CN211182153U - Double-vacuum-chamber ion beam processing system - Google Patents
Double-vacuum-chamber ion beam processing system Download PDFInfo
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- CN211182153U CN211182153U CN202020089464.5U CN202020089464U CN211182153U CN 211182153 U CN211182153 U CN 211182153U CN 202020089464 U CN202020089464 U CN 202020089464U CN 211182153 U CN211182153 U CN 211182153U
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Abstract
The utility model provides a two real empty room ion beam machining systems belongs to ion beam machining technical field, including the real empty room of ion source and the real empty room of work piece that communicate each other, be equipped with in the real empty room of work piece: and the workpiece overturning component is hoisted in the workpiece vacuum chamber and used for fixing the workpiece to be processed and driving the workpiece to be processed to move and overturn in the workpiece vacuum chamber. The workpiece overturning and moving assembly comprises: a workpiece chuck; the workpiece overturning vehicle is connected with the workpiece chuck to drive the workpiece chuck to overturn; and the linear module is used for fixing the workpiece turnover vehicle so as to enable the workpiece turnover vehicle to move. When the utility model is used for feeding, the workpiece is only required to be fixed on the workpiece overturning and moving component of the workpiece vacuum chamber, the workpiece is driven to move in the workpiece vacuum chamber through the workpiece overturning and moving component, the workpiece is not required to be conveyed into the ion source vacuum chamber, and the feeding is simple; the workpiece overturning and moving assembly drives the workpiece to overturn, so that the workpiece overturning and moving assembly is convenient to install and disassemble, the working efficiency is improved, and the working strength is reduced.
Description
Technical Field
The utility model belongs to the technical field of the ion beam machining, concretely relates to two real empty room ion beam machining systems.
Background
The ion beam processing system is ultra-precise processing equipment for processing optical elements with high precision, when the ion beam processing system is used for polishing a workpiece, an interferometer is used for measuring the surface shape of a part to be processed to generate surface shape error detection data, process software is used for determining process parameters and a processing track, the surface of the part to be processed is polished under the control of an industrial personal computer, the removal amount of the part to be processed is accurately controlled by controlling the residence time or the moving speed of the ion beam on the surface of the part, the surface shape error of the surface of the part to be processed is corrected, and the final surface shape requirement is met.
The prior art (CN102744654B) discloses a double-vacuum-chamber ion beam polishing system and a polishing method, which includes a vacuum working chamber, an auxiliary vacuum chamber for loading and unloading a workpiece is disposed beside the vacuum working chamber, a gate valve for controlling the on-off of the vacuum working chamber and the auxiliary vacuum chamber is disposed between the vacuum working chamber and the auxiliary vacuum chamber, and a workpiece transfer device capable of transferring a workpiece between the vacuum working chamber and the auxiliary vacuum chamber is disposed in the vacuum working chamber and the auxiliary vacuum chamber.
This prior art accomplishes getting of work piece and puts the operation at supplementary real empty room during the use, need install the work piece on the work piece moving device in the operation process, convey to the vacuum working room by work piece transmission again to through the anchor clamps location in the vacuum working room, whole material loading process is loaded down with trivial details, and need lift up the work piece when the installation of work piece and make its machined surface face up, therefore the installation and the dismantlement of work piece are more laborious, and working strength is big.
SUMMERY OF THE UTILITY MODEL
Based on the above background problem, the utility model aims at providing a two real empty room ion beam processing systems waits to process work piece and ion source branch department in the vacuum chamber of difference, turns over through setting up the work piece in the real empty room of work piece and moves the subassembly and make the work piece remove the upset, and the work piece need not to carry to the ion source vacuum chamber in, and the simple and installation of material loading is dismantled conveniently.
In order to achieve the above purpose, the technical scheme of the utility model is that:
the double-vacuum-chamber ion beam processing system comprises an ion source vacuum chamber and a workpiece vacuum chamber which are communicated with each other, wherein the workpiece vacuum chamber is internally provided with: and the workpiece overturning component is hoisted in the workpiece vacuum chamber and used for fixing the workpiece to be processed and driving the workpiece to be processed to move and overturn in the workpiece vacuum chamber.
