CN211069872U

CN211069872U - Stirring device for photoresist

Info

Publication number: CN211069872U
Application number: CN201921330767.5U
Authority: CN
Inventors: 李永斌
Original assignee: Gansu Hualong Core Material Technology Co ltd
Current assignee: Gansu Hualong Core Material Technology Co ltd
Priority date: 2019-08-16
Filing date: 2019-08-16
Publication date: 2020-07-24
Anticipated expiration: 2029-08-16

Abstract

The utility model discloses a stirring apparatus for photoresist belongs to photoresist processing equipment technical field, the power distribution box comprises a box body, be provided with a plurality of spacers, every in the box all be provided with the spout on the spacer, the top of spacer is provided with the backup pad, the bottom of backup pad be provided with spout matched with slider, the upper portion of backup pad is provided with a plurality of bottled section of thick bamboos of putting, every put a bottled section of thick bamboo and constitute, every put and be provided with at least three stop gear in the bottled section of thick bamboo, every stop gear extends to put the inboard of a bottled section of thick bamboo, every one side of backup pad all is provided with rocks mechanism, every rock the mechanism and extend to the box outside. Through the arrangement of the sliding block, the sliding groove, the supporting plate, the bottle placing barrel, the limiting mechanism and the shaking mechanism, the photoresist bottles with different sizes can be stirred and mixed uniformly.

Description

Stirring device for photoresist

Technical Field

The utility model relates to a photoresist processing equipment field, it relates to a agitating unit of photoresist to specificly.

Background

The photoresist is one of the key materials for fine pattern processing in the microelectronic technology, and particularly, the development of large-scale and ultra-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist. The photoresist has complex technology and more varieties, is mainly divided into three types including photopolymerization type, adopts alkene monomers to generate free radicals under the action of light, and the free radicals further initiate the polymerization of the monomers to finally generate polymers, and has the characteristic of forming positive images; the photolysis type adopts a material containing azidoquinones compounds, can generate photolysis reaction after illumination, changes oil solubility into water solubility, and can be prepared into positive glue; the photo-crosslinking type uses polyvinyl alcohol laurate and the like as photosensitive materials, under the action of light, double bonds in molecules of the photosensitive materials are opened, and the chains are crosslinked to form an insoluble network structure, so that the photosensitive materials play a role in corrosion resistance, and are typical negative photoresist.

At present, a stirring method of manually shaking a bottle filled with photoresist is generally adopted, and a further stirring method is to use a machine instead of manual shaking, for example, the publication No. CN208959786U discloses a photoresist stirrer, which is further provided with a reciprocating frame, wherein the reciprocating frame is fixed with a reciprocating first motor for driving a rotating device, and a guide part for slidably connecting the rotating device and the reciprocating frame is arranged between the rotating device and the reciprocating frame. The utility model discloses let the bottle along with the roller folk prescription between the roller to the pivoted basis on prior art, according to the design of the relevant principle of crank connecting rod, reciprocating mechanism drive rotates frame reciprocating motion, and circumferential direction adds straight reciprocating motion and makes the photoresist stirring more even, stirs the mixing efficiency height, and the practicality is strong.

Although the patent realizes the advantages of stirring and uniform stirring of the photoresist by adopting a machine, the photoresist mixing machine has the defects that the photoresist mixing machine can only mix bottles with photoresist in one size, cannot mix bottles with different sizes with photoresist at the same time, and has certain limitation in application range.

SUMMERY OF THE UTILITY MODEL

To the defect that above-mentioned current agitating unit can not be simultaneously mixed the not equidimension bottle that is equipped with the photoresist, the utility model aims at providing an agitating unit of photoresist.

The utility model discloses a realize above-mentioned purpose and specifically adopt following technical scheme: the utility model provides a stirring device of photoresist, includes the box, be provided with a plurality of spacers, every in the box all be provided with the spout on the spacer, the top of spacer is provided with the backup pad, the bottom of backup pad be provided with spout matched with slider, the upper portion of backup pad is provided with a plurality of bottle section of thick bamboos of putting, every put a bottle section of thick bamboo and constitute by the hollow stand of round, every it is provided with at least three stop gear in the bottle section of thick bamboo to put, every stop gear extends to put the inboard of a bottle section of thick bamboo, every one side of backup pad all is provided with rocks mechanism, every it extends to rock the mechanism the box outside.

