CN211182167U - Semiconductor soaking device - Google Patents
Semiconductor soaking device Download PDFInfo
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- CN211182167U CN211182167U CN202020275835.9U CN202020275835U CN211182167U CN 211182167 U CN211182167 U CN 211182167U CN 202020275835 U CN202020275835 U CN 202020275835U CN 211182167 U CN211182167 U CN 211182167U
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- liquid medicine
- soaking
- basket
- semiconductor
- soaking process
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a semiconductor soaking device, which comprises a liquid medicine storage tank, a soaking process tank and a mechanical pump, wherein the soaking process tank is arranged at the upper end of the liquid medicine storage tank, the liquid medicine storage tank is communicated with the soaking process tank through the mechanical pump, and a basket fixing support is arranged in the soaking process tank; the basket fixing support is of a net structure and comprises a plurality of groups of supporting surfaces and limiting surfaces, the cross section of the basket fixing support is in a sawtooth shape, and the supporting surfaces and the bottom surface of the soaking process tank form an included angle. The utility model is used for when soaking semiconductor device, with the fixed semiconductor hand-basket of hand-basket fixed bolster, make the certain angle of hand-basket slope, make the liquid medicine fully flow back after soaking, reduce the liquid medicine and remain on semiconductor device, reduced carrying of liquid medicine extravagant widely, alleviateed the washing difficulty after the liquid medicine soaks.
Description
Technical Field
The utility model relates to a soak device, concretely relates to semiconductor soak device.
Background
semiconductor package refers to the process of processing the wafer passing test according to the product model and functional requirements to get independent chips, this production link of package has great influence on the quality and competitiveness of microelectronic products, according to the data of semiconductor industry, in the total cost of microelectronic devices, it can be divided into three blocks including design, chip production and package, wherein the design takes about one third, the chip production takes about one third, and the package and test also take about one third, it can be seen that the package is an important component of semiconductor industry. Customers are constantly demanding cost reduction and production of environmentally friendly products, which has prompted a trend toward miniaturization of electronic packages and thinning of chips while ensuring high reliability. The miniaturization and thinning development of semiconductor devices are particularly important for soaking and cleaning the devices, the current soaking and cleaning mainly adopts a vertical placing or horizontal placing mode, and after the soaking is finished along with the miniaturization of the devices, residual liquid medicine between the devices can be more, so that the waste of the liquid medicine is caused, and the cleaning difficulty is increased.
Disclosure of Invention
To the problem that above-mentioned prior art exists, the utility model provides a semiconductor soak device can reduce the liquid medicine and remain on semiconductor device, alleviates the washing difficulty after the liquid medicine soaks.
In order to achieve the above object, the utility model provides a following technical scheme: a semiconductor soaking device comprises a liquid medicine storage tank, a soaking process tank and a mechanical pump, wherein the soaking process tank is arranged at the upper end of the liquid medicine storage tank, the liquid medicine storage tank is communicated with the soaking process tank through the mechanical pump, and a lifting basket fixing support is arranged in the soaking process tank; the basket fixing support is of a net structure and comprises a plurality of groups of supporting surfaces and limiting surfaces, the cross section of the basket fixing support is in a sawtooth shape, and the supporting surfaces and the bottom surface of the soaking process tank form an included angle.
Furthermore, the included angle between the supporting surface and the bottom surface of the soaking process tank is 30-60 degrees.
Furthermore, the net shape of the basket fixing support is of a diamond structure, and the basket fixing support is narrow at the upper part and the lower part and wide in the middle.
Furthermore, the supporting surface and the limiting surface have three groups.
Compared with the prior art the utility model is used for when soaking semiconductor device, with the fixed semiconductor hand-basket of hand-basket fixed bolster, make the certain angle of hand-basket slope, make the liquid medicine fully flow back after soaking, reduce the liquid medicine and remain on semiconductor device, reduced the waste of carrying of liquid medicine widely, alleviateed the washing difficulty after the liquid medicine soaks.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a side view of a basket securing bracket;
in the figure: 1. the device comprises a liquid medicine storage tank, 2, a soaking process groove, 3, a mechanical pump, 4, a lifting basket fixing support, 41, a supporting surface, 42, a limiting surface, 5, a water inlet pipe, 6 and a water outlet pipe.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings.
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1, the utility model provides a technical solution: the device comprises a liquid medicine storage tank 1, a soaking process tank 2 and a mechanical pump 3, wherein the soaking process tank 2 is arranged at the upper end of the liquid medicine storage tank 1, the liquid medicine storage tank 1 is communicated with the soaking process tank 2 through the mechanical pump 3, and a basket fixing support 4 is arranged in the soaking process tank 2; the basket fixing support 4 is of a net structure and comprises a plurality of groups of supporting surfaces 41 and limiting surfaces 42, the cross section of the basket fixing support 4 is in a sawtooth shape, the supporting surfaces 41 and the bottom surface of the soaking process groove 2 form an included angle of 30-60 degrees, and a water inlet pipe 5 and a water outlet pipe 6 are arranged on the side surface of the soaking process groove 2.