In one embodiment, the ion source vacuum chamber and the workpiece vacuum chamber are arranged one above the other, and the workpiece vacuum chamber is arranged above the ion source vacuum chamber.
In one embodiment, the workpiece flipping assembly comprises: the workpiece chuck is used for installing and fixing a workpiece to be processed; the workpiece overturning vehicle is connected with the workpiece chuck to drive the workpiece chuck to overturn; and the linear module is arranged at the top of the workpiece vacuum chamber and used for fixing the workpiece turnover vehicle and enabling the workpiece turnover vehicle to move.
In one embodiment, the workpiece chuck includes a chuck body, and a retaining member for coupling a workpiece to be machined with the chuck body.
Preferably, the locking part comprises a clamping plate which is of an L-shaped structure and comprises a horizontal section parallel to the surface of the chuck body and a vertical section perpendicular to the surface of the chuck body, a jacking screw which is arranged on the horizontal section in a penetrating mode and used for connecting the clamping plate with the chuck body, a workpiece hook and a cushion block which are respectively arranged at two ends of the vertical section and used for clamping workpieces to be machined, and the cushion block can be arranged along the vertical section in a movable mode so as to be matched with the workpieces to be machined, wherein the workpieces to be machined are different in thickness.
Preferably, the clamping plate is movably arranged along the radial direction of the chuck body so as to match workpieces to be processed with different sizes.
Preferably, the workpiece turnover vehicle includes: the bracket is respectively connected with the linear module and the workpiece chuck; the overturning motor is arranged on the bracket; one end of the transmission part is connected with an output shaft of the turnover motor, and the other end of the transmission part is connected with the workpiece chuck so as to drive the workpiece chuck to turn over through the turnover motor.
More preferably, the bracket comprises two side support plates and a connecting plate for fixing the two side support plates; the workpiece chuck is rotatably arranged between the two side supporting plates through a rotating shaft; the transmission part comprises a driving wheel connected with an output shaft of the turnover motor, a driven wheel arranged on the rotating shaft and a synchronous belt wound on the driving wheel and the driven wheel.
In one embodiment, the straight line module is provided with: the first limit sensor is used for limiting the processing position of the workpiece turnover vehicle; and the second limit sensor is used for limiting the material changing position of the workpiece turnover vehicle.
In one embodiment, the ion source vacuum chamber has disposed therein: the device comprises an ion source and a Faraday cup, wherein an emission end of the ion source is vertically upward so as to process a workpiece to be processed in a workpiece vacuum chamber; the Faraday cup is arranged at the top of the ion source vacuum chamber and is used for monitoring the beam intensity of the ion beam emitted by the ion source.
Compared with the prior art, the utility model discloses following effect has:
1. the utility model is provided with the ion source vacuum chamber and the workpiece vacuum chamber which are communicated with each other, namely, the workpiece to be processed and the ion source are respectively arranged in different vacuum chambers, when in feeding, the workpiece is only required to be fixed on the workpiece overturning and moving component of the workpiece vacuum chamber, the workpiece is driven to move in the workpiece vacuum chamber through the workpiece overturning and moving component, the workpiece is not required to be conveyed into the ion source vacuum chamber, and the feeding is simple; the workpiece overturning and moving assembly drives the workpiece to overturn, so that the workpiece overturning and moving assembly is convenient to install and disassemble, the working efficiency is greatly improved, and the working strength is reduced.
2. The utility model discloses distribute from top to bottom with the real empty room of ion source and the real empty room of work piece to inject the processing position of work piece upset car through first spacing sensor, so that the vertical upwards just to the machined surface of work piece of emission end of ion source, can guarantee the even bombardment workpiece surface of ion beam, guaranteed processingquality.
3. The utility model discloses a radial movement of chuck body can be followed to splint to can match the work piece of equidimension not, the utility model discloses a splint can be followed to the cushion and reciprocated, thereby match the work piece of different thickness.
4. The utility model discloses set up Faraday cup in the real empty room of ion source, can carry out the scanning of ion beam line for Faraday cup before processing, the line state of ion beam obtains the control, prevents to lead to the parts machining deviation too big because of the line of ion beam is abnormal.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the prior art and the embodiments will be briefly described below.
