CN211118728U - High-efficient and compact MO source feeding device of mounting structure - Google Patents
High-efficient and compact MO source feeding device of mounting structure Download PDFInfo
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- CN211118728U CN211118728U CN201922323070.1U CN201922323070U CN211118728U CN 211118728 U CN211118728 U CN 211118728U CN 201922323070 U CN201922323070 U CN 201922323070U CN 211118728 U CN211118728 U CN 211118728U
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Abstract
The utility model discloses a high-efficiency MO source supply device with compact installation structure, which at least comprises a primary MO source steel cylinder and a final MO source steel cylinder which are in gas communication and arranged in parallel; the primary MO source steel cylinder comprises a primary steel cylinder body with an MO source packaging space, the upper end of the primary steel cylinder body is respectively provided with an inert gas inlet pipe and an MO source filling port, the bottom of the primary MO source outlet pipe is provided with a primary MO source outlet pipe, the final MO source steel cylinder comprises a final steel cylinder body with an MO source packaging space, the bottom of the final steel cylinder body is provided with an MO source inlet pipe, and the upper end of the final MO source outlet pipe and the MO source filling port are respectively arranged; the MO source packaging space of the final-stage steel cylinder body is smaller than that of the primary-stage steel cylinder body, and the primary MO source gas outlet pipe is connected with the MO source gas inlet pipe through a connecting pipeline vertical to the primary MO source gas outlet pipe; the utility model discloses a simple and compact ally oneself with steel bottle structural design more can realize simultaneously that excellent MO source supplies with saturation and degree of consistency effect, finally realizes higher MO source supply efficiency.
Description
Technical Field
The utility model belongs to the technical field of MO source packaging container, concretely relates to high-efficient and compact MO source feeding device of mounting structure especially is fit for the packaging container as the solid MO source.
Background
MO Source (Metalorganic Source) refers to a high-purity metal organic compound (typical main materials include trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum, etc.) used as a basic material in MOCVD epitaxial technology, and in the foreign literature, MO Source is also commonly referred to as "MOCVD precursor" and is widely used in L ED epitaxial wafer manufacturing industry at present.
The solid MO source steel cylinder cannot reach the MO source supply saturation due to the fact that the vapor pressure of the MO source is smaller and smaller along with the smaller amount of the stored MO source, and finally the solid MO source steel cylinder in the prior art can cause a certain amount of residual MO source, so that the utilization rate of the MO source is low.
The closest prior art to the technical object of the present application is a packaging container for solid metal organic compound, which is disclosed in publication No. CN108998775A and comprises a bottle body for containing the solid metal organic compound. The bottle body is internally provided with a partition part which divides the interior of the bottle body into a first space and a second space. The partition has a gas passage connecting the first space and the second space. The air inlet pipe is connected with a carrier gas source, is arranged on the bottle body and is communicated to the first space from the top side of the first space; the gas outlet pipe is connected with a metal organic chemical vapor deposition device, arranged on the bottle body and penetrates through the bottom side of the second space, which is adjacent to the first space, to be communicated with the first space. According to the patent, through the structural configuration, the use efficiency of the solid metal organic compound is improved, and the waste of the residual solid metal organic compound is reduced; however, this technique needs to set up a plurality of MO filling ports at the upper end of each steel cylinder for respectively filling the MO source in its internal partition space, and needs to set up an air inlet pipe and an air outlet pipe at the upper end of the steel cylinder, which results in the installation difficulty of the steel cylinder, and also can not be applied to the small-size MO source steel cylinder product.
Therefore, the present application intends to solve the above technical problems by devising the inventive structure of the MO source cylinder itself.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model aims at providing a high-efficient and compact MO source feeding device of mounting structure through simple and compact many steel bottle structural design that ally oneself with, can realize excellent MO source simultaneously and supply with saturation and degree of consistency effect, finally realizes higher MO source supply efficiency.
