CN210945763U - DLC continuous coating production line - Google Patents
DLC continuous coating production line Download PDFInfo
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- CN210945763U CN210945763U CN201921910378.XU CN201921910378U CN210945763U CN 210945763 U CN210945763 U CN 210945763U CN 201921910378 U CN201921910378 U CN 201921910378U CN 210945763 U CN210945763 U CN 210945763U
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Abstract
The utility model provides a DLC continuous coating production line, including import room, import surge chamber, import transition room, first process chamber group, isolation room, second process chamber group, export transition room, export surge chamber and the export room that is the straight line and connects gradually, form the sharp passageway of intercommunication, and with the parallel interval arrangement's of sharp passageway returns the frame group, first process chamber group and second process chamber group include a plurality of process chambers respectively, it includes a plurality of time frames that link up in proper order to return the frame group. The utility model discloses a be equipped with different negative pole equipment on the same production line, can carry out multilayer, continuous coating film on same production line, be equipped with back the frame, carry out the substrate conveying through same transport mechanism, realize loading, uninstallation substrate, it is effective to return a simple structure.
Description
Technical Field
The utility model relates to a coating film production technical field specifically is a DLC continuous coating film production line.
Background
The vacuum coating technology is to coat a layer of coating with special performance on the solid surface by physical and chemical means, so that the solid surface has many superior performances superior to the solid material in terms of wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electric conduction, magnetic conduction, insulation and decorative lamp, and the effects of improving the product quality, prolonging the product life, saving energy and obtaining remarkable technical and economic benefits are achieved. The material to be coated is called a substrate and the material to be coated is called a target. Sputtering has become the most important method in vacuum coating, and this technique is to bombard the target surface with energetic particles in vacuum, so that the bombarded particles are deposited on the substrate. The coating production line comprises a plurality of continuous functional chambers, and the coating production line enters a process chamber to carry out coating operation after the steps of vacuumizing and the like in the early stage. For DLC and other coatings, multiple coatings are often required to enhance the functional effect, however, in many conventional production processes, multiple coatings are required to be performed in multiple independent, discontinuous production lines.
SUMMERY OF THE UTILITY MODEL
Aiming at the problems in the prior art, the utility model aims to provide a DLC continuous coating production line, wherein different cathode devices are arranged on the same production line, and multi-layer and continuous coating can be carried out on the same production line; the film coating machine is provided with a return frame, the substrate is conveyed through the same conveying mechanism, double-sided multilayer film coating is realized, and the return frame is simple and effective in structure.
In order to realize the purpose, the utility model discloses the technical scheme who adopts is:
the utility model provides a DLC continuous coating production line, is including the import room, import surge chamber, import transition room, first process chamber group, isolation chamber, second process chamber group, export transition room, export surge chamber and the export room that are the straight line and connect gradually, form the straight line passageway of intercommunication, and with the parallel interval arrangement of straight line passageway returns the frame group, first process chamber group and second process chamber group include a plurality of process chambers respectively, it includes a plurality of frame of returning that link up in proper order to return the frame group, the production line still includes preceding translation platform and back translation platform, and preceding translation platform and back translation platform are located respectively the both ends of straight line passageway are located respectively simultaneously and are located the both ends of returning the frame group respectively.
The further improvement of the technical scheme is as follows:
the first process chamber group comprises a first process chamber, a second process chamber and a third process chamber which are sequentially connected from the inlet transition chamber to the isolation chamber, and the second process chamber group comprises a fourth process chamber and a fifth process chamber which are sequentially connected from the isolation chamber to the outlet transition chamber.
The production line further comprises a cathode mechanism, wherein the cathode mechanism comprises at least one medium-frequency rotating cathode, at least one linear ion source and at least one plane cathode, the linear ion source is installed on the first process chamber, the plane cathode is installed on the fifth process chamber, and the medium-frequency rotating cathodes are installed on the second process chamber, the third process chamber and the fourth process chamber respectively.
The production line also comprises a substrate conveying mechanism for conveying the substrate to be coated on the linear channel, wherein the substrate conveying mechanism comprises a substrate frame, a plurality of magnetic guides and a plurality of inner driving wheels, the magnetic guides and the inner driving wheels are uniformly arranged in the inlet chamber, the inlet buffer chamber, the inlet transition chamber, the first process chamber group, the isolation chamber, the second process chamber group, the outlet transition chamber, the outlet buffer chamber and the outlet chamber at intervals, a linear conveying path is formed along the linear channel, the magnetic guides are positioned above the inner driving wheels, and the substrate frame for loading the substrate is positioned between the magnetic guides and the inner driving wheels and runs along the linear channel.
