CN211174509U - Cryopump structure for increasing steam pumping capacity - Google Patents
Cryopump structure for increasing steam pumping capacity Download PDFInfo
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- CN211174509U CN211174509U CN201921242331.0U CN201921242331U CN211174509U CN 211174509 U CN211174509 U CN 211174509U CN 201921242331 U CN201921242331 U CN 201921242331U CN 211174509 U CN211174509 U CN 211174509U
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Abstract
The utility model discloses an increase cryopump structure of vapor capacity of bleeding adopts two or more radiation protection baffles, and the radiation protection shielding section of thick bamboo that increases as required can the area of greatly increased vapor condensation surface, can let the capacity increase of bleeding of vapor be close to one time. Meanwhile, due to the design of the two radiation-proof baffles, the pumping speed of the low-temperature pump for other gases is reduced by half, the low-temperature pump can be used for a longer time, the gases are not forced to be regenerated due to condensation and saturation, and the regeneration interval period of the low-temperature pump can be prolonged by one time. The utility model discloses a cryopump structure is applicable to the cryopump structure that possesses vertical refrigerator, also is applicable to the cryopump structure that possesses horizontal refrigerator simultaneously.
Description
Technical Field
The utility model relates to a cryopump technical field especially relates to an increase cryopump structure of vapor capacity of bleeding.
Background
The cryopump is a high vacuum pump which generates an ultralow temperature surface by expansion refrigeration of a refrigerator and condenses or adsorbs gas by using the ultralow temperature surface. The cryogenic pump has the advantages of high pumping speed, high extreme vacuum degree and the like, and is particularly good at pumping steam.
A typical cryopump structure, as shown in fig. 1, mainly includes a cavity 10, a radiation-proof shielding cylinder 20, a radiation-proof baffle 30, a secondary cooling umbrella 40, and a dual-stage refrigerator 50, where the radiation-proof baffle 20 and the radiation-proof shielding cylinder 30 are connected and fixed at a first-stage cold head of the dual-stage refrigerator 50, and the secondary cooling umbrella 40 is connected and fixed at a second-stage cold head of the dual-stage refrigerator 50.
The cryopump produces cold energy through the two-stage refrigerator 50, so that the temperature of the radiation-proof shielding cylinder 20 and the radiation-proof baffle 30 is maintained at about 50K-100K, and the temperature of the two-stage cold umbrella 40 is maintained at about 10K-20K. According to the different condensation temperatures of different gases, the water vapor in the vacuum chamber is mainly condensed on the surfaces of the radiation-proof shielding cylinder 20 and the radiation-proof baffle 30, the gases such as nitrogen, oxygen, argon and the like are condensed on the surface of the secondary cooling umbrella 40, and the hydrogen is adsorbed by the active carbon on the inner side of the secondary cooling umbrella 4. The gas in the vacuum chamber is evacuated by means of condensation or adsorption, so that the required high vacuum is obtained.
Compared with other gas molecules (nitrogen, oxygen, argon and the like), the water vapor molecules have small volume and are easy to escape, and many high-vacuum pumps have poor capability of pumping water vapor in vacuum. One significant advantage of cryopumps, however, is that the pumping rate for water vapor is very high. Under certain process conditions, such as vacuum coating, water vapor is the predominant gas load for the cryopump.
As the amount of condensed or adsorbed gases within the cryopump increases, the pumping capacity of the cryopump may be reduced, requiring a regeneration operation of the cryopump to restore the initial performance of the cryopump. When the regeneration is started, the high vacuum valve between the cryopump and the vacuum chamber is closed, the temperature of the radiation-proof shielding cylinder 20, the radiation-proof baffle 30 and the secondary cooling umbrella 40 of the cryopump is raised through heating or natural temperature rise, and various gases condensed or adsorbed on the surface of the cryopump are released and discharged out of the pump.
When the cryopump is used in a place with a large water vapor load, the characteristic of the cryopump that the pumping speed of water vapor is large needs to be fully utilized. But there may be a need for the cryopump to initiate regeneration because the cryopump is saturated with other gas pumping. Regeneration takes time, which is disadvantageous for the use of cryopumps.
