CN210958121U

CN210958121U - Driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating

Info

Publication number: CN210958121U
Application number: CN201921901260.0U
Authority: CN
Inventors: 窦久存
Original assignee: Tangshan Biaoxian Electronics Co ltd
Current assignee: Tangshan Biaoxian Electronics Co ltd
Priority date: 2019-11-06
Filing date: 2019-11-06
Publication date: 2020-07-07
Anticipated expiration: 2029-11-06

Abstract

The driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating comprises four controllable switching tubes QC1, QC2, QC3 and QC4 which form bridge arms, and a freewheeling high-frequency diode is connected in parallel between drain and source electrodes of each controllable switching tube; the control electrode of the controllable switching tube is connected with a control circuit of the power supply to control the on-off of the controllable switching tube; the high-frequency LED power supply also comprises a high-frequency diode DC5, a DC6, filter capacitors CC1, CC2, CC3 and electrolytic capacitors CA and CB; resistors RC1, RC2, inductor LC; one end of the RC1 is connected with the power supply A after being connected with the DC5 in parallel, and the other end of the RC1 is connected with the power supply B through the LC; the cathode of the DC6 is connected with the CC3 in series and then connected with the low potential of a driving power supply, and the anode of the DC6 is connected with the anode of the high-frequency DC 5; one end of the RC2 is connected with a DC6 cathode, and the other end of the RC2 is connected with a B power supply; CC1 is connected in parallel at the input end of the driving power supply, and CC2 is connected at the anode of DC6 and two ends of the low potential of the driving power supply.

Description

Driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating

Technical Field

The utility model relates to a be applied to vacuum arc ion plating and magnetron sputtering ion plating power supply who uses in the field, especially relate to a be applied to vacuum arc ion plating and magnetron sputtering ion plating's drive power supply.

Background

The multi-arc ion plating is to take a metal evaporation source (target material) as a cathode, evaporate and ionize the target material to form space plasma through arc discharge between the target material and an anode shell in a vacuum environment, and perform deposition plating of metal, metal compounds and the like on a workpiece under the action of bias voltage of a substrate to form a high-temperature-resistant and corrosion-resistant decorative coating with a specific color; or the superhard self-lubricating coating formed by metal, metal alloy, silicon and nitride and carbide of the metal alloy is used for the abrasion-resistant environment such as cutting tools, drilling tools, dies, turbine blades, oil-free lubrication and the like. The bias voltage is an important process parameter of multi-arc ion plating and other vacuum plasma coating, and can remove gas and pollutants adsorbed on the surface of a workpiece during pre-bombardment before plating; during deposition, the bias voltage in turn energizes the ions to tightly bond the substrate to the film. The traditional unipolar bias power supply is easy to accumulate charge discharge burn workpieces due to unipolar bias, and the unipolar bias causes radial accumulation of particles and cannot enhance the pinning strength inside the particles, so that the loose binding force of a film layer is poor. The bipolar pulse bias power supply can output positive and negative bidirectional pulses, the negative pulses can neutralize charge accumulation on the insulating layer, workpiece ignition is effectively inhibited, and the positive pulses carry out bombardment cleaning and deposition. The positive and negative alternate pulses obtain more obvious ion bombardment effect in the film deposition process, the internal stress of the film and the binding force between the film and a substrate are obviously improved, meanwhile, ultrasonic waves generated based on a geomagnetic field have good workpiece self-cleaning effect, and the film layer is fine, smooth and clean and does not cause dust.

As the application of multi-arc ion plating in various fields is increasingly expanded, a vacuum coating chamber of decorative coating equipment is also rapidly expanded, at present, 116 arc targets are matched with large coating equipment with a vacuum chamber diameter of 4 meters and a height of 6.8 meters, 8A bias current is loaded according to each arc target, 928A is needed for coating deposition working current, 220V is calculated for coating deposition bias, 204KW bias power is needed in total, the dynamic characteristic of arc discharge is considered, the needed bias power is at least over 240KW, and a workpiece is applied with a bias voltage of over 400V in a bombardment cleaning working process. With the demands of industrial development, the requirements for output voltage and current are higher.

