CN210973246U - Winding deviation correcting mechanism and roll-to-roll CVD equipment with same - Google Patents
Winding deviation correcting mechanism and roll-to-roll CVD equipment with same Download PDFInfo
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- CN210973246U CN210973246U CN201922030564.0U CN201922030564U CN210973246U CN 210973246 U CN210973246 U CN 210973246U CN 201922030564 U CN201922030564 U CN 201922030564U CN 210973246 U CN210973246 U CN 210973246U
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Abstract
The utility model relates to the technical field of winding devices, and provides a winding deviation correcting mechanism and a roll-to-roll CVD device with the same, wherein the winding deviation correcting mechanism is positioned behind a heating zone of the roll-to-roll CVD device and used for adjusting a metal foil with a deviated position to an original position, the winding deviation correcting mechanism comprises a deviation correcting shaft and a fixed shaft, and the deviation correcting shaft is arranged in a vacuum cavity of the roll-to-roll CVD device; the fixed shaft is arranged in the vacuum cavity, and the metal foil sequentially bypasses the deviation rectifying shaft, the fixed shaft and a material receiving shaft of the roll-to-roll CVD equipment after passing through the heating zone; wherein, the metal foil is set up on rectifying the axle, and the axle of rectifying can swing the setting to drive the metal foil and remove. The metal foil with the position deviated is driven by the deviation correcting shaft to move, namely the direction of acting force applied to the metal foil can be changed, and the metal foil with the position deviated can be gradually restored to the original position under the pulling action of the material receiving shaft.
Description
Technical Field
The disclosure relates to the technical field of winding devices, in particular to a winding deviation correcting mechanism and a roll-to-roll CVD device with the same.
Background
The graphene is a two-dimensional atomic crystal material composed of carbon atoms, has excellent mechanical, thermal, optical, electrical and other properties, and has wide application prospects in the fields of advanced materials, energy and the like.
The continuous batch preparation of the graphene film material can be realized by adopting a roll-to-roll CVD method. In the non-heating winding process, when the discharge shaft and the receiving shaft are kept parallel and the foil at the discharge end is wound orderly, stable and unbiased winding can be realized even if no deviation rectifying device is arranged. However, in the CVD growth process, since the elastic modulus of the base foil decreases after passing through a high temperature region, a very small deformation is easily generated, and a significant deviation occurs during the winding process, which affects the quality of the foil and the graphene film, and even when the deviation is too large, the foil may be broken, resulting in the suspension of the roll-to-roll growth.
SUMMERY OF THE UTILITY MODEL
It is a primary object of the present disclosure to overcome at least one of the above-mentioned drawbacks of the prior art and to provide a roll-to-roll CVD apparatus having the same.
According to the utility model discloses a first aspect provides a mechanism of rectifying of coiling, is located after the zone of heating of volume to volume CVD equipment for take place the metal foil adjustment to the initial position of skew with the position, the mechanism of rectifying of coiling includes:
the deviation correcting shaft is arranged in a vacuum cavity of the roll-to-roll CVD equipment;
the fixed shaft is arranged in the vacuum cavity, and the metal foil sequentially bypasses the deviation rectifying shaft, the fixed shaft and a material receiving shaft of the roll-to-roll CVD equipment after passing through the heating zone;
wherein, the metal foil is set up on rectifying the axle, and the axle of rectifying can swing the setting to drive the metal foil and remove.
In an embodiment of the present invention, one end of the deviation rectifying shaft is hinged in the vacuum chamber, and the other end of the deviation rectifying shaft is movably disposed along the vertical direction.
The utility model discloses an embodiment, the mechanism of rectifying of coiling still includes:
the driving part is used for being arranged in the vacuum cavity and is in driving connection with the deviation rectifying shaft so as to drive the deviation rectifying shaft to swing along the vertical direction.
The utility model discloses an embodiment, the mechanism of rectifying of coiling still includes:
and the controller is connected with the driving part.
The utility model discloses an embodiment, the mechanism of rectifying of coiling still includes:
the detector is arranged in the vacuum cavity and positioned between the deviation rectifying shaft and the fixed shaft, and comprises at least two detecting heads;
wherein the controller is connected with the detector.
In one embodiment of the present invention, the detector is a photodetector, an infrared detector, or an ultrasonic detector.
The utility model discloses an embodiment, the mechanism of rectifying of coiling still includes:
a guide rail extending in a vertical direction;
the slide block is arranged on the guide rail and is in driving connection with the deviation rectifying shaft, and the driving part is in driving connection with the slide block so that the driving part is in driving connection with the deviation rectifying shaft through the slide block.
In an embodiment of the present invention, the driving portion includes a stepping motor, an electromagnet group, or a hydraulic controller.
In an embodiment of the present invention, the fixing shaft is located below the deviation correcting shaft and the material receiving shaft to press the metal foil.
According to the utility model discloses a second aspect provides a volume to volume CVD equipment, including foretell coiling mechanism, vacuum cavity and the receipts material axle of rectifying, the coiling at least part setting of mechanism of rectifying is in the vacuum cavity.
The utility model discloses an in the embodiment, receive the material axle and be on a parallel with the fixed axle, and when the axle of rectifying is in initial position, receive the material axle and be on a parallel with the axle of rectifying.
The utility model discloses a coiling mechanism of rectifying a deviation is through rectifying a deviation the metal foil removal that the axle drive position took place the skew, and the effort direction that the metal foil received promptly can change, and under the pulling effect of receiving the material axle, the metal foil that the skew took place in the position can resume primary position gradually.
Drawings
Various objects, features and advantages of the present disclosure will become more apparent from the following detailed description of preferred embodiments thereof, when considered in conjunction with the accompanying drawings. The drawings are merely exemplary illustrations of the disclosure and are not necessarily drawn to scale. In the drawings, like reference characters designate the same or similar parts throughout the different views. Wherein:
FIG. 1 is a schematic diagram illustrating a winding deflection mechanism according to an exemplary embodiment;
FIG. 2 is a schematic diagram illustrating a control flow of a winding deflection mechanism according to an exemplary embodiment.
The reference numerals are explained below:
1. a metal foil; 2. a material receiving shaft; 10. an axis of rectification; 20. a fixed shaft; 50. a drive section; 60. a controller; 70. and a detector.
Detailed Description
Exemplary embodiments that embody features and advantages of the present disclosure are described in detail below in the specification. It is to be understood that the disclosure is capable of various modifications in various embodiments without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.
In the following description of various exemplary embodiments of the disclosure, reference is made to the accompanying drawings, which form a part hereof, and in which are shown by way of illustration various exemplary structures, systems, and steps in which aspects of the disclosure may be practiced. It is to be understood that other specific arrangements of parts, structures, example devices, systems, and steps may be utilized and structural and functional modifications may be made without departing from the scope of the present disclosure. Moreover, although the terms "over," "between," "within," and the like may be used in this specification to describe various example features and elements of the disclosure, these terms are used herein for convenience only, e.g., in accordance with the orientation of the examples in the figures. Nothing in this specification should be construed as requiring a specific three dimensional orientation of structures in order to fall within the scope of this disclosure.
An embodiment of the utility model provides a winding mechanism of rectifying is located behind the zone of heating of volume to volume CVD equipment for adjust the metal foil 1 that the position takes place to squint to primary position, please refer to fig. 1, and winding mechanism of rectifying includes: the deviation rectifying shaft 10 is arranged in a vacuum cavity of the roll-to-roll CVD equipment, and the deviation rectifying shaft 10 is used for being arranged in the vacuum cavity of the roll-to-roll CVD equipment; the fixed shaft 20 is used for being arranged in a vacuum cavity, and the metal foil 1 sequentially bypasses the deviation rectifying shaft 10, the fixed shaft 20 and the material receiving shaft 2 of the roll-to-roll CVD equipment after passing through the heating zone; wherein, metal foil 1 sets up on rectifying axle 10, and rectifying axle 10 can swing the setting to drive metal foil 1 and remove.
The utility model discloses a coiling mechanism of rectifying a deviation is through rectifying axle 10 and drive the metal foil 1 that the position takes place to squint and remove, and the effort direction that metal foil 1 received promptly can change, under the pulling effect of receiving material axle 2, and the metal foil 1 that the position takes place to squint can resume home position gradually to avoid metal foil 1 because the too big fracture problem that arouses of skew.
In one embodiment, the two ends of the deviation correcting shaft 10 are respectively defined as the left end and the right end along the axial direction of the deviation correcting shaft 10, and the optimal position and the original position of the metal foil 1 can be considered to be located in the middle of the deviation correcting shaft 10 during the whole deposition process of the metal foil 1. The metal foil 1 may deviate to the left or right in the moving process, i.e. to the left or right, at this time, the deviation correcting shaft 10 swings, the swinging direction is determined according to the left or right deviation, and the effect of the swinging of the deviation correcting shaft 10 is to change the stress direction of the metal foil 1, so that the metal foil 1 gradually returns to the original position.
In one embodiment, one end of the deviation correcting shaft 10 is hinged in the vacuum chamber, and the other end of the deviation correcting shaft 10 is movably disposed in a vertical direction. The deviation correcting shaft 10 can ensure that the metal foil 1 can be restored to the original position after the position deviation occurs through the up-and-down swinging.
As shown in fig. 1, the winding deviation correcting mechanism further includes: the driving part 50 is used for being arranged in the vacuum cavity, and the driving part 50 is in driving connection with the deviation rectification shaft 10 so as to drive the deviation rectification shaft 10 to swing along the vertical direction. The driving unit 50 mainly functions to drive the deviation correcting shaft 10 to swing, and many structures capable of driving the deviation correcting shaft 10 to swing are required, but it is necessary to ensure easy control.
In one embodiment, the winding deviation correcting mechanism further comprises: and a controller 60, wherein the controller 60 is connected with the driving part 50. The controller 60 is used to control the operation state of the driving part 50.
In one embodiment, the driving part 50 includes a stepping motor, and the controller 60 is connected to the stepping motor. When the position of the metal foil 1 is deviated, the controller 60 controls the stepping motor to operate, the stepping motor drives the deviation rectifying shaft 10 to swing for a certain distance along the vertical direction, and the swing direction of the deviation rectifying shaft 10 can be upward or downward and is mainly determined according to the deviation direction of the metal foil 1. The controller 60 can control not only the start of the stepping motor but also the swing direction of the stepping motor driving correction shaft 10 and the swing amount of the correction shaft 10.
In one embodiment, the controller 60 is adapted to be disposed within or outside of the vacuum chamber.
In one embodiment, the stepper motor may be replaced with a set of electromagnets, hydraulic controller, etc., which may be controlled by the controller 60 and which may drive the movement of the rectification shaft 10.
As shown in fig. 1, the winding deviation correcting mechanism further includes: a probe 70, the probe 70 is used for being arranged in the vacuum cavity and is positioned between the rectification shaft 10 and the fixed shaft 20, and the probe 70 comprises at least two probe heads; wherein the controller 60 is connected to the detector 70. The detector 70 is used to determine the offset direction of the metal foil 1, i.e. two detector heads located on both sides of the metal foil 1 are used to determine the offset direction of the metal foil 1.
In one embodiment. The two detecting heads are located on the same side of the metal foil 1, when the metal foil 1 does not deviate, one detecting head is arranged opposite to the metal foil 1, the other detecting head is located on the outer side of the metal foil 1, when the metal foil 1 moves towards the detecting head far away from the detecting head located on the outer side, the detecting head arranged opposite to the metal foil 1 is released (namely located on the outer side of the metal foil 1), a first deviation direction of the metal foil 1 can be determined, and correspondingly, if the two detecting heads are blocked (namely located opposite to the metal foil 1), a second deviation direction of the metal foil 1 can be determined.
In one embodiment, two ends of the metal foil 1 respectively correspond to at least one probing tip along the width direction of the metal foil 1 to determine the offset direction of the metal foil 1. When the metal foil 1 is not deflected, the detecting head of the detector 70 cannot acquire the metal foil 1, and when the metal foil 1 is deflected, the detecting head located on the deflected side of the metal foil 1 acquires the metal foil 1, so that the deflection direction of the metal foil 1 can be determined, and at this time, the controller 60 acquires the corresponding deflection direction, so as to control the stepping motor, and the stepping motor drives the deflection correcting shaft 10 to deflect according to the corresponding direction.
In one embodiment, the detector 70 is a light detector, an infrared detector, or an ultrasound detector.
In one embodiment, the detector 70 is a double-eye photoelectric detector, and for the control flow of the winding deviation rectifying mechanism, referring to fig. 2, after the winding deviation rectifying mechanism is started, the movement rate of the stepping motor is set, and the double-eye photoelectric detector outputs a digital signal reflecting whether the position of the metal foil 1 is deviated and the deviation direction in real time. The controller 60 supplies power to the detector 70 and the stepping motor, receives an output signal of the detector 70, and controls the stepping motor to ascend and descend by a program to drive the motion correction shaft 10 to move up and down.