Fig. 1 is a schematic structural view of a dual vacuum chamber ion beam processing system according to an embodiment of the present invention;
fig. 2 is a front cross-sectional view of a dual vacuum chamber ion beam processing system in an embodiment of the present invention;
FIG. 3 is a schematic structural view of a workpiece vacuum chamber according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a workpiece chuck according to an embodiment of the present invention;
fig. 5 is a schematic structural view of another view angle of the workpiece chuck according to the embodiment of the present invention;
FIG. 6 is an enlarged view of a portion of FIG. 3 at A;
FIG. 7 is a schematic structural view of a locking member according to an embodiment of the present invention;
fig. 8 is a right side view of fig. 3.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "top", "bottom", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings of the specification, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. It should be noted that the terms "first" and "second" are used for convenience of description only and are not to be construed as indicating or implying relative importance.
In order to solve the loaded down with trivial details and the inconvenient defect of work piece installation dismantlement of material loading that prior art exists, the utility model provides a two real empty room ion beam processing systems, as shown in fig. 1 and 2, including the real empty room 1 of the ion source and the real empty room 2 of work piece that communicate each other, be equipped with in the real empty room 2 of work piece: and the workpiece overturning and moving component is hoisted in the workpiece vacuum chamber 2 and is used for fixing the workpiece to be processed and driving the workpiece to be processed to move and overturn in the workpiece vacuum chamber 2.
The utility model only needs to fix the workpiece on the workpiece turning and moving component of the workpiece vacuum chamber 2 during feeding, and drives the workpiece to move in the workpiece vacuum chamber 2 through the workpiece turning and moving component, namely, the ion source and the workpiece are separately arranged, the workpiece does not need to be conveyed into the ion source vacuum chamber 1, and the feeding is simple; the workpiece overturning and moving assembly drives the workpiece to overturn, so that the workpiece overturning and moving assembly is convenient to install and disassemble, the working efficiency is greatly improved, and the working strength is reduced.
In the present embodiment, as shown in fig. 2, the ion source vacuum chamber 1 and the workpiece vacuum chamber 2 are arranged up and down, the workpiece vacuum chamber 2 is arranged above the ion source vacuum chamber 1, and the ion source vacuum chamber 1 and the workpiece vacuum chamber 2 are communicated through a gate valve 3, that is, the on/off of the ion source vacuum chamber 1 and the workpiece vacuum chamber 2 is controlled through the gate valve 3.
The workpiece vacuum chamber 2 of the present embodiment is provided with a workpiece inverting member, as shown in fig. 3, which includes: a workpiece chuck 4, a workpiece turnover vehicle 5 and a linear module 6, wherein a door 201 is opened on the right side wall of the workpiece vacuum chamber 2 as shown in fig. 1 in order to load and unload the workpiece to be processed.
The workpiece chuck 4 is used for installing and fixing a workpiece to be machined, as shown in fig. 4 and 5, the workpiece chuck 4 comprises a chuck body 401 and a locking member arranged on the chuck body 401, the chuck body 401 of the embodiment is of a disc structure, and the locking member is embedded on the inner side wall of the chuck body 401.
Specifically, as shown in fig. 6 and 7, the locker includes: clamp plate 402, holding screw 403, workpiece hook 404, and spacer 405.
As shown in FIG. 6, the clamping plate 402 is in an L-shaped structure and comprises a horizontal section parallel to the surface of the chuck body 401 and a vertical section perpendicular to the surface of the chuck body 401, when in use, the horizontal section is attached to the lower surface of the chuck body 401, and the jacking screw 403 is arranged on the horizontal section in a penetrating manner and used for connecting the clamping plate 402 with the chuck body 401.
In this embodiment, as shown in fig. 6 and 7, the workpiece hook 404 is fixedly arranged at the bottom of the vertical section, the pad 405 is arranged at the upper part of the vertical section, and the workpiece to be machined is clamped between the workpiece hook 404 and the pad 405 in use.
