CN211118743U - Silicon chip box aerating device - Google Patents
Silicon chip box aerating device Download PDFInfo
- Publication number
- CN211118743U CN211118743U CN201921864186.XU CN201921864186U CN211118743U CN 211118743 U CN211118743 U CN 211118743U CN 201921864186 U CN201921864186 U CN 201921864186U CN 211118743 U CN211118743 U CN 211118743U
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- tube
- aerating
- inflation
- gas tube
- air inlet
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Abstract
The utility model discloses a silicon chip box aerating device, including the gas tube, the outside cover of gas tube is equipped with the sleeve pipe, the outer wall of gas tube with sheathed tube inner wall threaded connection, the bottom of gas tube is equipped with the air inlet, the air inlet is connected with air connector, the top of gas tube is equipped with the charging connector, be equipped with the inflation inlet on the charging connector. According to the silicon wafer box inflation device, the sleeve is arranged outside the inflation tube, so that the inflation nozzle can be screwed into the sleeve after use, and the purpose of protecting the inflation nozzle is achieved.
Description
Technical Field
The utility model relates to an integrated circuit makes technical field, particularly, relates to a silicon chip box aerating device.
Background
Silicon wafers in the production of semiconductor devices are very sensitive to the environment, and manufacturers mostly adopt silicon wafer boxes to place the produced silicon wafers in order to avoid pollution or damage to the silicon wafers during transportation and storage. Meanwhile, the safety of the silicon wafer can be improved by filling the protective gas into the silicon wafer box, but the inflation inlet of the conventional inflation device of the silicon wafer box is not provided with a protective device and is easy to damage.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned technical problem among the correlation technique, the utility model provides a silicon chip box aerating device can overcome prior art's the aforesaid not enough.
In order to achieve the technical purpose, the technical scheme of the utility model is realized as follows:
the utility model provides a silicon chip box aerating device, includes the gas tube, the outside cover of gas tube is equipped with the sleeve pipe, the outer wall of gas tube with sheathed tube inner wall threaded connection, the bottom of gas tube is equipped with the air inlet, the air inlet is connected with air connector, the top of gas tube is equipped with the charging connector, be equipped with the inflation inlet on the charging connector.
Furthermore, the inflation tube comprises a first inflation tube, the bottom end of the first inflation tube is connected with one end of a second inflation tube, the inflation nozzle is located at the top end of the first inflation tube, and the air inlet is located at the other end of the second inflation tube.
Furthermore, the first inflation tube is perpendicular to the second inflation tube.
Further, the length of the sleeve is smaller than that of the first inflation tube.
Further, the charging connector is conical.
The utility model has the advantages that: the sleeve is arranged outside the inflation tube, so that the inflation nozzle can be screwed into the sleeve after use, and the purpose of protecting the inflation nozzle is achieved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an inflator for silicon wafer cassettes according to an embodiment of the present invention;
in the figure: 1. the air inlet structure comprises an inflation tube 2, inflation tubes I and 3, inflation tubes II and 4, a sleeve 5, an air inlet joint 6, an air inlet 7, an inflation nozzle 8 and an inflation opening.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art all belong to the protection scope of the present invention.
As shown in fig. 1, according to the embodiment of the utility model provides a silicon chip box aerating device, including gas tube 1, the outside cover of gas tube 1 is equipped with sleeve pipe 4, the outer wall of gas tube 1 with sleeve pipe 4's inner wall threaded connection, the bottom of gas tube 1 is equipped with air inlet 6, air inlet 6 is connected with air connector 5, the top of gas tube 1 is equipped with charging connector 7, charging connector 7 is the toper, be equipped with inflation inlet 8 on charging connector 7.
The inflation tube 1 comprises a first inflation tube 2, the bottom end of the first inflation tube 2 is connected with one end of a second inflation tube 3, the inflation nozzle 7 is located at the top end of the first inflation tube 2, and the air inlet 6 is located at the other end of the second inflation tube 3. The first inflation tube 2 is perpendicular to the second inflation tube 3. The length of the sleeve 4 is smaller than that of the first inflation tube 2.
For the convenience of understanding the above technical solutions of the present invention, the above technical solutions of the present invention are explained in detail through specific use modes below.
When the protective gas charging device is used specifically, the sleeve 4 is rotated, the charging connector 7 extends out of the sleeve 4, the gas inlet connector 5 is connected with a protective gas source, after the charging is finished, the gas inlet connector 5 and the protective gas source are disconnected, and the charging connector 7 is screwed into the sleeve 4.
To sum up, with the help of the technical scheme of the utility model, through set up the sleeve pipe outside the gas tube to make the charging connector can screw in the sleeve pipe when finishing using, and then reach the purpose of protection charging connector.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The utility model provides a silicon chip box aerating device, includes gas tube (1), its characterized in that, the outside cover of gas tube (1) is equipped with sleeve pipe (4), the outer wall of gas tube (1) with the inner wall threaded connection of sleeve pipe (4), the bottom of gas tube (1) is equipped with air inlet (6), air inlet (6) are connected with air connector (5), the top of gas tube (1) is equipped with charging connector (7), be equipped with on charging connector (7) charging port (8).
2. The silicon wafer box aerating device of claim 1 wherein the aerating tube (1) comprises a first aerating tube (2), the bottom end of the first aerating tube (2) is connected with one end of a second aerating tube (3), the aerating nozzle (7) is positioned at the top end of the first aerating tube (2), and the air inlet (6) is positioned at the other end of the second aerating tube (3).
3. The silicon wafer box aerating device of claim 2 wherein the first aerating tube (2) is perpendicular to the second aerating tube (3).
4. The silicon wafer box aerating device of claim 3 wherein the length of said sleeve (4) is less than the length of said aerating tube one (2).
5. The silicon wafer cassette gassing device according to claim 1 wherein the gassing nozzle (7) is conical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921864186.XU CN211118743U (en) | 2019-11-01 | 2019-11-01 | Silicon chip box aerating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921864186.XU CN211118743U (en) | 2019-11-01 | 2019-11-01 | Silicon chip box aerating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211118743U true CN211118743U (en) | 2020-07-28 |
Family
ID=71690613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921864186.XU Active CN211118743U (en) | 2019-11-01 | 2019-11-01 | Silicon chip box aerating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211118743U (en) |
-
2019
- 2019-11-01 CN CN201921864186.XU patent/CN211118743U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |