CN210837644U

CN210837644U - Novel radio frequency ion source

Info

Publication number: CN210837644U
Application number: CN201922419071.6U
Authority: CN
Inventors: 施春燕
Original assignee: Suzhou Zhizhen Precision Optical Co ltd
Current assignee: Sichuan Zhizhen Precision Optics Co.,Ltd.
Priority date: 2019-12-30
Filing date: 2019-12-30
Publication date: 2020-06-23
Anticipated expiration: 2029-12-30

Abstract

The utility model discloses a novel radio frequency ion source, concretely relates to ion source technical field, the on-line screen storage device comprises a base, first spout has been seted up at the base top, sliding connection has two sliders in the first spout, slider top fixedly connected with slide bar, slide bar lateral wall sliding connection has the sliding sleeve, the sliding sleeve outer wall inlays and is equipped with the fixing base, the second spout has all been seted up to fixing base inner chamber both sides, and sliding connection has the slide in the second spout of both sides. The utility model discloses a set up grip block and heat absorption seat, the radio frequency ion source body is fixed at the grip block inner chamber, and in endothermic shock pad can be with the leading-in grip block of heat and heat absorption seat, the heat absorption seat of both sides passes through the heat in the leading-in fin of heat conduction post with the heat, the heat on fin surface is walked in the air flow to can effectively avoid thermal piling up, compare with prior art and guarantee radio frequency ion source body operating condition's stability, satisfy the use needs.

Description

Novel radio frequency ion source

Technical Field

The utility model relates to an ion source technical field, more specifically say, the utility model relates to a novel radio frequency ion source.

Background

An ion source is a device that ionizes neutral atoms or molecules and extracts a stream of ions therefrom. It is an indispensable component of various types of equipment such as ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, and neutral beam implanters in controlled fusion devices.

The existing ion source can generate a large amount of heat during working, the heat is accumulated in an element to cause instability of a working state, and meanwhile, a good damping effect is not achieved when the radio frequency ion source is fixed, so that shaking during working can generate large noise to influence the working environment of the radio frequency ion source.

SUMMERY OF THE UTILITY MODEL

In order to overcome the above-mentioned defect of the prior art, the embodiment of the utility model provides a novel radio frequency ion source, the utility model aims to solve the technical problem that: how to improve the stability of the fixation of the radio frequency ion source body.

In order to achieve the above object, the utility model provides a following technical scheme: a novel radio frequency ion source comprises a base, wherein a first sliding groove is formed in the top of the base, two sliding blocks are connected in the first sliding groove in a sliding mode, a sliding rod is fixedly connected to the top of each sliding block, the outer side wall of each sliding rod is connected with a sliding sleeve in a sliding mode, a fixed seat is embedded in the outer wall of each sliding sleeve, second sliding grooves are formed in two sides of the inner cavity of the fixed seat, sliding plates are connected in the second sliding grooves in the two sides of the inner cavity of the fixed seat in a sliding mode, the bottom of each sliding plate is fixedly connected with the top end of each sliding;

the fixing base top fixedly connected with grip block, and both sides grip block inner chamber has placed the radio frequency ion source body, grip block top fixedly connected with fixed block, the through-hole has been seted up to fixed block one side, and has connect the screw thread post in the through-hole of both sides, screw thread post opposite side threaded connection has the nut, the nut is laminated mutually with fixed block one side, grip block one side fixedly connected with heat absorption seat, heat absorption seat one side fixedly connected with a plurality of heat conduction posts, the heat conduction post outer wall is inlayed and is equipped with a plurality of fin.

