CN220110901U - Stirring device for photoresist - Google Patents
Stirring device for photoresist Download PDFInfo
- Publication number
- CN220110901U CN220110901U CN202321620124.0U CN202321620124U CN220110901U CN 220110901 U CN220110901 U CN 220110901U CN 202321620124 U CN202321620124 U CN 202321620124U CN 220110901 U CN220110901 U CN 220110901U
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- stirring
- photoresist
- driving motor
- utility
- model
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- 238000003756 stirring Methods 0.000 title claims abstract description 63
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 40
- 239000003292 glue Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 230000009471 action Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000006303 photolysis reaction Methods 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- -1 azide quinone compounds Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- POULHZVOKOAJMA-UHFFFAOYSA-M dodecanoate Chemical compound CCCCCCCCCCCC([O-])=O POULHZVOKOAJMA-UHFFFAOYSA-M 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229940070765 laurate Drugs 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Mixers Of The Rotary Stirring Type (AREA)
Abstract
The utility model relates to a photoresist stirring device which comprises a fixed base, wherein a first fixed vertical plate and a second fixed vertical plate are respectively connected to the left side and the right side of the fixed base, rotating shafts are respectively connected to the top ends of the first fixed vertical plate and the second fixed vertical plate and are arranged on the same axis, a photoresist homogenizing barrel is connected between the rotating shafts, a gear ring is sleeved on one side of the outer part of the photoresist homogenizing barrel, a first driving motor is connected to the fixed base, a driving gear is connected to a driving shaft of the first driving motor, the driving gear is meshed with the gear ring, a second driving motor is connected to one side of the photoresist homogenizing barrel, the driving shaft of the second driving motor penetrates through the photoresist homogenizing barrel and is in driving connection with a stirring shaft, a plurality of stirring blades are connected to the stirring shaft, and stirring blades are connected to the stirring blades and are in touching arrangement with the inner wall of the photoresist homogenizing barrel. The utility model can improve the working efficiency and the stirring uniformity.
Description
Technical Field
The utility model relates to the field of photoresist stirring, in particular to a photoresist stirring device.
Background
Photoresist is one of key materials for micro pattern processing in microelectronic technology, and especially the development of large-scale and ultra-large-scale integrated circuits in recent years has greatly promoted the research, development and application of photoresist. The photoresist has complex technology and more varieties, is mainly divided into three types, including photopolymerization, adopts vinyl monomers, generates free radicals under the action of light, further initiates the polymerization of the monomers by the free radicals, and finally generates polymers, and has the characteristic of forming positive images; photodecomposition type materials containing azide quinone compounds are adopted, and after illumination, photodecomposition reaction can occur, and oil solubility is changed into water solubility, so that positive glue can be prepared; photo-crosslinking is performed by using polyvinyl alcohol laurate or the like as a photosensitive material, and under the action of light, double bonds in molecules of the photosensitive material are opened, and chains are crosslinked to form an insoluble network structure, so that the photosensitive material plays a role in corrosion resistance, and is a typical negative photoresist.
At present, a stirring method of manually shaking a bottle filled with photoresist is generally adopted, a machine is adopted to replace manual shaking, for example, an authorized publication number CN208959786U discloses a photoresist stirrer, a reciprocating frame is further arranged on the photoresist stirrer, a reciprocating first motor for driving a rotating device is fixed on the reciprocating frame, a guide piece for connecting the rotating device with the reciprocating frame in a sliding manner is arranged between the rotating device and the reciprocating frame, the reciprocating mechanism drives the rotating frame to reciprocate, and the photoresist is stirred more uniformly due to the circumferential rotation and the linear reciprocation, but the efficiency is slower.
Disclosure of Invention
In order to solve the technical problems, the utility model aims to provide a stirring device for photoresist.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a agitating unit of photoresist, includes unable adjustment base, be connected with first fixed riser and the fixed riser of second on unable adjustment base's the left side and the right side respectively, all be connected with the pivot on the top of first fixed riser and the fixed riser of second, they set up at the same axis, be connected with the samming bucket between the pivot, the cover is equipped with the gear ring on the outside one side of samming bucket, be connected with first driving motor on the unable adjustment base, be connected with drive gear in the drive shaft of first driving motor, drive gear meshes with the gear ring mutually, be connected with second driving motor on one side of samming bucket, the drive shaft of second driving motor passes samming bucket and is connected with the (mixing) shaft drive, be connected with a plurality of stirring vane on the (mixing) vane, the stirring vane is connected with stirring scraper blade and the inner wall of samming bucket and touches the setting.
Preferably, in the stirring device for photoresist, the gear ring is connected with the photoresist homogenizing barrel through welding.
Preferably, in the stirring device for photoresist, the stirring blades on one side of the stirring shaft and the stirring blades on the other side of the stirring shaft are arranged in a staggered structure.
Preferably, in the stirring device for photoresist, the photoresist homogenizing barrel is made of PP or stainless steel.
Preferably, in the stirring device for photoresist, a guide ring is connected to the photoresist homogenizing barrel, the guide ring is opposite to the gear ring, and the fixed base is connected with a guide pulley sliding on the guide ring.
Preferably, in the stirring device for photoresist, the guide pulley is connected to the fixed base through a bearing with a seat.
By means of the scheme, the utility model has at least the following advantages:
according to the utility model, through the autorotation glue homogenizing barrel and the stirring assembly stirring in the barrel, the solution in the glue homogenizing barrel can be effectively and uniformly stirred, so that the comprehensive stirring in the glue homogenizing barrel is realized, the efficiency is ensured, and meanwhile, the uniformity of the solution is ensured.