The working principle is as follows: open the door of box front side, the bottle that is equipped with the photoresist that will need the stirring is arranged in and is put a bottle section of thick bamboo, stop gear opposition bottle section of thick bamboo in the bottle has carried out spacing step-up, when preventing that the backup pad from driving to put a bottle section of thick bamboo and the bottle rocks the stirring and mixes, prevent to put a bottle in the bottle section of thick bamboo and rock, rock the mechanism to the backup pad, put a bottle section of thick bamboo and bottle and rock, make the photoresist misce bene in the bottle, the slider plays the supporting role to the backup pad, when rocking the mechanism drives the backup pad and rocks back and forth, the slider lies in the round. Through slider, spout, backup pad, put a bottle section of thick bamboo, stop gear and the setting of rocking the mechanism, can stir the misce bene to not including the photoresist bottle of equidimension simultaneously, solved above-mentioned current agitating unit can not be simultaneously to the defect that the not equidimension bottle that is equipped with the photoresist mixes.

Furthermore, each limiting mechanism comprises a first motor fixed in the bottle containing cylinder, a telescopic rod connected with the first motor and a limiting block fixed at the end part of the telescopic rod, and the end part of the telescopic rod extends to the inner side of the bottle containing cylinder. First motor drive telescopic link is made a round trip to stretch out and draw back, can step up not the bottle of equidimension simultaneously, and spacing effectual, stopper are direct and the body contact.

Furthermore, the limiting block is square or crescent. The manufacture is convenient, and the tightening effect is good.

Furthermore, the supporting plate is arranged on the two sides of the box body, the inner wall of the box body is provided with an anti-collision pad, and the anti-collision pad is made of foam, rubber, sponge or cotton yarn. The setting of crashproof pad prevents that the both ends of backup pad from making a round trip to rock the time and the box inner wall bumps firmly, has prolonged the life of equipment.

Furthermore, each shaking mechanism comprises a supporting seat positioned outside the box body, a first gear positioned on the supporting seat, a second gear meshed with the first gear, an eccentric shaft positioned on the second gear, a first connecting rod connected to the eccentric shaft, a second connecting rod connected with the first connecting rod and a second motor driving the first gear to rotate, wherein the second connecting rod penetrates through the box body and is fixedly connected with one side of the supporting plate; the second connecting rod is connected with the first connecting rod through a fixing column, and the outer side of the connecting column is rotatably sleeved with the first connecting rod; one side of the box body, which is close to the second connecting rod, is provided with a through hole, and the second connecting rod is sleeved in the through hole in a sliding manner. The bottles filled with the photoresist are placed in the bottle containing barrel, each bottle is tightened by the adjusting limiting mechanism, the output shaft of the second motor rotates to drive the first gear to rotate, the first gear rotates to drive the second gear to rotate, the eccentric shaft arranged during rotation of the second gear drives the first connecting rod to move, the first connecting rod moves to enable the second connecting rod and the sliding block to drive the supporting plate to move back and forth, and then the photoresist in the bottles is shaken.

Further, the slider is of an inverted T shape. The inverted T-shaped sliding block saves most labor when supporting the supporting plate.

Furthermore, the bottom of box is provided with the base, the base with be provided with damper between the box. When the sliding block in the box body drives the supporting plate, the bottle placing barrel and the bottle to shake back and forth, the whole box body can shake left and right, the purpose of the damping mechanism is arranged, the shaking of the box body is reduced, and the safety is guaranteed.

Further, the damping mechanism is a spring or a damping pad, and the damping pad is made of rubber or foam. The spring or the shock pad has good shock absorption effect.

In the technical scheme of this application, still can be provided with the controller on the box, the controller with first motor with the second motor electricity is connected, and the controller is real-time to first motor and second motor control.

The utility model has the advantages as follows:

(1) through the arrangement of the sliding block, the sliding groove, the supporting plate, the bottle placing barrel, the limiting mechanism and the shaking mechanism, photoresist bottles with different sizes can be stirred and mixed uniformly;

(2) the first motor drives the telescopic rod to extend back and forth, bottles with different sizes can be simultaneously clamped, the limiting effect is good, and the limiting block is directly contacted with the bottle body;

(3) the setting of crashproof pad prevents that the both ends of backup pad make a round trip to rock the time and the box inner wall bumps hard, has prolonged the life of equipment:

(4) the bottles filled with the photoresist are placed in a bottle placing barrel, each bottle is tightened by adjusting a limiting mechanism, an output shaft of a second motor rotates to drive a first gear to rotate, the first gear rotates to drive a second gear to rotate, an eccentric shaft arranged when the second gear rotates drives a first connecting rod to move, the first connecting rod moves to enable the second connecting rod and a sliding block to drive a supporting plate to move back and forth, and then the photoresist in the bottles is shaken;

(5) the inverted T-shaped sliding block saves most labor when supporting the supporting plate;

(6) when the sliding block in the box body drives the supporting plate, the bottle placing barrel and the bottle to shake back and forth, the whole box body can shake left and right, the purpose of the damping mechanism is arranged, the shaking of the box body is reduced, and the safety is guaranteed.