The substrate frame is vertical to the horizontal plane, the upper end of the substrate frame is magnetically connected with the magnetic guide in a non-contact way, and the lower end of the substrate frame is arranged on the plurality of inner driving wheels in a sliding way.
The outer surface of the inner driving wheel is inwards concave along the circumferential direction, and the lower end of the substrate frame is contacted and arranged on the inwards concave surface in a sliding mode.
The substrate conveying mechanism further comprises a plurality of magnetic fluids, a plurality of servo motors, a plurality of synchronous belts and a plurality of synchronous wheels, each synchronous wheel is connected with an inner driving wheel through the magnetic fluids, the synchronous wheels are connected through the synchronous belts, and the servo motors are connected with and drive the synchronous wheels.
A plurality of magnetic guides and a plurality of inner driving wheels are also uniformly arranged in each return frame at intervals, and a magnetic fluid, a synchronizing wheel, a synchronous belt and a driving motor are connected with the inner driving wheels and connected with and drive the synchronizing wheel.
The production line further comprises a heat transfer mechanism with a heat transfer effect, the heat transfer mechanism comprises a cooling mechanism, the cooling mechanism comprises at least one water return main cooling pipeline, at least one water inlet main cooling pipeline and a plurality of cooling plates, the cooling plates are respectively and uniformly installed in the isolation chamber, the second process chamber group, the outlet transition chamber and the outlet buffer chamber, the heat exchange plates are connected in parallel, two ends of each heat exchange plate are respectively connected with the water inlet main cooling pipeline and the water return main cooling pipeline, and the water inlet main cooling pipeline and the water return main cooling pipeline are in butt joint with an external cooling water system.
The heat transfer mechanism further comprises a heating mechanism, the heating mechanism comprises a plurality of heaters, the heaters are of a resistance type and are directly heated by electricity, and the heaters are respectively installed in the inlet buffer chamber, the inlet transition chamber, the first process chamber group and the isolation chamber.
The production line also comprises a vacuumizing mechanism, the vacuumizing mechanism comprises a plurality of molecular pumps, and the inlet buffer chamber, the inlet transition chamber, the first process chamber group, the isolation chamber, the second process chamber group, the outlet transition chamber and the outlet buffer chamber are respectively provided with one molecular pump.
The vacuumizing mechanism further comprises a plurality of molecular pump pipelines, a plurality of corrugated pipes, at least one main air pumping pipeline and a preceding stage vacuum pump set, each molecular pump is connected with one molecular pump pipeline through one corrugated pipe, and the plurality of molecular pump pipelines are connected in parallel and then connected with the main air pumping pipeline.
And a partition outer door valve is respectively arranged between the front translation stage and the inlet chamber and between the outlet chamber and the rear translation stage.
And a set of partition inner gate valves are respectively arranged between the inlet chamber and the inlet buffer chamber, between the inlet buffer chamber and the inlet transition chamber, between the process chamber III and the isolation chamber, between the isolation chamber and the process chamber IV, between the outlet transition chamber and the outlet buffer chamber, and between the outlet buffer chamber and the outlet chamber.
The inlet chamber, the inlet buffer chamber, the inlet transition chamber, the isolation chamber, the outlet transition chamber, the outlet buffer chamber, the outlet chamber and each process chamber are all box bodies with inner cavities.
DLC coating production process, based on the production line, comprises two processes which are carried out in sequence and have opposite running directions:
a first process: the substrate sequentially passes through a front translation table, an inlet chamber, an inlet buffer chamber, an inlet transition chamber, a first process chamber, a second process chamber, a third process chamber, an isolation chamber, a fourth process chamber, a fifth process chamber, an outlet transition chamber, an outlet buffer chamber, an outlet chamber and a rear translation table, and multilayer coating is completed in a first process chamber group and a second process chamber group;
a second process: the substrate frame is translated on the rear translation table, is conveyed to a return frame close to the rear translation table after being positioned in the same conveying straight line with the return frame, is conveyed to the front translation table in the return frame, and is unloaded on the front translation table, the substrate to be coated is loaded on the substrate frame, and enters the inlet chamber from the front translation table for coating.
And (3) carrying out plasma cleaning on the substrate in the first process chamber, carrying out film coating on the substrate in the second process chamber, the third process chamber, the fourth process chamber and the fifth process chamber, wherein the film thickness and the material are selected according to the design of a film system.