In order to enable the locking member to be capable of being matched with workpieces to be machined with different thicknesses, the cushion block 405 can be arranged in a movable mode along the vertical section, in the embodiment, as shown in fig. 7, a clamping screw 406 penetrates through the vertical section, the end portion of the clamping screw 406 penetrating out of the vertical section is locked, a thread block is sleeved on the clamping screw 406, the cushion block 405 is fixed to the thread block through a screw, and when the clamping screw 406 is screwed, the thread block is in threaded connection with the clamping screw 406, so that the thread block can be driven to move up and down along the clamping screw 406, and the cushion block 405 is driven to move to be matched with workpieces to be machined with different thicknesses.
It should be noted that the movable structure of the cushion block 405 is not limited to the above-mentioned clamping screw, and in another embodiment, a slide rail may be provided to slidably connect the slide block, and the cushion block 405 is limited to the moving position by a bolt.
In order to match workpieces with different sizes, as shown in fig. 5, a plurality of adjusting grooves 407 are radially formed in the bottom surface of the chuck body 401, and the locking member can radially move along the adjusting grooves 407, so that the clamping range can be adjusted according to the size of the workpiece. Specifically, the adjusting slot 407 in this embodiment is a T-shaped slot, and the clamping screw 406 is slidably disposed in the adjusting slot 407 through the end of the vertical section.
In this embodiment, as shown in fig. 3, the workpiece turning cart 5 is connected to the workpiece chuck 4 to turn the workpiece chuck 4; the workpiece turnover vehicle 5 includes: support, upset motor 501 and driving medium.
The bracket is respectively connected with the linear module 6 and the workpiece chuck 4, so that the workpiece chuck 4 can move along the linear module 6; specifically, as shown in fig. 8, the bracket includes a first side support plate 502 and a second side support plate 503 which are symmetrically distributed, and a connecting plate 504 for fixing the first side support plate 502 and the second side support plate 503, where the connecting plate 504 is fixed to the linear module 6, specifically to the moving platform of the linear module 6.
In order to facilitate installation of the workpiece chuck 4, in the embodiment, as shown in fig. 3, the first side support plate 502 and the second side support plate 503 are in a right-angled triangle-like structure, that is, a platform is provided at both tips of the right-angled triangle-like structure for facilitating connection, and the workpiece chuck 4 is rotatably provided between the first side support plate 502 and the second side support plate 503 through a rotating shaft.
Specifically, as shown in fig. 3, the lengths of the first side support plate 502 and the second side support plate 503 are such that when the connecting plate 504 is located at the left processing position of the linear module 6, the center of the workpiece chuck 4 is aligned with the center of the workpiece vacuum chamber 2, but the invention is not limited thereto.
In this embodiment, as shown in fig. 8, the turnover motor 501 is also disposed between the first side support plate 502 and the second side support plate 503, and the turnover motor 501 is disposed near the second side support plate 503, and the output shaft of the turnover motor 501 is connected to the transmission member.
In this embodiment, the transmission member includes a driving wheel 505 connected to the output shaft of the flipping motor 501, a driven wheel 506 disposed on the rotation shaft, and a synchronous belt wound around the driving wheel 505 and the driven wheel 506, and the flipping motor 501 operates to drive the driving wheel 505 to rotate, further drive the driven wheel 506 and the rotation shaft to rotate, so as to drive the workpiece chuck 4 to flip 180 °. The utility model discloses an action wheel 505 can be the sprocket with follow driving wheel 506, also can be the belt pulley, the utility model discloses do not specifically restrict, in another embodiment, also can directly drive the pivot through upset motor 501 and rotate, then can not set up the driving medium this moment.
In order to move the workpiece chuck 4 to a position corresponding to the ion source 101 described later or to move the workpiece chuck 4 away from the ion source position described later to attach and detach the workpiece, in the present embodiment, the linear module 6 is provided on the top of the workpiece vacuum chamber 2, and the workpiece carriage 5 is fixed to the moving platform of the linear module 6 by the connecting plate 504, so that the workpiece carriage 5 can move along the linear module 6. In the present embodiment, the linear module 6 is installed in the workpiece vacuum chamber 2 by a hoisting method, but is not limited thereto.
In order to limit the moving position of the workpiece turnover vehicle 5 on the linear module 6, as shown in fig. 3, a first limit sensor 601 and a second limit sensor 602 are arranged on the linear module, the first limit sensor 601 is arranged on the left side of the linear module 6 and is used for limiting the processing position of the workpiece turnover vehicle 5, and the second limit sensor 602 is arranged on the right side of the linear module 6 and is used for limiting the material changing position of the workpiece turnover vehicle 5.
