CN208380781U - A kind of cryogenic pump condensation adsorption device - Google Patents
A kind of cryogenic pump condensation adsorption device Download PDFInfo
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- CN208380781U CN208380781U CN201820919964.XU CN201820919964U CN208380781U CN 208380781 U CN208380781 U CN 208380781U CN 201820919964 U CN201820919964 U CN 201820919964U CN 208380781 U CN208380781 U CN 208380781U
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- cryogenic pump
- mounting frame
- central mounting
- cold umbrella
- adsorption device
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Abstract
The utility model discloses a kind of cryogenic pump condensation adsorption devices, if the cold umbrella piece is radial to be orderly distributed in above bottom plate and is fixedly connected on central mounting frame and/or bottom plate including central mounting frame, dry and cold umbrella piece and the conductive base plate connecting with central mounting frame bottom；Pumped gas can be made to reach any position inside cold umbrella, the limited surface of cold umbrella and space is made full use of, more gases can be condensed.Bigger to the pumping capacity of these gases, thus cryogenic pump can be run can just reach saturation state for more time, and then reduce the regeneration frequency of cryogenic pump.
Description
Technical field
The utility model relates to low temperature pump technical field more particularly to a kind of cryogenic pump condensation adsorption devices.
Background technique
Cryogenic pump is a kind of vacuum pump using low-temperature surface condensation or adsorbed gas.Cryogenic pump can obtain the speed of exhaust
Cleaning vacuum maximum, limiting pressure is minimum, be widely used in semiconductor and IC, vacuum coating, ion implantation apparatus and
The industries such as spatial simulation.
As shown in Figure 1, be a typical cryogenic pump structure, including flange 1, one baffle 2, protective shield of radiation 3, cold umbrella 4,
Cold head 5 and refrigeration machine 6.At runtime, refrigeration machine 6 persistently generates cooling capacity to the cryogenic pump, makes protective shield of radiation 3, one baffle 2 and cold
Umbrella 4 is maintained at low-temperature condition.Refrigeration machine 6 divides for level-one cold head and second level cold head.6 level-one cold head of refrigeration machine and protective shield of radiation 3 and
One baffle 2 connects, and typical temperature is 60~100K, and the gases such as water vapour, the carbon dioxide in space can be made on its surface
Condensation.6 second level cold head of refrigeration machine is connect with cold umbrella 4, and typical temperature is 10~20K, can make nitrogen, oxygen, the argon in space
The gases such as gas in its surface condensation, inhale by the active carbon low temperature for separately having the non-condensable gas such as hydrogen, helium to be bonded by cold umbrella inner surface
It is attached.By means such as cryogenic condensation and cryogenic absorptions, cryogenic pump all extracts nearly all gas in space, obtains Gao Zhen
It is empty.
As shown in Fig. 2, being typical cold 4 structure of umbrella of multilayered structure.The cold umbrella by multiple cold umbrella pieces 401 combinations and
At.Cold umbrella piece 401 may be wholecircle type or semicircle.By mounting rack or bracket (not shown) between multiple cold umbrella pieces 401
It is serially connected, accumulates multilayer from top to bottom.Cold umbrella piece 401 passes through the shapes such as rivet, screw or welding with mounting rack or bracket bracket
Formula connection.
As shown in figure 3, cryogenic pump is at work, the gases such as nitrogen, oxygen, argon gas, by protective shield of radiation opening and level-one
The gap of baffle is finally reached cold umbrella into inside cryogenic pump, on its surface by cryogenic condensation.Due to the multilayer of the cold umbrella of tradition
Structure, gas molecule are hard to reach inside cold umbrella, therefore the gas flow of cold umbrella surface condensation is restricted.When cold umbrella surface condensation
Gas constantly accumulate, cryogenic pump constantly declines the speed of evacuation of these gases, and the pressure in space then constantly rises.Most
Whole cryogenic pump will reach a saturation state, and pumping effect does not reach requirement.The gas of condensation is at best able to inside cryogenic pump
Amount, the referred to as pumping capacity of cryogenic pump.
After cryogenic pump saturation, need to regenerate cryogenic pump, to restore its original pumping performance.Regeneration is exactly to pass through
Various heating means, make the gas of cryogenic pump internal condensation or absorption, outside discharge pump.The regenerative process of cryogenic pump may need to consume
Take multiple hours, frequent regeneration constrains the application of cryogenic pump, needs to increase the pumping capacity of cryogenic pump.
And the solid state gas of the cold umbrella surface condensation in this structure is also fallen in the case where condensate layer is too thick
To the danger of protective shield of radiation, because protective shield of radiation temperature is higher, solid state gas can gasify, and the pressure in space will rise, very
Reciprocal of duty cycle is deteriorated.