The utility model adopts the technical scheme as follows:
an MO source supply device with high efficiency and compact installation structure at least comprises a primary MO source steel cylinder and a final MO source steel cylinder which are in gas communication and arranged in parallel;
the primary MO source steel cylinder comprises a primary steel cylinder body with an MO source packaging space, an inert gas inlet pipe and an MO source filling port are respectively arranged at the upper end of the primary steel cylinder body, a primary MO source outlet pipe is arranged at the bottom of the primary steel cylinder body, the inert gas inlet pipe, the MO source filling port and the primary MO source outlet pipe are respectively communicated with the MO source packaging space, and the central line of the MO source filling port and the central line of the primary MO source outlet pipe are coincident with the central line of the primary steel cylinder body;
the MO source gas inlet pipe, the final MO source gas outlet pipe and the MO source filling port are respectively communicated with the MO source packaging space, and the central line of the MO source gas inlet pipe and the central line of the MO source filling port are coincided with the central line of the final steel cylinder body;
the MO source packaging space of the final-stage steel cylinder body is smaller than that of the primary-stage steel cylinder body, and the primary MO source gas outlet pipe is connected with the MO source gas inlet pipe through a connecting pipeline vertical to the primary MO source gas outlet pipe.
Preferably, an inert gas control switch valve and an MO source control switch valve are respectively installed on the inert gas inlet pipe and the final MO source outlet pipe.
Preferably, a pipe switching control valve for controlling the supply pressure is installed on the connection pipe.
Preferably, the volume of the MO source encapsulation space of the primary cylinder body is 200-500m L, and the volume of the MO source encapsulation space of the final cylinder body is 150-400m L.
Preferably, the difference between the volume of the MO source enclosure space of the primary cylinder body and the volume of the MO source enclosure space of the final cylinder body is not less than 50m L.
The utility model creatively provides an MO source supply device which adopts primary MO source steel cylinder and final MO source steel cylinder which are mutually communicated to form high efficiency and compact installation structure, meanwhile, MO source packaging space of the final MO source steel cylinder is smaller than that of the primary MO source steel cylinder, when in actual work, solid MO sources are stored and packaged in the primary MO source steel cylinder and the final MO source steel cylinder, the primary MO source steel cylinder is injected with gas pressure through an inert gas inlet pipe positioned at the upper end part, MO (mixed with inert gas) is output through a primary MO source outlet pipe positioned at the bottom of the steel cylinder, an MO source inlet pipe of the final MO source steel cylinder is injected through a connecting pipeline which is vertically connected, finally, final MO source gas with excellent MO source supply saturation and uniformity effects is output through the final MO source steel cylinder, the smaller final MO source gas in the MO source steel cylinder space is taken as an MO source gas regulating bottle and an MO source output end in the process, can effectively avoid in the primary MO source steel bottle because MO source vapour presses the problem that not enough and lead to the unable use of surplus, both carry out the air current linkage effect, wholly realize higher MO source supply efficiency, moreover the utility model discloses need not set up a plurality of MO sources and fill the filler opening, simple structure and installation are compact, and especially adapted is used at the MO source steel bottle supply end of little volume capacity.
The utility model discloses on above high-efficient and the compact MO source feeding device of mounting structure basis, specifically preferably proposed MO source quadruple steel bottle product, further set up two middle MO source steel bottles between elementary MO source steel bottle and final MO source steel bottle, MO source gas through elementary MO source steel bottle output is through the linkage air current effect of middle MO source steel bottle, can improve the homogeneity of MO source gas, and middle MO source steel bottle has MO source filling space equally simultaneously, can ensure the saturation of MO source gas; the utility model discloses still further provide and set up MO source quadruple steel bottle into rectangular type or square type shape, further do benefit to compact structure and installation convenience degree.
Drawings
Fig. 1 is a schematic structural view of an MO source supply apparatus according to embodiment 1 of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a top view of an MO source quadruple steel cylinder in embodiment 2 of the present invention;
FIG. 4 is a schematic diagram of the MO source four-in-one steel cylinder structure developed from FIG. 2.
