CN210886310U

CN210886310U - Connecting assembly for single crystal furnace and single crystal furnace

Info

Publication number: CN210886310U
Application number: CN201922013505.2U
Authority: CN
Inventors: 王维; 胥俊东; 常晓鱼; 陈辉
Original assignee: Beijng Naura Vacuum Technology Co Ltd
Current assignee: Beijng Naura Vacuum Technology Co Ltd
Priority date: 2019-11-20
Filing date: 2019-11-20
Publication date: 2020-06-30
Anticipated expiration: 2029-11-20

Abstract

The utility model relates to a photovoltaic field discloses a coupling assembling and single crystal growing furnace for single crystal growing furnace. The connecting assembly for the single crystal furnace is used for connecting the auxiliary chamber and the rotary plate valve and comprises a connecting column, a chuck and a driving assembly; one end of the connecting column is connected to the rotary plate valve, and a first boss protruding along the radial direction of the connecting column is arranged on the connecting column; the chuck is clamped on the auxiliary chamber and is connected with the auxiliary chamber through the driving assembly; the chuck is provided with a gourd hole, the gourd hole comprises a large hole and a small hole, the connecting column is arranged in the gourd hole in a penetrating mode, the first boss is located above the gourd hole, the diameter of the first boss is smaller than the inner diameter of the large hole and larger than the inner diameter of the small hole, and when the connecting column is located in the large hole, the auxiliary chamber is separated from the rotary plate valve; when the connecting column is positioned in the small hole, the auxiliary chamber is connected with the rotary plate valve. The utility model provides a coupling assembling for single crystal growing furnace can simplify the structure that is connected, breaks away from of subchamber and rotary plate valve greatly, has improved the efficiency that subchamber is connected, breaks away from with rotary plate valve, just can guarantee the production efficiency of single crystal growing furnace effectively.

Description

Connecting assembly for single crystal furnace and single crystal furnace

Technical Field

The utility model relates to a photovoltaic field especially relates to a coupling assembling and single crystal growing furnace for single crystal growing furnace.

Background

With the rapid development of the photovoltaic industry, the demand of monocrystalline silicon wafers is greatly increased, manufacturers of large monocrystalline silicon rods expand the capacity to meet the demand of the silicon wafers, and meanwhile, in order to realize the photovoltaic power generation on line at a low price in the early days, manufacturers of the silicon rods need to continuously reduce the production cost from the technology of preparing the silicon rods, and improve the production efficiency.

At present, a single crystal furnace is the highest-yield device for producing solar-grade silicon single crystal rods, and in order to further improve the productivity, reduce the production cost and improve the production efficiency of the silicon single crystal rods, a plurality of silicon rod manufacturers mostly adopt a method of feeding materials by a single furnace for multiple times and drawing the silicon single crystal rods for multiple times. The auxiliary chamber and the rotary plate valve can be selectively connected and released when the silicon rod is prepared by the single crystal furnace.

When the production raw materials are put into the single crystal furnace for the first time, the auxiliary chamber is required to be connected with the rotary plate valve, the rotary plate valve is assembled on the furnace cover and fastened with the furnace cover, and the rotary plate valve and the furnace cover are driven by the ascending and the rotation of the auxiliary chamber to realize the open-furnace feeding; when the rod is taken and fed in production, the auxiliary chamber and the rotary plate valve are required to be released, and the auxiliary chamber independently rises and rotates, so that the rod is pulled for multiple times by multiple times of feeding of the single crystal furnace; when the production is finished, the auxiliary chamber is required to be connected with the rotary plate valve again to realize the furnace opening and complete the replacement and cleaning of the furnace and related components.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model aims at providing a coupling assembling and single crystal growing furnace for single crystal growing furnace to solve among the prior art problem that the subchamber is connected, break away from that the structure is complicated, inefficiency with the rotary plate valve.