The multi-mode output magnetron sputtering coating power supply circuit comprises a direct current stabilized power supply (1), a main circuit (2), a digital controller (3), a driver (4) and a target (01), wherein the main circuit comprises five switches, two diodes, a high-frequency inductor and two energy storage capacitors, and is characterized in that a left bridge arm is formed by a switch I (5) and a switch II (6), and a right bridge arm is formed by a switch III (7) and a switch IV (8); the energy storage capacitor I (13) is connected with the direct-current stabilized voltage power supply (1) and the left bridge arm in parallel; the energy storage capacitor II (14) is connected with the right bridge arm in parallel; the switch V (9) is connected with the diode I (10) in parallel, is connected with the high-frequency inductor (12) in series, and is then connected to the upper ends of the left bridge arm and the right bridge arm; the lower ends of the left and right bridge arms are connected with the negative electrode of the energy storage capacitor I (13), the negative electrode of the energy storage capacitor II (14) and the negative electrode of the direct-current power supply together; the cathode of the diode (11) is connected with the left end of the high-frequency inductor, and the anode of the diode is connected with the cathode of the direct-current stabilized power supply (1); the left side of the target pole (01) is connected between the switch tube I (5) and the switch tube II (6), and the right side of the target pole is connected between the switch tube III (7) and the switch tube IV (8). Although the patent realizes four mode output functions of direct current sputtering, unidirectional pulse sputtering, bidirectional symmetric intermediate frequency sputtering, bidirectional asymmetric intermediate frequency sputtering and the like by controlling the semiconductor power devices according to different working time sequences, different sputtering coating processes are completed on the same equipment. Although the time sequence control and the setting of the output process parameters of the coating power supply are realized by software, the time sequence control and the setting of the output process parameters of the coating power supply are realized by a bipolar pulse power supply provided for the work of the magnetron sputtering target, a main power supply is applied to the

switching elements

5 and 6, and a secondary power supply is generated by a BUCK voltage reduction circuit consisting of the switches 9 and D11, the design actually shares the main power supply for supplying power to the

switching elements

5 and 6, so that the large-range independent regulation of the voltage of the main power supply and the secondary power supply cannot be realized, and the power configuration of.

As another example of the prior art, for example, "vacuum" (vol 1, 54, 2017), discloses a multi-mode output magnetron sputtering coating power supply technology research, which can also realize multi-mode output, but the defects of the literature are similar to those of the above patent literature, and a single power supply is adopted for power supply, which is not beneficial to voltage regulation;

the alternating-current square-wave micro-arc oxidation power supply and process research of China Master thesis (author: Guyanfei, university of Ranchu rational Engineers, 4 months 2014) discloses that a control system of a power supply consists of a main control system and an auxiliary control system. The main control system takes a singlechip 80C196KB as a control core and has the main functions of realizing the acquisition of voltage, current and parameters under manual regulation; generating a driving signal of the IGBT; and monitoring the working state, overcurrent, overheat and the like of the IGBT. The auxiliary system takes a singlechip 89C52 as a control core and mainly has the functions of realizing the setting of various electrical parameters and the selection of a power supply mode; and displaying the voltage, the current and the working state in real time in the working process. The two control systems adopt serial communication to transmit data and instructions in real time; the study on the topology of a novel high-power asymmetric pulse power supply (author: zhangjiaqi, western & ann university of science, 3 months 2009) of the chinese master thesis discloses that a novel adjustable pulse power supply adopts two sets of DC converters to provide DC output, then a novel chopping pulse generating circuit is used to obtain multifunctional adjustable pulse output, the two sets of DC converters adopt a symmetric structure, the core part is a phase-shifted full-bridge PWMDC/DC converter working in ZVS state, the DC output is adjusted by changing the magnitude of the phase shift angle, and a high-frequency transformer is used to electromagnetically isolate, the pulse chopping generator adopts a full-bridge topology with an auxiliary circuit to chop two input paths of DC, the switching tube works in zero-voltage and zero-current state, and finally, the frequency is obtained in a large-range adjustable manner by different control modes of the switching tube, and the positive and negative pulse amplitudes, Pulse output with independently adjustable duty ratio; and the study on a high-power-factor multi-waveform pulse electroplating power supply based on the FPGA (author: Liu Xiao Long, North China Power university, 3 months in 2013) and the like.

