CN211112320U

CN211112320U - A wiring frock for furnace body

Info

Publication number: CN211112320U
Application number: CN201922164877.5U
Authority: CN
Inventors: 张庆龙; 绳仁龙; 田晓凡
Original assignee: Shandong Yuankun Electronic Technology Co ltd
Current assignee: Shandong Yuankun Electronic Technology Co ltd
Priority date: 2019-12-06
Filing date: 2019-12-06
Publication date: 2020-07-28
Anticipated expiration: 2029-12-06

Abstract

A wiring tool for a furnace body comprises a bakelite plate, a support plate, an aluminum bar, studs and nuts; the bakelite plate is provided with a through hole I, a through hole II and a through hole III according to the electrode distance, and the supporting plate is provided with 2 through holes IV and V for fixing the bakelite plate; through holes VI and VII are formed in the two ends of the aluminum busbar, a stud penetrates through a through hole II in the bakelite plate and a through hole IV in the supporting plate and is fixed by a nut, and a stud penetrates through a through hole III in the bakelite plate and a through hole V in the supporting plate and is fixed by a nut; a stud penetrates through the through hole VI on the aluminum bar and is fixed on the electrode by a nut, and the stud penetrates through the through hole VII on the aluminum bar and the through hole I on the bakelite plate and is fixed by the nut; the utility model discloses the advantage: low cost, simple structure, reasonable design, convenient use, convenient replacement, stable operation, repeated use and the like.

Description

A wiring frock for furnace body

Technical Field

The utility model relates to a semiconductor material processing field especially relates to a wiring frock for single crystal furnace body. The utility model is suitable for a single crystal furnace uses, still is applicable to needs cable circular telegram industrial equipment or equipment such as polycrystal stove, diffusion furnace, annealing stove, synthetic furnace, oxidation furnace.

Background

In recent years, with the rapid development of the domestic semiconductor industry, more strict requirements are also put forward on the quality of semiconductor materials, particularly on the quality of single crystal growth and production equipment. Wherein, the furnace body needs high-power heating, but in order to ensure the safe power consumption, the large current and the low voltage are all implemented; the large current causes the need for a corresponding cable. If the cable is directly connected to the electrode, a certain falling force exists, and the welding part of the electrode and the furnace wire is pulled to be cracked; certain heat on the surface of the furnace body volatilizes, the volatilized heat can bake the insulating layer on the surface of the cable, so that the insulating layer is aged and peeled, the cable wire is easy to age, and the service life is influenced; a new cable needs to be replaced in a short time; if high-temperature cables are used, the cost is too high, and the cables need to be replaced for a long time. The replacement of the cable needs to be stopped, and the cable can be replaced when the temperature is reduced, so that the time and the cost are wasted.

Disclosure of Invention

To the not enough of furnace body wiring method existence among the prior art, the utility model aims to provide a furnace body wiring frock, it has: low cost, simple structure, reasonable design, convenient use, convenient replacement, stable operation, repeated use and the like.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a wiring frock for furnace body which characterized in that: the tool comprises a bakelite plate, a support plate, an aluminum bar, a stud and a nut; the bakelite plate is provided with corresponding through holes I (corresponding to the number of the electrodes), and the supporting plate is provided with 2 through holes IV and V for fixing the bakelite plate; and through holes II and III are formed in the bakelite plate corresponding to the through holes IV and V of the support plate. Two ends of the aluminum bar are provided with a through hole VI and a through hole VII, wherein the supporting plate is fixed at the appointed position of the furnace body according to the requirement; a stud penetrates through the through hole II on the bakelite plate and the through hole IV on the supporting plate and is fixed by a nut, and a stud penetrates through the through hole III on the bakelite plate and the through hole V on the supporting plate and is fixed by a nut; a stud penetrates through a through hole VI on the aluminum bar and is fixed on the electrode by a nut, and the stud penetrates through a through hole VII on the aluminum bar and a through hole I on the bakelite plate and is fixed by the nut; corresponding aluminum bars and bakelite plate through holes can be installed in an increasing and decreasing mode according to the number and the spacing of the electrodes.

The utility model has the advantages that: the operation is simple, convenient and quick; the support plate, the bakelite plate and the aluminum bar are combined, so that the surface temperature transmission of the furnace body is reduced, the insulating layer of the cable is protected, and the service life of the cable is prolonged; the falling acting force of the cable is prevented from being transmitted to the electrode of the furnace body, so that the welding position between the electrode and the furnace wire is cracked, and the furnace body is prevented from being fatally damaged; the cable is intersected with the aluminum row on the bakelite plate and is far away from the surface temperature of the furnace body, so that the service life of the cable is prolonged; the method also has wide applicability, and is not only suitable for single crystal furnaces, but also suitable for industrial equipment or equipment which adopts electrode heating, such as polycrystalline furnaces, diffusion furnaces, annealing furnaces, synthesis furnaces, oxidation furnaces and the like.