The target material of the second process chamber is a Ti target, a TiOx ceramic target, a Si target or an Nb2Ox ceramic target, the target material of the third process chamber is a Si target, the target material of the fourth process chamber is a C target, and the target material of the fifth process chamber is a Si target.
The working atmosphere in the process chamber is as follows: working gas Ar with the flow rate of 50-500 sccm; the reaction gas is N2、O2Or ArH with a flow rate of 50-500 sccm.
The running speed of the substrate carrier in the process chamber is 0.5-1.5 m/min.
Compared with the prior art, the beneficial effects of the utility model are that: different cathode devices are arranged on the same production line, and multi-layer and continuous film coating can be carried out on the same production line; the substrate return frame is arranged, the substrates are conveyed through the same conveying mechanism, loading and unloading of the substrates are achieved, and the substrate return frame is simple and effective in structure.
Drawings
Fig. 1 is a schematic top view of an embodiment of the present invention;
fig. 2 is a schematic front view of an embodiment of the present invention;
FIG. 3 is a schematic view of an inlet or outlet chamber according to an embodiment of the present invention;
FIG. 4 is a schematic view of an inlet buffer chamber, an inlet transition chamber, an outlet transition chamber, or an outlet buffer chamber according to an embodiment of the present invention;
FIG. 5 is a schematic view of an isolation chamber according to an embodiment of the present invention;
FIG. 6 is a schematic structural view of a second process chamber, a third process chamber or a fourth process chamber according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a process chamber v according to an embodiment of the present invention.
Detailed Description
The present invention provides a continuous DLC coating production line, which will be described in detail and fully with reference to the following embodiments. The following description of the embodiments is merely exemplary in nature and is in no way intended to limit the invention.
A DLC continuous coating production line comprises an inlet chamber 12, an inlet buffer chamber 131, an inlet transition chamber 132, a first process chamber group, an isolation chamber 15, a second process chamber group, an outlet transition chamber 171, an outlet buffer chamber 172 and an outlet chamber 18 which are connected in sequence in a straight line to form a communicated straight line channel and a frame returning group which is arranged in parallel with the straight line channel at intervals, wherein the first process chamber group and the second process chamber group respectively comprise a plurality of process chambers, and process chamber modules can be added according to the specific process requirements of products, namely cathode positions are increased. The frame returning group comprises a plurality of frame returning bodies 7 which are connected in sequence. The functional chambers such as the inlet chamber 12, the inlet buffer chamber 131, the inlet transition chamber 132, the isolation chamber 15, the outlet transition chamber 171, the outlet buffer chamber 172, the outlet chamber 18 and each process chamber are all box bodies with inner cavities, and are surrounded by a plurality of box body walls 105. The above chambers are provided with corresponding doors, specifically, the box walls 105 of the inlet chamber 12 and the outlet chamber 18 are provided with inlet and outlet doors 101 for equipment to enter and exit, and the box walls 105 of the inlet buffer chamber 131, the inlet transition chamber 132, the isolation chamber 15, the outlet transition chamber 171 and the outlet buffer chamber 172 are provided with non-target doors 102. The inlet chamber 12 and the outlet chamber 18 are mounted on a chassis 6, the chassis 6 being supported on the ground.
The production line further comprises a front translation stage 11 and a rear translation stage 19, wherein the front translation stage 11 and the rear translation stage 19 are respectively located at two ends of the linear channel and are respectively located at two ends of the rack returning group, namely the front translation stage 11 is simultaneously connected with the inlet chamber 12 and the rack returning 7, and the rear translation stage 19 is simultaneously connected with the outlet chamber 18 and the rack returning 7. The front translation stage 11 and the rear translation stage 19 function to translate the substrate holder 21 holding the substrate before the linear path and the set of carriages. The front translation stage 11 and the rear translation stage 19 have the same structure and comprise a translation cylinder and a slide rail, and the translation cylinder drives the substrate holder 21 to move along the slide rail. The function of the return frame 7 is to transfer the substrate frame 21 back to the substrate loading area, unload the coated substrate, and load a new substrate to be coated.
The first process chamber group comprises a first process chamber 141, a second process chamber 142 and a third process chamber 143 which are sequentially connected from the inlet transition chamber 132 to the isolation chamber 15, and the second process chamber group comprises a fourth process chamber 161 and a fifth process chamber 162 which are sequentially connected from the isolation chamber 15 to the outlet transition chamber 171.