The radio frequency ion source body is fixed in the inner cavity of the clamping plate, the clamping plates on two sides are matched with the diameter of the radio frequency ion source body in a sliding mode in the first sliding groove through the fixing seats on two sides and the sliding blocks on the bottom, the threaded columns are inserted into the through holes of the fixing blocks on the top of the clamping plates, the fixing blocks on two sides are limited through nuts in threaded connection with the tail ends of the threaded columns, so that the clamping plates on two sides can be limited and fixed, when the radio frequency ion source body shakes, the radio frequency ion source body shakes the fixing seats to drive the sliding plates to slide in the second sliding groove to pull the sliding sleeve, the sliding sleeve slides outside the sliding rods to extrude the springs, the springs reduce shaking of the fixing seats and the clamping plates by utilizing self elasticity, noise generated by the work of the radio frequency ion source body can be effectively reduced, the heat absorption seats on the two sides guide heat into the radiating fins through the heat conducting columns, and air flows to drive away the heat on the surfaces of the radiating fins, so that heat accumulation can be effectively avoided, the stability of the working state of the radio frequency ion source body is guaranteed, and the use requirement is met.

In a preferred embodiment, the cross section of the clamping plate is in a semicircular arc shape, so that the clamping plate is better in adaptability.

In a preferred embodiment, a shock pad is fixedly connected to the inner cavity of the clamping plate, and the shock pad is attached to the radio frequency ion source body, so that heat is conducted while attachment is ensured.

In a preferred embodiment, the shock absorbing pad is a thermally conductive plastic pad.

In a preferred embodiment, the first sliding groove and the sliding block are both T-shaped in axial section, so that the fixed seat and the clamping plate are prevented from being separated from the base during fixing.

In a preferred embodiment, the heat sink and the heat conducting column are both heat absorbing copper members, ensuring heat conduction.

In a preferred embodiment, the heat sink base is a heat sink copper member.

In a preferred embodiment, the sliding sleeve and the sliding rod are both circular.

1. The utility model discloses a set up grip block and heat absorption seat, the radio frequency ion source body is fixed in the grip block inner chamber, the radio frequency ion source body rocks the fixing base and upwards drives the slide and slides and stimulate the sliding sleeve extrusion spring in the second spout, the spring utilizes the rocking of self elasticity reduction fixing base and grip block, reduce the noise that the work of radio frequency ion source body produced, when the work of radio frequency ion source body generates heat, endothermic shock pad can lead-in the heat into grip block and heat absorption seat, the heat absorption seat of both sides leads the heat into in the fin through the heat conduction post, the air flow drives away the heat on fin surface, thereby can effectively avoid thermal piling up, compared with the prior art, the stability of radio frequency ion source body operating condition has been guaranteed, the use needs have been satisfied;

2. the utility model discloses a set up the shock pad, slider and first spout, the gap of grip block and radio frequency ion source body can be filled to the shock pad of grip block inner chamber, thereby can guarantee the fixed stability of radio frequency ion source body, can effectively be with in the leading-in endothermic grip block of heat, both sides grip block is more stable through the slip of bottom slider in first spout, and the grip block slides from the slider when the slider of T type and first spout can avoid fixing, the effect of grip block removal centre gripping has been guaranteed, installation suitability is higher, use needs have been satisfied.

Drawings

Fig. 1 is a schematic view of the front view cross-sectional structure of the present invention.

Fig. 2 is a schematic side view of the cross-sectional structure of the present invention.

Fig. 3 is an enlarged schematic view of a portion a in fig. 2 according to the present invention.

Fig. 4 is a schematic perspective view of the present invention.

Fig. 5 is a schematic view of a three-dimensional structure of the heat absorbing seat of the present invention.

The reference signs are: the ion source comprises a base 1, a first sliding groove 2, a sliding block 3, a fixed seat 4, a clamping plate 5, a damping pad 6, a heat absorption seat 7, a heat radiating fin 8, a heat conducting column 9, a fixed block 10, a through hole 11, a threaded column 12, a nut 13, a second sliding groove 14, a sliding plate 15, a sliding rod 16, a spring 17, a sliding sleeve 18 and a radio frequency ion source body 19.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a novel radio frequency ion source, including base 1, base 1 top has seted up first spout 2, sliding connection has two sliders 3 in first spout 2, slider 3 top fixedly connected with slide bar 16, slide bar 16 lateral wall sliding connection has sliding sleeve 18, sliding sleeve 18 outer wall inlays and is equipped with fixing base 4, fixing base 4 inner chamber both sides have all been seted up second spout 14, and sliding connection has slide 15 in the second spout 14 of both sides, slide 15 bottom and slide bar 16 top fixed connection, slide bar 16 lateral wall cover is equipped with spring 17, spring 17 both ends respectively with sliding sleeve 18 and slide 15 corresponding position fixed connection;