The method comprises the steps that liquid medicine for soaking semiconductors is filled in a liquid medicine storage box 1 in an initial state, when the semiconductors need to be soaked, the semiconductors are firstly arranged in a lifting basket, then the lifting basket is placed on a supporting surface 41, the supporting surface 41 supports one side surface of the lifting basket at the moment, a limiting surface 42 supports the bottom surface of the lifting basket, after the lifting basket is placed, a mechanical pump 3 is started to pump the liquid medicine in the liquid medicine storage box 1 into a soaking process groove 2 and not through the semiconductors in the lifting basket, after soaking, the liquid medicine in the soaking process groove 2 is pumped back into the liquid medicine storage box 1 through the mechanical pump 3, after the liquid medicine in the process groove 2 flows back, tap water is injected into the process groove 2 through a water inlet pipe 5 for cleaning, the cleaning times are determined according to process requirements, after the water cleaning is finished, the tap water is drained through a drain pipe 6, and then the lifting basket is taken out. The basket fixing support 4 is a saw-toothed shape, the basket is inclined when placed on the basket, the inclined placement is beneficial to draining the liquid medicine, the liquid medicine residue is reduced, and the cleaning difficulty is reduced.
The utility model discloses an effect of use is explained through specific data below:
| basket placing mode | Lying down | Vertical type | Inclined at 45 ° |
| Residual amount of liquid medicine (ml) | 235 | 53 | 7.5 |
| Reduction ratio of residual amount | / | 77.5% | 96.8% |
The experimental vertical type is reduced by about 77.5% when lying relatively flat, and the experimental vertical type is reduced by about 96.8% when lying relatively flat with an inclination of 45 degrees, so that the residual quantity of the liquid medicine corresponding to the placement mode of the lifting basket with the inclination of 45 degrees is the least.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above, only do the preferred embodiment of the present invention, not used to limit the present invention, all the technical matters of the present invention should be included in the protection scope of the present invention for any slight modification, equivalent replacement and improvement of the above embodiments.
Claims (4)
1. The semiconductor soaking device is characterized by comprising a liquid medicine storage box (1), a soaking process groove (2) and a mechanical pump (3), wherein the soaking process groove (2) is arranged at the upper end of the liquid medicine storage box (1), the liquid medicine storage box (1) is communicated with the soaking process groove (2) through the mechanical pump (3), and a basket fixing support (4) is arranged in the soaking process groove (2);
the basket fixing support (4) is of a net structure and comprises a plurality of groups of supporting surfaces (41) and limiting surfaces (42), the cross section of the basket fixing support (4) is in a sawtooth shape, and an included angle is formed between each supporting surface (41) and the bottom surface of the soaking process groove (2).
2. The semiconductor soaking device according to claim 1, wherein: the included angle between the supporting surface (41) and the bottom surface of the soaking process groove (2) is 30-60 degrees.
3. The semiconductor soaking device according to claim 1, wherein: the net shape of the lifting basket fixing support (4) is of a diamond structure, and the lifting basket fixing support is narrow at the upper part and the lower part and wide in the middle.
4. The semiconductor soaking device according to claim 1, wherein: the supporting surface (41) and the limiting surface (42) have three groups.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020275835.9U CN211182167U (en) | 2020-03-09 | 2020-03-09 | Semiconductor soaking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020275835.9U CN211182167U (en) | 2020-03-09 | 2020-03-09 | Semiconductor soaking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211182167U true CN211182167U (en) | 2020-08-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020275835.9U Active CN211182167U (en) | 2020-03-09 | 2020-03-09 | Semiconductor soaking device |
Country Status (1)
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| CN (1) | CN211182167U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112454577A (en) * | 2020-11-30 | 2021-03-09 | 开化县华伟文教用品有限公司 | Wood board processing device for pencil processing |
| CN112509950A (en) * | 2020-12-21 | 2021-03-16 | 马之彬 | Semiconductor soaking device convenient for backflow of liquid medicine |
-
2020
- 2020-03-09 CN CN202020275835.9U patent/CN211182167U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112454577A (en) * | 2020-11-30 | 2021-03-09 | 开化县华伟文教用品有限公司 | Wood board processing device for pencil processing |
| CN112509950A (en) * | 2020-12-21 | 2021-03-16 | 马之彬 | Semiconductor soaking device convenient for backflow of liquid medicine |
| CN112509950B (en) * | 2020-12-21 | 2022-12-09 | 盐城高测新能源科技有限公司 | Semiconductor soaking device convenient for backflow of liquid medicine |
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