(II) technical scheme

In order to solve the technical problem, the utility model provides a connecting component for a single crystal furnace, which is used for connecting an auxiliary chamber and a rotary plate valve and comprises a connecting column, a chuck and a driving component; one end of the connecting column is connected to the rotary plate valve, and a first boss protruding in the radial direction of the connecting column is arranged on the connecting column; the chuck is clamped on the auxiliary chamber and is connected with the auxiliary chamber through the driving assembly; the chuck is provided with a gourd hole, the gourd hole comprises a large hole and a small hole, the connecting column is arranged in the gourd hole in a penetrating mode, the first boss is located above the gourd hole, the diameter of the first boss is smaller than the inner diameter of the large hole and larger than the inner diameter of the small hole, and when the connecting column is located in the large hole, the auxiliary chamber is separated from the rotary plate valve; when the connecting column is positioned in the small hole, the auxiliary chamber is connected with the rotary plate valve.

Further, drive assembly includes fixing base and extensible member, fixing base fixed connection be in on the subchamber, the first end of extensible member rotationally connects on the fixing base, the second end of extensible member rotationally connects on the chuck.

Further, the chuck comprises at least two chuck segments, and at least two of the chuck segments are connected through a chuck connecting block to form the chuck.

Further, at least two the chuck segmentation is the arc, follows the chuck segmentation radially is provided with at least three screw hole, and the setting element one-to-one wears to establish at least three with the joint in the screw hole the chuck segmentation with the accessory chamber.

Furthermore, an anti-abrasion piece is further arranged at one end, facing the auxiliary chamber, of the positioning piece.

Furthermore, the number of the positioning pieces is at least three, and the at least three positioning pieces are arranged at equal intervals along the circumferential direction of the chuck segment.

Further, a second boss protruding in the radial direction of the sub-chamber is provided at the lower end of the sub-chamber, and the upper surface of the second boss and the lower surfaces of at least two of the chuck segments abut against each other.

Furthermore, the spliced pole and the gourd hole be a plurality of, and it is a plurality of the spliced pole sets up with a plurality of the gourd hole one-to-one.

Further, a plurality of connecting columns are arranged at equal intervals along the circumferential direction of the rotary plate valve; the plurality of gourd holes are arranged at equal intervals along the circumferential direction of the chuck.

According to another aspect of the present invention, there is provided a single crystal furnace, comprising the connecting assembly for a single crystal furnace as defined in any one of the above.

(III) advantageous effects

The utility model provides a coupling assembling and single crystal growing furnace for single crystal growing furnace is through at subchamber lower extreme joint chuck, set up the spliced pole on the rotary plate valve to set up the calabash hole on the chuck, wear to establish the spliced pole in the calabash hole simultaneously, rotate for the rotary plate valve through drive assembly drive chuck, can make the position of spliced pole along macropore, the aperture switching in calabash hole, and then can realize breaking away from or being connected of subchamber and rotary plate valve through the cooperation in spliced pole and calabash hole. Therefore, the structure for connecting and separating the auxiliary chamber and the rotary plate valve can be greatly simplified, the efficiency for connecting and separating the auxiliary chamber and the rotary plate valve is improved, and the production efficiency of the single crystal furnace can be effectively ensured.

Drawings

Fig. 1 is a schematic front view of a connecting assembly for a single crystal furnace according to an embodiment of the present invention;

fig. 2 is a schematic top view of a connection assembly for a single crystal furnace according to an embodiment of the present invention;

FIG. 3 is a schematic cross-sectional view taken at A-A in FIG. 2;

fig. 4 is a schematic cross-sectional view at B-B in fig. 2.

The reference numbers illustrate:

100. a sub-chamber; 102. a rotary plate valve; 104. connecting columns; 106. a first boss; 108. a gourd hole; 110. a fixed seat; 112. a telescoping member; 114. segmenting the chuck; 116. a positioning member; 118. an anti-wear member; 120. a second boss; 122. a furnace cover; 124. a chuck connecting block; 126. and a third boss.

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1 to 4, the present invention provides a connecting assembly for a single crystal growing furnace, which is used to connect an auxiliary chamber 100 and a rotary plate valve 102, and comprises a connecting column 104, a chuck and a driving assembly; one end of the connecting column 104 is connected to the rotary plate valve 102, and a first boss 106 protruding along the radial direction of the connecting column 104 is arranged on the connecting column 104; the chuck is clamped on the auxiliary chamber 100 and is connected with the auxiliary chamber 100 through a driving assembly; the chuck is provided with a gourd hole 108, the gourd hole 108 comprises a large hole and a small hole, the connecting column 104 is arranged in the gourd hole 108 in a penetrating mode, the first boss 106 is located above the gourd hole 108, the diameter of the first boss 106 is smaller than the inner diameter of the large hole and larger than the inner diameter of the small hole, and when the connecting column 104 is located in the large hole, the auxiliary chamber 100 is separated from the rotary plate valve 102; when the connecting post 104 is positioned within the aperture, the subchamber 100 is connected to the rotary plate valve 102.

The utility model provides a coupling assembling for single crystal growing furnace, through at 100 lower extreme joint chucks of loco, set up spliced pole 104 on rotary plate valve 102 to set up calabash hole 108 on the chuck, wear to establish spliced pole 104 in calabash hole 108 simultaneously, rotate for rotary plate valve 102 through drive assembly drive chuck, can make the position of spliced pole 104 along the macropore of calabash hole 108, the aperture switches, and then can realize breaking away from or being connected of loco 100 and rotary plate valve 102 through the cooperation of spliced pole 104 with calabash hole 108. Therefore, the structure for connecting and disconnecting the subchamber 100 and the rotary plate valve 102 can be greatly simplified, the efficiency for connecting and disconnecting the subchamber 100 and the rotary plate valve 102 is improved, and the production efficiency of the single crystal furnace can be effectively ensured.

Specifically, the connecting assembly for a single crystal furnace provided in this embodiment is used to connect or disconnect the sub-chamber 100 and the rotary plate valve 102. Wherein, a pair of flange structures can be arranged between the rotary plate valve 102 and the auxiliary chamber 100, and the flange on the rotary plate valve 102 is arranged above the rotary plate valve 102; the flange on the sub-chamber 100 is disposed below the sub-chamber 100.

The rotary plate valve 102 is provided with a connecting column 104, and the connecting column 104 can be connected to a flange on the rotary plate valve 102 in a welding or threaded connection mode. As shown in fig. 3, the connecting column 104 in this embodiment is designed with an axial step, in other words, a first boss 106 is provided along the radial direction of the connecting column 104.

Specifically, the first boss 106 on the connection column 104 in this embodiment has a large upper diameter and a tapered shape, a small middle diameter and a large lower diameter, and the connection column 104 is provided with a thread at its lower portion. Correspondingly, a threaded hole is formed in the flange of the rotary plate valve 102. Wherein the diameter of the middle portion of the connecting post 104 is enlarged to form a third boss 126. In other words, the first boss 106 is located at the top end of the connecting column 104, the third boss 126 is located below the first boss 106, for example, the middle portion of the connecting column 104, and the first boss 106 is conical and the third boss 126 is square. In this way, the connecting stud 104 can be tightened onto the rotary plate valve 102 by being tightened onto the third boss 126 by a tool such as a wrench.

In this embodiment, since the outer peripheral surface of the sub-chamber 100 is circular, the chuck is also circular. The chuck is engaged with the outer circumferential surface of the sub-chamber 100, whereby the inner diameter of the chuck in this embodiment is slightly larger than the outer diameter of the sub-chamber 100. In addition, the chuck is also in transmission connection with sub-chamber 100 through a driving assembly, that is, in this embodiment, the chuck can rotate relative to sub-chamber 100 through the driving of the driving assembly.