When the workpiece is machined and needs to be changed, the door 201 on the right side of the workpiece vacuum chamber 2 is opened, and when the workpiece turnover vehicle 5 moves to the position of the second limit sensor 602 along the linear module 6, the second limit sensor 602 is triggered, and the system controls the workpiece turnover vehicle 5 to stop moving; after the workpiece is replaced, the workpiece turnover vehicle 5 moves in the reverse direction along the linear module 6, when the workpiece turnover vehicle moves to a machining position, the first limiting sensor 601 triggers, and the system controls the workpiece turnover vehicle 5 to stop moving for machining.
In the present embodiment, as shown in fig. 2, the ion source vacuum chamber 1 is located below the workpiece vacuum chamber 2, and has: an ion source 101, an ion source motion system 102, a neutralizer, and a faraday cup 103.
The ion source 101 is arranged at the top of the ion source motion system 102, the emission end of the ion source 101 is vertically upward so as to process a workpiece to be processed in the workpiece vacuum chamber 2, and the ion source motion system 102 is used for driving the ion source 101 to move in three dimensions.
The faraday cup 103 is disposed on the top of the ion source vacuum chamber 1, and in this embodiment, as shown in fig. 1, is disposed on the top of the left side of the ion source vacuum chamber 1, the faraday cup 103 is a vacuum detector for measuring the incident intensity of the charged particles, and the measured current can be used to determine the amount of incident electrons or ions. After the faraday cup 103 is additionally arranged, faraday scanning can be performed before parts are machined each time, the beam intensity of an ion beam emitted by the ion source 101 is monitored through a signal amplifier, if the curve of the beam intensity or current and coordinates tested by the faraday cup 102 is not smooth, the performance fault of the ion source 101 can be judged, the parameters of the ion source 101 need to be adjusted, and if the curve is asymmetric, X-axis and Y-axis offset compensation is performed.
When the processing system is used for processing the workpiece, the processing system comprises the following steps:
(1) installing a workpiece: firstly, a workpiece is well installed on a workpiece chuck 4 of a workpiece vacuum chamber 2, then a workpiece overturning vehicle 5 drives the workpiece to overturn to the processing surface downwards, a system controls the workpiece overturning vehicle 5 to move to a position to be processed along a linear module 6, then the workpiece vacuum chamber 2 is closed, and the workpiece vacuum chamber 2 is pumped to a pressure state in the vacuum working chamber.
(2) Ion beam ultra-precision machining in a vacuum environment: firstly, carrying out Faraday scanning on the ion source 101, opening the large-scale gate valve 3 between the ion source vacuum chamber 1 and the workpiece vacuum chamber 2 after the parameters are normal, and controlling the ion source 101 to start processing by a system.
(3) Taking out the workpiece: firstly closing the gate valve 3, opening the workpiece vacuum chamber 2, controlling the workpiece turnover vehicle 5 to move to the material changing position by the system, then turning the workpiece by the workpiece turnover vehicle 5 to enable the processing surface to face upwards, and finally taking out the workpiece.
The utility model discloses an add work piece upset car 5, can make the easy installation work piece of workman, and need not carry together even work piece chuck 4 and get off, improved work efficiency greatly, reduced working strength.
It should be noted that, for those skilled in the art, without departing from the inventive concept, several variations and modifications can be made, which are within the scope of the present invention.
Claims (10)
1. Double-vacuum-chamber ion beam processing system, including the ion source vacuum chamber and the work piece vacuum chamber that communicate each other, its characterized in that, be equipped with in the work piece vacuum chamber:
and the workpiece overturning component is hoisted in the workpiece vacuum chamber and used for fixing the workpiece to be processed and driving the workpiece to be processed to move and overturn in the workpiece vacuum chamber.
2. The dual vacuum chamber ion beam processing system of claim 1, wherein the ion source vacuum chamber and the workpiece vacuum chamber are disposed one above the other, and the workpiece vacuum chamber is disposed above the ion source vacuum chamber.
