CN211125604U - Support plate mounting frame assembly and support plate carrying mechanism - Google Patents

Abstract

The application provides a support plate mount pad subassembly and support plate transport mechanism, the support plate mount pad including the side bearer that is located the left and right sides, both sides frame about being provided with between the side bearer of the left and right sides, install a drawer frame on two frames respectively, drawer frame can be relative the frame take out, drawer frame include one along Y to the horizontal pole that sets up, a plurality of a tip fixed mounting along X on the horizontal pole to the vertical pole that sets up, through a linear guide rail subassembly with vertical pole sliding connection along X to the dead lever that sets up, linear guide rail subassembly along X to setting up. The application discloses a support plate mount pad subassembly and support plate transport mechanism can realize once carrying two support plates, has improved work efficiency.

Description

Support plate mounting frame assembly and support plate carrying mechanism

Technical Field

The application relates to the field of silicon wafer production, in particular to a support plate mounting frame assembly and a support plate carrying mechanism.

Background

The silicon chip is a carrier of the solar cell, the quality of the silicon chip directly determines the conversion efficiency of the solar cell, the solar cell needs a large-area PN junction to realize the conversion from light energy to electric energy, and the diffusion furnace is special equipment for manufacturing the PN junction of the solar cell. The tubular diffusion furnace mainly comprises an upper loading part and a lower loading part of a quartz boat, an exhaust gas chamber, a furnace body part, a gas holder part and the like. The diffusion is generally carried out by using a liquid source of phosphorus oxychloride as a diffusion source. The P-type silicon chip is placed in a quartz container of a tubular diffusion furnace, phosphorus oxychloride is brought into the quartz container by using nitrogen at the high temperature of 850-900 ℃, and phosphorus atoms are obtained by the reaction of the phosphorus oxychloride and the silicon chip. After a certain period of time, phosphorus atoms enter the surface layer of the silicon wafer from the periphery, and permeate and diffuse to the interior of the silicon wafer through gaps among the silicon atoms to form an interface of the N-type semiconductor and the P-type semiconductor, namely a PN junction. In the process of processing the silicon wafer, the silicon wafer needs to be conveyed to a working position, and blanking is carried out after the processing is finished. In the prior art, a silicon wafer is usually placed in a carrier plate, and the carrier plate is transported to the next station.

Disclosure of Invention

The technical problem that this application will be solved provides a support plate mount pad subassembly and support plate transport mechanism that can realize once carrying two support plates.

In order to solve the technical problem, the application provides a support plate mounting bracket assembly, support plate mounting bracket including the side bearer that is located the left and right sides, both sides frame about being provided with between the side bearer of the left and right sides, install a drawer frame on two frames respectively, drawer frame can be relative the frame take out, drawer frame include one along Y to the horizontal pole that sets up, a plurality of an end fixed mounting along X on the horizontal pole to the vertical pole that sets up, through a linear guide rail subassembly with vertical pole sliding connection along X to the dead lever that sets up, linear guide rail subassembly along X to setting up.

Preferably, the linear guide rail assembly includes a first linear guide rail fixedly connected to the longitudinal bar and a second linear guide rail fixedly connected to the fixing bar, and the first linear guide rail and the second linear guide rail are slidably disposed.

Preferably, a plurality of sensors are mounted on the side frames on the left side and the right side, and the plurality of sensors are divided into an upper layer and a lower layer.

Preferably, the upper surface of the longitudinal rod is further provided with a plurality of supporting blocks for supporting the carrier plate, a first positioning block is mounted at a free end of the longitudinal rod, a second positioning block is mounted at a root of the longitudinal rod, which is located at the outer side of the longitudinal rod, the plurality of first positioning blocks and the second positioning blocks limit the carrier plate, each first positioning block is provided with a limiting edge protruding upwards and extending along the Y direction, and each second positioning block is provided with two limiting edges protruding upwards and extending along the X direction and the Y direction respectively.

Preferably, the frame include two along X to the first frame that sets up, two along Y to the second frame that sets up, two first frames and two second frame end to end connection constitute a rectangular frame, the frame still include along X to the both ends connection of setting on the second frame a plurality of connecting rods, a plurality of the dead lever with a plurality of connecting rod one-to-one set up, just the dead lever with the connecting rod pass through a plurality of mounting looks fixed connection.

Preferably, the connecting rod is provided with a plurality of lifting cylinders, and the lifting cylinders can upwards support the carrier plate.

