CN211118724U - MO source duplex steel bottle - Google Patents
MO source duplex steel bottle Download PDFInfo
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- CN211118724U CN211118724U CN201922323103.2U CN201922323103U CN211118724U CN 211118724 U CN211118724 U CN 211118724U CN 201922323103 U CN201922323103 U CN 201922323103U CN 211118724 U CN211118724 U CN 211118724U
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Abstract
The utility model discloses an MO source duplex steel cylinder, which comprises a first MO source steel cylinder and a second MO source steel cylinder which are communicated through a main-level connecting pipeline, wherein a coaxial lining bottle is arranged in each steel cylinder body and divides the corresponding MO source packaging space into an outer periphery MO source packaging space and an inner periphery MO source packaging space; the lower end of the outer periphery MO source packaging space comprises a first conical surface, the lower end of the inner periphery MO source packaging space adopts a second conical surface, the conical degree of the second conical surface is greater than that of the first conical surface, and the bottom of the outer periphery MO source packaging space is communicated with the bottom of the inner periphery MO source packaging space; the upper end part of each MO source steel cylinder body is respectively provided with a first MO source filling port and a second MO source filling port; the utility model discloses through the linkage air current effect of two steel bottles, can further improve the utilization ratio of solid MO source steel bottle, can effectively improve the homogeneity of ultimate MO source outlet duct output MO source gas simultaneously.
Description
Technical Field
The utility model belongs to the technical field of MO source packaging container, concretely relates to MO source duplex steel bottle.
Background
MO Source (Metalorganic Source) refers to a high-purity metal organic compound (typical main materials include trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum, etc.) used as a basic material in MOCVD epitaxial technology, and in the foreign literature, MO Source is also commonly referred to as "MOCVD precursor" and is widely used in L ED epitaxial wafer manufacturing industry at present.
The solid MO source steel cylinder cannot reach the MO source supply saturation due to the fact that the vapor pressure of the MO source is smaller and smaller along with the smaller amount of the stored MO source, and finally the solid MO source steel cylinder in the prior art can cause a certain amount of residual MO source, so that the utilization rate of the MO source is low.
The closest prior art to the technical object of the present application is a packaging container for solid metal organic compound, which is disclosed in publication No. CN108998775A and comprises a bottle body for containing the solid metal organic compound. The bottle body is internally provided with a partition part which divides the interior of the bottle body into a first space and a second space. The partition has a gas passage connecting the first space and the second space. The air inlet pipe is connected with a carrier gas source, is arranged on the bottle body and is communicated to the first space from the top side of the first space; the gas outlet pipe is connected with a metal organic chemical vapor deposition device, arranged on the bottle body and penetrates through the bottom side of the second space, which is adjacent to the first space, to be communicated with the first space. According to the patent, through the structural configuration, the use efficiency of the solid metal organic compound is improved, and the waste of the residual solid metal organic compound is reduced; however, after the actual use of the technology, the communication space between the first space and the second space at the bottom of the steel cylinder still has the residue of the MO source, and the effect of improving the utilization rate of the solid MO source is still limited.
Therefore, the present application intends to solve the above technical problems by devising the inventive structure of the MO source cylinder itself.
Disclosure of Invention
In view of this, the utility model aims at providing a MO source pair steel bottle, the linkage air current effect through two steel bottles can further improve the utilization ratio of solid MO source steel bottle, can effectively improve the homogeneity of ultimate MO source outlet duct output MO source gas simultaneously.