The chuck is provided with a gourd hole 108, wherein the gourd hole 108 comprises a big hole and a small hole which are communicated with each other. In addition, the large hole may be a through hole and the small hole may be a counter bore. The connecting column 104 is disposed through the gourd hole 108, and the first boss 106 of the connecting column 104 is disposed above the gourd hole 108. Thus, the connecting column 104 and the gourd hole 108 have the following two matching states:

first, when the connecting post 104 is located in a counterbore in the gourd hole 108, the diameter of the first boss 106 on the connecting post 104 is larger than the inner diameter of the counterbore. Thus, when the sub-chamber 100 is raised, the lower surface of the first boss 106 abuts the upper surface of the counterbore. Thus, when the auxiliary chamber 100 is lifted, the chuck is clamped on the outer peripheral surface of the auxiliary chamber 100, so that the rotary plate valve 102 and the furnace cover 122 can be driven to move together through the matching of the connecting column 104 on the chuck and the upper surface of the counter bore;

second, when the connecting column 104 is located in the large hole of the gourd hole 108, the diameter of the first boss 106 on the connecting column 104 is smaller than the inner diameter of the large hole. Thus, when the sub-chamber 100 is lifted, the lower surface of the first boss 106 and the upper surface of the large hole do not come into contact with each other, and therefore, the sub-chamber 100 is separated from the rotary plate valve 102 and the furnace cover 122.

According to the above two states, the embodiment of the utility model provides a coupling assembling for single crystal growing furnace can simplify the structure that subchamber 100 and rotary plate valve 102 are connected, break away from greatly, has improved the efficiency that subchamber 100 and rotary plate valve 102 are connected, break away from, just can guarantee the production efficiency of single crystal growing furnace effectively.

Furthermore, there are a plurality of connecting columns 104 and a plurality of gourd holes 108, and the connecting columns 104 and the gourd holes 108 are arranged in a one-to-one correspondence.

By arranging the connecting columns 104 and the gourd holes 108 and arranging the connecting columns 104 and the gourd holes 108 in a one-to-one correspondence manner, the purpose that the rotary plate valve 102 and the furnace cover 122 can be stably driven to act together when the auxiliary chamber 100 ascends can be ensured, and the operation stability of the connecting assembly for the single crystal furnace is improved.

Still further, a plurality of connecting columns 104 are arranged at equal intervals along the circumferential direction of the rotary plate valve 102; a plurality of gourd holes 108 are equally spaced along the circumference of the chuck. This is provided to further improve the stability of the connection of the sub-chamber 100 to the rotary plate valve 102 and the furnace cover 122.

In this embodiment, the driving assembly includes a fixing base 110 and a telescopic member 112, the fixing base 110 is fixedly connected to the sub-chamber 100, a first end of the telescopic member 112 is rotatably connected to the fixing base 110, and a second end of the telescopic member 112 is rotatably connected to the chuck.

As shown in fig. 1 and 2, the fixing base 110 of the driving assembly may be fixedly connected to the auxiliary chamber 100 by welding or bolting, and the telescopic member 112 may be a cylinder or other element capable of performing a telescopic action, such as an electric cylinder. Taking the cylinder as an example, the first end of the cylinder in this embodiment specifically refers to one end of a cylinder body of the cylinder, and the second end of the cylinder specifically refers to one end of a piston rod on the cylinder. That is, the one end of the cylinder body of cylinder rotationally connects on fixing base 110, and wherein rotatable connected mode can be articulated, for example, can all set up corresponding through-hole on the first end of cylinder and fixing base 110 to wear to establish through structures such as round pin axle, pin and make the two connect in the through-hole. The one end of the piston rod of cylinder rotationally connects on the chuck, and wherein rotatable connected mode can be articulated, for example, can all set up corresponding through-hole on the second end of cylinder and chuck to wear to establish through structures such as round pin axle, pin and make the two connect in the through-hole.