Detailed Description
The embodiment of the utility model discloses an MO source supply device with high efficiency and compact installation structure, which at least comprises a primary MO source steel cylinder and a final MO source steel cylinder which are in gas communication and arranged in parallel; the primary MO source steel cylinder comprises a primary steel cylinder body with an MO source packaging space, the upper end of the primary steel cylinder body is respectively provided with an inert gas inlet pipe and an MO source filling port, the bottom of the primary steel cylinder body is provided with a primary MO source outlet pipe, the inert gas inlet pipe, the MO source filling port and the primary MO source outlet pipe are respectively communicated with the MO source packaging space, and the central line of the MO source filling port and the central line of the primary MO source outlet pipe are coincided with the central line of the primary steel cylinder body; the MO source gas inlet pipe, the final MO source gas outlet pipe and the MO source filling port are respectively communicated with the MO source packaging space, and the central line of the MO source gas inlet pipe and the central line of the MO source filling port are overlapped with the central line of the final steel cylinder body; the MO source packaging space of the final-stage steel cylinder body is smaller than that of the primary steel cylinder body, and the primary MO source gas outlet pipe is connected with the MO source gas inlet pipe through a connecting pipeline perpendicular to the primary MO source gas outlet pipe.
In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.
Example 1: referring to fig. 1 and 2, an efficient and compact MO source supply apparatus includes a primary MO source cylinder 10 and a final MO source cylinder 20, which are connected in gas communication and arranged in parallel;
in this embodiment, the primary MO source steel cylinder 10 includes a primary steel cylinder body 12 having an MO source enclosure space 11, an inert gas inlet pipe 13 and an MO source filling port 14 are respectively disposed at the upper end of the primary steel cylinder body 12, and a primary MO source outlet pipe 15 is disposed at the bottom of the primary MO source steel cylinder body, the inert gas inlet pipe 13, the MO source filling port 14 and the primary MO source outlet pipe 15 are respectively communicated with the MO source enclosure space 11, and a center line of the MO source filling port 14 and a center line of the primary MO source outlet pipe 15 are both coincident with a center line of the primary steel cylinder body 12; the final-stage MO source steel cylinder 20 comprises a final-stage steel cylinder body 22 with an MO source packaging space 21, an MO source air inlet pipe 23 is arranged at the bottom of the final-stage steel cylinder body 22, a final-stage MO source air outlet pipe 24 and an MO source filling port 25 are respectively arranged at the upper end of the final-stage steel cylinder body, the MO source air inlet pipe 23, the final-stage MO source air outlet pipe 24 and the MO source filling port 25 are respectively communicated with the MO source packaging space 21, and the central line of the MO source air inlet pipe 23 and the central line of the MO source filling port 25 are all coincided with the central line of;
in the present embodiment, the MO source sealing space 21 of the final cylinder body 22 is smaller than the MO source sealing space 11 of the primary cylinder body 12, and the primary MO source outlet 15 is connected to the MO source inlet 23 through a connecting pipe 30 perpendicular thereto;
preferably, in this embodiment, the inert gas inlet pipe 13 and the final MO source outlet pipe 24 are respectively provided with an inert gas control on-off valve 41 and an MO source control on-off valve 42, in other embodiments of the present application, the connecting pipe 30 is provided with a pipe on-off control valve for controlling the supply pressure, and the supply flow rate of the MO gas can be adjusted more flexibly through the linkage effect of the inert gas control on-off valve 41, the pipe on-off control valve 42 and the MO source control on-off valve;
preferably, in the present embodiment, the volume of the MO source encapsulation space 11 of the primary cylinder body 12 is 200-500m L, the volume of the MO source encapsulation space 21 of the final-stage cylinder body 22 is 150-400m L, the difference between the volume of the MO source encapsulation space 11 of the primary cylinder body 12 and the volume of the MO source encapsulation space 21 of the final-stage cylinder body 22 is not less than 50m L, specifically, in the present embodiment, the volume of the MO source encapsulation space 11 of the primary cylinder body 12 is 400m L, and the volume of the MO source encapsulation space 21 of the final-stage cylinder body 22 is 200m L.
