CN217808750U

CN217808750U - Liquid feeding system

Info

Publication number: CN217808750U
Application number: CN202221819785.1U
Authority: CN
Inventors: 崔尚坤; 朱海洋; 李飞; 王维斌; 李龙祥
Original assignee: Shenghejing Micro Semiconductor Jiangyin Co Ltd
Current assignee: SJ Semiconductor Jiangyin Corp
Priority date: 2022-06-28
Filing date: 2022-06-28
Publication date: 2022-11-15
Anticipated expiration: 2032-06-28

Abstract

The utility model provides a liquid adding system, which comprises a liquid tank, a first pipeline and a second pipeline; a liquid feeding port is formed in the top of the liquid tank; the first pipeline is inserted into the liquid tank, the first end of the first pipeline is arranged at the bottom of the liquid tank, and the second end of the first pipeline is arranged outside the liquid tank; a check valve is arranged on the first pipeline outside the liquid tank; the first end of the second pipeline is connected with the second end of the first pipeline through a power pump, and the second end outputs liquid. The liquid adding system of the utility model conveys liquid through the liquid tank, has large volume, can reduce the time for changing liquid when the system is shut down, and improves the running time of the system; the liquid feeding system can quantitatively add inert gas according to the volume of the liquid tank, and the liquid tank is sealed, so that the decomposition of chemical substances is avoided, and the normal operation of equipment is guaranteed.

Description

Liquid feeding system

Technical Field

The utility model relates to a semiconductor manufacturing field especially relates to a liquid feeding system.

Background

As shown in fig. 1, a hand valve and a power pump are arranged on a liquid feeding pipeline of a conventional liquid feeding system, a first end of the liquid feeding pipeline is connected with a raw liquid barrel through a corrugated pipe, and a second end of the liquid feeding pipeline outputs liquid; when in use, the hand valve is opened, and the stock solution is output through the power pump. The existing liquid adding system has the following defects: a small-capacity stock solution barrel is used for adding liquid, and the stock solution barrel replacement frequency is high; when the original liquid barrel is replaced, the problem of gas recharging pipelines exists; after a new stock solution barrel is replaced, a large amount of chemical gas is consumed for discharging gas in the pipeline; the potential safety hazard to operators is caused by the separation of chemical gases; when the original liquid barrel leaving the factory is directly used, the original liquid barrel cannot be sealed, and the main chemical components of the original liquid are decomposed and lose efficacy in about one week.

Therefore, how to solve the disadvantages of the prior liquid adding system using a small-volume stock solution barrel for liquid adding becomes one of the problems to be solved urgently by the technical personnel in the field.

SUMMERY OF THE UTILITY MODEL

In view of the above shortcomings in the prior art, an object of the present invention is to provide a liquid feeding system for solving the shortcomings existing in the prior art using a small-volume stock solution barrel for liquid feeding.

In order to achieve the above and other related objects, the present invention provides a liquid feeding system, which comprises a liquid tank, a first pipeline and a second pipeline;

a liquid feeding port is formed in the top of the liquid tank; the first pipeline is inserted into the liquid tank, the first end of the first pipeline is arranged at the bottom of the liquid tank, and the second end of the first pipeline is arranged outside the liquid tank; a check valve is arranged on the first pipeline outside the liquid tank; the first end of the second pipeline is connected with the second end of the first pipeline through a power pump, and the second end outputs liquid.

Optionally, a sealing device is further arranged on the filling opening.

More optionally, the sealing means is a sealing membrane or a sealing cap.

Optionally, the first end of the first conduit is located one fifth of the height of the tank.

Optionally, a liquid level meter is further arranged on the liquid tank.

More optionally, the liquid level meter is a communication type liquid level meter.

Optionally, the charging system further comprises a third conduit; the first end of the third pipeline is connected with an inert gas storage tank, and the second end of the third pipeline is arranged in the liquid tank; and a normally open plant valve is also arranged on the third pipeline outside the liquid tank.

More optionally, the second end of the third conduit is positioned at nine tenths of the tank height.

More optionally, the inert gas storage tank is a nitrogen gas storage tank.