Thus, when the piston rod of the cylinder extends or shortens, the chuck can be driven to rotate relative to the sub-chamber 100, and the purpose of connecting or disconnecting the sub-chamber 100 and the rotary plate valve 102 can be achieved.

Further, the chuck comprises at least two chuck segments 114, the at least two chuck segments 114 being connected by a chuck connecting block 124 to form the chuck.

As shown in fig. 2, the chuck in this embodiment comprises two chuck segments 114, wherein each chuck segment 114 has an arc-shaped structure, and the two chuck segments 114 are connected by a chuck connecting block 124 to form a complete chuck. Correspondingly, through holes can be formed at the ends of the two chuck segments 114, through holes can be formed in the chuck connecting block 124, and the chuck segments 114 and the chuck connecting block 124 can be connected by a connecting member such as a bolt to form a complete chuck. Through setting the chuck to detachable structure, can guarantee that the chuck can install or dismantle fast, when the chuck needs the maintenance, can improve the efficiency of dismantling, changing.

Further, at least two chuck segments 114 are arc-shaped, at least three threaded holes are arranged along the radial direction of the chuck segments 114, and the positioning members 116 are correspondingly arranged in the at least three threaded holes one by one to ensure the coaxiality of the chuck segments 114 and the sub-chamber 100.

As shown in fig. 4, the inner diameter of the chuck is slightly larger than the outer diameter of the sub-chamber 100, so that at least three threaded holes are provided along the radial direction of the chuck segment 114, and the positioning member 116 may be a bolt or the like, in order to ensure high coaxiality between the chuck and the sub-chamber 100. The position of the chuck relative to the sub-chamber 100 can be adjusted by adjusting the position of the bolt relative to the threaded hole, and high coaxiality of the chuck and the sub-chamber can be further ensured. Preferably, the positioning member 116 is also stepped axially.

Further, a wear prevention member 118 is provided on the positioning member 116 toward the end of the sub-chamber 100. The abrasion prevention member 118 is provided at an end of the positioning member 116 facing the sub-chamber 100, and thus the positioning member 116 can effectively prevent the outer circumferential surface of the sub-chamber 100 from being scratched. The wear-proof member 118 may be a cap-shaped structure made of rubber, teflon, or the like.

Still further, there are also at least three positioning members 116, and the at least three positioning members 116 are equally spaced along the circumference of the chuck segment 114.

By providing at least three locating members 116 equally spaced circumferentially along the chuck segment 114, it is ensured that the relative position of the chuck and the sub-chamber 100 can be adjusted from multiple directions of the chuck, thereby ensuring a higher degree of coaxiality of the chuck and the sub-chamber 100.

In other words, the number of the positioning members 116 is set in one-to-one correspondence with the number of the screw holes.

Further, a second boss 120 protruding in the radial direction of the sub-chamber 100 is provided on the side surface of the sub-chamber 100, and an upper surface of the second boss 120 and lower surfaces of the at least two chuck segments 114 abut against each other.

As shown in fig. 4, when the connection post 104 is located at the position of the counter bore in the gourd hole 108, in order to ensure that the sub-chamber 100 can more stably drive the rotary plate valve 102 and the furnace cover 122 to move together, in a preferred embodiment, a second boss 120 protruding along the radial direction is further provided on the outer circumferential surface of the sub-chamber 100, and when the sub-chamber 100 moves upward, the upper surface of the second boss 120 abuts against the lower surfaces of at least two chuck segments 114, thereby ensuring that the sub-chamber 100 can more stably drive the rotary plate valve 102 and the furnace cover 122 to move.

Thus, the radial cross section of the chuck in this embodiment is L-shaped, and the upper surface of the second boss 120 abuts against one side of the L-shaped chuck.