The utility model adopts the technical scheme as follows:
a solid MO source steel cylinder comprises an MO source steel cylinder body with an MO source packaging space, wherein a coaxial lining sleeve bottle is arranged in the MO source steel cylinder body and divides the MO source packaging space into an outer periphery MO source packaging space and an inner periphery MO source packaging space; wherein the content of the first and second substances,
the lower end of the outer periphery MO source packaging space comprises a first conical surface, the lower end of the inner periphery MO source packaging space adopts a second conical surface, the conical degree of the second conical surface is greater than that of the first conical surface, and the bottom of the outer periphery MO source packaging space is communicated with the bottom of the inner periphery MO source packaging space;
the upper end part of the MO source steel cylinder body is respectively provided with an inert gas inlet pipe, an MO source outlet pipe, a first MO source filling port and a second MO source filling port, the inert gas inlet pipe and the first MO source filling port are respectively communicated with the peripheral MO source packaging space, and the MO source outlet pipe and the second MO source filling port are respectively communicated with the peripheral MO source packaging space;
and the inert gas inlet pipe and the MO source outlet pipe are respectively provided with an inert gas control switch valve and an MO source control switch valve.
Preferably, coaxial inside lining cover bottle sealing weld is in the upper end of MO source steel bottle body is inboard, including connecting the conical surface inside lining that is located the cylinder type inside lining of top and is located the below as an organic whole, this conical surface inside lining conduct the second conical surface, wherein, the lower tip of conical surface inside lining still integrative being connected with cylinder direction inside lining port, the height of conical surface inside lining is greater than the height of cylinder direction inside lining port just is less than the height of cylinder type inside lining, just cylinder direction inside lining port with periphery MO source packaging space bottom has the passageway that is used for the intercommunication.
Preferably, the height range of the cylindrical liner is 5-30cm, the height range of the conical liner is 1-10cm, and the height range of the port of the cylindrical guide liner is 0.2-1 cm.
Preferably, the height of the first tapered surface is greater than the height of the second tapered surface.
Preferably, the upper end of the cylindrical liner is provided with a communication port for communicating with the peripheral MO source encapsulation space.
Preferably, the first conical surfaces have a degree of taper of 30-50 ° and the second conical surfaces have a degree of taper of 40-70 °.
On the basis of the technical scheme of the solid MO source steel cylinder, the application further provides an MO source duplex steel cylinder which comprises a first MO source steel cylinder and a second MO source steel cylinder which are communicated through a main-level connecting pipeline, wherein the first MO source steel cylinder comprises a first steel cylinder body with an MO source packaging space, and the upper end part of the first steel cylinder body is respectively provided with an inert gas inlet pipe and a primary MO source outlet pipe which are communicated with the MO source packaging space; the second MO source steel cylinder comprises a second steel cylinder body with an MO source packaging space, an MO source air inlet pipe and a final MO source air outlet pipe which are communicated with the MO source packaging space are respectively arranged at the upper end part of the second steel cylinder body, and the primary MO source air outlet pipe is connected to the MO source air inlet pipe through the main-stage connecting pipeline; an inert gas control switch valve and an ultimate MO source control switch valve are respectively arranged on the inert gas inlet pipe and the ultimate MO source outlet pipe; wherein the content of the first and second substances,
a coaxial lining sleeve bottle is arranged in each steel bottle body, and divides the MO source packaging space corresponding to the coaxial lining sleeve bottle into an outer periphery MO source packaging space and an inner periphery MO source packaging space;
the lower end of the outer periphery MO source packaging space comprises a first conical surface, the lower end of the inner periphery MO source packaging space adopts a second conical surface, the conical degree of the second conical surface is greater than that of the first conical surface, and the bottom of the outer periphery MO source packaging space is communicated with the bottom of the inner periphery MO source packaging space;
the upper end of each MO source steel bottle body is provided with a first MO source filling port and a second MO source filling port respectively, the first MO source filling port is communicated with the outer peripheral MO source packaging space corresponding to the first MO source filling port, and the second MO source filling port is communicated with the inner peripheral MO source packaging space corresponding to the second MO source filling port.
Preferably, the inert gas inlet pipe is communicated with the primary MO source gas outlet pipe through a first auxiliary connecting pipeline, and a first pipeline switch control valve is arranged on the first auxiliary connecting pipeline; the MO source air inlet pipe is communicated with the ultimate MO source air outlet pipe through a second auxiliary connecting pipeline, and a second pipeline switch control valve is arranged on the second auxiliary connecting pipeline.