When the wound metal foil 1 is deviated, the detector 70 sends the deviation condition to the step controller 60 through a digital signal, and after program judgment, sends an instruction to the stepping motor to control the stepping motor to ascend and descend, so as to drive the deviation correction shaft 10 to deviate to one side, so that the metal foil 1 moves in the direction opposite to the deviation direction in the winding process, and the deviation correction is completed. For example, when the metal foil 1 deviates to the left, the deviation rectifying shaft 10 swings upward, i.e. the left side of the deviation rectifying shaft 10 is shifted to + x, and when the metal foil 1 deviates to the right, the deviation rectifying shaft 10 swings upward, i.e. the left side of the deviation rectifying shaft 10 is shifted to-x, wherein referring to fig. 1, the left deviation means outward deviation from the plane where the projection of the deviation rectifying shaft 10 is located, and the right deviation means inward deviation from the plane where the projection of the deviation rectifying shaft 10 is located.
In one embodiment, the winding deviation correcting mechanism further comprises: a guide rail extending in a vertical direction; the slide block is arranged on the guide rail and is in driving connection with the deviation rectifying shaft 10, and the driving part 50 is in driving connection with the slide block so that the driving part 50 is in driving connection with the deviation rectifying shaft 10 through the slide block. The arrangement of the guide rail and the slide block can ensure that the deviation rectification shaft 10 moves along the vertical direction without other problems. Wherein, the slider can directly abut against the deviation rectification shaft 10 so as to drive the deviation rectification shaft 10 to swing. Considering that the moving end of the deviation correcting shaft 10 swings along an arc track, in order to realize the swing of the deviation correcting shaft 10, the deviation correcting shaft 10 has a certain sliding amount relative to the sliding block during the swing process.
In one embodiment, a connecting rod is arranged on the sliding block, one end of the connecting rod is connected with the deviation rectifying shaft 10, but the deviation rectifying shaft 10 can slide relative to the connecting rod, namely, the deviation rectifying shaft 10 can be ensured to swing. Furthermore, a spherical joint bearing is arranged on the connecting rod, the deviation correcting shaft 10 penetrates through the spherical joint bearing and can move along the axial direction of the bearing, and meanwhile, the direction of the spherical joint bearing can also change along with the change of the direction of the deviation correcting shaft 10.
In one embodiment, as shown in fig. 1, the fixed shaft 20 is located below the deviation rectifying shaft 10 and the material collecting shaft 2 to press the metal foil 1.
The utility model discloses a winding mechanism of rectifying of embodiment is a winding mechanism of rectifying for volume-to-volume CVD equipment, include: a motion deviation correction shaft (deviation correction shaft 10), a fixed shaft 20, a stepping motor controller (controller 60) and a deviation correction sensor (detector 70). The winding deviation correcting mechanism is positioned behind a heating zone of the roll-to-roll CVD equipment and in front of a winding shaft (material receiving shaft 2), the movement deviation correcting shaft, the fixed shaft 20, the stepping motor and the deviation correcting sensor are fixed in the vacuum cavity, and the stepping motor controller is fixed in the vacuum cavity or outside the vacuum cavity and is connected with the deviation correcting sensor and the motor controller through a power line and a signal line. After passing through the vacuum cavity heated by the electric heater, the metal foil 1 to be corrected sequentially bypasses the movement deviation correcting shaft and the fixed shaft 20, and is wound and collected on the material receiving shaft 2. One side of the motion deviation correcting shaft is fixed, the other side of the motion deviation correcting shaft is movable on the slide rail and is connected with the stepping motor, and the position of the slidable side of the motion deviation correcting shaft is controlled by the stepping motor. When the slidable side of the motion deviation correcting shaft is positioned at the initial position, the motion deviation correcting shaft is parallel to the material receiving shaft 2. The deviation rectifying sensor can be a visible light detector, an infrared detector, an ultrasonic detector and the like, and can output digital or analog signals reflecting whether the position of the metal foil 1 deviates or not and the deviation direction in real time. The stepping motor controller supplies power to the deviation-rectifying sensor and the stepping motor, receives an output signal of the deviation-rectifying sensor and controls the stepping motor to ascend and descend through a program.
An embodiment of the utility model also provides a volume to volume CVD equipment, including foretell coiling mechanism, vacuum cavity and receipts material axle 2 of rectifying, the coiling at least part setting of mechanism of rectifying is in the vacuum cavity.
In one embodiment, the material receiving shaft 2 is parallel to the fixed shaft 20, and when the deviation rectifying shaft 10 is at the initial position, the material receiving shaft 2 is parallel to the deviation rectifying shaft 10. The deviation rectification shaft 10 is in an initial position, i.e., a position state when the metal foil 1 is not deviated.
The roll-to-roll CVD apparatus includes: the discharging shaft, the receiving shaft 2, the vacuum cavity, the heater and the winding deviation correcting mechanism. The discharging shaft and the receiving shaft 2 are respectively positioned at two sides of the vacuum cavity and are kept parallel to each other and on the same horizontal plane, and the heater is positioned at the outer side of the vacuum cavity between the discharging shaft and the receiving shaft 2 and can heat the part of the vacuum cavity to a specific temperature.