An outer gate blocking valve 103 is arranged between the front translation stage 11 and the inlet chamber 12 and between the outlet chamber 18 and the rear translation stage 19. A set of isolated inner gate valves 104 are provided between the inlet chamber 12 and the inlet buffer chamber 131, between the inlet buffer chamber 131 and the inlet transition chamber 132, between the process chamber three 143 and the isolation chamber 15, between the isolation chamber 15 and the process chamber four 161, between the outlet transition chamber 171 and the outlet buffer chamber 172, and between the outlet buffer chamber 172 and the outlet chamber 18. The blocking outer door valve 103 is used for blocking the production line and the external environment, and the blocking inner door valve 104 is used for blocking each functional chamber to realize independence and sealing between the functional chambers.
The production line comprises a substrate conveying mechanism, a heat transfer mechanism, a vacuum-pumping mechanism and a cathode mechanism besides the functional chambers.
The substrate conveying mechanism is used for conveying the substrate in the linear channel. The substrate transport mechanism includes a substrate holder 21, a plurality of magnetic guides 22, a plurality of inner driving wheels 23, a plurality of sets of magnetic fluid 24, a plurality of servo motors 27, a plurality of timing belts 26, and a plurality of timing wheels 25. Disposed within each of the chambers are a plurality of magnetic guides 22, a plurality of inner drive wheels 23, a plurality of timing wheels 25, at least one servo motor 27 and a timing belt 26. The plurality of magnetic guides 22 and the plurality of inner pulleys 23 are arranged at regular intervals in the inlet chamber 12, the inlet buffer chamber 131, the inlet transition chamber 132, the first process chamber group, the isolation chamber 15, the second process chamber group, the outlet transition chamber 171, the outlet buffer chamber 172, and the outlet chamber 18, and form a linear transfer path along the linear path along which the magnetic guides 22 are positioned above the inner pulleys 23, and the substrate holder 21 on which the substrate is loaded is positioned between the plurality of magnetic guides 22 and the plurality of inner pulleys 23 and travels along the linear path. The substrate frame 21 is vertical to the horizontal plane, the upper end of the substrate frame 21 is in non-contact magnetic connection with the magnetic guide 22, and the lower end is arranged on the plurality of inner driving wheels 23 in a sliding mode. The outer surface of the inner driving wheel 23 is concave along the circumferential direction, and the lower end of the substrate frame 21 is contacted and glidingly arranged on the concave surface. Each synchronizing wheel 25 is connected with an inner driving wheel 23 through a magnetic fluid 24, all synchronizing wheels 25 in the same chamber are connected through a synchronous belt 26, and a corresponding servo motor 27 is connected with one synchronizing wheel 25. The synchronous belt 26 is tensioned by a plurality of synchronous wheels 25, a servo motor 27 is connected with and drives the synchronous wheels 25, the synchronous wheels 25 drive the synchronous belt 26 to rotate, the synchronous belt 26 drives other synchronous wheels 25 to synchronously rotate, and therefore all the inner transmission wheels 23 are driven to rotate in the same direction, and the base frame positioned between the magnetic guide 22 and the inner transmission wheels 23 is gradually conveyed.
A plurality of magnetic guides 22, a plurality of inner transmission wheels 23, a magnetic fluid 24 connected with the inner transmission wheels 23, a synchronizing wheel 25, a synchronous belt 26 and a transmission motor 28 are also uniformly arranged in each return frame 7 at intervals, the transmission motor 28 is connected with the synchronizing wheel 25, and the transmission motor 28 drives the synchronous belt 26 by driving the synchronizing wheel 25, so that each synchronizing wheel 25 and each inner transmission wheel 23 synchronously run, and the purpose of conveying the substrate is realized.
The heat transfer mechanism is used for cooling or heating the coated substrate and comprises a cooling mechanism and a heating mechanism.
The cooling mechanism comprises at least one water return main cooling pipeline 51, at least one water inlet main cooling pipeline 52 and a plurality of heat exchange plates. The heat exchange plate is a cooling plate and is used for absorbing heat in the corresponding cavity to cool the coated substrate of the cavity. A plurality of cooling plates are uniformly installed in the isolation chamber 15, the second process chamber group, the outlet transition chamber 171, and the outlet buffer chamber 172, respectively. The heat exchange plates are connected in parallel, two ends of each heat exchange plate are respectively connected with a water inlet main cooling pipeline 52 and a water return main cooling pipeline 51, and the water inlet main cooling pipeline 52 and the water return main cooling pipeline 51 are in butt joint with an external cooling water system.
