CN210862515U - Calibration device for eddy current displacement sensor - Google Patents

Calibration device for eddy current displacement sensor Download PDF

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Publication number
CN210862515U
CN210862515U CN201921379923.7U CN201921379923U CN210862515U CN 210862515 U CN210862515 U CN 210862515U CN 201921379923 U CN201921379923 U CN 201921379923U CN 210862515 U CN210862515 U CN 210862515U
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China
Prior art keywords
eddy current
displacement sensor
current displacement
grating ruler
mounting table
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CN201921379923.7U
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Chinese (zh)
Inventor
王建磊
门川皓
崔展
贾谦
崔亚辉
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Xi'an Tianyu Aviation Technology Co.,Ltd.
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Xian University of Technology
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Abstract

The utility model discloses a calibration device of an eddy current displacement sensor, which comprises an eddy current displacement sensor and a displacement system which are arranged oppositely; the displacement system is connected with a grating ruler; the grating ruler reading head is also included; when the displacement system moves relative to the eddy current displacement sensor, the grating ruler reading head can measure the displacement; the eddy current displacement sensor is arranged in a mode of comprising a bottom plate; a mounting table a is vertically fixed on one side of the upper surface of the bottom plate; a threaded hole a is horizontally formed in the mounting table a; the eddy current displacement sensor penetrates through the threaded hole a and is in threaded connection with the mounting table a. The utility model discloses can mark eddy current displacement sensor, and mark that the process operation is convenient, efficiency is higher.