The utility model provides a single crystal growing furnace, through at 100 lower extreme joint chucks of loco, set up spliced pole 104 on rotary plate valve 102 to set up calabash hole 108 on the chuck, wear to establish spliced pole 104 in calabash hole 108 simultaneously, rotate for rotary plate valve 102 through drive assembly drive chuck, can make the position of spliced pole 104 along the macropore of calabash hole 108, the aperture switches, and then can realize breaking away from or being connected of loco 100 and rotary plate valve 102 through the cooperation of spliced pole 104 with calabash hole 108. Therefore, the structure for connecting and disconnecting the subchamber 100 and the rotary plate valve 102 can be greatly simplified, the efficiency for connecting and disconnecting the subchamber 100 and the rotary plate valve 102 is improved, and the production efficiency of the single crystal furnace can be effectively ensured.

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A connecting component for a single crystal furnace is used for connecting an auxiliary chamber (100) and a rotary plate valve (102), and is characterized by comprising a connecting column (104), a chuck and a driving component;

one end of the connecting column (104) is connected to the rotary plate valve (102), and a first boss (106) protruding along the radial direction of the connecting column (104) is arranged on the connecting column;

the chuck is clamped on the auxiliary chamber (100) and is connected with the auxiliary chamber (100) through the driving component;

a gourd hole (108) is formed in the chuck, the gourd hole (108) comprises a large hole and a small hole, the connecting column (104) is arranged in the gourd hole (108) in a penetrating mode, the first boss (106) is located above the gourd hole (108), the diameter of the first boss (106) is smaller than the inner diameter of the large hole and larger than the inner diameter of the small hole, and when the connecting column (104) is located in the large hole, the auxiliary chamber (100) is separated from the rotary plate valve (102); when the connecting column (104) is located within the aperture, the sub-chamber (100) is connected to the rotary plate valve (102).

2. The connecting assembly for the single crystal furnace according to claim 1, wherein the driving assembly comprises a fixed seat (110) and a telescopic member (112), the fixed seat (110) is fixedly connected to the auxiliary chamber (100), a first end of the telescopic member (112) is rotatably connected to the fixed seat (110), and a second end of the telescopic member (112) is rotatably connected to the chuck.

3. The connecting assembly for the single crystal furnace according to claim 1, wherein the chuck comprises at least two chuck segments (114), and at least two of the chuck segments (114) are connected by a chuck connecting block (124) to form the chuck.

4. The connecting assembly for the single crystal furnace according to claim 3, wherein at least two of the chuck segments (114) are arc-shaped, at least three threaded holes are formed in the radial direction of the chuck segments (114), and positioning members (116) are correspondingly arranged in the at least three threaded holes in a penetrating manner to clamp the chuck segments (114) and the auxiliary chamber (100).

5. The connecting assembly for the single crystal furnace according to claim 4, wherein the positioning member (116) is further provided with a wear-proof member (118) at an end facing the sub-chamber (100).

6. The connecting assembly for the single crystal furnace according to claim 4, wherein the number of the positioning members (116) is at least three, and the at least three positioning members (116) are equally spaced along the circumference of the chuck segment (114).

7. The connecting assembly for the single crystal furnace according to claim 3, wherein a second boss (120) protruding in a radial direction of the sub-chamber (100) is provided at a lower end of the sub-chamber (100), and an upper surface of the second boss (120) and a lower surface of at least two of the chuck segments (114) abut against each other.

8. The connecting assembly for the single crystal furnace according to any one of claims 1 to 7, wherein the connecting column (104) and the gourd hole (108) are plural, and the connecting columns (104) and the gourd holes (108) are provided in one-to-one correspondence.

9. The connecting assembly for the single crystal furnace according to claim 8, wherein a plurality of the connecting columns (104) are equally spaced along a circumference of the rotary plate valve (102); a plurality of gourd holes (108) are equally spaced along a circumference of the chuck.

10. A single crystal furnace comprising the connecting assembly for a single crystal furnace according to any one of claims 1 to 9.