CN203404038U - High-efficiency regenerating cryogenic pump - Google Patents
High-efficiency regenerating cryogenic pump Download PDFInfo
- Publication number
- CN203404038U CN203404038U CN201320487718.9U CN201320487718U CN203404038U CN 203404038 U CN203404038 U CN 203404038U CN 201320487718 U CN201320487718 U CN 201320487718U CN 203404038 U CN203404038 U CN 203404038U
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- CN
- China
- Prior art keywords
- refrigerator
- regenerating
- pump
- refrigerating
- screen
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a high-efficiency regenerating cryogenic pump which comprises a pump casing. A refrigerator is installed at the upper end of the pump casing, a safety valve and an air exhausting regenerating opening which are communicated with an inner cavity of the pump casing are arranged at the upper end of the pump casing, a pump opening flange is arranged at the lower end of the pump casing, a refrigerator primary refrigerating head and a refrigerator secondary refrigerating head are distributed in the pump casing from top to bottom, the refrigerator secondary refrigerating head is covered by a refrigerating screen, an absorbing array and a blocking plate are arranged in the refrigerating screen, and a venting hole is formed in the lateral wall of the refrigerating screen. The high-efficiency regenerating cryogenic pump has the advantages of being simple and reasonable in structure. Due to the design that the venting hole is formed in the refrigerating screen, air molecules desorbing from the surface of the absorbing array can directly enter the upper end of the casing through the holes in a regenerating process and then are exhausted out of the air exhausting opening. Thus, the problem the all desorbing molecules must pass through the blocking plate is solved, the regenerating time of the cryogenic pump is effectively shortened, and the regenerating efficiency is improved.
Description
Technical field
The utility model relates to a kind of cryopump, is specially a kind of highly efficient regeneration cryopump.
Background technique
Cryopump is in pumping process, and first gas molecule bumps with the baffle of cryopump, the gas molecule that solidifying point is high, as water, nitrogen etc. will directly be adsorbed on baffle surface, and the low gas molecule of some solidifying point, as hydrogen, helium etc. can pass through baffle, is adsorbed battle array absorption.After cryopump work a period of time, due to surface coverage thicker absorption molecule, as shown in 11 in Fig. 1, now cryopump is difficult to continue to maintain its pumping performance, need to regenerate.The method of regeneration is, at one-level cold head and the secondary cold head place of refrigerator, one heat block is installed respectively, and the baffle of cryopump, cold screen and absorbing array are heated, and now desorption can occur the molecule of absorption.A mechanical pump is installed at the regeneration mouthful place of bleeding at cryopump, and the molecule of desorption is taken away.
In carrying out heating process, first desorption molecule spreads out from Leng Pingkou by baffle, then can, along the space between cold screen and housing, finally by bleeding point, discharge.Because the structure of baffle is special, conductance is restricted, and desorption molecule can be through just passing through with baffle multiple impacts, so had a strong impact on regeneration efficiency during by baffle.
Model utility content
The purpose of this utility model is to provide a kind of highly efficient regeneration cryopump, to solve in prior art because the structure of baffle is special, conductance is restricted, and desorption molecule can be through just passing through with baffle multiple impacts, so had a strong impact on the problem of regeneration efficiency during by baffle.
For achieving the above object, the technical solution adopted in the utility model is:
A kind of highly efficient regeneration cryopump, it is characterized in that: include pump case, described pump case upper end is provided with refrigerator, and be provided with the safety valve being communicated with pump case inner chamber and the regeneration mouthful of bleeding, described pump case lower end is provided with pumping hole flange, is distributed with refrigerator one-level cold head and refrigerator secondary cold head in described pump case from top to bottom, and described refrigerator secondary cold head is covered with cold screen, in described cold screen, be provided with absorbing array and baffle, on described cold screen sidewall, have vent.
Described a kind of highly efficient regeneration cryopump, is characterized in that: described vent is arranged on cold screen sidewall stage casing.