Description

Calibration device for eddy current displacement sensor
Technical Field
The utility model belongs to the technical field of calibration device, concretely relates to eddy current displacement sensor calibration device.
Background
With the rapid development of the society, a rotary machine is developing towards high speed, vibration caused by high speed is a non-negligible problem, and the generated reasons can be poor assembly and severe working conditions such as alternating load, high temperature and high pressure, speed change and the like for a long time, and the operation safety of a unit is directly influenced. The serious shaft vibration can cause the problems of machine body vibration, transmission system part damage, bearing transitional wear and the like, and the fault risk of the rotating machinery is caused. In order to ensure the stability of the operation of the rotating machine, an eddy current displacement sensor is often installed at the bearing seat to monitor the vibration of the journal relative to the bearing bush.
The eddy current displacement sensor is a non-contact linear metering tool, can accurately measure static and dynamic relative displacement changes between a measured body and the end surface of a metal probe, and is widely applied to on-line measurement and protection of radial vibration, axial displacement, key phase, shaft rotating speed, expansion difference, eccentricity and the like of large-scale rotating mechanical shafts of steam turbines, water turbines, blowers, compressors, air compressors, gear boxes, large-scale cooling pumps and the like. The device has the advantages of good long-term working reliability, wide measuring range, high sensitivity, high resolution, high response speed, strong interference resistance, no influence of oil stains and other media, simple structure and the like.
The eddy current displacement sensor needs to be calibrated before being used, and currently, most of the calibration of the eddy current displacement sensor is performed by fixing the calibrated eddy current displacement sensor on a bracket and changing the distance by manually rotating a micrometer. Because the calibration method needs manual rotation operation, the calibration method is not convenient enough and is easy to generate errors, and the calibration method has low efficiency and long time consumption when the number of the sensors to be calibrated is large. Therefore, a convenient calibration device for the eddy current displacement sensor is needed.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an eddy current displacement sensor calibration device can mark eddy current displacement sensor, and the operation of calibration process is convenient, efficiency is higher.
The utility model adopts the technical proposal that the calibration device of the eddy current displacement sensor comprises an eddy current displacement sensor and a displacement system which are arranged oppositely; the displacement system is connected with a grating ruler; the grating ruler reading head is also included; when the displacement system moves relative to the eddy current displacement sensor, the grating ruler reading head can measure the displacement.
The utility model discloses a characteristics still lie in:
the eddy current displacement sensor is arranged in a mode of comprising a bottom plate; a mounting table a is vertically fixed on one side of the upper surface of the bottom plate; a threaded hole a is horizontally formed in the mounting table a; the eddy current displacement sensor penetrates through the threaded hole a and is in threaded connection with the mounting table a.
The displacement system comprises a ball screw fixed on one side of the upper surface of the bottom plate; a screw nut of the ball screw is fixedly connected with the mounting table b; a test disc is fixed on the upper surface of the mounting table b; a grating ruler is horizontally fixed on the side surface a of the mounting table b; one end of the ball screw is fixedly connected with an output shaft of the servo motor; the test disc is arranged opposite to the eddy current displacement sensor.
The center of the test disc and the eddy current displacement sensor are located on the same horizontal line.
The grating ruler reading head is arranged in a mode of comprising an installation platform c fixed on the upper surface of the bottom plate; the mounting table c is positioned on one side of the ball screw; a threaded hole b is horizontally formed in the mounting table c; the reading head of the grating ruler penetrates through the threaded hole b and is in threaded connection with the mounting table c; the grating ruler reading head is arranged opposite to the grating ruler.
The eddy current displacement sensor is electrically connected with the displacement sensor display.
The servo motor, the servo driver, the work control platform and the grating ruler reading head are electrically connected in sequence.
The device also comprises a protective cover; the eddy current displacement sensor, the displacement system, the grating ruler and the grating ruler reading head are all positioned in the protective cover.
The bottom plate is made of cast iron.
The utility model has the advantages that:
(1) the eddy current displacement sensor can be calibrated;
(2) the calibration precision is higher than that of the traditional method, and the precision can reach 5 mu m;
(3) the whole calibration process adopts electric drive, the introduced error is small, the calibration efficiency is high, and the large-batch calibration of the eddy current displacement sensor can be realized;
(4) the device has simple structure, safety, reliability and convenient operation;
(5) the external protective cover can prevent dust and the like from damaging the grating ruler to cause errors, and meanwhile, the service life of the device is ensured;
(6) the device adopts horizontal design, and the device base adopts cast iron material, can guarantee the steady of device when using, guarantees to mark the precision.