When the roll-to-roll CVD equipment works, the metal foil 1 of the graphene growth substrate is placed on the discharging shaft, passes through the vacuum cavity part heated by the electric heater after being unfolded, sequentially bypasses the deviation rectifying shaft 10 and the fixed shaft 20, and is wound and collected on the material collecting shaft 2.
A coiling mechanism of rectifying for roll-to-roll CVD equipment, simple structure, small and exquisite flexibility, reasonable in design, convenient to use are applicable to the roll-to-roll CVD equipment of different sizes, can effectively revise the skew of roll-to-roll CVD growth graphite alkene in-process basement foil material, promote the regularity of coiling finished product.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. The present invention is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and exemplary embodiments be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.
Claims (11)
1. A winding deviation correcting mechanism located after a heating zone of a roll-to-roll CVD apparatus for adjusting a metal foil (1) having a deviation in position to an original position, the winding deviation correcting mechanism comprising:
an alignment shaft (10), the alignment shaft (10) being configured to be disposed within a vacuum chamber of the roll-to-roll CVD apparatus;
the fixed shaft (20) is used for being arranged in the vacuum cavity, and the metal foil (1) sequentially bypasses the deviation rectifying shaft (10), the fixed shaft (20) and a material receiving shaft (2) of the roll-to-roll CVD equipment after passing through the heating zone;
wherein, metal foil (1) set up rectify on axle (10), it can set up asway to rectify axle (10) to drive metal foil (1) removes.
2. The winding deviation rectifying mechanism according to claim 1, characterized in that one end of the deviation rectifying shaft (10) is hinged in the vacuum chamber, and the other end of the deviation rectifying shaft (10) is movably arranged along the vertical direction.
3. The winding correction mechanism of claim 2, further comprising:
drive division (50), drive division (50) are used for setting up in the vacuum chamber, drive division (50) with rectify off-axis (10) drive connection, in order to drive rectify off-axis (10) along vertical direction swing.
4. The winding correction mechanism of claim 3, further comprising:
a controller (60), the controller (60) being connected to the drive section (50).
5. The winding correction mechanism of claim 4, further comprising:
a probe (70), the probe (70) being arranged in the vacuum chamber and located between the rectification shaft (10) and the fixed shaft (20), the probe (70) comprising at least two probe heads;
wherein the controller (60) is connected with the detector (70).
6. The winding deviation correcting mechanism according to claim 5, wherein the detector (70) is an optical detector, an infrared detector, or an ultrasonic detector.
7. The winding mechanism according to any one of claims 3 to 6, further comprising:
a rail extending in a vertical direction;
the slider sets up the guide rail, the slider with rectify deviation axle (10) drive connection, drive division (50) with slider drive connection, so that drive division (50) pass through the slider with rectify deviation axle (10) drive connection.
8. The winding deviation correction mechanism according to any one of claims 3 to 6, characterized in that the drive section (50) comprises a stepper motor, a set of electromagnets or a hydraulic controller.
9. The winding deviation rectifying mechanism according to claim 1, characterized in that said fixed shaft (20) is located below said deviation rectifying shaft (10) and said take-up shaft (2) to press said metal foil (1).
10. A roll-to-roll CVD apparatus comprising the roll deviation correcting mechanism of any one of claims 1 to 9, a vacuum chamber, and a take-up reel (2), at least part of the roll deviation correcting mechanism being disposed within the vacuum chamber.
11. Roll-to-roll CVD apparatus according to claim 10, characterized in that the take-up shaft (2) is parallel to the fixed shaft (20) and when the deviation-rectifying shaft (10) is in an initial position, the take-up shaft (2) is parallel to the deviation-rectifying shaft (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922030564.0U CN210973246U (en) | 2019-11-22 | 2019-11-22 | Winding deviation correcting mechanism and roll-to-roll CVD equipment with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922030564.0U CN210973246U (en) | 2019-11-22 | 2019-11-22 | Winding deviation correcting mechanism and roll-to-roll CVD equipment with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210973246U true CN210973246U (en) | 2020-07-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922030564.0U Active CN210973246U (en) | 2019-11-22 | 2019-11-22 | Winding deviation correcting mechanism and roll-to-roll CVD equipment with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210973246U (en) |
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2019
- 2019-11-22 CN CN201922030564.0U patent/CN210973246U/en active Active
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