Preferably, the first cylinder body and the second cylinder body are identical.
Preferably, the MO source sealing space of the first cylinder body is larger than the MO source sealing space of the second cylinder body.
Preferably, the volume of the MO source encapsulation space of the first steel cylinder body is 200-1000m L, and the volume of the MO source encapsulation space of the second steel cylinder body is 150-1000m L.
Preferably, the inert gas inlet pipe and the primary MO source outlet pipe are respectively parallel to a center line of the first steel cylinder body; the MO source air inlet pipe and the final MO source air outlet pipe are parallel to the central line of the second steel cylinder body respectively.
Preferably, the installation height of the final MO source control switching valve is greater than that of the inert gas control switching valve.
Preferably, the installation heights of the first pipeline switch control valve and the second pipeline switch control valve are equal and are both greater than the installation height of the inert gas control switch valve and the installation height of the final MO source control switch valve.
Preferably, coaxial inside lining cover bottle sealing weld is inboard rather than the upper end that corresponds MO source steel bottle body, including connecting the conical surface inside lining that is located the cylinder type inside lining of top and is located the below as an organic whole, this conical surface inside lining conduct the second conical surface, wherein, the lower tip of conical surface inside lining still integrative being connected with cylinder direction inside lining port, highly being greater than of conical surface inside lining cylinder direction inside lining port highly just be less than the height of cylinder type inside lining, just cylinder direction inside lining port with periphery MO source packaging space bottom has the passageway that is used for the intercommunication.
Preferably, the height range of the cylindrical liner is 5-30cm, the height range of the conical liner is 1-10cm, and the height range of the port of the cylindrical guide liner is 0.2-1 cm.
It should be noted that the taper referred to in this application refers to the angle between the conical surface and the horizontal plane.
The applicant finds that the core reason causing the solid MO source to have more surplus is that the deposition is generated at the bottom of the steel cylinder, so that saturated vapor pressure cannot be formed, and finally the utilization rate of the solid MO source is low, the applicant provides the technical scheme of the utility model to improve the utilization rate of the MO source steel cylinder, specifically, a coaxial lining bottle is arranged in the MO source steel cylinder body, a peripheral MO source packaging space and an inner peripheral MO source packaging space which can be respectively filled with the solid MO source are formed, meanwhile, the bottoms of the two spaces are communicated and conical surface structures with different tapers are arranged, when the work is implemented, inert gas (namely MO source carrier gas) enters the peripheral MO source packaging space, the MO source positioned in the peripheral MO source packaging space quickly forms saturated gas to enter the inner peripheral MO source packaging space, and is supplied to a production line through an MO source outlet pipe to output, a second conical surface positioned at the lower end of the inner peripheral MO source packaging space and a first conical surface positioned at the lower The gas flowing effect can be effectively improved at the bottom of the steel cylinder, so that the deposition problem of the solid MO source at the bottom of the steel cylinder can be obviously improved, and the utilization rate of the solid MO source steel cylinder of the utility model is finally and effectively improved;
the utility model discloses on the basis of solid MO source steel bottle, further provide the structural scheme of MO source duplex steel bottle, wherein, first MO source steel bottle is as input access inert gas, second MO source steel bottle is as output mainly used to supply the MO source to the production line, and all store solid MO source in two MO source steel bottles, when carrying out real work, after inert gas input first MO source steel bottle, the solid MO source that lies in first MO source steel bottle receives gas pressure, form elementary MO source gas fast, then input second MO source steel bottle through the connecting tube, elementary MO source gas further mixes the MO source gas after entering second MO source steel bottle, linkage air current effect through two steel bottles, can further improve the utilization ratio of solid MO source steel bottle, can effectively improve the homogeneity of terminal MO source outlet duct output MO source gas simultaneously;
the utility model discloses still further preferably between inert gas intake pipe and elementary MO source outlet duct through the first auxiliary connection pipeline intercommunication of installing first pipeline on-off control valve, through the second auxiliary connection pipeline intercommunication of installing second on-off control valve between MO source intake pipe and ultimate MO source outlet duct, can carry out evacuation in advance to the air in the pipeline before carrying out MO source gas supply, improve the supply quality in MO source.