Although the above documents belong to the same technical field as the present invention and the working principle is similar, the above prior art and the present invention have many differences, such as the design of switching circuit, the design of multiple power input and multiple power independent control adjustment, etc., and the above differences are the technical solutions that the engineers in the field pay creative labor and obtained through numerous experiments, and the engineers in the field can not give any combination hint to realize the technical solutions adopted in the present invention on the basis of the above prior art.

SUMMERY OF THE UTILITY MODEL

Present extensive vacuum multi-arc ion plating bias voltage power supply adopts direct current or pulse direct current always for often appear being plated the work piece during practical application and burn because of the work piece that the charge accumulation caused, the cohesion of rete is not good enough in addition, and the rete purity is poor, to the defect that exists among the prior art, the utility model discloses a be applied to vacuum arc ion plating and magnetron sputtering ion plating's drive power supply, its technical scheme is as follows:

the driving power supply comprises four controllable switching tubes QC1, QC2, QC3 and QC4 which form bridge arms, and a freewheeling high-frequency diode is connected between the drain and the source of each controllable switching tube in parallel; the control electrode of the controllable switching tube is connected with a control circuit of a power supply to control the on-off of the controllable switching tube; it is characterized in that: the high-frequency LED power supply also comprises a high-frequency diode DC5, a DC6, filter capacitors CC1, CC2, CC3 and electrolytic capacitors CA and CB; resistors RC1, RC2, inductor LC; one end of a resistor RC1 is connected with a power supply A after being connected with a high-frequency diode DC5 in parallel, and the other end of the resistor RC1 is connected with a power supply B through an inductor LC; the cathode of the high-frequency diode DC6 is connected with the low potential of the driving power supply after being connected with the filter capacitor CC3 in series, and the anode of the high-frequency diode DC6 is connected with the anode of the high-frequency diode DC 5; one end of the resistor RC2 is connected with the cathode of the high-frequency diode DC6, and the other end of the resistor RC2 is connected with a power supply B; the capacitor CC1 is connected in parallel with the input end of the driving power supply, and the capacitor CC2 is connected with the anode of the high-frequency diode DC6 and the two ends of the low potential of the driving power supply.

Preferably: the driving power supply has three output modes: the power supply comprises a direct current output mode, a unipolar pulse output mode and an asymmetric bipolar pulse output mode, wherein the direct current output mode is that the duty ratio of a power supply pulse is set to be 100%, and the output voltage and current of a power supply A are controlled, namely the output voltage and current of the driving power supply can be adjusted; the unipolar pulse output mode is that the driving power supply outputs unipolar pulses, and the frequency output by the driving power supply and the duty ratio of positive and negative pulses of the unipolar pulses are changed by changing the period and the duty ratio of the control pulses output by the driving power supply control circuit; the asymmetric bipolar pulse output mode is that the positive and negative amplitudes of the bipolar pulse output by the driving power supply are correspondingly changed by changing the output amplitude of the A, B power supply; the period and the duty ratio of the control pulse output by the driving power supply control circuit are changed, so that the frequency output by the driving power supply and the duty ratio of positive and negative pulses of the bipolar pulse are changed, and the aim of asymmetric output is fulfilled.

Preferably: and the power structures of the power supply A and the power supply B are the same or different.

Has the advantages that:

the driving power supply is simple in structure, and different output modes can be realized according to different duty ratios.

Drawings

FIG. 1 is a block diagram of the overall structure of a driving power supply for vacuum arc ion plating and magnetron sputtering ion plating according to the present invention.

Fig. 2 is a block diagram of the whole driving power circuit structure of the driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating.

Fig. 3 is a circuit diagram of a driving power supply of the driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating.