SUMMERY OF THE UTILITY MODEL
The utility model relates to a solve the defect among the prior art, prolong the duty cycle of cryogenic pump, reduce the regeneration frequency of cryogenic pump, and the cryogenic pump structure of an increase vapor air-bleed capacity that proposes.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a cryopump structure for increasing the pumping capacity of water vapor comprises two or more radiation-proof baffles, wherein the radiation-proof baffles are stacked in the vertical direction and are fixedly connected with a radiation-proof shielding cylinder; gaps are kept between the radiation-proof baffles and are not contacted, the radiation-proof baffle at the lowest part keeps a distance with the secondary cooling umbrella, and the radiation-proof baffle at the uppermost part is not higher than the radiation-proof shielding cylinder.
Preferably, the radiation-proof shielding cylinder is higher than the flange surface of the cavity of the cryogenic pump.
Preferably, the radiation-proof baffle is a cross-section annular baffle, can also be a louver-type baffle, and can also be a combination of the cross-section annular baffle and the louver-type baffle.
Preferably, the radiation-proof baffle is a perforated plate, each perforated plate is concentrically distributed at intervals from top to bottom, the plate holes on the upper surface are staggered with the plate holes on the lower surface, and the plates are mutually shielded.
Preferably, the small holes of the porous plate are circular holes, square holes or polygonal holes, and the edges of the small holes are connected with obliquely downward bent fins.
Preferably, the projection shape of the radiation protection baffle in the vertical direction is a circle, a square, a polygon or an irregular shape.
Due to the adoption of the scheme, the beneficial effects of the utility model are that:
the utility model discloses a radiation protection baffle more than two or two, the radiation protection shielding section of thick bamboo that increases as required, area that can greatly increased vapor condensation surface can let the capacity increase of bleeding of vapor be close one time. Meanwhile, due to the design of the two radiation-proof baffles, the pumping speed of the low-temperature pump for other gases is reduced by half, the low-temperature pump can be used for a longer time, the gases are not forced to be regenerated due to condensation and saturation, and the regeneration interval period of the low-temperature pump can be prolonged by one time.
The utility model discloses a cryopump structure is applicable to the cryopump structure that possesses vertical refrigerator, also is applicable to the cryopump structure that possesses horizontal refrigerator simultaneously.
Drawings
Fig. 1 is a block diagram of a typical cryopump.
Fig. 2 is a structural diagram of an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
The cryopump structure of the present invention, as shown in fig. 2, uses two (or more than two) radiation-proof baffles 30, which are connected and fixed to the radiation-proof shielding cylinder 21. A certain distance is reserved between the two radiation-proof baffles, the distance between the lower radiation-proof baffle 30 and the second-stage cold umbrella 40 is unchanged, and the upper radiation-proof baffle 30 is not higher than the radiation-proof shielding cylinder 21.
Compared with the original radiation-proof shielding cylinder 20, due to the adoption of the plurality of radiation-proof baffles, the height of the new radiation-proof shielding cylinder 21 is increased as required, the radiation-proof shielding cylinder 21 is allowed to be higher than the flange surface of the cavity 10, but the higher section cannot interfere with a high vacuum valve of a machine table.
The working principle is as follows: under low vacuum conditions (100 mtorr or less), the main gas component in the space is water vapor, and the cryopump continuously pumps the water vapor, so that a high vacuum can be obtained and maintained.
When the cryopump is applied to a process occasion with a large water vapor load, the area of the water vapor condensation surface can be greatly increased by the two (or more) radiation-proof baffles 30 and the radiation-proof shielding cylinder 21 which is increased as required. After the water vapor enters the cryopump, more water vapor contacts the radiation-proof baffles 30, and less water vapor contacts the radiation-proof shielding cylinder 21, so that the design of the two radiation-proof baffles 30 can increase the air extraction capacity of the water vapor by nearly one time.
Meanwhile, the design of the two radiation-proof baffles enables the pumping speed of the cryopump to other gases (nitrogen, oxygen, argon, hydrogen and the like) to be reduced by half, so that the cryopump can be used for a longer time and cannot be forced to regenerate due to the condensation saturation of the gases. The two radiation-proof baffles have the same structure as the original radiation-proof baffle, and the mold does not need to be prepared again in the aspect of manufacturing. The regeneration interval period of the cryopump can be doubled by using the cryopump with the structure.