4 top fixedly connected with grip block 5 of fixing base, and 5 inner chambers of both sides grip block have placed radio frequency

ion source body

19, 5 top fixedly connected with fixed block 10 of grip block, through-hole 11 has been seted up to fixed block 10 one side, and has connect threaded post 12 in the through-hole 11 of both sides, 12 opposite side threaded connection of threaded post has nut 13, nut 13 laminates with fixed block 10 one side mutually, 5 one side fixedly connected with heat absorption seat 7 of grip block, a plurality of heat conduction posts 9 of 7 one side fixedly connected with of heat absorption seat, the outer wall of heat conduction post 9 is inlayed and is equipped with a plurality of fin 8, sliding sleeve 18 and slide bar 16 are circularly.

As shown in fig. 1 to 5, the embodiment specifically is: the radio frequency ion source body 19 is fixed in the inner cavity of the clamping plate 5, the clamping plates 5 on two sides are matched with the diameter of the radio frequency ion source body 19 in a sliding way in the first sliding groove 2 through the fixing seats 4 on two sides and the sliding blocks 3 on the bottom, the threaded columns 12 are inserted into the through holes 11 of the fixing blocks 10 on the top of the clamping plate 5, and the nuts 13 in threaded connection with the tail ends of the threaded columns 12 limit the fixing blocks 10 on two sides, so that the clamping plates 5 on two sides can be limited and fixed, when the radio frequency ion source body 19 shakes, the radio frequency ion source body 19 shakes the fixing seats 4 to drive the sliding plates 15 to slide in the second sliding grooves 14 to pull the sliding sleeves 18, the sliding sleeves 18 slide and extrude the springs 17 outside the sliding rods 16, the springs 17 reduce the shaking of the fixing seats 4 and the clamping plates 5 by utilizing the self elasticity, the heat-absorbing shock pad 6 can be with in the leading-in grip block 5 of heat and the heat absorption seat 7, the heat absorption seat 7 of both sides is with in the heat leads to the fin 8 through heat conduction post 9, and the heat on fin 8 surface is taken away in the air flow to can effectively avoid thermal piling up, guarantee the stability of the 19 operating condition of radio frequency ion source body, satisfy the user demand.

The cross section of the clamping plate 5 is in a semicircular arc shape, a damping pad 6 is fixedly connected to an inner cavity of the clamping plate 5, the damping pad 6 is attached to the radio frequency ion source body 19, the damping pad 6 is a heat-conducting plastic pad, the radiating fins 8 and the heat-conducting columns 9 are all heat-absorbing copper components, the shaft cross sections of the first sliding groove 2 and the sliding block 3 are both in a T shape, and the heat-absorbing seat 7 is a heat-absorbing copper component.

As shown in fig. 1 and 4, the embodiment specifically includes: the shock pad 6 of the 5 inner chambers of grip block can fill the gap of grip block 5 and radio frequency ion source body 19, thereby can guarantee the fixed stability of radio frequency ion source body 19, can effectively with the leading-in endothermic grip block 5 of heat, and the 5 inner chambers of grip block can imitate the shape of adaptation radio frequency ion source body 19 outer wall for the arc, both sides grip block 5 is more stable through the slip of bottom slider 3 in first spout 2, and grip block 5 slides from slider 3 when the slider 3 of T type and first spout 2 can avoid fixing, the effect of grip block 5 removal centre gripping has been guaranteed, the installation suitability is higher, the user demand has been satisfied.