3. The dual vacuum chamber ion beam processing system of claim 2, wherein the workpiece translation assembly comprises:
the workpiece chuck is used for installing and fixing a workpiece to be processed;
the workpiece overturning vehicle is connected with the workpiece chuck to drive the workpiece chuck to overturn;
and the linear module is arranged at the top of the workpiece vacuum chamber and used for fixing the workpiece turnover vehicle and enabling the workpiece turnover vehicle to move.
4. The dual vacuum chamber ion beam processing system of claim 3, wherein the workpiece chuck comprises a chuck body and a retaining member for coupling the workpiece to be processed with the chuck body.
5. The dual vacuum chamber ion beam processing system of claim 4, wherein the retaining member comprises:
the clamping plate is of an L type structure and comprises a horizontal section parallel to the surface of the chuck body and a vertical section vertical to the surface of the chuck body;
the jacking screw penetrates through the horizontal section and is used for connecting the clamping plate with the chuck body;
the workpiece hook and the cushion block are respectively arranged at two ends of the vertical section and used for clamping workpieces to be machined, and the cushion block can be movably arranged along the vertical section to be matched with the workpieces to be machined with different thicknesses.
6. The dual vacuum chamber ion beam processing system of claim 5, wherein the clamp plate is movably disposed in a radial direction of the chuck body to match workpieces of different sizes to be processed.
7. The dual vacuum chamber ion beam processing system of claim 3, wherein the workpiece flipping cart comprises:
the bracket is respectively connected with the linear module and the workpiece chuck;
the overturning motor is arranged on the bracket;
one end of the transmission part is connected with an output shaft of the turnover motor, and the other end of the transmission part is connected with the workpiece chuck so as to drive the workpiece chuck to turn over through the turnover motor.
8. The dual vacuum chamber ion beam processing system of claim 7, wherein the bracket comprises two side plates and a connecting plate for securing the two side plates; the workpiece chuck is rotatably arranged between the two side supporting plates through a rotating shaft;
the transmission part comprises a driving wheel connected with an output shaft of the turnover motor, a driven wheel arranged on the rotating shaft and a synchronous belt wound on the driving wheel and the driven wheel.
9. The dual vacuum chamber ion beam processing system of claim 3, wherein the linear module has:
the first limit sensor is used for limiting the processing position of the workpiece turnover vehicle;
and the second limit sensor is used for limiting the material changing position of the workpiece turnover vehicle.
10. The dual vacuum chamber ion beam processing system of claim 2, wherein the ion source vacuum chamber has disposed therein: an ion source and a Faraday cup;
the emission end of the ion source is vertically upward so as to process a workpiece to be processed in the workpiece vacuum chamber;
the Faraday cup is arranged at the top of the ion source vacuum chamber and is used for monitoring the beam intensity of the ion beam emitted by the ion source.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020089464.5U CN211182153U (en) | 2020-01-16 | 2020-01-16 | Double-vacuum-chamber ion beam processing system |
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| CN202020089464.5U CN211182153U (en) | 2020-01-16 | 2020-01-16 | Double-vacuum-chamber ion beam processing system |
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| CN211182153U true CN211182153U (en) | 2020-08-04 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111223738A (en) * | 2020-01-16 | 2020-06-02 | 云南展凡科技有限公司 | Double-vacuum-chamber ion beam processing system and processing method |
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2020
- 2020-01-16 CN CN202020089464.5U patent/CN211182153U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111223738A (en) * | 2020-01-16 | 2020-06-02 | 云南展凡科技有限公司 | Double-vacuum-chamber ion beam processing system and processing method |
| CN111223738B (en) * | 2020-01-16 | 2024-05-03 | 昆明凯航光电科技有限公司 | Dual vacuum chamber ion beam processing system and processing method |
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Effective date of registration: 20211014 Address after: No. 206, 2nd floor, management committee of Kunming Haikou Industrial Park, Xishan District, Kunming, Yunnan 650000 Patentee after: KUNMING KH-OPTICS TECHNOLOGY Co.,Ltd. Address before: 650100 workshop of kuandiba Industrial Park, Haikou Town, Xishan District, Kunming City, Yunnan Province Patentee before: Yunnan Zhanfan Technology Co.,Ltd. |
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