FIG. 4(a) shows a DC output mode of the output pulse timing diagram of the high-power asymmetric bipolar pulse bias power supply with the switching circuit of the present invention: the output voltage waveform of the power supply C when the pulse duty ratio of the power supply A is modulated to be 100%; fig. 4(B) -a are a schematic diagram i of a power supply output voltage waveform when the pulse duty ratio of the power supply a is modulated to 50% in the unipolar pulse output mode, fig. 4(B) -B are a schematic diagram ii of a power supply output voltage waveform when the pulse duty ratio of the power supply a is modulated to 10% in the unipolar pulse output mode, and fig. 4(B) -C are a schematic diagram iii of a power supply output voltage waveform when the pulse duty ratio of the power supply a is modulated to 90% in the unipolar pulse output mode; fig. 4(C) -a are schematic diagrams i of a power supply output voltage waveform C when the power supply pulse duty ratio a is modulated to 50% in the asymmetric bipolar pulse output mode, fig. 4(C) -B are schematic diagrams ii of a power supply output voltage waveform C when the power supply pulse duty ratio a is modulated to 10% in the asymmetric bipolar pulse output mode, and fig. 4(C) -C are schematic diagrams iii of a power supply output voltage waveform C when the power supply pulse duty ratio a is modulated to 90% in the asymmetric bipolar pulse output mode.

Fig. 5 is the utility model discloses among the a power supply switching circuit: (a) the power supply comprises a power supply gear switching circuit A, a power supply gear switching circuit A and a power supply gear switching circuit B, wherein the power supply A is in low-voltage output, and the power supply A is in high-voltage output.

Detailed Description

The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. See fig. 1-5 for illustration.

As shown in fig. 1-2. The driving power supply of the bias power supply in the fields of vacuum arc ion plating and magnetron sputtering ion plating comprises a power supply A, a power supply B, a driving power supply and a control circuit corresponding to the power supply; the driving power supply is respectively connected with the output ends of the power supply A and the power supply B; the control circuit is connected with the comprehensive control and data display module; and the input ends of the power supply circuit A and the power supply circuit B are respectively connected with the output ends of a three-phase 380V alternating-current power supply after rectification and filtering.

The power supply A comprises a three-phase full-bridge rectifying circuit, a filter capacitor, a DC/AC/DC converter I, a DC/AC/DC converter II, a DC/AC/DC converter III, a power supply gear switching circuit A and a power supply control circuit A which are sequentially connected. The DC/AC/DC converter I comprises a full-bridge inverter, a high-frequency transformer T1, a high-frequency rectifier D1, a filter inductor L1 and a filter capacitor C1; the full-bridge inverter 1 is composed of IGBT tubes Q1a, Q1b, Q1c and Q1d which are connected in sequence; the output end of the full-bridge inverter is connected with the primary side of a high-frequency transformer T1; the secondary side of the high-frequency transformer T1 is connected with a high-frequency rectifier D1; the output of the high-frequency rectifier D1 is connected with a filter inductor L1 and a filter capacitor C1; the power supply control circuit A controls Q1a and Q1D to be switched on, Q1b and Q1C to be switched off, then Q1a and Q1D to be switched off, Q1b and Q1C to be switched on, the direct current is converted into high-frequency alternating current through cyclic conversion, a transformer T1 is used for isolating a primary side and a secondary side, the high-frequency alternating current is converted into pulsating direct current through a high-frequency rectifier bridge D1, and finally the smooth direct current is obtained through the filtering action of an inductor L1 and a capacitor C1 a; the circuit output is provided with an LEMVA Hall voltage and current sensor, and the power supply control circuit A adjusts the on-off time of each working cycle of the full-bridge inverter by comparing the difference value of an output signal and a set signal so as to adjust the output voltage of the DC/AC/DC converter I;