The embodiment 1 creatively proposes that a high-efficiency and compact-installation MO source supply device is composed of at least a primary MO source steel cylinder 10 and a final MO source steel cylinder 20 which are in gas communication with each other, while an MO source enclosure space 21 of the final MO source steel cylinder 20 is smaller than an MO source enclosure space 11 of the primary MO source steel cylinder 10, during actual operation, solid MO sources are stored and enclosed in the primary MO source steel cylinder 10 and the final MO source steel cylinder 20, the primary MO source steel cylinder 10 injects gas pressure through an inert gas inlet pipe 13 at the upper end part, and simultaneously outputs MO source gas (mixed with inert gas) through a primary MO source outlet pipe 15 at the bottom of the steel cylinder, injects MO source gas into an MO source inlet pipe 23 of the final MO source steel cylinder 20 through a vertically connected connecting pipe 30, and finally outputs final MO source gas with excellent MO source supply saturation and uniformity effects through the final MO source steel cylinder 20, through MO source encapsulation space 21 littleer final MO source steel bottle 20 as the regulating bottle and the MO source output of MO source gas in the process, can effectively avoid in the primary MO source steel bottle 10 because MO source vapour pressure is not enough and lead to the unable problem that uses of surplus, both carry out the air current linkage effect, wholly realized higher MO source supply efficiency, and this embodiment 1 need not set up a plurality of MO source charging openings moreover, simple structure and installation are compact, especially adapted to be used at the MO source steel bottle feed end of small volume capacity.
Example 2: referring to fig. 3 and 4, the MO source four-in-one cylinder includes a first MO source cylinder 100, a second MO source cylinder 200, a third MO source cylinder 300 and a fourth MO source cylinder 400 which are sequentially connected to each other, wherein the first MO source cylinder 100 is used as a primary MO source cylinder, and the fourth MO source cylinder 400 is used as a final MO source cylinder; the second MO source cylinder 200 and the third MO source cylinder 300 are respectively used as a first intermediate MO source cylinder and a second intermediate MO source cylinder between the primary MO source cylinder and the fourth MO source cylinder 400;
in the present embodiment, the first MO source cylinder 100 includes a first cylinder body 120 having an MO source enclosure space 110, an inert gas inlet tube 121 and an MO source filling port 122 are respectively disposed at an upper end of the first cylinder body 120, and a primary MO source outlet tube 123 is disposed at a bottom thereof, the inert gas inlet tube 121, the MO source filling port 122, and the primary MO source outlet tube 123 are respectively communicated with the MO source enclosure space 110, and a center line of the MO source filling port 122 and a center line of the primary MO source outlet tube 123 are both coincident with a center line of the first cylinder body 120; the second MO source steel cylinder 200 comprises a second steel cylinder body 220 with an MO source packaging space 210, the bottom and the upper end of the second steel cylinder body 220 are respectively provided with a primary MO source inlet pipe 221 and a secondary MO source outlet pipe 222 which are communicated with the MO source packaging space 210, the primary MO source outlet pipe 123 is connected to the primary MO source inlet pipe 221 through a connecting pipe 500, and the secondary MO source outlet pipe 222 is simultaneously used as an MO source charging port of the second MO source steel cylinder 200; the third MO source steel cylinder 300 comprises a third steel cylinder body 320 with an MO source encapsulation space 310, a second MO source inlet pipe 321 and a third MO source outlet pipe 322 which are communicated with the MO source encapsulation space 310 are respectively arranged at the upper end and the bottom of the third steel cylinder body 320, the second MO source outlet pipe 222 is connected to the second MO source inlet pipe 321 through a connecting pipe 500, and the second MO source inlet pipe 321 is simultaneously used as an MO source filling port of the third MO source steel cylinder 300; the fourth MO source steel cylinder 400 includes a fourth steel cylinder body 420 having an MO source enclosure space 410, a third MO source inlet pipe 421 is disposed at the bottom of the fourth steel cylinder body 420, and a final MO source outlet pipe 422 and an MO source charging port 423 are respectively disposed at the upper end of the fourth steel cylinder body, the third MO source outlet pipe 322 is connected to the third MO source inlet pipe 421 through a connecting pipe 500, and a center line of the third MO source inlet pipe 322 and a center line of the MO source charging port are both coincident with a center line of the fourth steel cylinder body 400; an inert gas control switch valve 121a and an ultimate MO source control switch valve 422a are respectively arranged on the inert gas inlet pipe 121 and the ultimate MO source outlet pipe 422;
preferably, in order to facilitate the installation structure compactness of the MO source quadruple cylinder and reduce the installation space, in the present embodiment, the first cylinder body 120, the second cylinder body 220, the third cylinder body 320 and the fourth cylinder body 420 are arranged in a rectangular or square shape by the connection of the connection pipes 500;
preferably, in the present embodiment, the MO source sealing space 110 of the first cylinder body 120 is larger than the MO source sealing space 210 of the second cylinder body 220, the MO source sealing space 310 of the third cylinder body 320 is larger than the MO source sealing space 410 of the fourth cylinder body 400, the MO source sealing space 210 of the second cylinder body 200 is equal to the MO source sealing space 310 of the third cylinder body 300, further preferably, the MO source sealing space 110 of the first cylinder body 120 has a volume of 300-.