Drawings

FIG. 1 is a schematic diagram of a stirring apparatus for a photoresist according to the present application.

Reference numerals: 1-box body, 2-spacer block, 3-chute, 4-supporting plate, 5-slide block, 6-bottle placing barrel, 7-first motor, 8-telescopic rod, 9-limiting block, 10-anti-collision pad, 11-supporting seat, 12-first gear, 13-second gear, 14-eccentric shaft, 15-first connecting rod, 16-connecting rod, 17-second connecting rod, 18-base and 19-shock pad.

Detailed Description

For a better understanding of the present invention, the present invention will be described in further detail with reference to the accompanying drawings and the following embodiments.

Example 1

As shown in fig. 1, a photoresist stirring device comprises a box body 1, wherein a plurality of spacer blocks 2 are arranged in the box body 1, each spacer block 2 is provided with a sliding groove 3, a supporting plate 4 is arranged above the spacer block 2, the bottom of the supporting plate 4 is provided with a sliding block 5 matched with the sliding groove 3, the upper portion of the supporting plate 4 is provided with a plurality of bottle containing cylinders 6, each bottle containing cylinder 6 is composed of a circle of hollow upright posts, each bottle containing cylinder 6 is internally provided with at least three limiting mechanisms, each limiting mechanism extends to the inner side of the bottle containing cylinder 6, one side of the supporting plate 4 is provided with a shaking mechanism, and each shaking mechanism extends to the outer side of the box body 1.

The working principle is as follows: open the door of 1 front side of box, the bottle that is equipped with the photoresist that will need the stirring is arranged in and is put a bottle section of thick bamboo 6, the bottle in stop gear opposition bottle section of thick bamboo 6 has carried out spacing step-up, when preventing that backup pad 4 from driving to put a bottle section of thick bamboo 6 and bottle and rocking the stirring and mixing, prevent to put the bottle in a bottle section of thick bamboo 6 and rock, rock the mechanism to backup pad 4, put a bottle section of thick bamboo 6 and bottle and rock, make the photoresist misce bene in the bottle, slider 5 plays supporting role to backup pad 4, rock the mechanism and drive backup pad 4 when rocking back and forth, slider 5 lies in the round trip motion in its matched with spout. Through slider 5, spout 3, backup pad 4, put a bottle section of thick bamboo 6, stop gear and the setting of rocking the mechanism, can stir the misce bene to not including the photoresist bottle of equidimension simultaneously, solved above-mentioned current agitating unit can not be simultaneously to the defect that the not equidimension bottle that is equipped with the photoresist mixes.

Example 2

Based on embodiment 1, as shown in fig. 1, each of the limiting mechanisms includes a first motor 7 fixed in the bottle containing cylinder 6, an expansion link 8 connected to the first motor 7, and a limiting block 9 fixed at an end of the expansion link 8, where an end of the expansion link 8 extends to an inner side of the bottle containing cylinder 6.

First motor 7 drive telescopic link 8 makes a round trip to stretch out and draw back, can step up not equidimension bottle simultaneously, and spacing effectual, stopper 9 is direct and the body contact.

Example 3

Based on embodiment 2, as shown in fig. 1, the limiting block 9 is square or crescent.

The manufacture is convenient, and the tightening effect is good.

Example 4

Based on embodiment 1, as shown in fig. 1, crash pads 10 are disposed on the inner walls of the box body 1 at two sides of the supporting plate 4, and the crash pads 10 are one of foam, rubber, sponge or cotton yarn.

The crash pad 10 prevents that the both ends of backup pad 4 from bumping hard with 1 inner wall of box when rocking back and forth, has prolonged the life of equipment.

Example 5

Based on embodiment 1, as shown in fig. 1, each of the rocking mechanisms includes a supporting base 11 located outside the box body 1, a first gear 12 located on the supporting base 11, a second gear 13 engaged with the first gear 12, an eccentric shaft 14 located on the second gear 13, a first connecting rod 15 connected to the eccentric shaft 14, a second connecting rod 17 connected to the first connecting rod 15, and a second motor driving the first gear 12 to rotate, wherein the second connecting rod 17 penetrates through the box body 1 and is fixedly connected to one side of the supporting plate 4; the second connecting rod 17 is connected with the first connecting rod 15 through a fixed column, and the outer side of the connecting column 16 is rotatably sleeved with the first connecting rod 15; one side of the box body 1 close to the second connecting rod 17 is provided with a through hole, and the second connecting rod 17 is sleeved in the through hole in a sliding mode.