(7) The industrial control console can display and record the calibrated data, and is convenient for comparing and evaluating products of different batches.
Drawings
Fig. 1 is a front view of the calibration device of the eddy current displacement sensor of the present invention;
fig. 2 is an electrical connection schematic diagram of the calibration apparatus for eddy current displacement sensor of the present invention.
In the figure, 1, an eddy current displacement sensor, 2, a displacement system, 3, a grating ruler, 4, a grating ruler reading head, 5, a bottom plate, 6, a mounting table a, 7, a threaded hole a, 8, a ball screw, 9, a screw nut, 10, a mounting table b, 11, a test disc, 12, a mounting table c, 13, a threaded hole b, 14, a displacement sensor display, 15, a servo motor, 16, a servo driver, 17, an industrial control table and 18 a protective cover.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, the present invention relates to a calibration device for an eddy current displacement sensor, which comprises an eddy current displacement sensor 1 and a displacement system 2, which are oppositely disposed; the displacement system 2 is connected with a grating ruler 3; also comprises a grating ruler reading head 4; when the displacement system 2 moves relative to the eddy current displacement sensor 1, the grating ruler reading head 4 can measure the displacement; the bottom plate 5 is made of cast iron.
The eddy current displacement sensor 1 is arranged in a mode of comprising a bottom plate 5; a mounting table a6 is vertically fixed on one side of the upper surface of the bottom plate 5; a threaded hole a7 is horizontally formed in the mounting table a 6; the eddy current displacement sensor 1 passes through the threaded hole a7 and is screwed with the mounting block a 6.
The displacement system 2 comprises a ball screw 8 fixed on one side of the upper surface of the bottom plate 5; a screw nut 9 of the ball screw 8 is fixedly connected with the mounting table b 10; a test disc 11 is fixed on the upper surface of the mounting table b 10; a grating ruler 3 is horizontally fixed on the side surface a of the mounting platform b 10; one end of the ball screw 8 is fixedly connected with an output shaft of the servo motor 15; the test disc 11 is arranged opposite to the eddy current displacement sensor 1; the center of the test disc 11 is located on the same horizontal line with the eddy current displacement sensor 1.
The grating scale reading head 4 is arranged in a manner that it includes a mounting table c12 fixed on the upper surface of the base plate 5; the mounting table c12 is located on the ball screw 8 side; a threaded hole b13 is horizontally formed in the mounting table c 12; the grating scale reading head 4 passes through the threaded hole b13 and is in threaded connection with the mounting table c 12; the grating ruler reading head 4 is arranged opposite to the grating ruler 3.
The eddy current displacement sensor 1 is electrically connected with the displacement sensor display 14.
As shown in fig. 2, the servo motor 15, the servo driver 16, the industrial control platform 17 and the grating scale reading head 4 are electrically connected in sequence; a protective cover 18; the eddy current displacement sensor 1, the displacement system 2, the grating ruler 3 and the grating ruler reading head 4 are all positioned in the protective cover 18.
The utility model discloses eddy current displacement sensor calibration device's work process (principle) does:
the eddy current displacement sensor 1 to be calibrated is arranged in the mounting table a 6; inputting the displacement value of the test disc 11 in the industrial control console 17, and controlling the servo motor 15 to operate through the servo driver 16; the servo motor 15 drives the screw nut 9 in the ball screw 8 to move, so that the mounting table b10 mounted on the servo motor moves along with the movement; the mounting table b10 drives the grating ruler 3 and the test disc 11 mounted thereon to move therewith; when the grating ruler reading head 4 detects that the moving distance of the grating ruler 11 reaches an input value, a feedback signal is sent to the industrial control console 17; the work control console 17 controls the servo motor 15 to stop running through the servo driver 16 after receiving the feedback signal; the change of the distance between the probe of the eddy current displacement sensor 1 and the test disc 11 is displayed on the displacement sensor display 14, so that the eddy current displacement sensor 1 can be calibrated; the work control console 17 can record and store data in the calibration process; after the calibration is finished, the displacement value can be input again in the industrial control console 17 to return the test tray 11 to the original position, and the eddy current displacement sensor 1 can be replaced to perform the next calibration.
The utility model discloses eddy current displacement sensor calibration device's advantage does:
(1) the eddy current displacement sensor can be calibrated;
(2) the calibration precision is higher than that of the traditional method, and the precision can reach 5 mu m;
(3) the whole calibration process adopts electric drive, the introduced error is small, the calibration efficiency is high, and the large-batch calibration of the eddy current displacement sensor can be realized;
(4) the device has simple structure, safety, reliability and convenient operation;
(5) the external protective cover can prevent dust and the like from damaging the grating ruler to cause errors, and meanwhile, the service life of the device is ensured;
(6) the device adopts horizontal design, and the device base adopts cast iron material, can guarantee the steady of device when using, guarantees to mark the precision.
(7) The industrial control console can display and record the calibrated data, and is convenient for comparing and evaluating products of different batches.