the DC/AC/DC converter II comprises a full-bridge inverter 2, a high-frequency transformer T2, a high-frequency rectifier D2, a filter inductor L2 and a filter capacitor C2; the full-bridge inverter 2 consists of IGBT tubes Q2a, Q2b, Q2c and Q2d which are connected in sequence; the output end of the full-bridge inverter 2 is connected with the primary side of a high-frequency transformer T2; the secondary side of the high-frequency transformer T2 is connected with a high-frequency rectifier D2; the output of the high-frequency rectifier D2 is connected with a filter inductor L2 and a filter capacitor C2; the control and output mode of the DC/AC/DC converter II is the same as that of the DC/AC/DC converter I; the DC/AC/DC converter III comprises a full-bridge inverter 3, a high-frequency transformer T3, a high-frequency rectifier D3, a filter inductor L3 and a filter capacitor C3; the full-bridge inverter 3 consists of IGBT tubes Q3a, Q3b, Q3c and Q3d which are connected in sequence; the output end of the full-bridge inverter 3 is connected with the primary side of a high-frequency transformer T3; the secondary side of the high-frequency transformer T3 is connected with a high-frequency rectifier D3; the output of the high-frequency rectifier D3 is connected with a filter inductor L3 and a filter capacitor C3. The control and output mode of the DC/AC/DC converter III is the same as that of the DC/AC/DC converter I; the full-bridge inverters 1, 2 and 3, the high-frequency transformers T1, T2 and T3, the high-frequency rectifiers D1, D2 and D3, the filter inductors L1, L2 and L3 and the filter capacitors C1, C2 and C3 have the same element parameters and the same mutual connection mode; the power supply control circuit A synchronously controls the output of the DC/AC/DC converter I, the DC/AC/DC converter II and the DC/AC/DC converter III to ensure that the output characteristics are completely the same; the power source gear switching circuit A comprises a contactor and a control circuit, and is shown in fig. 5.

The contactors comprise three identical contactors KM1, KM2 and KM 3; the contactors KM1, KM2 and KM3 respectively comprise two contacts 1-2 and 5-6; the contact terminal 1 of the contactor KM1 is connected with the output positive electrode of the DC/AC/DC converter II; the contact terminal 5 of the contactor KM1 is connected with the output positive electrode of the DC/AC/DC converter III; the contactor KM1 contact terminal 2 and the contact terminal 6 are connected with the positive pole of the DC/AC/DC converter I at one point and serve as the output positive pole of the power supply A; the contact terminal 1 of the contactor KM2 is connected with the output positive electrode of the DC/AC/DC converter II; the contact terminal 2 of the contactor KM2 is connected with the output negative electrode of the DC/AC/DC converter I; the contact terminal 5 of the contactor KM2 is connected with the output negative electrode of the DC/AC/DC converter II; the contact terminal 6 of the contactor KM2 is connected with the positive electrode of the DC/AC/DC converter III; the contact terminal 1 of the contactor KM3 is connected with the negative electrode of the DC/AC/DC converter I; the contact terminal 5 of the contactor KM3 is connected with the negative electrode of the DC/AC/DC converter II; the contact terminal 2 of the contactor KM3, the contact terminal 6 and the negative electrode of the AC/DC converter III are connected at one point and used as the negative electrode of the power supply A output; the A power supply control circuit controls the contactors KM1 and KM3 to be attracted at the same time, and KM2 to be disconnected, when KM1 and KM2 are attracted, the anodes of the DC/AC/DC converters I, II and III are connected together through KM1, the cathodes of the DC/AC/DC converters I, II and III are connected together through KM3, and the DC/AC/DC converters I, II and III are connected in parallel for output, so that the large current output of the A power supply is realized, and the power supply meets the working requirement of coating film deposition on low voltage and large current; when KM1 and KM3 are released and KM2 is attracted, the positive pole of a negative pole DC/AC/DC converter II of the DC/AC/DC converter I is connected with the positive pole of a negative pole DC/AC/DC converter II of the DC/AC/DC converter I through KM2 electric shock terminals 1 and 2, the positive pole of a negative pole II DC/AC/DC converter III of the DC/AC/DC converter I is connected with the positive pole of a negative pole II DC/AC/DC converter III through KM2

electric shock terminals

5 and 6, and the DC/AC/DC converters I, II and III are connected in series for output, so that the high-voltage output of a.

