CN210736876U

CN210736876U - Film coating equipment for vertical transport tray

Info

Publication number: CN210736876U
Application number: CN201921235520.5U
Authority: CN
Inventors: 陈厚模; 陈麒麟; 卢贤政
Original assignee: SC New Energy Technology Corp
Current assignee: SC New Energy Technology Corp
Priority date: 2019-08-01
Filing date: 2019-08-01
Publication date: 2020-06-12
Anticipated expiration: 2029-08-01

Abstract

The utility model discloses a filming equipment of transport tray stands vertically, include: the device comprises a tray for placing a substrate and a transmission track for conveying the tray, wherein the transmission track is provided with an upright transportation section, at least one side of the upright transportation section is provided with a coating group, and the coating group consists of at least two coating devices arranged from top to bottom; when the tray is conveyed in the vertical conveying section, an included angle theta is formed between the tray and the vertical surface, and the coating group projects a coating film for the substrate in the tray. The utility model has the advantages of high coating efficiency, even film thickness and the like.

Description

Film coating equipment for vertical transport tray

Technical Field

The utility model relates to a base plate coating film technical field especially relates to the filming equipment of transport tray upright.

Background

The principle of the technology is that high-density low-energy electron beams are used to sublimate atoms on the surface of a material to generate dissociation, and a compact thin film is formed on a substrate, namely a substrate.

Based on sublimation of the surface of the melting target material, the operation of RPD coating is basically upward projection coating, most of the coated substrates (such as silicon wafers and the like) are carried on pockets or shelves of a tray, the back surfaces of the substrates exposed downwards can be coated with thin films, but the coated surfaces of the substrates can be shielded by the edges of the supports or the hooks, so that the substrates cannot be fully coated on the whole plate surface of the substrates, and the coating effect is similar to the white edges left by the old photos. In some applications, such as coating of solar cells, in order to obtain a larger coating area to increase the sunlight receiving area and relatively increase the photoelectric conversion efficiency, it is necessary to avoid the situation of edge or hook shielding of the coated surface. Due to design limitation of a target material supply system of the coating cavity, the RPD equipment cannot be suspended, namely, the coating is carried out in a mode that a furnace mouth faces downwards, so that the surface of a lying substrate cannot be subjected to non-shading coating.

Therefore, how to design a coating apparatus with uniform film and high efficiency is an urgent technical problem to be solved in the industry.

SUMMERY OF THE UTILITY MODEL

In order to solve the defects of uneven film and low efficiency in the prior art, the utility model provides a film coating device for a vertical transportation tray.

The technical proposal adopted by the utility model is that the coating equipment for designing the vertical transportation tray comprises: the device comprises a tray for placing a substrate and a transmission track for conveying the tray, wherein the transmission track is provided with an upright transportation section, at least one side of the upright transportation section is provided with a coating group, and the coating group consists of at least two coating devices arranged from top to bottom; when the tray is conveyed in the vertical conveying section, an included angle theta is formed between the tray and the vertical surface, and the coating group projects a coating film for the substrate in the tray.

Preferably, the effective coating area with the same height as the coating device is formed on the substrate in the conveying process, and the distance from the furnace mouth of the coating device to the corresponding effective coating area in the horizontal direction is the coating distance; the coating distances of all coating devices in the same coating group are the same.

Preferably, when theta =0 degrees, the furnace mouths of all the film plating devices in the film plating group are aligned up and down; when theta is more than 0 degree and less than 90 degrees, the furnace mouths of all the film coating devices in the film coating group are sequentially staggered and placed along the inclined direction parallel to the substrate.

Preferably, both sides of the vertical transportation section are provided with a film plating group; the coating group at one side of the vertical transportation section projects a coating film for the front surface of the substrate, and the coating group at the other side of the vertical transportation section projects a coating film for the back surface of the substrate.

Preferably, the coating groups on both sides of the vertical transportation section simultaneously coat the substrates.

Preferably, the coating groups on the two sides of the vertical transportation section sequentially coat the substrate.

Preferably, the furnace mouth of the coating device projects a coating film along the horizontal direction or obliquely forms an included angle with the horizontal plane.

Preferably, the tray is provided with a hollow groove matched with the substrate in shape, and when the tray is conveyed by the vertical conveying section, the substrate is positioned in the hollow groove by means of gravity.

Preferably, θ ranges from 10 ° to 89 °.