Utility model content
In view of presently, there are above-mentioned deficiency, the utility model provides a kind of cryogenic pump condensation adsorption device, can make by
Pumping body reaches any position inside cold umbrella, makes full use of the limited surface of cold umbrella and space, can condense more gases.
In order to achieve the above objectives, the embodiments of the present invention adopt the following technical scheme that
A kind of cryogenic pump condensation adsorption device, if the condensation adsorption device include central mounting frame, dry and cold umbrella piece and with
The conductive base plate of central mounting frame bottom connection, the cold umbrella piece is radial to be orderly distributed in above bottom plate and is fixedly connected on
On central mounting frame and/or bottom plate.
According to the one aspect of the utility model, the bottom plate is the circular slab equipped with centre bore, the central mounting frame
It is described to be opened on bottom center hole sealing and be connected for the hollow cylinder of lower ending opening.
According to the one aspect of the utility model, the cold umbrella piece is arranged in parallel along the diametrical direction of central mounting frame.
According to the one aspect of the utility model, the cold umbrella piece edge and the diameter of central mounting frame are in not equal to 90 °
Angle setting.
According to the one aspect of the utility model, the cold umbrella piece is polygon.
According to the one aspect of the utility model, the cold umbrella piece, passes through the side of fastener between central mounting frame at bottom plate
Formula is connected or is connected by welding.
The advantages of the utility model is implemented: condensation adsorption device described in the utility model, including it is central mounting frame, several
Cold umbrella piece and the conductive base plate being connect with central mounting frame bottom, the cold umbrella piece is radial be orderly distributed in above bottom plate and
It is fixedly connected on central mounting frame and/or bottom plate；Pumped gas (nitrogen, oxygen, argon gas etc.) can be made to reach inside cold umbrella
Any position, make full use of the limited surface of cold umbrella and space, more gases can be condensed.That is, to these gas
The pumping capacity of body is bigger, and thus cryogenic pump can be run can just reach saturation state for more time, and then reduce cryogenic pump
Regeneration frequency.
Detailed description of the invention
In order to illustrate more clearly of the technical scheme in the embodiment of the utility model, will make below to required in embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are merely some embodiments of the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.
Fig. 1 is cryogenic pump structure schematic diagram described in the utility model background technique；
Fig. 2 is cold umbrella structural schematic diagram described in the utility model background technique；
Fig. 3 is cryogenic pump condensation situations schematic diagram described in the utility model background technique；
Fig. 4 is a kind of cryogenic pump condensation adsorption apparatus structure schematic diagram described in the utility model embodiment；
Fig. 5 is cryogenic pump condensation adsorption device condensation situations schematic diagram described in the utility model embodiment；
Fig. 6 to Fig. 8 is a variety of cold umbrella piece distribution schematic diagrams of cryogenic pump condensation adsorption device described in the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
As shown in figure Fig. 4 to Fig. 8, a kind of cryogenic pump condensation adsorption device, the condensation adsorption device includes center installation
If frame 1, dry and cold umbrella piece 2 and the conductive base plate 3 connecting with central mounting frame bottom, the cold umbrella piece is radial to be orderly distributed in
Above bottom plate and it is fixedly connected on central mounting frame and/or bottom plate.
In practical applications, the bottom plate is the circular slab equipped with centre bore, and the central mounting frame is lower ending opening
Hollow cylinder, it is described be opened on bottom center hole sealing be connected.
In practical applications, the cold umbrella piece is arranged in parallel along the diametrical direction of central mounting frame.
In practical applications, the cold umbrella piece is arranged along the diameter with central mounting frame in the angle not equal to 90 °.
In practical applications, the cold umbrella piece is polygon.
In practical applications, the cold umbrella piece, bottom plate, connect or pass through by way of fastener between central mounting frame
The mode of welding connects.
The condensation adsorption device is formed by multiple cold umbrella pieces, 1 central mounting frame and a floor combination.Under traditionally
The cold umbrella structure of multilayer is compared, and condensation adsorption device of the present invention is and to be mounted with a bottom plate by interior emitting shape outward.Cold umbrella piece,
The connection of the forms such as rivet, screw or welding can be used between central mounting frame, bottom plate.
Because majority of gas is to eventually arrive at condensation adsorption apparatus surface from top to bottom from surrounding toward intermediate path.
According to this rule, cold umbrella piece is placed on the position parallel with protective shield of radiation diametrical direction, there can also be the deflection of certain angle,
But cannot be vertical with protective shield of radiation diametrical direction, gas cannot be influenced by going inhales toward condensation adsorption device center position and toward condensation
The movement of adsorption device bottom direction can make gas reach condensation adsorption device bosom position and bottommost.
