CN210865636U

CN210865636U - Multi-degree-of-freedom and long-stroke nanoscale positioning platform

Info

Publication number: CN210865636U
Application number: CN201922289673.4U
Authority: CN
Inventors: 文杰; 闫灿
Original assignee: Sanying Motioncontrol Instruments Ltd
Current assignee: Sanying Motioncontrol Instruments Ltd
Priority date: 2019-12-19
Filing date: 2019-12-19
Publication date: 2020-06-26
Anticipated expiration: 2029-12-19

Abstract

The utility model relates to the technical field of positioning platforms, and discloses a multi-degree of freedom and long-stroke nanometer positioning platform, which comprises a marble base, a linear motor and a coil support platform, wherein the upper surface of the marble base is symmetrically and fixedly connected with side plates, the linear motor is fixedly installed between the two side plates, the coil support platform is installed on the linear motor, a scale rod is arranged below the linear motor, the scale rod is fixedly connected between the two side plates, a matched moving block is sleeved on the scale rod in a sliding manner, the moving block is fixedly connected with the coil support platform through a moving frame, and a long-stroke positioning mechanism is installed on the scale rod; the long-stroke positioning mechanism comprises a threaded rod which is rotatably connected between the two side plates, and the threaded rod is arranged below the scale rod. The utility model discloses the convenience carries out accurate control to the large stroke linear motion distance of coil support platform, and then effectively guarantees the accuracy of location.

Description

Multi-degree-of-freedom and long-stroke nanoscale positioning platform

Technical Field

The utility model relates to a positioning platform technical field especially relates to a nanometer positioning platform of multi freedom and long stroke.

Background

In recent years, a multi-degree-of-freedom long-stroke nanometer positioning platform plays an increasingly important role in modern precision machining equipment, and particularly in the micro-electronic field of hard disk surfaces, Fresnel lenses and the like, the equipment needs to drive the platform to realize rotary and linear two-degree-of-freedom long-stroke precision positioning. At present, the domestic long-stroke ultra-precise positioning mainly adopts a ball screw and a piezoelectric driver or a linear motor and the piezoelectric driver, and cannot meet the positioning requirement of two degrees of freedom of rotation-linear.

In a patent with the Chinese patent authorization number of CN207409264U, a multi-freedom-degree and long-stroke nanometer positioning platform is disclosed, when in use, a linear motor coil generates a magnetic field after being electrified and interacts with the magnetic field of a linear motor permanent magnet, so that a coil support platform is driven to realize large-stroke linear motion; the servo motor coil generates a magnetic field after being electrified, and the magnetic field is interacted with a magnetic field generated by a servo motor permanent magnet fixed on the rotating main shaft to drive the rotating main shaft to rotate. Meanwhile, high-precision positioning in the rotating direction is realized by feeding back signals through an encoder; after the coil of the giant magnetostrictive actuator is electrified, a magnetic field is generated and acts on the giant magnetostrictive material, so that the giant magnetostrictive material generates nanoscale telescopic displacement. The whole platform is subjected to large-stroke displacement by a linear motor, the alternating-current servo motor is used for high-precision positioning in the rotating direction, and the giant magnetostrictive actuator is used for nano-scale positioning in the linear direction, so that multi-freedom-degree long-stroke nano-scale positioning is realized; however, the scheme still has the following defects:

when the coil support platform performs large-stroke linear motion, the motion distance of the coil support platform cannot be accurately controlled, so that the positioning accuracy is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the prior art, when coil support platform was carrying out big stroke linear motion, its motion distance can't carry out the problem of accurate control, and the nanometer positioning platform of a multi freedom and long stroke that provides.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a multi-degree-of-freedom and long-stroke nanoscale positioning platform comprises a marble base, a linear motor and a coil support platform, wherein the upper surface of the marble base is symmetrically and fixedly connected with side plates, the linear motor is fixedly installed between the two side plates, the coil support platform is installed on the linear motor, a scale rod is arranged below the linear motor and fixedly connected between the two side plates, a matched moving block is sleeved on the scale rod in a sliding mode, the moving block is fixedly connected with the coil support platform through a moving frame, and a long-stroke positioning mechanism is installed on the scale rod;

the long stroke positioning mechanism is including rotating the threaded rod of connection between two curb plates, and the threaded rod is located the setting of scale bar below, one of them through mounting bracket fixedly connected with servo drive motor on the lateral wall of curb plate, servo drive motor's output passes through the one end fixed connection of shaft coupling with the threaded rod, the screw thread has cup jointed the screw thread section of thick bamboo that matches on the threaded rod, rotate through the bearing on the open-ended edge of screw thread section of thick bamboo one end and be connected with the sliding sleeve that matches with the threaded rod, the threaded rod passes the sliding sleeve setting, and sliding sleeve and threaded rod sliding connection, the sliding sleeve that matches has been cup jointed in the slip on the scale bar, the lower fixed surface of sliding sleeve is connected with the connecting rod, the other end of connecting rod and the top fixed connection of sliding sleeve, fixed mounting has touch off.