Claims (9)

1. The utility model provides an electric eddy current displacement sensor calibration device which characterized in that: comprises an eddy current displacement sensor (1) and a displacement system (2) which are oppositely arranged; the displacement system (2) is connected with a grating ruler (3); also comprises a grating ruler reading head (4); when the displacement system (2) moves relative to the eddy current displacement sensor (1), the grating ruler reading head (4) can measure the displacement.
2. The calibration device of the eddy current displacement sensor as claimed in claim 1, wherein: the eddy current displacement sensor (1) is arranged in a mode of comprising a bottom plate (5); a mounting table a (6) is vertically fixed on one side of the upper surface of the bottom plate (5); a threaded hole a (7) is horizontally formed in the mounting table a (6); the eddy current displacement sensor (1) penetrates through the threaded hole a (7) and is in threaded connection with the mounting table a (6).
3. The calibration device of the eddy current displacement sensor as claimed in claim 2, wherein: the displacement system (2) comprises a ball screw (8) fixed on one side of the upper surface of the bottom plate (5); a screw nut (9) of the ball screw (8) is fixedly connected with the mounting table b (10); a test disc (11) is fixed on the upper surface of the mounting table b (10); a grating ruler (3) is horizontally fixed on the side surface a of the mounting table b (10); one end of the ball screw (8) is fixedly connected with an output shaft of the servo motor (15); the test disc (11) is arranged opposite to the eddy current displacement sensor (1).
4. The calibration device of the eddy current displacement sensor as claimed in claim 3, wherein: the circle center of the test disc (11) and the eddy current displacement sensor (1) are located on the same horizontal line.
5. The calibration device of the eddy current displacement sensor as claimed in claim 3, wherein: the grating ruler reading head (4) is arranged in a mode of comprising an installation table c (12) fixed on the upper surface of the bottom plate (5); the mounting table c (12) is positioned on one side of the ball screw (8); a threaded hole b (13) is horizontally formed in the mounting table c (12); the grating ruler reading head (4) penetrates through the threaded hole b (13) and is in threaded connection with the mounting table c (12); the grating ruler reading head (4) is arranged opposite to the grating ruler (3).
6. The calibration device of the eddy current displacement sensor as claimed in claim 5, wherein: the eddy current displacement sensor (1) is electrically connected with the displacement sensor display (14).
7. The calibration device of the eddy current displacement sensor as claimed in claim 6, wherein: the servo motor (15), the servo driver (16), the industrial control platform (17) and the grating ruler reading head (4) are electrically connected in sequence.
8. The calibration device of the eddy current displacement sensor as claimed in claim 1, wherein: further comprising a protective cover (18); the eddy current displacement sensor (1), the displacement system (2), the grating ruler (3) and the grating ruler reading head (4) are all positioned in the protective cover (18).
9. The calibration device of the eddy current displacement sensor as claimed in any one of claims 2 to 7, wherein: the bottom plate (5) is made of cast iron.
CN201921379923.7U 2019-08-23 2019-08-23 Calibration device for eddy current displacement sensor Active CN210862515U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921379923.7U CN210862515U (en) 2019-08-23 2019-08-23 Calibration device for eddy current displacement sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921379923.7U CN210862515U (en) 2019-08-23 2019-08-23 Calibration device for eddy current displacement sensor

Publications (1)

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CN210862515U true CN210862515U (en) 2020-06-26

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Application Number Title Priority Date Filing Date
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112729087A (en) * 2020-12-16 2021-04-30 中国科学院苏州生物医学工程技术研究所 Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium
CN113251909A (en) * 2021-06-25 2021-08-13 清华大学 Calibration device and method of eddy current sensor for measuring displacement of rotating shaft

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112729087A (en) * 2020-12-16 2021-04-30 中国科学院苏州生物医学工程技术研究所 Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium
CN112729087B (en) * 2020-12-16 2022-03-22 中国科学院苏州生物医学工程技术研究所 Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium
CN113251909A (en) * 2021-06-25 2021-08-13 清华大学 Calibration device and method of eddy current sensor for measuring displacement of rotating shaft

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Effective date of registration: 20220629

Address after: 710000 No. 38, Hangkong 1st Road, National Aviation high tech industrial base, Xi'an, Shaanxi Province

Patentee after: Xi'an Tianyu Aviation Technology Co.,Ltd.

Address before: 710048 Shaanxi province Xi'an Beilin District Jinhua Road No. 5

Patentee before: XI'AN University OF TECHNOLOGY

TR01 Transfer of patent right