The bottles filled with the photoresist are placed in the bottle containing barrel 6, each bottle is tightened by the adjusting limiting mechanism, the first gear 12 is driven to rotate by the rotation of the output shaft of the second motor, the second gear 13 is driven to rotate by the rotation of the first gear 12, the eccentric shaft 14 arranged when the second gear 13 rotates drives the first connecting rod 15 to move, and the second connecting rod 17 and the sliding block 5 are driven by the first connecting rod 15 to move to drive the supporting plate 4 to move back and forth, so that the photoresist in the bottles is shaken.

Example 6

Based on embodiment 1, as shown in fig. 1, the slider 5 is of an inverted T shape.

The inverted T-shaped sliding block 5 is most labor-saving when supporting the supporting plate 4.

Example 7

Based on embodiment 1, as shown in fig. 1, a base 18 is disposed at the bottom of the box 1, and a damping mechanism is disposed between the base 18 and the box 1.

When slider 5 in the box 1 drives backup pad 4, puts a bottled section of thick bamboo 6 and the bottle and makes a round trip to rock, rocks about whole box 1 can, and the purpose that sets up damper reduces rocking of box 1, guarantees safety.

Example 8

Based on embodiment 1, as shown in fig. 1, the damping mechanism is a spring or a damping pad 19, and the damping pad 19 is made of rubber or foam.

The spring or the shock pad 19 has good shock absorption effect.

It should be understood by those skilled in the art that the first motor 7, the second motor (not shown), and the controller (not shown) in the present embodiment are all products that can be purchased in different models and specifications according to specific needs, for example, in the present invention, the model of the first motor and the model of the second motor are Y-180L-8, and the model of the controller is FKQ 640-7.

The foregoing is a primary feature of the present solution and its advantages, and it should be understood by those skilled in the art that the present solution is not limited by the foregoing embodiments, and that the foregoing embodiments and descriptions are only illustrative of the principles of the present solution, and that various changes and modifications may be made therein without departing from the spirit and scope of the present solution, which fall within the scope of the invention as claimed, and the scope of the present solution is defined by the appended claims and their equivalents.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a releasable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through an intermediary profile, or both. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Claims

1. The utility model provides a stirring apparatus of photoresist, includes box (1), its characterized in that: be provided with a plurality of spacer blocks (2) in box (1), every all be provided with spout (3) on spacer block (2), the top of spacer block (2) is provided with backup pad (4), the bottom of backup pad (4) be provided with spout (3) matched with slider (5), the upper portion of backup pad (4) is provided with a plurality of bottle section of thick bamboo (6) of putting, every put a bottle section of thick bamboo (6) and constitute by round hollow stand, every be provided with at least three stop gear in putting a bottle section of thick bamboo (6), every stop gear extends to put the inboard of a bottle section of thick bamboo (6), every one side of backup pad (4) all is provided with rocks the mechanism, every rock the mechanism extend to the box (1) outside.

2. The stirring apparatus for photoresist according to claim 1, wherein each of the limiting mechanisms comprises a first motor (7) fixed inside the bottle holding cylinder (6), a telescopic rod (8) connected to the first motor (7), and a limiting block (9) fixed at an end of the telescopic rod (8), wherein an end of the telescopic rod (8) extends to an inner side of the bottle holding cylinder (6).

3. The stirring device for photoresist according to claim 2, wherein the stopper (9) is square or crescent shaped.

4. The stirring device for photoresist according to claim 1, wherein crash pads (10) are disposed on the inner wall of the box body (1) at both sides of the supporting plate (4).

5. The stirring apparatus of a photoresist according to claim 1, wherein each of the rocking mechanisms comprises a supporting base (11) located outside the housing (1), a first gear (12) located on the supporting base (11), a second gear (13) engaged with the first gear (12), an eccentric shaft (14) located on the second gear (13), a first connecting rod (15) connected to the eccentric shaft (14), a second connecting rod (17) connected to the first connecting rod (15) and a second motor for driving the first gear (12) to rotate, the second connecting rod (17) passing through the housing (1) and fixedly connected to one side of the supporting plate (4); the second connecting rod (17) is connected with the first connecting rod (15) through a fixed column, and the outer side of the connecting column (16) is rotatably sleeved with the first connecting rod (15); one side of the box body (1) close to the second connecting rod (17) is provided with a through hole, and the second connecting rod (17) is sleeved in the through hole in a sliding mode.

6. A stirring device for photoresist according to claim 1, characterized in that the slide (5) is of inverted T-shape.

7. The stirring apparatus for photoresist according to claim 1, wherein a base (18) is disposed at the bottom of the box (1), and a damping mechanism is disposed between the base (18) and the box (1).

8. The stirring apparatus for photoresist according to claim 7, wherein the damping mechanism is a spring or a damping pad (19), and the damping pad (19) is made of rubber or foam.