Preferably, the inner cylinder wall of the sliding cylinder is symmetrically provided with ball grooves, matched balls are arranged in the ball grooves, and one ends, far away from the bottoms of the ball grooves, of the balls penetrate through the notches of the ball grooves and extend outwards and are in rolling connection with the outer rod wall of the scale rod.

Preferably, the lower surface of the marble base is connected with a matched rubber pad.

Preferably, a reading head which is connected with the bottom of the scale rod in a sliding manner is fixedly connected to the side wall of the sliding cylinder, which is close to the moving block.

Preferably, the outer cylinder wall of the threaded cylinder is fixedly sleeved with a turntable.

Compared with the prior art, the utility model provides a nanometer positioning platform of multi freedom and long stroke possesses following beneficial effect:

this nanometer level positioning platform of multi freedom and long stroke, through setting up linear electric motor, coil support platform, scale rod, movable block, removal frame and long stroke positioning mechanism, linear electric motor drives coil support platform and carries out big stroke linear motion, and simultaneously, the removal frame drives the movable block and carries out the synchronous slip along the scale rod, conveniently carries out accurate control to the displacement distance of movable block through long stroke positioning mechanism to conveniently carry out accurate control to the big stroke linear motion distance of coil support platform, and then effectively guarantee the accuracy of location.

The part that does not relate to in the device all is the same with prior art or can adopt prior art to realize, the utility model discloses the convenience carries out accurate control to coil support platform's long-range linear motion distance, and then effectively guarantees the accuracy of location.

Drawings

FIG. 1 is a schematic structural view of a multi-degree-of-freedom and long-stroke nanoscale positioning platform provided by the present invention;

fig. 2 is an enlarged view of a portion a in fig. 1.

In the figure: 1 marble base, 2 linear electric motors, 3 coil support platforms, 4 side plates, 5 scale bars, 6 moving blocks, 7 moving frames, 8 threaded rods, 9 servo driving motors, 10 threaded cylinders, 11 sliding sleeves, 12 sliding cylinders, 13 connecting rods, 14 touch-break switches, 15 balls, 16 reading heads and 17 turntables.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Referring to fig. 1-2, a multi-degree-of-freedom and long-stroke nanometer positioning platform comprises a marble base 1, a linear motor 2 and a coil support platform 3, wherein side plates 4 are symmetrically and fixedly connected to the upper surface of the marble base 1, the linear motor 2 is fixedly installed between the two side plates 4, the coil support platform 3 is installed on the linear motor 2, a scale rod 5 is arranged below the linear motor 2, the scale rod 5 is fixedly connected between the two side plates 4, a matched moving block 6 is slidably sleeved on the scale rod 5, the moving block 6 is fixedly connected with the coil support platform 3 through a moving frame 7, and a long-stroke positioning mechanism is installed on the scale rod 5;

the long-stroke positioning mechanism comprises a threaded rod 8 which is rotatably connected between two side plates 4, the threaded rod 8 is arranged below a scale rod 5, a servo driving motor 9 is fixedly connected to the side wall of one side plate 4 through an installation frame, the output end of the servo driving motor 9 is fixedly connected with one end of the threaded rod 8 through a coupler, a matched threaded cylinder 10 is sleeved on the threaded rod 8 in a threaded manner, a sliding sleeve 11 matched with the threaded rod 8 is rotatably connected to the edge of an opening at one end of the threaded cylinder 10 through a bearing, the threaded rod 8 penetrates through the sliding sleeve 11 and is arranged, the sliding sleeve 11 is slidably connected with the threaded rod 8, a matched sliding cylinder 12 is slidably sleeved on the scale rod 5, a connecting rod 13 is fixedly connected to the lower surface of the sliding cylinder 12, the other end of the connecting rod 13 is fixedly connected with the top of the sliding sleeve 11, a contact disconnection switch 14 is fixedly installed on the side wall of the, the threaded cylinder 10 connected by threads is enabled to move along the threaded rod 8, the threaded cylinder 10 drives the sliding sleeve 11 to synchronously move along the threaded rod 8, the sliding sleeve 11 drives the sliding cylinder 12 to slide along the scale rod 5 through the connecting rod 13, the servo driving motor 9 is started to conveniently and quickly regulate and control the movement of the sliding cylinder 12, the servo driving motor 9 is turned off after regulating and controlling the approximate distance, the threaded cylinder 10 is manually rotated to move along the threaded rod 8 so as to drive the sliding cylinder 12 to precisely and finely regulate the position along the scale rod 5, the sliding cylinder 12 is conveniently regulated and controlled to the precise position according to the scale on the scale rod 5, the linear motor 2 drives the coil support platform 3 to perform large-stroke linear motion, meanwhile, the moving frame 7 drives the moving block 6 to synchronously slide along the scale rod 5, when the moving block 6 touches the touch switch 14 on the sliding cylinder 12, the power supply of the linear motor 2 is automatically cut off, and, therefore, the large-stroke linear motion distance of the coil support platform 3 can be accurately controlled conveniently, and the positioning accuracy is effectively guaranteed.