The heating mechanism includes a plurality of heaters 53 ', and the heaters 53' are of a resistance type and are directly heated by electricity. The plurality of heaters 53' are installed in the inlet buffer chamber 131, the inlet transition chamber 132, the first process chamber group, and the isolation chamber 15, respectively.
The evacuation mechanism is used for evacuating air in the corresponding chamber, and includes a plurality of molecular pumps 41, a plurality of molecular pump pipelines 42, a plurality of bellows 44, at least one main evacuation pipeline 45 and a backing pump set 54. The inlet buffer chamber 131, the inlet transition chamber 132, the first process chamber group, the isolation chamber 15, the second process chamber group, the outlet transition chamber 171, and the outlet buffer chamber 172 are respectively provided with a molecular pump 41. Each molecular pump 41 is connected with a molecular pump pipeline 42 through a corrugated pipe 44, and a plurality of molecular pump pipelines 42 are connected in parallel and then connected with a main pumping pipeline 45. The molecular pump 41 is mounted on the tank wall 105 of the corresponding chamber, and further mounted on the tank wall 105 exposed from the corresponding chamber to communicate with the corresponding chamber.
The cathode mechanism comprises at least one intermediate-frequency rotating cathode 31, at least one linear ion source 32 and at least one plane cathode 33, the linear ion source 32 is installed on the first process chamber 141, the plane cathode 33 is installed on the fifth process chamber 162, and the intermediate-frequency rotating cathode 31 is installed on each of the second process chamber 142, the third process chamber 143 and the fourth process chamber 161.
Based on the production line, the DLC coating production process comprises two processes which are sequentially carried out and run in opposite directions:
a first process: the substrate sequentially passes through the front translation stage 11, the inlet chamber 12, the inlet buffer chamber 131, the inlet transition chamber 132, the first process chamber 141, the second process chamber 142, the third process chamber 143, the isolation chamber 15, the fourth process chamber 161, the fifth process chamber 162, the outlet transition chamber 171, the outlet buffer chamber 172, the outlet chamber 18 and the rear translation stage 19, and multilayer coating is completed in the first process chamber group and the second process chamber group;
a second process: the substrate holder 21 is translated on the rear translation stage 19 to be in the same transfer line with the return stage 7, transferred to a return stage 7 adjacent to the rear translation stage 19, and then transported in the return stage 7 to the front translation stage 11, where the substrate holder is unloaded with the coated substrate, the substrate to be coated is loaded on the substrate holder, and enters the inlet chamber 12 from the front translation stage 11 for coating.
The first process chamber 141 is provided with an ion source for performing plasma cleaning of the substrate. The substrate is coated in the second process chamber 142, the third process chamber 143, the fourth process chamber 161 and the fifth process chamber 162, and the thickness and the material of the film are selected according to the design of the film system. Specifically, the target material of the second process chamber 142 can be a Ti target, a TiOx ceramic target, a Si target, a Nb2Ox ceramic target, etc.; the target material of the third process chamber 143 is a Si target; the target material of the process chamber four 161 is C target; the target material of the process chamber five 162 is a Si target.
The working atmosphere in the process chamber is as follows: working gas Ar with the flow rate of 50-500 sccm; the reaction gas is N2、O2And ArH with a flow rate of 50-500 sccm.
The running speed of the substrate carrier in the process chamber is 0.5-1.5 m/min.
Finally, it must be said here that: the above embodiments are only used for further detailed description of the technical solutions of the present invention, and should not be understood as limiting the scope of the present invention, and the modifications and adjustments made by those skilled in the art according to the above-mentioned contents of the present invention are all included in the scope of the present invention.
Claims (10)
1. A DLC continuous coating production line is characterized by comprising an inlet chamber, an inlet buffer chamber, an inlet transition chamber, a first process chamber group, an isolation chamber, a second process chamber group, an outlet transition chamber, an outlet buffer chamber and an outlet chamber which are connected in sequence in a straight line to form a communicated straight line channel, and a return frame group arranged in parallel with the linear passage at intervals, wherein the first process chamber group and the second process chamber group respectively comprise a plurality of process chambers, the frame returning group comprises a plurality of frame returning bodies which are connected in sequence, the production line also comprises a front translation table and a rear translation table, the front translation table and the rear translation table are respectively positioned at two ends of the linear channel, and the cathode mechanisms comprise at least one medium-frequency rotating cathode, at least one linear ion source and at least one plane cathode.