The bottom plate of condensation adsorption bottom of device can also prevent the solid state gas being condensed from falling to protective shield of radiation bottom,
In order to avoid pressure transient or rising.
Compare Fig. 3 and Fig. 5 it is found that the gas flow that can be condensed much compares on the basis of condensation adsorption device of the present invention
Traditionally descend the cold umbrella of multilayer much more.
Cold umbrella piece therein, can be rectangle, be also possible to trapezoidal, can connect on central mounting frame, can also connect
It connects on bottom plate, size, shape, the quantity of cold umbrella piece can arbitrarily arrange by real space, but require cold umbrella piece and anti-spoke
It is parallel to penetrate screen diametrical direction, there can also be certain deflection, but cannot be vertical with protective shield of radiation diametrical direction.
The advantages of the utility model is implemented: condensation adsorption device described in the utility model, including it is central mounting frame, several
Cold umbrella piece and the conductive base plate being connect with central mounting frame bottom, the cold umbrella piece is radial be orderly distributed in above bottom plate and
It is fixedly connected on central mounting frame and/or bottom plate；Pumped gas (nitrogen, oxygen, argon gas etc.) can be made to reach inside cold umbrella
Any position, make full use of the limited surface of cold umbrella and space, more gases can be condensed.That is, to these gas
The pumping capacity of body is bigger, and thus cryogenic pump can be run can just reach saturation state for more time, and then reduce cryogenic pump
Regeneration frequency.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, any those skilled in the art is in technical scope disclosed by the utility model, the change that can readily occur in
Change or replace, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with described
Subject to scope of protection of the claims.
Claims (6)
1. a kind of cryogenic pump condensation adsorption device, which is characterized in that if the condensation adsorption device include central mounting frame, it is dry and cold
Umbrella piece and the conductive base plate connecting with central mounting frame bottom, the cold umbrella piece is radial to be orderly distributed in above bottom plate and consolidates
Surely it is connected on central mounting frame and/or bottom plate.
2. cryogenic pump condensation adsorption device according to claim 1, which is characterized in that the bottom plate is equipped with centre bore
Circular slab, the central mounting frame be lower ending opening hollow cylinder, it is described be opened on bottom center hole sealing be connected.
3. cryogenic pump condensation adsorption device according to claim 2, which is characterized in that the cold umbrella piece is along central mounting frame
Diametrical direction be arranged in parallel.
4. cryogenic pump condensation adsorption device according to claim 2, which is characterized in that the cold umbrella piece is installed along with center
The diameter of frame is in that the angle not equal to 90 ° is arranged.
5. cryogenic pump condensation adsorption device according to claim 1, which is characterized in that the cold umbrella piece is polygon.
6. cryogenic pump condensation adsorption device according to one of claims 1 to 5, which is characterized in that the cold umbrella piece, bottom
It is connected by way of fastener between plate, central mounting frame or is connected by welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820919964.XU CN208380781U (en) | 2018-06-14 | 2018-06-14 | A kind of cryogenic pump condensation adsorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820919964.XU CN208380781U (en) | 2018-06-14 | 2018-06-14 | A kind of cryogenic pump condensation adsorption device |
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| Publication Number | Publication Date |
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| CN208380781U true CN208380781U (en) | 2019-01-15 |
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| CN201820919964.XU Active CN208380781U (en) | 2018-06-14 | 2018-06-14 | A kind of cryogenic pump condensation adsorption device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113577974A (en) * | 2021-07-28 | 2021-11-02 | 刘菊红 | Radon removing and purifying method and device |
| CN117489563A (en) * | 2023-12-05 | 2024-02-02 | 上海优尊真空设备有限公司 | Improved cryogenic pump |
-
2018
- 2018-06-14 CN CN201820919964.XU patent/CN208380781U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113577974A (en) * | 2021-07-28 | 2021-11-02 | 刘菊红 | Radon removing and purifying method and device |
| CN117489563A (en) * | 2023-12-05 | 2024-02-02 | 上海优尊真空设备有限公司 | Improved cryogenic pump |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201221 Address after: 201801 area B, building 2, No.3, Jiahong Road, Malu Town, Jiading District, Shanghai Patentee after: Shanghai NR Vacuum Technology Co.,Ltd. Address before: 201109 room 511-2, building 5, No. 118, Lane 315, Yuanyuan North Road, Minhang District, Shanghai Patentee before: SHANGHAI YOUTUO LOW TEMPERATURE TECHNOLOGY Co.,Ltd. |