coating equipment according to claim 1, wherein the inner container (3) is a revolving body and is concentrically arranged with the cooling roller (1) and can rotate along with the cooling roller (1).
4. The chill roll mechanism applied to the vacuum coating equipment according to claim 3, wherein the inner container (3) further comprises a water outlet pipe (3011) communicated with the internal water outlet channel (301).
5. The chill roll mechanism for use in a vacuum coating apparatus according to claim 4, wherein the passage opening (302) is provided at an end of the inner container (3) remote from the coolant line (31).
6. The chill roll mechanism for use in a vacuum coating apparatus according to claim 5, wherein the coolant line (31) further comprises a rotary joint (34) provided at an end thereof.
7. The cooling roller mechanism applied to vacuum coating equipment according to claim 4, wherein a flange connection structure is arranged at one end of the cooling liquid pipeline (31) connected with the cooling roller (1), and the water outlet pipe (3011) is fixedly connected in the inner container (3) through a flange plate (3012).
8. The chill roll mechanism applied in vacuum coating equipment according to claim 7, wherein the water outlet pipe (3011) is further provided with a sealing member.
9. A vacuum plating apparatus, characterized by comprising the chill roll mechanism according to any one of claims 1 to 8 applied to a vacuum plating apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922306164.8U CN211199380U (en) | 2019-12-19 | 2019-12-19 | Cooling roller mechanism applied to vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922306164.8U CN211199380U (en) | 2019-12-19 | 2019-12-19 | Cooling roller mechanism applied to vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211199380U true CN211199380U (en) | 2020-08-07 |
Family
ID=71888311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922306164.8U Active CN211199380U (en) | 2019-12-19 | 2019-12-19 | Cooling roller mechanism applied to vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211199380U (en) |
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2019
- 2019-12-19 CN CN201922306164.8U patent/CN211199380U/en active Active
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Address after: Building 4, Haiyin Technology Industrial Park, No.1 Industrial Avenue, Banfu Community, Banfu Town, Zhongshan City, Guangdong Province, 528400 Patentee after: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Address before: 528400 No.3, niuchangling, Shenwan village, Banfu Town, Zhongshan City, Guangdong Province (block 301, 1st floor) Patentee before: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. |