The utility model discloses the theory of operation:

referring to the attached drawings 1-5 of the specification, a radio frequency ion source body 19 is fixed in an inner cavity of a clamping plate 5, the radio frequency ion source body 19 shakes a fixed seat 4 to drive a sliding plate 15 to slide in a second sliding groove 14 to pull a sliding sleeve 18 to extrude a spring 17, the spring 17 utilizes self elasticity to reduce the shaking of the fixed seat 4 and the clamping plate 5, and noise generated by the work of the radio frequency ion source body 19 is reduced;

referring to the attached

drawings

1 and 4 of the specification, the damping pad 6 in the inner cavity of the clamping plate 5 can fill the gap between the clamping plate 5 and the radio frequency ion source body 19, so that the fixing stability of the radio frequency ion source body 19 can be ensured, heat can be effectively guided into the heat-absorbing clamping plate 5, the inner cavity of the clamping plate 5 is arc-shaped, and can be matched with the shape of the outer wall of the radio frequency ion source body 19, the clamping plates 5 on two sides can slide more stably in the first sliding groove 2 through the bottom sliding block 3, and the T-shaped sliding block 3 and the first sliding groove 2 can avoid the sliding of the clamping plate 5 in the sliding block 3 when the fixing is carried out, so that the moving clamping effect of the clamping plate 5 is ensured, the mounting adaptability.

The points to be finally explained are: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounted," "connected," and "connected" should be understood broadly, and may be a mechanical connection or an electrical connection, or a communication between two elements, and may be a direct connection, and "upper," "lower," "left," and "right" are only used to indicate a relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship may be changed;

secondly, the method comprises the following steps: in the drawings of the disclosed embodiments of the present invention, only the structures related to the disclosed embodiments are referred to, and other structures can refer to the common design, and under the condition of no conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

and finally: the above description is only for the preferred embodiment of the present invention and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A novel radio frequency ion source comprises a base (1), and is characterized in that: the sliding device is characterized in that a first sliding groove (2) is formed in the top of the base (1), two sliding blocks (3) are connected in the first sliding groove (2) in a sliding mode, a sliding rod (16) is fixedly connected to the top of each sliding block (3), a sliding sleeve (18) is connected to the outer side wall of each sliding sleeve (16) in a sliding mode, a fixing seat (4) is embedded in the outer wall of each sliding sleeve (18), second sliding grooves (14) are formed in two sides of the inner cavity of each fixing seat (4), sliding plates (15) are connected in the second sliding grooves (14) in two sides in a sliding mode, the bottom of each sliding plate (15) is fixedly connected with the top end of each sliding rod (16), springs (17) are sleeved on the outer side walls of the sliding;

fixing base (4) top fixedly connected with grip block (5), and both sides grip block (5) inner chamber has placed radio frequency ion source body (19), grip block (5) top fixedly connected with fixed block (10), through-hole (11) have been seted up to fixed block (10) one side, and the joint has threaded post (12) in both sides through-hole (11), threaded post (12) opposite side threaded connection has nut (13), nut (13) and fixed block (10) one side are laminated mutually, grip block (5) one side fixedly connected with heat absorption seat (7), heat absorption seat (7) one side fixedly connected with a plurality of heat conduction posts (9), heat conduction post (9) outer wall inlays and is equipped with a plurality of fin (8).

2. The novel rf ion source of claim 1, wherein: the cross section of the clamping plate (5) is in a semi-circular arc shape.

3. The novel rf ion source of claim 1, wherein: the clamping plate (5) is fixedly connected with a damping pad (6) in an inner cavity, and the damping pad (6) is attached to the radio frequency ion source body (19).

4. The novel rf ion source of claim 3, wherein: the shock pad (6) is a heat-conducting plastic pad.

5. The novel rf ion source of claim 1, wherein: the radiating fins (8) and the heat conducting columns (9) are all made of heat-absorbing copper components.

6. The novel rf ion source of claim 1, wherein: the shaft cross-sectional shapes of the first sliding chute (2) and the sliding block (3) are both T-shaped.

7. The novel rf ion source of claim 1, wherein: the heat absorption seat (7) is a heat absorption copper component.

8. The novel rf ion source of claim 1, wherein: the sliding sleeve (18) and the sliding rod (16) are both circular.