Drawings
FIG. 1 is a schematic structural view of a solid MO source steel cylinder in embodiment 1 of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a schematic structural view of an MO source duplex steel cylinder in embodiment 2 of the present invention;
fig. 4 is a side view of the structure of fig. 3.
Detailed Description
The embodiment of the utility model discloses an MO source duplex steel bottle, which comprises a first MO source steel bottle and a second MO source steel bottle which are communicated through a main-level connecting pipeline, wherein the first MO source steel bottle comprises a first steel bottle body with an MO source packaging space, and the upper end part of the first steel bottle body is respectively provided with an inert gas inlet pipe and a primary MO source outlet pipe which are communicated with the MO source packaging space; the second MO source steel cylinder comprises a second steel cylinder body with an MO source packaging space, the upper end part of the second steel cylinder body is respectively provided with an MO source air inlet pipe and a final MO source air outlet pipe which are communicated with the MO source packaging space, and the primary MO source air outlet pipe is connected to the MO source air inlet pipe through a main-level connecting pipeline; an inert gas control switch valve and an ultimate MO source control switch valve are respectively arranged on the inert gas inlet pipe and the ultimate MO source outlet pipe; the coaxial lining sleeve bottle divides the MO source packaging space corresponding to the coaxial lining sleeve bottle into an outer periphery MO source packaging space and an inner periphery MO source packaging space; the lower end of the outer periphery MO source packaging space comprises a first conical surface, the lower end of the inner periphery MO source packaging space adopts a second conical surface, the conical degree of the second conical surface is greater than that of the first conical surface, and the bottom of the outer periphery MO source packaging space is communicated with the bottom of the inner periphery MO source packaging space; the upper end of each MO source steel cylinder body is respectively provided with a first MO source filling port and a second MO source filling port, the first MO source filling port is communicated with the outer peripheral MO source packaging space corresponding to the first MO source filling port, and the second MO source filling port is communicated with the inner peripheral MO source packaging space corresponding to the second MO source filling port.
In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.
Example 1: referring to fig. 1 and 2, a solid MO source steel cylinder 100 includes an MO source steel cylinder body 110 having an MO source sealing space, a coaxial liner bottle 120 is disposed in the MO source steel cylinder body 110, and the coaxial liner bottle 120 divides the MO source sealing space into an outer MO source sealing space 130a and an inner MO source sealing space 130 b; the lower end of the outer circumferential MO source encapsulation space 130a includes a first tapered surface 141, the lower end of the inner circumferential MO source encapsulation space 130b adopts a second tapered surface 142, the taper of the second tapered surface 142 is greater than that of the first tapered surface 141, preferably, the height of the first tapered surface 141 is greater than that of the second tapered surface 142, the taper of the first tapered surface 141 is 30 to 50 °, and the taper of the second tapered surface 142 is 40 to 70 °;
in the present embodiment, the bottom of the outer peripheral MO source encapsulation space 130a communicates with the bottom of the inner peripheral MO source encapsulation space 130 b; the upper end of the MO source steel cylinder body 110 is respectively provided with an inert gas inlet pipe 151, an MO source outlet pipe 152, a first MO source filling port 153 and a second MO source filling port 154, the inert gas inlet pipe 151 and the first MO source filling port 153 are respectively communicated with the outer periphery MO source packaging space 130a, and the MO source outlet pipe 152 and the second MO source filling port 154 are respectively communicated with the inner periphery MO source packaging space 130 b; an inert gas control switch valve 161 and an MO source control switch valve 162 are respectively arranged on the inert gas inlet pipe 151 and the MO source outlet pipe 152;
preferably, in this embodiment, the coaxial liner bottle 120 is hermetically welded inside the upper end of the MO source steel cylinder body 110, and includes an upper cylindrical liner 121 and a lower conical liner as a second conical surface 142, which are integrally connected, wherein the lower end of the conical liner is further integrally connected with a cylindrical guide liner port 122, the height of the conical liner is greater than the height of the cylindrical guide liner port 122 and less than the height of the cylindrical liner 121, and the cylindrical guide liner port 122 and the bottom of the peripheral MO source encapsulation space 130a have a passage 123 for communication; preferably, the height range of the cylindrical liner 121 is 5-30cm, the height range of the conical liner is 1-10cm, and the height range of the cylindrical guide liner port 122 is 0.2-1 cm;
