CN211170884U

CN211170884U - Two-way business turn over tubular PECVD equipment

Info

Publication number: CN211170884U
Application number: CN201921668142.XU
Authority: CN
Inventors: 朱旭东; 史孟杰
Original assignee: Nice Sun Pv Co ltd
Current assignee: Jimusar Jiarui Yubang Semiconductor Materials Co ltd
Priority date: 2019-10-08
Filing date: 2019-10-08
Publication date: 2020-08-04
Anticipated expiration: 2029-10-08

Abstract

The utility model discloses a two-way business turn over tubular PECVD equipment, including at least one equipment import and an equipment export, set gradually from the equipment import towards the equipment export and put boat portion, preheating part, PECVD technology reaction boiler tube, cooling part and get boat portion, put the outside graphite boat of boat portion and snatch and collect and put boat portion, put boat portion and put the graphite boat to preheating part and preheat, preheat the completion back graphite boat and remove PECVD technology reaction boiler tube and react, the cooling part cooling is arrived again after finishing, take out equipment with the graphite boat through getting boat portion after the cooling. Adopt the utility model discloses a design, the mode that adopts two-way business turn over carries out the PECVD reaction, can preheat the operation when carrying out the PECVD reaction, has accelerated the process of production technology greatly.

Description

Two-way business turn over tubular PECVD equipment

Technical Field

The utility model relates to a PECVD equipment, especially a two-way business turn over tubular PECVD equipment.

Background

The PECVD technique is to generate glow discharge on a cathode (i.e., a tray on which a sample is placed) of a process chamber by using low-temperature plasma under low pressure, heat the sample to a predetermined temperature by using the glow discharge (or adding a heating element), then introduce a proper amount of process gases, and finally form a solid film on the surface of the sample through a series of chemical reactions and plasma reactions.

The existing PECVD equipment comprises a boat taking and placing system and a PECVD process reaction furnace tube, wherein the boat taking and placing system is positioned on the same side of the PECVD process reaction furnace tube, and an inlet and an outlet of a graphite boat are the same, but the method has the defects that at most two graphite boats can react in the equipment at the same time on a boat placing manipulator and a PECVD process reaction furnace tube, then the boat taking manipulator is taken out for continuous operation, three steps of preheating, reacting and cooling are required to be completed in the PECVD process reaction furnace tube, the flow time is about 35-45 minutes, wherein after the graphite boats enter the furnace tube, the temperature is firstly increased, the temperature inside the furnace tube and the graphite boats are heated to the temperature required by the process reaction, the approximate time of the step is about 10-15 minutes, and the time of the whole coating process is about 30 percent.

SUMMERY OF THE UTILITY MODEL

Utility model purpose: the utility model aims to solve the problems that the boat is taken and placed by the existing PECVD equipment, preheating, reaction and cooling operation are needed to be completed simultaneously in a PECVD process reaction furnace tube, the working hour is long, and the production efficiency is low.

The technical scheme is as follows: the utility model provides a following technical scheme:

a two-way inlet and outlet tube type PECVD device comprises at least one device inlet and a device outlet, wherein a boat placing part, a preheating part, a PECVD process reaction furnace tube, a cooling part and a boat taking part are sequentially arranged from the device inlet to the device outlet.

Adopt two-way design, the equipment import sets up in putting the import of boat portion, and the equipment export sets up in getting the export of boat portion, and the graphite boat gets into from the equipment import, and the equipment export is taken out, in equipment, can hold at least one graphite boat simultaneously at every station, and whole equipment can hold 5 at least graphite boats simultaneously promptly, has long-standing progress for prior art.

The equipment with the structure can be suitable for all surface coating processes needing preheating, such as a surface aluminum oxide film coating process and the like.

Furthermore, the boat placing part and the boat taking part respectively comprise at least one manipulator capable of conveying the graphite boat.

The telescopic length of the manipulator at least ensures that the manipulator can extend to the PECVD process reaction furnace tube and enable the first electrode column and the second electrode column to form electric contact.

Further, heat insulation layers are arranged among the boat placing part, the preheating part, the PECVD process reaction furnace tube, the cooling part and the boat taking part.

The influence of mutual temperature difference is avoided.

Furthermore, the inner wall of each PECVD process reaction furnace tube is provided with a second electrode column capable of supplying power to the anode and the cathode of the graphite boat.