The improved cryopump of the present invention may be used in conjunction with other types of high vacuum pumps (e.g., molecular pumps, etc.) if it is desired to achieve a higher vacuum. The utility model discloses an improved generation cryopump mainly used takes out vapor, takes out other all kinds of gases concurrently, and other all kinds of gases (nitrogen gas, oxygen, argon gas, hydrogen etc.) are taken out in the assistance of other high vacuum pumps of complex with it. The improved low-temperature pump can be used together with a common low-temperature pump.
The utility model discloses an increase cryopump of vapor capacity of bleeding, two (or more than two) radiation protection baffles 30 are not necessarily the shape as shown in the figure, can be "<" type cross section ring baffle, also can be shutter type baffle, also can be "<" type cross section ring baffle and shutter type baffle combination.
The radiation-proof baffle plate can also be in the shape of a plurality of porous circular plates, wherein a plurality of the porous circular plates are concentrically distributed at intervals from top to bottom, the holes of the upper circular plate are staggered from the holes of the lower circular plate, and the circular plates are mutually shielded. The small holes of the porous circular plate are not limited to circular holes, but can be square holes, polygonal holes or other small holes with irregular shapes, and one section of the edge of each small hole can be connected with an obliquely downward bent fin.
The projected shape of the radiation shielding barrier 30 in the vertical direction may be a circle, or may be a square or other polygon (or other irregular shape).
The utility model discloses an increase cryopump of vapor capacity of bleeding, two (or more than two) radiation protection baffles 30, other forms's cryopump radiation protection baffle structure that also can not mention above.
The utility model discloses a cryopump structure is applicable to the cryopump structure that possesses vertical refrigerator (being that the 50 center pins of doublestage refrigerator are parallel or coincide with cavity 10 center pin), also is applicable to the cryopump structure that possesses horizontal refrigerator simultaneously (being that the 50 center pins of doublestage refrigerator are perpendicular with cavity 10 center pin).
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. A cryopump structure for increasing the pumping capacity of water vapor is characterized by comprising two or more radiation-proof baffles, wherein the radiation-proof baffles are stacked in the vertical direction and are fixedly connected with a radiation-proof shielding cylinder; gaps are kept between the radiation-proof baffles and are not contacted, the radiation-proof baffle at the lowest part keeps a distance with the secondary cooling umbrella, and the radiation-proof baffle at the uppermost part is not higher than the radiation-proof shielding cylinder.
2. The cryopump structure for increasing water vapor pumping capacity of claim 1, wherein said radiation shield canister is elevated above a flange surface of the cryopump volume.
3. The cryopump structure for increasing water vapor pumping capacity of claim 1, wherein said radiation shield is one or a combination of a "<" section annular shield, a louver-type shield.
4. The cryopump structure for increasing water vapor pumping capacity of claim 1, wherein the radiation shield is a perforated plate, each perforated plate is spaced concentrically from the top to the bottom, and the holes in the top plate are offset from the holes in the bottom plate and are shielded from each other.
5. The cryopump structure for increasing pumping capacity of water vapor according to claim 4, wherein the small holes of the porous plate are circular holes, square holes or polygonal holes, and the edges of the small holes are connected with bent fins which are downward inclined.
6. The cryopump structure for increasing water vapor pumping capacity of claim 1, wherein the projection shape of the radiation shield in the vertical direction is a circle, a square, a polygon or an irregular shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921242331.0U CN211174509U (en) | 2019-08-02 | 2019-08-02 | Cryopump structure for increasing steam pumping capacity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921242331.0U CN211174509U (en) | 2019-08-02 | 2019-08-02 | Cryopump structure for increasing steam pumping capacity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211174509U true CN211174509U (en) | 2020-08-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921242331.0U Active CN211174509U (en) | 2019-08-02 | 2019-08-02 | Cryopump structure for increasing steam pumping capacity |
Country Status (1)
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|---|---|
| CN (1) | CN211174509U (en) |
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2019
- 2019-08-02 CN CN201921242331.0U patent/CN211174509U/en active Active
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Effective date of registration: 20201224 Address after: 201801 area B, building 2, No.3, Jiahong Road, Malu Town, Jiading District, Shanghai Patentee after: Shanghai NR Vacuum Technology Co.,Ltd. Address before: 201109 room 511-2, building 5, No. 118, Lane 315, Yuanyuan North Road, Minhang District, Shanghai Patentee before: SHANGHAI YOUTUO LOW TEMPERATURE TECHNOLOGY Co.,Ltd. |