preferably, in order to adjust the gas flow effect between the outer circumferential MO source enclosure space 130a and the inner circumferential MO source enclosure space 130b, in the present embodiment, the upper end of the cylindrical liner 121 is provided with a communication port 124 for communicating with the outer circumferential MO source enclosure space 130 a.
The applicant finds that the core reason of the large residual amount of the solid MO source is that the deposition occurs at the bottom of the steel cylinder, so that saturated vapor pressure cannot be formed, and finally the utilization rate of the solid MO source is low, and therefore, the applicant forms an outer circumferential MO source packaging space 130a and an inner circumferential MO source packaging space 130b which can be respectively filled with the solid MO source by arranging the coaxial inner liner bottle 120 in the MO source steel cylinder body 110, and simultaneously the bottoms of the two spaces are communicated and provided with the conical surfaces 141 and 142 with different tapers, when the present invention is implemented, inert gas (i.e., MO source carrier gas) enters the outer circumferential MO source packaging space 130a through the inert gas inlet pipe 151, and the MO source in the outer circumferential MO source packaging space 130a quickly forms saturated gas to enter the inner circumferential MO source packaging space 130b and is supplied and output to a production line through the MO source outlet pipe 152, and the second conical surface 142 at the lower end of the inner circumferential MO source packaging space 130b and the first conical surface The conical surface 141 can effectively improve the gas flow effect at the bottom of the steel cylinder, so that the deposition problem of the solid MO source at the bottom of the steel cylinder can be obviously improved, and finally, the utilization rate of the solid MO source steel cylinder 100 of the embodiment is effectively improved.
Example 2: referring to fig. 3 and 4, an MO source duplex cylinder includes a first MO source cylinder 10 and a second MO source cylinder 20 connected by a primary connecting pipe 30 and used for storing and packaging an MO source, wherein the first MO source cylinder 10 includes a first cylinder body 12 having an MO source packaging space 11, and an inert gas inlet pipe 13 and a primary MO source outlet pipe 14 connected to the MO source packaging space 11 are respectively provided at an upper end of the first cylinder body 12; the second MO source steel cylinder 20 comprises a second steel cylinder body 22 with an MO source packaging space 21, the upper end of the second steel cylinder body 22 is respectively provided with an MO source inlet pipe 23 and a final MO source outlet pipe 24 which are communicated with the MO source packaging space 21, and the primary MO source outlet pipe 24 is connected to the MO source inlet pipe 23 through a main-stage connecting pipe 30; an inert gas control switch valve 13a and an ultimate MO source control switch valve 24a are respectively arranged on the inert gas inlet pipe 13 and the ultimate MO source outlet pipe 24;
in the present embodiment, the first cylinder body 12 and the second cylinder body 22 both adopt the structure of the solid MO source cylinder 100 in example 1, a coaxial liner bottle 120 is provided in each cylinder body 12,22, and the upper end portion of each MO source cylinder body is respectively provided with a first MO source filling port 40a and a second MO source filling port 40b, the first MO source filling port 40a communicates with the corresponding outer peripheral MO source sealing space thereof, and the second MO source filling port 40b communicates with the corresponding inner peripheral MO source sealing space thereof, preferably, in the present embodiment, the first cylinder body 12 and the second cylinder body 22 are the same, and certainly, in other embodiments, the MO source sealing space of the first cylinder body may be larger than the MO source sealing space of the second cylinder body, preferably, in the present embodiment, the MO source sealing space of the first cylinder body has a volume of 200-;
preferably, in the present embodiment, the inert gas inlet pipe 13 is communicated with the primary MO source outlet pipe 14 through a first auxiliary connecting pipe 15, and a first pipe switch control valve 15a is disposed on the first auxiliary connecting pipe 15; the MO source air inlet pipe 23 is communicated with the final MO source air outlet pipe 24 through a second auxiliary connecting pipe 25, and a second pipe switch control valve 25a is arranged on the second auxiliary connecting pipe 25;