In this embodiment 2, two middle MO source steel cylinders are further disposed between the primary MO source steel cylinder and the final MO source steel cylinder proposed in embodiment 1, and the MO source gas output from the primary MO source steel cylinder can improve the uniformity of the MO source gas through the linkage gas flow effect of the middle MO source steel cylinders, and meanwhile, the middle MO source steel cylinder also has an MO source charging space, which can ensure the saturation of the MO source gas; this embodiment 2 still further proposes to set up MO source quadruple steel bottle into square or square shape, further does benefit to compact structure and installation convenience degree.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (5)
1. The MO source supply device is characterized by at least comprising a primary MO source steel cylinder and a final MO source steel cylinder which are in gas communication and arranged in parallel;
the primary MO source steel cylinder comprises a primary steel cylinder body with an MO source packaging space, an inert gas inlet pipe and an MO source filling port are respectively arranged at the upper end of the primary steel cylinder body, a primary MO source outlet pipe is arranged at the bottom of the primary steel cylinder body, the inert gas inlet pipe, the MO source filling port and the primary MO source outlet pipe are respectively communicated with the MO source packaging space, and the central line of the MO source filling port and the central line of the primary MO source outlet pipe are coincident with the central line of the primary steel cylinder body;
the MO source gas inlet pipe, the final MO source gas outlet pipe and the MO source filling port are respectively communicated with the MO source packaging space, and the central line of the MO source gas inlet pipe and the central line of the MO source filling port are coincided with the central line of the final steel cylinder body;
the MO source packaging space of the final-stage steel cylinder body is smaller than that of the primary-stage steel cylinder body, and the primary MO source gas outlet pipe is connected with the MO source gas inlet pipe through a connecting pipeline vertical to the primary MO source gas outlet pipe.
2. An efficient and compact MO source supply apparatus as claimed in claim 1, wherein said inert gas inlet pipe and said final MO source outlet pipe are respectively provided with an inert gas control switch valve and an MO source control switch valve.
3. An efficient and compact MO source supply apparatus as claimed in claim 2, wherein a conduit on-off control valve for controlling the supply pressure is mounted on said connecting conduit.
4. The apparatus of claim 1, wherein the MO source sealing space of the primary cylinder body has a volume of 200-500m L, and the MO source sealing space of the final cylinder body has a volume of 150-400m L.
5. The apparatus of claim 1, wherein the difference between the volume of the MO source enclosure space of the primary cylinder body and the volume of the MO source enclosure space of the final cylinder body is not less than 50m L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922323070.1U CN211118728U (en) | 2019-12-23 | 2019-12-23 | High-efficient and compact MO source feeding device of mounting structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922323070.1U CN211118728U (en) | 2019-12-23 | 2019-12-23 | High-efficient and compact MO source feeding device of mounting structure |
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| CN211118728U true CN211118728U (en) | 2020-07-28 |
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| CN201922323070.1U Active CN211118728U (en) | 2019-12-23 | 2019-12-23 | High-efficient and compact MO source feeding device of mounting structure |
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