The foregoing description is only an overview of the present utility model, and is intended to provide a better understanding of the present utility model, as it is embodied in the following description, with reference to the preferred embodiments of the present utility model and the accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the structure of the present utility model;
fig. 2 is a schematic diagram of the internal structure of the glue homogenizing barrel.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Examples
As shown in fig. 1 and fig. 2, a stirring device for photoresist comprises a fixed base 1, a first fixed vertical plate 2 and a second fixed vertical plate 3 are respectively connected on the left side and the right side of the fixed base 1, rotating shafts 4 are respectively connected to the top ends of the first fixed vertical plate 2 and the second fixed vertical plate 3, the rotating shafts are arranged on the same axis, a photoresist homogenizing barrel 5 is connected between the rotating shafts 4, a gear ring 6 is sleeved on one side of the outer part of the photoresist homogenizing barrel 5, a first driving motor 7 is connected to the fixed base 1, a driving gear 8 is connected to a driving shaft of the first driving motor 7, the driving gear 8 is meshed with the gear ring 6, a second driving motor 9 is connected to one side of the photoresist homogenizing barrel 5, the driving shaft of the second driving motor 9 penetrates through the photoresist homogenizing barrel 5 and is in driving connection with a stirring shaft 10, a plurality of stirring blades 11 are connected to the stirring shaft 10, stirring blades 12 are connected to the stirring blades 11, and the stirring blades 12 are arranged in a manner of touching the inner wall of the photoresist homogenizing barrel 5.
According to the utility model, the gear ring 6 is connected with the glue homogenizing barrel 5 through welding, so that the stability of fixing the gear ring can be ensured.
According to the stirring shaft, the stirring blades on one side of the stirring shaft 10 and the stirring blades on the other side of the stirring shaft are arranged in a staggered structure, and the stirring blades in the staggered structure can be used for sufficiently stirring the solution, so that the purpose of uniform stirring is achieved.
In the utility model, the spin basket 5 is made of PP or stainless steel.
According to the utility model, the guide ring 13 is connected to the spin basket 5, the guide ring 13 is opposite to the gear ring, and the fixed base 1 is connected with the guide pulley 14 sliding on the guide ring 13, so that stable rotation can be effectively achieved.
The guide pulley 14 is connected to the fixed base through a bearing with a seat.
It should be understood by those skilled in the art that the first driving motor 7, the second driving motor and the controller in the present embodiment all belong to products with different types and specifications, which can be purchased in the market according to specific requirements in the prior art, for example, in the present utility model, the types of the first driving motor and the second driving motor are Y-180L-8, and the types of the controller are FKQ640-7.
The working principle of the utility model is as follows:
the concrete during operation has seted up the filling opening on the side of samming bucket, after injecting into the samming bucket with the solution, realize the rotation of samming bucket and the rotation of stirring piece ((mixing shaft, stirring vane and stirring scraper blade)) in the samming bucket respectively through starting first driving motor second driving motor, realize the tumbling that samming bucket can stop through the rotation to ensure that the solution in the samming bucket can both be stirred, and the stirring piece can make its interior samming bucket that gets the solution all by even stirring, and make the solution can not remain on the inside of samming bucket.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present utility model, it should be noted that the azimuth or positional relationship indicated by the terms "vertical", "horizontal", "inner", "outer", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship that is conventionally put in use of the product of this application, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or vertical, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, and it should be noted that it is possible for those skilled in the art to make several improvements and modifications without departing from the technical principle of the present utility model, and these improvements and modifications should also be regarded as the protection scope of the present utility model.
Claims (6)
1. A stirring device for photoresist, which is characterized in that: including unable adjustment base (1), be connected with first fixed riser (2) and second fixed riser (3) on unable adjustment base (1)'s the left side and the right side respectively, all be connected with pivot (4) on the top of first fixed riser (2) and second fixed riser (3), they set up at same axis, be connected with samming bucket (5) between pivot (4), the cover is equipped with gear ring (6) on one side of the outside of samming bucket (5), be connected with first driving motor (7) on unable adjustment base (1), be connected with driving gear (8) in the drive shaft of first driving motor (7), driving gear (8) mesh with gear ring (6), be connected with second driving motor (9) on one side of samming bucket (5), the drive shaft of second driving motor (9) is passed samming bucket (5) and is connected with the drive of (10), be connected with a plurality of stirring vane (11) on (10), stirring vane (11) touch stirring vane (12) on stirring vane (12) and stirring barrel (12) are touched.
2. A photoresist stirring device according to claim 1, wherein: the gear ring (6) is connected with the glue homogenizing barrel (5) through welding.
3. A photoresist stirring device according to claim 1, wherein: the stirring blades on one side of the stirring shaft (10) and the stirring blades on the other side of the stirring shaft are arranged in a staggered structure.
4. A photoresist stirring device according to claim 1, wherein: the material of the glue homogenizing barrel (5) is PP or stainless steel.
5. A photoresist stirring device according to claim 1, wherein: the glue homogenizing barrel (5) is connected with a guide ring (13), the guide ring (13) is opposite to the gear ring, and the fixed base (1) is connected with a guide pulley (14) sliding on the guide ring (13).
6. A photoresist stirring apparatus according to claim 5, wherein: the guide pulley (14) is connected to the fixed base through a bearing with a seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321620124.0U CN220110901U (en) | 2023-06-26 | 2023-06-26 | Stirring device for photoresist |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321620124.0U CN220110901U (en) | 2023-06-26 | 2023-06-26 | Stirring device for photoresist |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220110901U true CN220110901U (en) | 2023-12-01 |
Family
ID=88917194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321620124.0U Active CN220110901U (en) | 2023-06-26 | 2023-06-26 | Stirring device for photoresist |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220110901U (en) |
-
2023
- 2023-06-26 CN CN202321620124.0U patent/CN220110901U/en active Active
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