As mentioned above, the utility model discloses a liquid feeding system has following beneficial effect:

1, the utility model discloses a liquid feeding system carries liquid through the fluid reservoir, and the volume is big, and it is long when the liquid is traded to the machine that can reduce the system delay, improves system operation duration.

2, the utility model discloses a liquid feeding system can be according to the volume of fluid reservoir, and the ration adds inert gas and the fluid reservoir is sealed, has avoided chemical's decomposition, and the normal operation of guarantee equipment.

Drawings

Fig. 1 is a schematic structural diagram of a liquid feeding system in the prior art.

Fig. 2 shows a schematic structural view of the liquid adding system of the present invention.

Description of the element reference numerals

1. Liquid tank

11. Liquid filling opening

2. First pipeline

21. Check valve

3. Second pipeline

4. Liquid level meter

5. Third pipeline

51. Normally open service valve

Detailed Description

The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

Please refer to fig. 2. It should be noted that the drawings provided in the present embodiment are only for schematically illustrating the basic concept of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, amount and proportion of each component may be changed arbitrarily and the layout of the components may be more complicated.

The present embodiment provides a liquid feeding system, which includes a liquid tank 1, a first pipeline 2 and a second pipeline 3.

As shown in fig. 2, a filling opening 11 is arranged at the top of the liquid tank 1, and the liquid tank 1 is filled through the filling opening 11. The volume of the liquid tank 1 is greater than that of a single original liquid barrel leaving a factory, in this embodiment, the volume of the liquid tank 1 is 10L, and the volume of the liquid tank 1 may also be set according to actual needs, which is not limited herein. In this embodiment, the liquid tank 1 has a tetragonal structure, and the liquid tank 1 may also have other three-dimensional structures, such as a circular truncated cone shape and a cylindrical shape, which are not limited herein; the liquid filling port 11 is arranged on the top surface of the liquid tank 1, the liquid filling port 11 can also be arranged on the side surface of the liquid tank 1, liquid is filled through the liquid pumping device, and the position of the liquid filling port 11 is arranged according to actual needs without limitation.

Specifically, the liquid filling port 11 is sealed, and a sealing device (the sealing device is not shown in the figure) is arranged on the liquid filling port 11 and is used for sealing after liquid filling, so that gas is prevented from being separated out. In the existing liquid adding system, when a delivery raw liquid barrel is used up, the system needs to stop running, so that the delivery raw liquid barrel is replaced, and the system is started to run after the delivery raw liquid barrel is replaced; compared with the existing liquid adding system which uses a small-capacity delivery raw liquid barrel, the liquid tank 1 of the embodiment has larger capacity, thereby reducing the downtime of the system and improving the running time.

The sealing device is, for example, a sealing film or a sealing cover, and the sealing device may have other structures, which is not limited herein.

Specifically, still be provided with level gauge 4 on the fluid reservoir 1, through level gauge 4 knows the liquid capacity in the fluid reservoir 1 when the liquid capacity in the fluid reservoir 1 is less than the setting value, in time through filling opening 11 adds the stoste, has reduced the frequency of changing the stoste bucket of leaving the factory.

As an example, the liquid level meter is a 4-position communication type liquid level meter, the principle of the communication type liquid level meter is a communicating vessel, so that the liquid level can be detected in real time, the structure is simple, and the failure rate is low. The liquid level meter 4 may be other devices capable of knowing the liquid capacity in the tank 1, and is not limited herein.

As shown in fig. 2, the first pipe 2 is inserted into the top of the tank 1, a first end of the first pipe 2 is placed at the bottom of the tank 1, and a second end is placed outside the tank 1. The liquid inlet of the first pipeline 2 is a first end, and the first end is arranged below the lowest liquid level in the liquid tank 1; the liquid outlet is a second end and is arranged outside the liquid tank 1. The top surface of the liquid tank 1 is provided with a through hole, the first pipeline 2 is inserted into the top surface of the liquid tank 1 through the through hole, and the through hole is provided with a sealing ring so as to prevent gas from being separated out through the through hole. In this embodiment, the top surface and the top portion represent a surface where the filling opening 11 is located.