preferably, in order to ensure that the MO source supply saturation is not adversely affected, in the present embodiment, the inert gas inlet pipe 13 and the primary MO source outlet pipe 14 are respectively parallel to the center line of the first cylinder body 12; in the present embodiment, the MO source inlet 23 and the final MO source outlet 24 are parallel to the center line of the second cylinder body 22; the installation height of the final MO source control on-off valve 24a is greater than that of the inert gas control on-off valve 13 a; the first pipe switching control valve 15a and the second pipe switching control valve 25a are installed at the same height and are larger than the installation height of the final MO source control switching valve 24 a.
The embodiment further provides a structural scheme of an MO source duplex steel cylinder on the basis of the solid MO source steel cylinder, wherein, the first MO source steel cylinder 10 is used as an input end to access inert gas, the second MO source steel cylinder 20 is used as an output end to mainly supply MO source to a production line, and solid MO source is stored in both MO source steel cylinders 10,20, in actual operation, after the inert gas is fed into the first MO source cylinder 10, the solid MO source located in the first MO source cylinder 10 is subjected to gas pressure to rapidly form a primary MO source gas, then the primary MO source gas is fed into the second MO source steel cylinder 20 through the connecting pipe 30, and further mixed with the MO source gas after entering the second MO source steel cylinder 20, and then subjected to the linkage gas flow action of the double steel cylinders, the utilization rate of the solid MO source steel cylinder can be further improved, and the uniformity of the MO source gas output by the final MO source gas outlet pipe can be effectively improved;
in this embodiment, it is further preferable that the inert gas inlet pipe 13 and the primary MO source outlet pipe 14 are communicated with each other through a first auxiliary connection pipe 15 having a first pipe switching control valve 15a, and the MO source inlet pipe 23 and the final MO source outlet pipe 24 are communicated with each other through a second auxiliary connection pipe 25 having a second switching control valve 25a, so that air in the pipe of the MO source duplex cylinder can be evacuated in advance before the MO source gas is supplied, thereby improving the supply quality of the MO source.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. An MO source duplex steel cylinder is characterized by comprising a first MO source steel cylinder and a second MO source steel cylinder which are communicated through a main-level connecting pipeline, wherein the first MO source steel cylinder comprises a first steel cylinder body with an MO source packaging space, and an inert gas inlet pipe and a primary MO source outlet pipe which are communicated with the MO source packaging space are respectively arranged at the upper end part of the first steel cylinder body; the second MO source steel cylinder comprises a second steel cylinder body with an MO source packaging space, an MO source air inlet pipe and a final MO source air outlet pipe which are communicated with the MO source packaging space are respectively arranged at the upper end part of the second steel cylinder body, and the primary MO source air outlet pipe is connected to the MO source air inlet pipe through the main-stage connecting pipeline; an inert gas control switch valve and an ultimate MO source control switch valve are respectively arranged on the inert gas inlet pipe and the ultimate MO source outlet pipe; wherein the content of the first and second substances,
a coaxial lining sleeve bottle is arranged in each steel bottle body, and divides the MO source packaging space corresponding to the coaxial lining sleeve bottle into an outer periphery MO source packaging space and an inner periphery MO source packaging space;
the lower end of the outer periphery MO source packaging space comprises a first conical surface, the lower end of the inner periphery MO source packaging space adopts a second conical surface, the conical degree of the second conical surface is greater than that of the first conical surface, and the bottom of the outer periphery MO source packaging space is communicated with the bottom of the inner periphery MO source packaging space;
the upper end of each MO source steel bottle body is provided with a first MO source filling port and a second MO source filling port respectively, the first MO source filling port is communicated with the outer peripheral MO source packaging space corresponding to the first MO source filling port, and the second MO source filling port is communicated with the inner peripheral MO source packaging space corresponding to the second MO source filling port.