Correspondingly, the graphite boat that this equipment adopted also makes the improvement, pile up the graphite boat piece that sets up including the multilayer, have the space that is used for placing the silicon chip between adjacent graphite boat piece, its characterized in that: two first electrode columns which connect a plurality of graphite boat pieces in series are arranged at the edge of the graphite boat piece, and two adjacent graphite boat pieces are respectively connected to the two electrode columns.

The first electrode column is matched with the second electrode column to supply power to the anode and the cathode.

Further, the second electrode column extends along the length direction of the PECVD process reaction furnace tube.

The existing technical means is that only the bottom of the PECVD process reaction furnace tube is correspondingly provided with an electrode for power supply, the whole PECVD process reaction furnace tube can be provided with power supply, the application range is enlarged, of course, the same position as the prior art is only needed to be adopted under the general condition, and then the corresponding second electrode column is arranged on the inner wall of the PECVD process reaction furnace tube, so that the cost can be saved, and only under the special condition, if the adopted graphite boat is vertical and is overlapped in an overlong way, the length of the second electrode column is required to be prolonged.

Has the advantages that: compared with the prior art:

adopt the utility model discloses a design, the different stages of PECVD technology independently accomplish in the different regions in equipment to can go on simultaneously under equipment control system's control, promote about 30% of the productivity of single equipment, match the productivity demand of front and back process with the PE board of less quantity, reduce production line investment cost, reduce energy consumption, generally reduced manufacturing cost.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic diagram of a prior art structure;

FIG. 3 is a schematic view of a horizontal graphite boat in a PECVD process reaction furnace tube according to the prior art.

Detailed Description

The invention will be further elucidated with reference to the drawings and the specific embodiments.

Examples

As shown in fig. 1 to fig. 3, a two-way in-out tube type PECVD apparatus comprises at least one apparatus inlet and one apparatus outlet, and a boat placing part 1, a preheating part 2, a PECVD process reaction furnace tube 3, a cooling part 4 and a boat taking part 5 are sequentially arranged from the apparatus inlet to the apparatus outlet.

By adopting a bidirectional design, the equipment inlet is arranged at the boat placing part inlet, the equipment outlet is arranged at the boat taking part outlet, the graphite boat 6 enters from the equipment inlet, the equipment outlet is taken out, and in the equipment, at least one graphite boat 6 can be simultaneously accommodated in each station, as shown in fig. 3, the graphite boat 6 needs to abut against the bottom of the PECVD process reaction furnace tube 3, namely, the whole equipment can simultaneously accommodate at least 5 graphite boats 6, and the method has great improvement compared with the prior art.

Each of the boat placing unit 1 and the boat taking unit 5 includes at least one robot (not shown) capable of transporting a graphite boat.

Thermal insulation layers (not shown) are arranged among the boat placing part 1, the preheating part 2, the PECVD reaction furnace tube 3, the cooling part 4 and the boat taking part 5.

The influence of mutual temperature difference is avoided.

The inner wall of each PECVD process reaction furnace tube 3 is provided with a second electrode column (not shown) capable of supplying power to the anode and the cathode of the graphite boat.

The second electrode column extends along the length direction of the reaction furnace tube 3 in the PECVD process.

Claims

1. The utility model provides a two-way business turn over tubular PECVD equipment which characterized in that: the device comprises at least one device inlet and a device outlet, wherein a boat placing part, a preheating part, a PECVD process reaction furnace tube, a cooling part and a boat taking part are sequentially arranged from the device inlet to the device outlet.

2. The bi-directional ingress and egress tubular PECVD apparatus of claim 1, wherein: the boat placing part and the boat taking part both comprise at least one manipulator capable of conveying the graphite boat.

3. The bi-directional ingress and egress tubular PECVD apparatus of claim 1, wherein: the boat placing part, the preheating part, the PECVD process reaction furnace tube, the cooling part and the boat taking part are all provided with heat insulation layers.

4. The bi-directional ingress and egress tubular PECVD apparatus of claim 1, wherein: the inner wall of each PECVD process reaction furnace tube is provided with a second electrode column capable of supplying power to the anode and the cathode of the graphite boat.

5. The bi-directional ingress and egress tubular PECVD apparatus of claim 1, wherein: the second electrode column extends along the length direction of the PECVD process reaction furnace tube.