Specifically, a check valve 21 is disposed on the first pipe 2 outside the liquid tank 1, and the check valve 21 is close to the second end of the first pipe 2 and far away from the first end of the first pipe 2. The check valve 21 serves to prevent the liquid in the first pipe 2 from flowing backward, thereby increasing the system stability.

As an example, the first end of the first pipe 2 is placed at a fifth of the height of the tank 1, and the position of the first end of the first pipe 2 is set according to actual needs, which is not limited herein.

As shown in fig. 2, the first end of the second pipeline 3 is connected with the second end of the first pipeline 2 through a power pump, and the second end outputs liquid.

As an implementation manner of this embodiment, the liquid adding system further includes a third pipe 5; the first end of the third pipeline 5 is connected with an inert gas storage tank (the inert gas tank is not shown in the figure), and the second end is arranged in the liquid tank 1.

As an example, the second end of the third pipe 5 is placed at the ninth tenth of the height of the tank 1, and the position of the second end of the third pipe 5 is set according to actual needs, which is not limited herein.

Specifically, a normally open service valve 51 is provided in the third pipe 5 outside the liquid tank 1. The tank 1 is also fed with inert gas through a normally open service valve 51, which is chemically inert and can be used as shielding gas. Under the condition that the capacity of the liquid tank 1 is determined, adding inert gas according to the requirement, and sealing the liquid tank 1; according to the Charter principle, the pressure is increased, and the reversible reaction is carried out towards the direction of reducing the pressure, so that the decomposition of chemical substances is avoided, and the operation cost is reduced.

As an example, the inert gas storage tank is a nitrogen gas storage tank, and the inert gas is nitrogen gas. In the chemical industry, nitrogen is mainly used as protective gas, replacement gas, washing gas and safety guarantee gas, and is widely applied.

The utility model discloses an among the liquid feeding system, replace the stock solution bucket that dispatches from the factory of small capacity through the large capacity fluid reservoir, when liquid is less than the default in the fluid reservoir, only need add the stock solution through the filling opening, need not to change the fluid reservoir to reduced the decomposition of the chemical substance in the stock solution bucket that dispatches from the factory.

To sum up, the utility model provides a liquid feeding system, which comprises a liquid tank, a first pipeline and a second pipeline; a liquid feeding port is formed in the top of the liquid tank; the first pipeline is inserted into the liquid tank, the first end of the first pipeline is arranged at the bottom of the liquid tank, and the second end of the first pipeline is arranged outside the liquid tank; a check valve is arranged on the first pipeline outside the liquid tank; the first end of the second pipeline is connected with the second end of the first pipeline through a power pump, and the second end outputs liquid. The liquid adding system of the utility model conveys liquid through the liquid tank, the volume is large, the time for changing liquid when the system is down can be reduced, and the system operation time is improved; the liquid adding system can quantitatively add inert gas according to the volume of the liquid tank, and the liquid tank is sealed, so that the decomposition of chemical substances is avoided, and the normal operation of equipment is guaranteed. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims

1. A charging system, characterized in that it comprises at least: the device comprises a liquid tank, a first pipeline and a second pipeline;

2. The charging system according to claim 1, characterized in that: and a sealing device is also arranged on the liquid filling port.

3. The charging system according to claim 2, characterized in that: the sealing device is a sealing film or a sealing cover.

4. The charging system according to claim 1, characterized in that: the first end of the first conduit is disposed at one fifth of the height of the tank.

5. The charging system according to claim 1, characterized in that: and a liquid level meter is also arranged on the liquid tank.

6. The charging system of claim 5, wherein: the liquid level meter is a communicated liquid level meter.

7. The charging system according to claim 1, characterized in that: the liquid adding system also comprises a third pipeline; the first end of the third pipeline is connected with an inert gas storage tank, and the second end of the third pipeline is arranged in the liquid tank; and a normally open plant valve is also arranged on the third pipeline outside the liquid tank.

8. The charging system according to claim 7, characterized in that: the second end of the third conduit is disposed at nine tenths of the tank height.

9. The charging system of claim 7, wherein: the inert gas storage tank is a nitrogen storage tank.