The application still provides a support plate transport mechanism, support plate transport mechanism include a support plate mount frame subassembly, support plate transport mechanism include the track subassembly, support plate mount frame subassembly install on the guide rail subassembly and can follow the guide rail subassembly and slide.

Preferably, the rail assembly comprises a linear motor extending along the Y direction, and two slide rails parallel to the linear motor and respectively disposed at two sides of the linear motor.

Preferably, the track assembly is provided with a moving frame, two sliding blocks capable of sliding along two sliding rails respectively and a moving block driven by the linear motor are fixedly mounted on the lower side of the moving frame, and the carrier plate mounting frame is mounted on the moving frame.

The application discloses a support plate mount pad subassembly and support plate transport mechanism can realize once carrying two support plates, has improved work efficiency.

Drawings

Fig. 1 is a schematic structural diagram of a carrier plate conveying mechanism;

fig. 2 is a partial structural schematic view of a carrier plate conveying mechanism;

fig. 3 is a schematic structural view of a carrier mounting bracket assembly;

fig. 4 is a schematic structural view of a drawer cabinet;

FIG. 5 is a schematic view of the structure of the frame;

fig. 6 is an enlarged view of a in fig. 1.

Wherein: 101. a linear motor; 102. a slide rail; 200. a carrier plate mounting frame assembly;

10. a movable frame; 11. a slider;

20. a frame; 30. a drawer frame; 40. a side frame; 50. a sensor; 60. a carrier plate;

31. a cross bar; 32. a longitudinal bar; 33. fixing the rod; 34. a first positioning block; 35. a support block; 36. a second positioning block; 371. a first linear guide rail; 372. a second linear guide; 38. a fixing member;

21. a first frame; 22. a second frame; 23. a connecting rod; 24. and a lifting cylinder.

Detailed Description

The present application is further described below in conjunction with the following figures and specific examples to enable those skilled in the art to better understand the present application and to practice it, but the examples are not intended to limit the present application.

As shown in fig. 1, a carrier plate carrying mechanism according to the present application includes a track assembly and a carrier plate mounting frame assembly 200 mounted on the track assembly and capable of sliding along the track assembly, where the track assembly includes a linear motor 101 extending along the Y direction, and two slide rails 102 parallel to the linear motor 101 and respectively disposed on two sides of the linear motor 101, as shown in fig. 2, a moving frame 10 is disposed on the track assembly, and two sliding blocks 11 capable of sliding along the two slide rails 102 and a moving block driven by the linear motor 101 are fixedly mounted on the lower side of the moving frame 10.

As shown in fig. 3, the carrier mounting bracket is mounted on the movable frame 10, and includes side frames 40 located at left and right sides, frames 20 located at upper and lower sides are disposed between the side frames 40 located at left and right sides, a drawer frame 30 is mounted on each of the two frames 20, and a plurality of sensors 50 are mounted on the side frames 40 located at left and right sides. The plurality of sensors 50 are divided into upper and lower layers.

As shown in fig. 4, the drawer frame 30 includes a cross bar 31 disposed along the Y direction, a plurality of longitudinal bars 32 having one end fixedly mounted on the cross bar 31 and disposed along the X direction, and a fixing bar 33 slidably connected to the longitudinal bars 32 via a linear guide assembly and disposed along the X direction, the linear guide assembly is disposed along the X direction, the linear guide assembly includes a first linear guide 371 fixedly connected to the longitudinal bars 32 and a second linear guide 372 fixedly connected to the fixing bar 33, and the first linear guide 371 and the second linear guide 372 are slidably disposed.

The upper surface of the longitudinal rod 32 is further provided with a plurality of supporting blocks 35 for supporting the carrier plate 60, a first positioning block 34 is mounted at the free end of the longitudinal rod 32, a second positioning block 36 is mounted at the root of the longitudinal rod 32, which is located at the outer side of the longitudinal rod 32, and the plurality of first positioning blocks 34 and the second positioning blocks 36 limit the carrier plate 60.

The first positioning block 34 has an upward protruding limiting edge extending along the Y direction, and the second positioning block 36 has two upward protruding limiting edges along the X direction and the Y direction, respectively.

As shown in fig. 5, the frame 20 includes two first frames 21 arranged along the X direction and two second frames 22 arranged along the Y direction, the two first frames 21 and the two second frames 22 are connected end to form a rectangular frame 20, and the frame 20 further includes a plurality of connecting rods 23 connected to the second frames 22 along the X direction at two ends.

