CN211180530U - Positioning device for light exposure center - Google Patents

Positioning device for light exposure center Download PDF

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Publication number
CN211180530U
CN211180530U CN202020107955.8U CN202020107955U CN211180530U CN 211180530 U CN211180530 U CN 211180530U CN 202020107955 U CN202020107955 U CN 202020107955U CN 211180530 U CN211180530 U CN 211180530U
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China
Prior art keywords
adjusting
light
side frame
support
positioning device
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CN202020107955.8U
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Chinese (zh)
Inventor
陈斌
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Beijing Jieanta Technical Service Co ltd
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Beijing Jieanta Technical Service Co ltd
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Priority to CN202020107955.8U priority Critical patent/CN211180530U/en
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Abstract

The utility model belongs to the technical field of light exposure, in particular to a positioning device for a light exposure center, which comprises an exposure head, wherein a light guide connecting seat is arranged below the exposure head, a light cover is arranged on the light guide connecting seat, an adjusting support is arranged below the light guide connecting seat, an auxiliary side frame is fixedly connected with the outer side wall of the light guide connecting seat, two supporting side rods are slidably connected to the inner side of the auxiliary side frame, the two supporting side rods are symmetrically distributed, and the bottoms of the two supporting side rods are fixedly connected with a positioning plate; when the workpiece on the adjusting support is inclined with the photomask, the adjusting angle of the support is adjusted, the two supporting side rods can slide in the adjusting groove, the two supporting side rods can move together under the action of the connecting rod, the end face of the positioning plate is attached to the end face of the adjusting support, and therefore the angle of the adjusting support can be corrected, the workpiece on the adjusting support is parallel to the photomask, and the angle adjusting precision and the exposure operation effect can be improved.