2. The MO source duplex steel cylinder of claim 1, wherein the inert gas inlet pipe is communicated with the primary MO source outlet pipe through a first auxiliary connecting pipe, and a first pipe switch control valve is arranged on the first auxiliary connecting pipe; the MO source air inlet pipe is communicated with the ultimate MO source air outlet pipe through a second auxiliary connecting pipeline, and a second pipeline switch control valve is arranged on the second auxiliary connecting pipeline.
3. The MO source duplex cylinder of claim 1, wherein the first cylinder body and the second cylinder body are identical.
4. The MO source duplex cylinder of claim 1 or 3, wherein the MO source sealing space of the first cylinder body is larger than the MO source sealing space of the second cylinder body.
5. The MO source duplex cylinder of claim 1, wherein the volume of the MO source encapsulation space of the first cylinder body is 200-1000m L, and the volume of the MO source encapsulation space of the second cylinder body is 150-1000m L.
6. The MO source duplex steel cylinder of claim 1, wherein the inert gas inlet pipe and the primary MO source outlet pipe are respectively parallel to a central line of the first steel cylinder body; the MO source air inlet pipe and the final MO source air outlet pipe are parallel to the central line of the second steel cylinder body respectively.
7. The MO source duplex steel cylinder of claim 1, wherein the installation height of the final MO source control switch valve is greater than the installation height of the inert gas control switch valve.
8. The MO source duplex steel cylinder of claim 2, wherein the installation height of the first pipeline switch control valve and the installation height of the second pipeline switch control valve are equal and are both greater than the installation height of the inert gas control switch valve and the installation height of the final MO source control switch valve.
9. The MO source duplex steel cylinder of claim 1, wherein the coaxial lining sleeve bottle seal welding is inside the upper end of the MO source steel cylinder body corresponding thereto, including connecting as an organic whole the cylinder type inside lining that is located above and the conical surface inside lining that is located below, and this conical surface inside lining is as the second conical surface, wherein, the lower tip of conical surface inside lining still integrative is connected with cylinder direction inside lining port, the height of conical surface inside lining is greater than the height of cylinder direction inside lining port just is less than the height of cylinder type inside lining, just cylinder direction inside lining port with periphery MO source packaging space bottom has the passageway that is used for the intercommunication.
10. The cylinder of claim 9, wherein the cylindrical liner has a height ranging from 5 to 30cm, the tapered liner has a height ranging from 1 to 10cm, and the cylindrical guide liner port has a height ranging from 0.2 to 1 cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922323103.2U CN211118724U (en) | 2019-12-23 | 2019-12-23 | MO source duplex steel bottle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922323103.2U CN211118724U (en) | 2019-12-23 | 2019-12-23 | MO source duplex steel bottle |
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| CN211118724U true CN211118724U (en) | 2020-07-28 |
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| CN201922323103.2U Active CN211118724U (en) | 2019-12-23 | 2019-12-23 | MO source duplex steel bottle |
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