The fixing rods 33 are arranged corresponding to the connecting rods 23, and the fixing rods 33 are fixedly connected with the connecting rods 23 through fixing pieces 38.

The connecting rod 23 is provided with a plurality of lifting cylinders 24, and the lifting cylinders 24 can lift the carrier plate 60 upwards.

The application discloses support plate transport mechanism's theory of operation as follows:

the carrier plate handling mechanism is used to transport carrier plate 60 from the first station to the second station, i.e., from one end of the slide 102 assembly to the other. In the first station, the drawer frames 30 in the upper and lower layers are pulled out, the carrier plate 60 is installed on the drawer frames 30, the carrier plate 60 is limited by the first positioning block 34 and the second positioning block 36 on the drawer frame 30, the supporting block 35 on the drawer frame 30 is used for supporting the carrier plate 60, and the drawer frame 30 is pushed into the frame 20 after the placement is completed. Starting the linear motor 101, conveying the carrier plate mounting frame assembly 200 from the first station to the second station, starting the lifting cylinder 24, lifting the carrier plate 60 upwards by the lifting cylinder 24, separating the carrier plate 60 from the drawer frame 30, extending into the bottom of the carrier plate 60 by using a telescopic fork (not shown in the figure), taking out the carrier plate 60, and completing transportation of the carrier plate 60, wherein the sensor 50 of each layer is used for detecting whether the telescopic fork is inserted into each layer.

The above-described embodiments are merely preferred embodiments for fully illustrating the present application, and the scope of the present application is not limited thereto. The equivalent substitution or change made by the person skilled in the art on the basis of the present application is within the protection scope of the present application. The protection scope of this application is subject to the claims.

Claims (4)

1. A carrier plate mounting frame assembly is characterized in that the carrier plate mounting frame comprises side frames positioned at the left side and the right side, frames at the upper side and the lower side are arranged between the side frames at the left side and the right side, a drawer frame is respectively arranged on the two frames, the drawer frame can be opposite to the frames, the drawer frame comprises a cross rod which is arranged along the Y direction, a plurality of end parts which are fixedly arranged on the cross rod along the X direction, a longitudinal rod which is arranged along the X direction and is connected with the longitudinal rod in a sliding way, a fixing rod which is arranged along the X direction and is arranged along the X direction, a linear guide rail assembly which is arranged along the X direction and comprises a first linear guide rail fixedly connected with the longitudinal rod and a second linear guide rail fixedly connected with the fixing rod, the first linear guide rail and the second linear guide rail are arranged in a sliding way, and a plurality of sensors are arranged on the side frames at the left side and the right side, the plurality of sensors are divided into an upper layer and a lower layer, the upper surface of the longitudinal rod is also provided with a plurality of supporting blocks for supporting the carrier plate, the free end part of the longitudinal rod is provided with a first positioning block, the root part of the longitudinal rod, which is positioned at the outer side of the longitudinal rods in total, is provided with a second positioning block, the first positioning block and the second positioning block play a limiting role on the carrier plate, the first positioning block is provided with an upward convex limiting edge extending along the Y direction, the second positioning block is provided with two upward convex limiting edges respectively along the X direction and the Y direction, the frame comprises two first frames arranged along the X direction and two second frames arranged along the Y direction, the two first frames and the two second frames are connected end to form a rectangular frame, the frame further comprises a plurality of connecting rods connected with the two end parts arranged along the X direction on the second frames, and the plurality of fixing rods are arranged in one-to-one correspondence with the plurality of connecting rods, and the fixed rod is fixedly connected with the connecting rod through a plurality of fixing pieces, a plurality of lifting cylinders are arranged on the connecting rod, and the lifting cylinders can upwards support the carrier plate.

2. A carrier handling mechanism comprising the carrier mounting bracket assembly of claim 1, said carrier handling mechanism comprising a track assembly, said carrier mounting bracket assembly mounted on and slidable along the track assembly.

3. A carrier transport mechanism as claimed in claim 2, wherein said track assembly comprises a linear motor extending along the Y-direction, and two slide rails parallel to said linear motor and disposed on two sides of the linear motor respectively.

4. A carrier plate transfer mechanism as claimed in claim 3, wherein a moving frame is disposed on the track assembly, two sliding blocks capable of sliding along two sliding rails respectively and a moving block driven by the linear motor are fixedly mounted on the lower side of the moving frame, and the carrier plate mounting frame is mounted on the moving frame.

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