The ball grooves are symmetrically formed in the inner cylinder wall of the sliding cylinder 12, matched balls 15 are installed in the ball grooves, one end, far away from the bottom of the ball groove, of each ball 15 penetrates through a groove opening of each ball groove and extends outwards, the ball 15 is connected with the outer rod wall of the scale rod 5 in a rolling mode, and friction force between the sliding cylinder 12 and the scale rod 5 is reduced.

The lower surface of marble base 1 is connected with the rubber pad of matching, guarantees marble base 1's stability.

The side wall of the sliding barrel 12 close to the moving block 6 is fixedly connected with a reading head 16 which is in sliding connection with the bottom of the scale rod 5, so that scales on the scale rod 5 can be conveniently and accurately read.

The outer cylinder wall of the threaded cylinder 10 is fixedly sleeved with a turntable 17, so that the threaded cylinder 10 can be driven to rotate conveniently.

In the utility model, a servo driving motor 9 is started to drive a threaded rod 8 to rotate, so that a threaded cylinder 10 connected with threads moves along the threaded rod 8, the threaded cylinder 10 drives a sliding sleeve 11 to move synchronously along the threaded rod 8, the sliding sleeve 11 drives a sliding cylinder 12 to slide along a scale rod 5 through a connecting rod 13, the movement of the sliding cylinder 12 is conveniently and rapidly regulated and controlled by starting the servo driving motor 9, the servo driving motor 9 is closed after regulating and controlling the approximate distance, the threaded cylinder 10 is manually rotated to move along the threaded rod 8, so that the sliding cylinder 12 is driven to perform position accurate fine adjustment along the scale rod 5, according to the scale on the scale rod 5, the sliding cylinder 12 is conveniently regulated and controlled to an accurate position, a linear motor 2 drives a coil support platform 3 to perform large-stroke linear motion, meanwhile, a moving frame 7 drives a moving block 6 to synchronously slide along the scale rod 5, when the moving block 6 touches a touch, the power supply of the linear motor 2 is automatically cut off, so that the coil support platform 3 stops moving, the large-stroke linear motion distance of the coil support platform 3 is conveniently and accurately controlled, and the positioning accuracy is effectively guaranteed.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The multi-degree-of-freedom and long-stroke nanometer positioning platform comprises a marble base (1), a linear motor (2) and a coil support platform (3), and is characterized in that side plates (4) are symmetrically and fixedly connected to the upper surface of the marble base (1), the linear motor (2) is fixedly installed between the two side plates (4), the coil support platform (3) is installed on the linear motor (2), a scale rod (5) is arranged below the linear motor (2), the scale rod (5) is fixedly connected between the two side plates (4), a matched moving block (6) is slidably sleeved on the scale rod (5), the moving block (6) is fixedly connected with the coil support platform (3) through a moving frame (7), and a long-stroke positioning mechanism is installed on the scale rod (5);

the long-stroke positioning mechanism comprises a threaded rod (8) which is rotatably connected between two side plates (4), the threaded rod (8) is arranged below a scale rod (5), one of the side plates (4) is fixedly connected with a servo driving motor (9) through an installation rack, the output end of the servo driving motor (9) is fixedly connected with one end of the threaded rod (8) through a shaft coupling, a matched threaded cylinder (10) is sleeved on the upper thread of the threaded rod (8), a sliding sleeve (11) matched with the threaded rod (8) is rotatably connected on the edge of one end opening of the threaded cylinder (10) through a bearing, the threaded rod (8) penetrates through the sliding sleeve (11) to be arranged, the sliding sleeve (11) is slidably connected with the threaded rod (8), a matched sliding cylinder (12) is slidably sleeved on the scale rod (5), and a connecting rod (13) is fixedly connected with the lower surface of the sliding cylinder (12), the other end of the connecting rod (13) is fixedly connected with the top of the sliding sleeve (11), and a touch-break switch (14) is fixedly installed on the side wall of the sliding sleeve (12) close to the moving block (6).

2. The nanometer-scale positioning platform with multiple degrees of freedom and long stroke as claimed in claim 1, wherein the inner cylinder wall of the sliding cylinder (12) is symmetrically provided with ball grooves, matched balls (15) are installed in the ball grooves, and one ends of the balls (15) far away from the bottom of the ball grooves penetrate through the notches of the ball grooves and extend outwards and are in rolling connection with the outer rod wall of the scale rod (5).

3. The multiple degree of freedom and long stroke nanometer scale positioning platform according to claim 1, characterized in that the lower surface of the marble base (1) is connected with a matching rubber pad.

4. The multi-degree-of-freedom and long-stroke nanoscale positioning platform as claimed in claim 1, wherein a reading head (16) slidably connected with the bottom of the scale rod (5) is fixedly connected to the side wall of the sliding cylinder (12) close to the moving block (6).

5. The multi-degree-of-freedom and long-stroke nanoscale positioning platform as claimed in claim 1, wherein a turntable (17) is fixedly sleeved on the outer cylinder wall of the threaded cylinder (10).