Drawings

Fig. 1 is the utility model discloses the assembly structure schematic diagram of wiring frock installation on the furnace body.

Fig. 2 is a schematic structural view of the bakelite plate of the present invention.

Fig. 3 is a schematic view of the supporting plate structure of the present invention.

Fig. 4 is a schematic view of the through hole structure at the back of the supporting plate according to the present invention.

Fig. 5 is a schematic structural diagram of the through hole of the aluminum row of the present invention.

In the attached drawings

1. A furnace body; 2. a bakelite plate; 3. aluminum bars; 4. a stud; 5. a support plate; 6. a nut; 7. an electrode; 8. a through hole I; 9. a through hole II; 10. a through hole III; 11. a through hole IV; 12. a through hole V; 13. vias VI, 14, via VII.

Detailed Description

The following describes in detail a furnace body wiring method according to the present invention with reference to the accompanying drawings.

A wiring tool for a furnace body is shown in figures 1-5: the tool comprises a bakelite plate 2, a support plate 5, an aluminum row 3, a stud 4 and a nut 6; the bakelite plate 2 is provided with corresponding through holes I8 (corresponding to the number of the electrodes 7 with holes) at intervals of the electrodes 7, and the support plate 5 is provided with 2 through holes IV11 and V12 for fixing the bakelite plate 2; and through holes II9 and III10 are formed at the positions of the bakelite plate 2 corresponding to the through holes IV11 and V12 of the support plate 5. Through holes VI13 and VII14 are arranged at the two ends of the aluminum row 3, wherein the supporting plate 5 is fixed at the appointed position of the furnace body 1 according to requirements; the screw bolt penetrates through a through hole II9 on the bakelite plate 2 and a through hole IV11 on the supporting plate 5 and is fixed by a nut 6, and the screw bolt 4 penetrates through a through hole III10 on the bakelite plate 2 and a through hole V12 on the supporting plate 5 and is fixed by a nut 6; a stud 4 penetrates through a through hole VI13 on the aluminum bar 3 and is fixed on the electrode 7 by a nut 6, and the stud 4 penetrates through a through hole VII14 on the aluminum bar 3 and a through hole I8 on the bakelite plate 2 and is fixed by the nut 6; the through holes of the corresponding aluminum row 3 and the corresponding bakelite plate 2 can be increased or decreased according to the number and the spacing of the electrodes 7.

The utility model discloses except being used for single crystal growing furnace to use in this embodiment, still be applicable to industrial equipment or equipment that adopt electrode heating such as polycrystal stove, diffusion furnace, annealing stove, synthetic furnace, oxidation furnace, all gained fine effect.

The embodiments described above are intended to facilitate one of ordinary skill in the art to understand and practice the invention. It will be readily apparent to those skilled in the art that various modifications to these embodiments may be made, and the generic principles described herein may be applied to other embodiments without the use of the inventive faculty. Therefore, the present invention is not limited to the embodiments herein, and those skilled in the art should understand that modifications and alterations made without departing from the scope of the present invention are within the protection scope of the present invention.

Claims

1. The utility model provides a wiring frock for furnace body which characterized in that: the tool comprises a bakelite plate (2), a support plate (5), an aluminum bar (3), studs (4) and nuts (6); corresponding through holes I (8) are formed in the bakelite plate (2) according to the distance between the electrodes (7), and 2 through holes IV (11) and 2 through holes V (12) for fixing the bakelite plate (2) are formed in the supporting plate (5); and through holes II (9) and III (10) are formed in the positions of the bakelite plate (2) corresponding to the through holes IV (11) and V (12) of the support plate (5).

2. Two ends of the aluminum row (3) are provided with a through hole VI (13) and a through hole VII (14), wherein the supporting plate (5) is fixed on the appointed position of the furnace body (1) according to requirements; a stud penetrates through a through hole II (9) on the bakelite plate (2) and a through hole IV (11) on the supporting plate (5) and is fixed by a nut (6), and a stud (4) penetrates through a through hole III (10) on the bakelite plate (2) and a through hole V (12) on the supporting plate (5) and is fixed by a nut (6); a stud (4) penetrates through a through hole VI (13) on the aluminum bar (3) and is fixed on the electrode (7) by a nut (6), and the stud (4) penetrates through a through hole VII (14) on the aluminum bar (3) and a through hole I (8) on the bakelite plate (2) and is fixed by the nut (6); the through holes of the corresponding aluminum row (3) and the corresponding bakelite plate (2) can be increased or decreased according to the number and the spacing of the electrodes (7).