Description

Positioning device for light exposure center
Technical Field
The utility model relates to a light exposure technical field specifically is a positioner for light exposure center.
Background
The exposure apparatus has a light source that emits ultraviolet laser light, a mask called a reticle that is configured in units of a pattern composed of a plurality of devices as a set, and a projection lens.
Chinese patent publication (CN200972571Y) discloses an alignment positioning device for an exposure machine, which uses a hemispherical convex portion of a movable seat and a hemispherical concave portion of a fixed seat to slide in a spherical manner, so as to adjust the parallelism between a workpiece and a photomask, and a first retractable device pushes the movable seat, and the movable seat pushes the workpiece to move toward the photomask, and the sliding fine adjustment of the spherical sliding is performed on the hemispherical concave portion of the fixed seat through the hemispherical convex portion, so as to automatically adjust the workpiece to a position where the workpiece can be in parallel contact with the photomask, so that the device can be automatically adjusted in multiple directions, and as long as the workpiece and the photomask are in a non-parallel state, the movable seat automatically adjusts the angle on the hemispherical concave portion of the fixed seat by the hemispherical convex portion, and the device does not require manual operation, and is quite convenient, but the movable seat automatically adjusts the angle on the hemispherical concave portion of the fixed seat by the hemispherical convex portion, and the tilt of the angle is easy to occur, therefore, the skilled person provides a positioning device for the light exposure center to solve the above problems in the background art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a positioner for light exposure center to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a positioner for light exposure center, includes the exposure head, the exposure head below is equipped with the leaded light connecting seat, be equipped with the light shield on the leaded light connecting seat, leaded light connecting seat below is equipped with the regulation support, the supplementary side frame of leaded light connecting seat lateral wall fixedly connected with, the inboard sliding connection of supplementary side frame has two support side levers, two support side lever is symmetric distribution, two support the equal fixedly connected with locating plate in side lever bottom, two the locating plate bottom terminal surface all with adjust the laminating of support top terminal surface mutually, two be equipped with the connecting rod between the support side lever, just the connecting rod is fixed two support on the side lever, the supplementary side frame outside is equipped with spacing bolt.
As a further proposal of the utility model, the auxiliary side frame is L-shaped.
As a further aspect of the present invention: the auxiliary side frame is provided with an adjusting groove, and the two supporting side rods slide in the adjusting groove.
As a further aspect of the present invention: the connecting rod slides in the adjusting groove.
As a further aspect of the present invention: the width of the supporting side rod is five times of the width of the connecting rod.
As a further aspect of the present invention: two the equal fixedly connected with limiting plate in support side lever top, the width of limiting plate equals the width of supplementary side frame.
As a further aspect of the present invention: the limiting bolt is in threaded connection with the auxiliary side frame, and one end of the limiting bolt penetrates through the auxiliary side frame and is in contact with and pressed against the supporting side rod.
Compared with the prior art, the beneficial effects of the utility model are that:
when the work piece on the regulation support inclines with the light shield, adjust support angle regulation, can make two support side lever slide in the adjustment tank, the effect of connecting rod can make two support side lever remove together, make the laminating of the bottom terminal surface of locating plate on the top terminal surface of adjusting the support, thereby can rectify the angle of adjusting the support, make the work piece on the regulation support parallel with the light shield, can improve angle regulation's precision and the effect of exposure operation, and the limiting plate can restrict the position of support side lever, make support side lever can not deviate from in the supplementary side frame, spacing bolt can the position of fixed support side lever, restrict the removal of support side lever, thereby operative installations that can be stable, avoid support side lever to influence device work.
Drawings
FIG. 1 is a schematic view of a positioning device for a light exposure center;
FIG. 2 is a schematic view of a supporting side rod of a positioning device for a light exposure center;
FIG. 3 is a schematic view of an auxiliary side frame of a positioning device for a light exposure center;
fig. 4 is a schematic structural view of a connecting rod in a positioning device for a light exposure center.
In the figure: 1. an exposure head; 11. a light guide connecting seat; 111. a photomask; 12. adjusting the support; 2. an auxiliary side frame; 201. an adjustment groove; 3. supporting the side rods; 31. positioning a plate; 32. a limiting plate; 33. a connecting rod; 4. and a limiting bolt.
Detailed Description
Please refer to fig. 1-4, in the embodiment of the utility model, a positioner for light exposure center, including exposure head 1, exposure head 1 below is equipped with leaded light connecting seat 11, be equipped with light cover 111 on the leaded light connecting seat 11, leaded light connecting seat 11 below is equipped with adjusts support 12, 11 lateral wall fixedly connected with auxiliary side frame 2 of leaded light connecting seat, 2 inboard sliding connection of auxiliary side frame has two support side lever 3, two support side lever 3 are symmetric distribution, two equal fixedly connected with locating plate 31 in support side lever 3 bottom, two locating plate 31 bottom terminal surfaces all laminate mutually with adjusting support 12 top terminal surface, be equipped with connecting rod 33 between two support side lever 3, and connecting rod 33 fixes on two support side lever 3, the auxiliary side frame 2 outside is equipped with spacing bolt 4.
In fig. 1-2, when the device is used to make the exposure head 1 emit predetermined light and penetrate through the light-transmitting cover 111 to expose a workpiece, the light-guiding connecting seat 11 can be connected to the light shield 111, if the workpiece is not parallel to the light shield 111, the exposure effect can be affected, the angle of the workpiece placed on the light-guiding connecting seat can be adjusted by adjusting the support 12, the exposure head 1 can be aligned to the workpiece for convenient operation, the adjustment mode of the support 12 is consistent with the publication number CN200972571Y, the adjustment principle proposed by the alignment positioning device of the exposure machine is the same, the hemispherical convex part of the movable seat and the hemispherical concave part of the fixed seat are relatively spherically slid to adjust the workpiece and the light shield, when the angle of the workpiece on the adjusting support 12 is adjusted, the auxiliary side frame 2 is L-shaped, so that two side support rods 3 are arranged in the auxiliary side frame 2, the positioning accuracy is improved, the auxiliary side frame 2 is provided with an adjusting groove 201, and the two side support rods 3 are slid in the adjusting groove 201, the adjusting groove 31 is provided along the top of the adjusting connecting rod 12, the adjusting connecting rod 31, the adjusting the positioning plate 31 can be adjusted by adjusting the adjusting rod 31, the adjusting rod 31 of the positioning plate 12, the positioning plate 31 can be adjusted by adjusting the adjusting rod 31, the adjusting rod 31, the adjusting the positioning plate 12 can be adjusted by adjusting the adjusting rod 12, the adjusting rod 12, the adjusting rod 12 is adjusted by adjusting the adjusting rod 12, the adjusting rod.
In fig. 3-4: two equal fixedly connected with limiting plates 32 in support side lever 3 tops, the width of limiting plate 32 equals the width of supplementary side frame 2, limiting plate 32 can laminate on supplementary side frame 2, make limiting plate 32 can restrict the position of support side lever 3, make support side lever 3 can not deviate from in supplementary side frame 2, spacing bolt 4 and supplementary side frame 2 threaded connection, spacing bolt 4 one end runs through supplementary side frame 2, and compress tightly with the contact of support side lever 3, twist spacing bolt 4, can make the one end top of spacing bolt 4 on support side lever 3, spacing bolt 4 can the position of fixed stay side lever 3, restriction support side lever 3's removal, thereby user equipment that can be stable, avoid support side lever 3 to influence device work.
The utility model discloses a theory of operation is: when the angle of the workpiece on the adjusting support 12 is adjusted, the supporting side rod 3 slides in the adjusting groove 201 on the auxiliary side frame 2, so that the bottom end surface of the positioning plate 31 can be attached to the top end surface of the adjusting support 12, the positioning plate 31 can judge the inclination angle of the adjusting support 12, when adjusting, the end surface of the adjusting support 12 is parallel to the positioning plate 31, the end surfaces of the two positioning plates 31 are attached to the adjusting support 12 without gaps, thereby the angle of the adjusting support 12 can be corrected, the workpiece on the adjusting support 12 is parallel to the light shield 111, the precision of the angle adjustment and the exposure operation effect can be improved, the exposure head 1 emits predetermined light and penetrates through the light shield 111 to expose the workpiece, the exposure head 1 can be aligned with the workpiece for convenient operation, the limiting plate 32 can limit the position of the supporting side rod 3, so that the supporting side rod 3 can not be separated from the auxiliary side frame 2, twist spacing bolt 4, can make the one end top of spacing bolt 4 on supporting side lever 3, spacing bolt 4 can the fixed support side lever 3 the position, and the removal of restriction supporting side lever 3 to operative installations that can be stable avoids supporting side lever 3 to influence device work.
The above-mentioned, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (7)