The power supply B consists of a filter capacitor and a DC/AC/DC converter IV which are sequentially connected; the DC/AC/DC converter IV comprises a full-bridge inverter 4 formed by IGBTs, a high-frequency transformer TB, a high-frequency rectifier DB, a filter inductor LB, a filter capacitor CB2 and a power supply B inverter control circuit; the full-bridge inverter 4 consists of IGBT tubes QB1, QB2, QB3 and QB4 which are connected in sequence; the input end of the high-frequency transformer TB is connected with the output end of the full-bridge inverter 4; the output end of the high-frequency transformer TB is connected with the input end of the high-frequency rectifier DB; the output end of the high-frequency rectifier DB is connected with a filter inductor LB and a filter capacitor CB 2; the B inverter control circuit converts direct current into high-frequency alternating current by controlling alternate conduction and disconnection of QB1 and QB4, QB2 and QB3, a primary transformer TB isolates the secondary, a high-frequency rectifier bridge DB converts the high-frequency alternating current into pulsating direct current, and finally the smooth direct current is obtained under the filtering action of an inductor LB and a capacitor CB 2; the output voltage of the B power supply is regulated by regulating the on and off time of the full-bridge inverter 4 per period, and the voltage of the negative pulse part output by the driving power supply is further regulated.

The driving power supply is composed of the elements shown in fig. 3, the power supply a side is a high voltage side, the power supply B side is a low voltage side, and OA and OB are power supply output terminals. QC1, QC2, QC3 and QC4 are controllable switching tubes (such as IGBTs, MOSFETs and the like), DC1, DC2, DC3, DC4, DC5 and DC6 are high-frequency diodes, CC1 and CC2 are filter capacitors, CC3 is an absorption energy storage capacitor, RC1 and RC2 are resistors, and LA, LB and LC are inductors. The purpose of this topology is to ensure that the high and low voltage side potentials do not charge the two side half-legs to equal voltage state through freewheeling diodes DC1, DC4 or DC2, DC3 due to the back emf of the output cable distributed inductance LO during diagonal turn-off. DC5 isolation diode blocks DC1, DC4 freewheeling circuit when QC1, QC2 high-voltage side is turned off, only CC1 and CA direction are allowed to charge, DC2, DC3 are turned on by reverse electromotive force generated when QC2, QC3 low-voltage side is turned off, on one hand, surplus energy is clamped through CC2, the surplus energy is clamped through DC3 and large capacitor CC3, CC3 stores energy and then is discharged to low-voltage side filter capacitor CB through RC2, on the other hand, due to the capacity limitation of CC2, reverse electromotive force generated by LC in the turn-off period of QC2, QC3 is accumulated through cycle, the potential of CC2 is higher than that of CB even CA, DC3 consumes a part of energy on RC2 through RC2 freewheeling channel, and the other part of charged CC3 is discharged to low-voltage side filter capacitor CB through RC 2. The utility model discloses design RC1 on drive power supply, its purpose can guarantee under the extreme circumstances CC 2's electric potential can not surpass CA, guarantees the safety of QC3, QC4 low pressure side bridge arm promptly, and CA end electric potential is stabilized to the electric potential that the load end RL was guaranteed to some energy of RC1 release during QC2, QC3 low pressure side switched on. All the energy drained to the capacitor CB will be discharged to the load end RL during the conduction of the low-voltage sides of QC2 and QC 3. The drive power supply control circuit controls the drive power supplies QC1, QC4, QC2 and QC3 to be switched on and switched off, so that three output modes are realized: a direct current output mode, a unipolar pulse output mode, and an asymmetric bipolar pulse output mode.

Fig. 4(a), fig. 4(B) -a, fig. 4(B) -B, fig. 4(B) -C, fig. 4(C) -a, fig. 4(C) -B, fig. 4(C) -C are output pulse sequences of the driving power supply according to the embodiment of the present invention.

The direct current output mode is as follows: the drive power supply control circuit controls QC1 and QC4 to be in a conducting state QC2 and QC3 to be in a cut-off state all the time, an OA output end of the drive power supply is connected with a positive electrode of the power supply A, an OB output end of the drive power supply is connected with a negative electrode of the power supply A, at the moment, the power supply works in a direct current output mode, namely, the duty ratio of power supply pulses is set to be 100%, and the output voltage and current of the power supply A can be controlled to adjust the output voltage and current of the. As shown in fig. 4 (a).