2. The DLC continuous coating production line of claim 1, wherein: the first process chamber group comprises a first process chamber, a second process chamber and a third process chamber which are sequentially connected from the inlet transition chamber to the isolation chamber, and the second process chamber group comprises a fourth process chamber and a fifth process chamber which are sequentially connected from the isolation chamber to the outlet transition chamber.
3. The DLC continuous coating production line of claim 2, wherein: the first process chamber is provided with a linear ion source, the fifth process chamber is provided with a planar cathode, and the second process chamber, the third process chamber and the fourth process chamber are respectively provided with a medium-frequency rotating cathode.
4. The DLC continuous coating production line of claim 3, wherein: the production line also comprises a substrate conveying mechanism for conveying the substrate to be coated on the linear channel, wherein the substrate conveying mechanism comprises a substrate frame, a plurality of magnetic guides and a plurality of inner driving wheels, the magnetic guides and the inner driving wheels are uniformly arranged in the inlet chamber, the inlet buffer chamber, the inlet transition chamber, the first process chamber group, the isolation chamber, the second process chamber group, the outlet transition chamber, the outlet buffer chamber and the outlet chamber at intervals, a linear conveying path is formed along the linear channel, the magnetic guides are positioned above the inner driving wheels, and the substrate frame for loading the substrate is positioned between the magnetic guides and the inner driving wheels and runs along the linear channel.
5. The DLC continuous coating production line of claim 4, wherein: the substrate frame is vertical to the horizontal plane, the upper end of the substrate frame is magnetically connected with the magnetic guide in a non-contact way, and the lower end of the substrate frame is arranged on the plurality of inner driving wheels in a sliding way.
6. The DLC continuous coating production line of claim 5, wherein: the outer surface of the inner driving wheel is inwards concave along the circumferential direction, and the lower end of the substrate frame is contacted and arranged on the inwards concave surface in a sliding mode.
7. The DLC continuous plating line according to claim 5 or 6, characterized in that: the production line further comprises a heat transfer mechanism with a heat transfer effect, the heat transfer mechanism comprises a cooling mechanism, the cooling mechanism comprises at least one water return main cooling pipeline, at least one water inlet main cooling pipeline and a plurality of cooling plates, the cooling plates are respectively and uniformly installed in the isolation chamber, the second process chamber group, the outlet transition chamber and the outlet buffer chamber, the heat exchange plates are connected in parallel, two ends of each heat exchange plate are respectively connected with the water inlet main cooling pipeline and the water return main cooling pipeline, and the water inlet main cooling pipeline and the water return main cooling pipeline are in butt joint with an external cooling water system.
8. The DLC continuous coating production line of claim 7, wherein: the heat transfer mechanism further comprises a heating mechanism, the heating mechanism comprises a plurality of heaters, the heaters are of a resistance type and are directly heated by electricity, and the heaters are respectively installed in the inlet buffer chamber, the inlet transition chamber, the first process chamber group and the isolation chamber.
9. The DLC continuous coating production line of claim 3, wherein: the production line also comprises a vacuumizing mechanism, the vacuumizing mechanism comprises a plurality of molecular pumps, and the inlet buffer chamber, the inlet transition chamber, the first process chamber group, the isolation chamber, the second process chamber group, the outlet transition chamber and the outlet buffer chamber are respectively provided with one molecular pump.
10. The DLC continuous coating production line according to claim 9, characterized in that: the vacuumizing mechanism further comprises a plurality of molecular pump pipelines, a plurality of corrugated pipes, at least one main air pumping pipeline and a preceding stage vacuum pump set, each molecular pump is connected with one molecular pump pipeline through one corrugated pipe, and the plurality of molecular pump pipelines are connected in parallel and then connected with the main air pumping pipeline.
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| CN201921910378.XU CN210945763U (en) | 2019-11-07 | 2019-11-07 | DLC continuous coating production line |
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| CN201921910378.XU CN210945763U (en) | 2019-11-07 | 2019-11-07 | DLC continuous coating production line |
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Effective date of registration: 20200701 Address after: Hunan Shengshi road 411100 Xiangtan Jiuhua Economic Zone No. 8 Patentee after: XIANGTAN HONGDA VACUUM TECHNOLOGY Co.,Ltd. Address before: Hunan Shengshi road 411100 Xiangtan Jiuhua Economic Zone No. 8 Patentee before: Huang Le |