The beneficial effects of the utility model are:
The utility model is simple and reasonable, employing arranges the design of vent on cold screen, like this in regenerative process, gas molecule from absorbing array surface desorption, can directly by this hole, enter housing upper end, then by bleeding point, discharge, avoid all necessary problems through baffle of all desorption molecules, effectively shorten the regeneration of low temperature pump time, improved regeneration efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Embodiment
As shown in Figure 1, a kind of highly efficient regeneration cryopump, include pump case 2, pump case 2 upper ends are provided with refrigerator 1, and be provided with the safety valve 9 being communicated with pump case 2 inner chambers and the regeneration mouth 8 of bleeding, pump case 2 lower ends are provided with pumping hole flange 10, in pump case 2, be distributed with refrigerator one-level cold head 6 and refrigerator secondary cold head 7 from top to bottom, refrigerator secondary cold head 7 is covered with cold screen 3, in cold screen 3, be provided with absorbing array 4 and baffle 5, on cold screen 3 sidewalls, have vent 12, absorbing array 4 and baffle 5 surfaces can cover thicker absorption molecule 11 in pumping process.
Claims (2)
1. a highly efficient regeneration cryopump, it is characterized in that: include pump case, described pump case upper end is provided with refrigerator, and be provided with the safety valve being communicated with pump case inner chamber and the regeneration mouthful of bleeding, described pump case lower end is provided with pumping hole flange, is distributed with refrigerator one-level cold head and refrigerator secondary cold head in described pump case from top to bottom, and described refrigerator secondary cold head is covered with cold screen, in described cold screen, be provided with absorbing array and baffle, on described cold screen sidewall, have vent.
2. a kind of highly efficient regeneration cryopump according to claim 1, is characterized in that: described vent is arranged on cold screen sidewall stage casing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320487718.9U CN203404038U (en) | 2013-08-10 | 2013-08-10 | High-efficiency regenerating cryogenic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320487718.9U CN203404038U (en) | 2013-08-10 | 2013-08-10 | High-efficiency regenerating cryogenic pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203404038U true CN203404038U (en) | 2014-01-22 |
Family
ID=49939978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320487718.9U Expired - Fee Related CN203404038U (en) | 2013-08-10 | 2013-08-10 | High-efficiency regenerating cryogenic pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203404038U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104929897A (en) * | 2014-03-18 | 2015-09-23 | 住友重机械工业株式会社 | Cyropump and method for regenerating the cryopump |
| CN105041609A (en) * | 2015-07-16 | 2015-11-11 | 兰州空间技术物理研究所 | Heavy-calibre cryopump for pumping away xenon |
| CN107489604A (en) * | 2017-09-26 | 2017-12-19 | 安徽万瑞冷电科技有限公司 | A kind of considerable low-temperature pump and its method of work |
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
| CN117489563A (en) * | 2023-12-05 | 2024-02-02 | 上海优尊真空设备有限公司 | Improved cryogenic pump |
-
2013
- 2013-08-10 CN CN201320487718.9U patent/CN203404038U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104929897A (en) * | 2014-03-18 | 2015-09-23 | 住友重机械工业株式会社 | Cyropump and method for regenerating the cryopump |
| CN104929897B (en) * | 2014-03-18 | 2017-04-26 | 住友重机械工业株式会社 | Cyropump and method for regenerating the cryopump |
| CN105041609A (en) * | 2015-07-16 | 2015-11-11 | 兰州空间技术物理研究所 | Heavy-calibre cryopump for pumping away xenon |
| CN107489604A (en) * | 2017-09-26 | 2017-12-19 | 安徽万瑞冷电科技有限公司 | A kind of considerable low-temperature pump and its method of work |
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
| CN117489563A (en) * | 2023-12-05 | 2024-02-02 | 上海优尊真空设备有限公司 | Improved cryogenic pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140122 Termination date: 20190810 |