The unipolar pulse output mode: output waveforms under three pulse duty ratio conditions are given. Taking fig. 4(b) -a as an example that the duty ratio of the pulse a is 50%, the power supply control circuit C controls the power supply control circuit t1 to be in the on state t1 and QC4, and to be in the off state t2 and t3 to be in the QC2 and QC3, the OA output terminal of the power supply C is connected to the positive pole of the power supply a, the OB output terminal of the power supply C is connected to the negative pole of the power supply a, and the amplitude output by the power supply C is the output amplitude of the power supply a at this time; the C power supply control circuit controls t1 time QC1, QC4 to be in cut-off state t2, t3 time QC2, QC3 to be in cut-off state, and the C power supply is in the state of stopping output; the C power supply control circuit controls t1, t2 time QC1, QC4 to be in cut-off state t3 time QC2, QC3 to be in the conducting state, the OA output end of the C power supply is connected with the positive pole of the B power supply, the OB output end of the C power supply is connected with the negative pole of the B power supply, the output voltage of the B power supply is set to be 0, and the amplitude value output by the C power supply is 0 at the moment; the C power supply control circuit controls the three states to change periodically, the C power supply outputs unipolar pulses, and the frequency output by the C power supply and the duty ratio of the unipolar pulses are changed by changing the period and the duty ratio of the control pulses output by the C power supply control circuit. Other pulse duty ratios are similar to this operation, and fig. 4(B) -B and fig. 4(B) -C are the case of duty ratios of 10% and 90%.

The asymmetric bipolar pulse output mode: output waveforms under three pulse duty ratio conditions are given. Fig. 4(C) -a shows an example of a pulse duty ratio of 50%, where the C power control circuit controls t1 to be in an on state at t1, at QC4, and in an off state at t2, at t3, at QC2, and at QC3, the OA output terminal of the C power is connected to the positive pole of the a power, the OB output terminal of the C power is connected to the negative pole of the a power, and the amplitude output by the C power at this time is the output amplitude of the a power; the C power supply control circuit controls t1 time QC1, QC4 to be in cut-off state t2, t3 time QC2, QC3 to be in cut-off state, and the C power supply is in the state of stopping output; the C power supply control circuit controls t1, t2 time QC1, QC4 to be in cut-off state t3 time QC2, QC3 to be in the conducting state, the OB output end of the C power supply is connected with the positive pole of the B power supply, the OA output end of the C power supply is connected with the negative pole of the B power supply, the amplitude value output by the C power supply is the output amplitude value of the B power supply at the moment, but the polarity is opposite to the former; the C power supply control circuit controls the three state periods to change alternately, and the C power supply outputs bipolar pulses. Changing A, B the output amplitude of the power supply will change the positive and negative amplitudes of the bipolar pulse output by the C power supply; the period and the duty ratio of the control pulse output by the C power supply control circuit are changed, so that the frequency output by the C power supply and the duty ratio of positive and negative pulses of the bipolar pulse are changed, and the aim of asymmetric output is fulfilled. Fig. 4(C) -B and 4(C) -C show the duty ratios of 10% and 90%.

The power control circuit is further described as follows: the power supply control circuit A is used for controlling the power supply A to generate three groups of 0-rated value direct current power supply DC/AC/DC converters I, DC/AC/DC converters II and DC/AC/DC converters III, and controlling the series connection or parallel connection of the three groups of power supplies through a high-voltage/low-voltage conversion (power supply output) circuit, so that the power supply A generates required high-voltage or low-voltage heavy current in different working periods; the B power supply control circuit is used for controlling a B power supply to generate a 0-rated value direct current power supply B (DC/AC/DC converter B); the driving power supply control circuit is used for adjusting the conducting time proportion of QC1, QC4, QC3 and QC2 shown in the figure 3 to realize different width output of the power supply A and the power supply B, so that asymmetrical output on the width is realized, and when QC1 and QC4 are always turned on, the direct current state output of the power supply A is realized; the comprehensive control and data display are used for distributing amplitude values required by the power supply A and the power supply B, controlling gear switching of the power supply A, controlling different working states of the driving power supply, collecting A, B data, displaying the current-voltage duty ratio of the driving power supply and the like, and are also responsible for data interaction with an upper computer.