1. A positioning device for a light exposure center comprises an exposure head (1), wherein a light guide connecting seat (11) is arranged below the exposure head (1), a light cover (111) is arranged on the light guide connecting seat (11), an adjusting support (12) is arranged below the light guide connecting seat (11), and the light exposure device is characterized in that an auxiliary side frame (2) is fixedly connected to the outer side wall of the light guide connecting seat (11), two supporting side rods (3) are slidably connected to the inner side of the auxiliary side frame (2), the two supporting side rods (3) are symmetrically distributed, a positioning plate (31) is fixedly connected to the bottoms of the two supporting side rods (3), the bottom end faces of the two positioning plates (31) are respectively jointed with the top end face of the adjusting support (12), a connecting rod (33) is arranged between the two supporting side rods (3), and the connecting rod (33) is fixed on the two supporting side, and a limiting bolt (4) is arranged on the outer side of the auxiliary side frame (2).
2. A positioning device for a light exposure center according to claim 1, wherein the auxiliary side frame (2) is L-shaped.
3. The positioning device for the light exposure center according to claim 1, wherein the auxiliary side frame (2) is provided with an adjusting groove (201), and both of the supporting side bars (3) slide in the adjusting groove (201).
4. A positioning device for a light exposure center according to claim 3, wherein the connecting rod (33) is slid in the adjusting groove (201).
5. A positioning device for a light exposure center according to claim 1, wherein the width of the supporting side bars (3) is five times the width of the connecting rods (33).
6. The positioning device for the light exposure center according to claim 1, wherein a limiting plate (32) is fixedly connected to the top of each of the two supporting side bars (3), and the width of the limiting plate (32) is equal to the width of the auxiliary side frame (2).
7. The positioning device for the light exposure center according to claim 1, wherein the limiting bolt (4) is in threaded connection with the auxiliary side frame (2), and one end of the limiting bolt (4) penetrates through the auxiliary side frame (2) and is in contact with and pressed against the supporting side rod (3).
CN202020107955.8U 2020-01-17 2020-01-17 Positioning device for light exposure center Active CN211180530U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020107955.8U CN211180530U (en) 2020-01-17 2020-01-17 Positioning device for light exposure center

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020107955.8U CN211180530U (en) 2020-01-17 2020-01-17 Positioning device for light exposure center

Publications (1)

Publication Number Publication Date
CN211180530U true CN211180530U (en) 2020-08-04

Family

ID=71799249

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020107955.8U Active CN211180530U (en) 2020-01-17 2020-01-17 Positioning device for light exposure center

Country Status (1)

Country Link
CN (1) CN211180530U (en)

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