As described in the background art, the power level of the 240KW bias power supply can not be realized by a single driving power supply due to the structural problem, the actually applied power expansion circuit is three identical 80kW driving power supplies, namely a driving power supply I, a driving power supply II and a driving power supply III, the corresponding input ends of the three power supplies are all connected into the output end of the power supply A and the output end of the power supply B, and the output ends of the three power supplies are all connected in parallel to serve as output, so that the purpose of power expansion is achieved. The driving power supply control circuit transmits positive and negative pulse signals to three same driving power supplies through six optical fibers of the same type, and synchronously controls output and stop. The power supply control circuit A, the inverter control circuit B and the driving power supply control circuit are controlled in a current and voltage closed loop mode and are controlled by the comprehensive control and display circuit in a unified mode.

Through the control scheme, a plurality of combined working modes of independent adjustment of frequency and duty ratio, independent adjustment of positive and negative pulse amplitude and real-time conversion of direct current, unipolar pulse and bipolar pulse can be realized, the voltage level of the positive pulse output by the power supply can be changed by changing the output gear of the power supply A, and the power supply can work in a high-voltage bombardment cleaning state and a high-current coating deposition state by matching with the parallel connection of the driving power supplies. The utility model discloses the negative-going pulse of output can the neutralization charge accumulation on the insulating layer, effectively restraines the work piece and strikes sparks, and positive pulse carries out bombardment washing and deposit, has overcome the shortcoming that unipolar pulse bias voltage accumulated charge easily.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the principles of the present invention may be applied to any other embodiment without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating comprises four controllable switching tubes QC1, QC2, QC3 and QC4 which form bridge arms, and a freewheeling high-frequency diode is connected in parallel between drain and source electrodes of each controllable switching tube; the control electrode of the controllable switching tube is connected with a control circuit of a power supply to control the on-off of the controllable switching tube; it is characterized in that: the high-frequency LED power supply also comprises a high-frequency diode DC5, a DC6, filter capacitors CC1, CC2, CC3 and electrolytic capacitors CA and CB; resistors RC1, RC2, inductor LC; one end of a resistor RC1 is connected with a power supply A after being connected with a high-frequency diode DC5 in parallel, and the other end of the resistor RC1 is connected with a power supply B through an inductor LC; the cathode of the high-frequency diode DC6 is connected with the low potential of the driving power supply after being connected with the filter capacitor CC3 in series, and the anode of the high-frequency diode DC6 is connected with the anode of the high-frequency diode DC 5; one end of the resistor RC2 is connected with the cathode of the high-frequency diode DC6, and the other end of the resistor RC2 is connected with a power supply B; the capacitor CC1 is connected in parallel with the input end of the driving power supply, and the capacitor CC2 is connected with the anode of the high-frequency diode DC6 and the two ends of the low potential of the driving power supply.

2. The driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating according to claim 1, characterized in that: the driving power supply has three output modes: a direct current output mode, a unipolar pulse output mode, and an asymmetric bipolar pulse output mode; the direct current output mode is that the duty ratio of the power supply pulse is set to be 100%, and the output voltage and current of the power supply A are controlled to adjust the output voltage and current of the driving power supply; the unipolar pulse output mode is that the driving power supply outputs unipolar pulses, and the frequency output by the driving power supply and the duty ratio of positive and negative pulses of the unipolar pulses are changed by changing the period and the duty ratio of the control pulses output by the driving power supply control circuit; the asymmetric bipolar pulse output mode is that the positive and negative amplitudes of the bipolar pulse output by the driving power supply are correspondingly changed by changing the output amplitude of the A, B power supply; changing the period and duty cycle of the control pulses output by the drive power supply control circuit also changes the frequency of the drive power supply output and the duty cycle of the positive and negative pulses of the bipolar pulses.

3. The driving power supply applied to vacuum arc ion plating and magnetron sputtering ion plating according to claim 1, characterized in that: and the power structures of the power supply A and the power supply B are the same or different.