Compared with the prior art, the utility model discloses a tray is transported to the transportation section of standing vertically to at least one side configuration coating film group in the transportation section of standing vertically, coating film group comprises from last two at least coating film devices of arranging down, and the coating film device of arranging carries out even coating film in order to the tray to wideer breadth about setting up, and wider tray can bear more base plates and count, effectively increases the output of coating film equipment. More importantly, the coating distances from the coating devices to the substrate in the same coating group are the same, so that the coating speed difference of the upper and lower coating devices to the substrate is reduced, and the film thickness on the substrate is more uniform.

Drawings

The invention is explained in more detail below with reference to exemplary embodiments and the accompanying drawings, in which:

FIG. 1 is a schematic diagram of the arrangement of the coating units according to a possible embodiment of the present invention;

FIG. 2 is a schematic diagram of the arrangement of the coating sets before optimization in the present invention;

FIG. 3 is a schematic diagram of the arrangement of the optimized coating sets of the present invention;

FIG. 4 is a schematic diagram of the arrangement of the coating sets for simultaneously coating the two surfaces of the substrate.

Detailed Description

As shown in fig. 1 to 3, the coating apparatus of the present invention comprises: tray 1, transmission track and coating film group, tray 1 is used for placing

base plate

2, 2 materials of base plate can be the silicon chip, metal, glass or plastics etc, the transmission track has upright transportation section, when upright transportation section transported tray 1, there is contained angle theta in tray 1 and perpendicular, the transmission track comprises two orbit, two orbit settings are in the both sides of tray 1, for support and guide tray 1 and advance, the orbital design of transmission decides the transport direction of tray 1 and the size of contained angle theta. The upright transportation section has two kinds of states of transporting, and the first kind is that the tray 1 is transported along the horizontal direction to the upright transportation section, and the second kind is that the tray 1 is transported along the direction of personally submitting contained angle theta with the vertical, and the first kind transports in-process tray 1 and transports along the horizontal direction all the time, transports in-process tray 1's high position and can not change, and the second kind transports in-process tray 1's height and can change. At least one side of the vertical transportation section is provided with a coating film group, the coating film group is composed of at least two coating devices arranged from top to bottom, when the vertical transportation section transports the tray 1, the tray 1 can pass through the coating film group, the furnace mouth of the coating device 3 in the coating film group faces to the front surface or the back surface of the substrate 2 to project coating films, as shown in figures 2 and 3, the front surface refers to the left working surface and the back surface of the substrate is the right working surface of the substrate.

An evaporation source is arranged in a hearth of the coating device 3, the evaporation source is equivalent to a spot emission source, decomposed atoms can be projected in the direction of the substrate 2 after the electron beam melts the surface of the target ingot, and with respect to the ideal spot emission source, the uniform surface of the spread is on an arc surface, if the coated tray 1 is in a concave umbrella shape, the substrate 2 placed on the tray can be uniformly coated with a film by effectively utilizing the arc surface, but with respect to the flat-plate tray 1, the coated film has the condition of thick inner part and thin outer part. For a point emission source, an effective coating area with the same height as that of a coating device 3 appears on a substrate 2 in the conveying process, the distance from a furnace mouth of the coating device 3 to the corresponding effective coating area in the horizontal direction is a coating distance, the coating speed is related to the inverse square of the coating distance, the substrate 2 with the longer coating distance is thinner in the same time in the same solid angle, for a coating group vertically arranged on the coating device 3, when the inclined tray 1 with an included angle theta is faced, as shown in fig. 2, the top end of the tray 1 is close to the right, the bottom end of the tray 1 is close to the left, the coating group is located on the left side of the tray 1, the coating device 3 which is farther upward is far away from the substrate, and therefore, in the same time period, the coating thickness of the substrate 2 by the upper furnace is lower than the coating thickness of the substrate 2 by the lower furnace. The utility model discloses in order to avoid the thick inhomogeneous phenomenon of appearance of membrane of base plate 2, all coating devices 3's coating film distance is the same in the same coating film group.

In a practical embodiment, the included angle θ is 0 °, the tray 1 is vertically transported in a vertical plane by the vertical transport section, furnace openings of all the coating devices 3 in the coating group are aligned up and down, coating distances of all the coating devices 3 in the same coating group are the same, and hollow grooves matched with the shape of the substrate 2 are arranged on the tray 1, so as to prevent the substrate 2 from falling off from the tray 1, and meanwhile, the hollow grooves are prevented from shielding edges of the substrate 2, and can only be arranged in a small-angle inclined manner, but because the angle of the hollow grooves is small, the substrate 2 still has a falling risk, and therefore, the method is feasible, but is rarely applied.

In a preferred embodiment, the included angle θ is greater than 0 ° and less than 90 °, the vertical transportation section tilts the transport tray 1, furnace mouths of all the coating devices 3 in a coating group are sequentially staggered and placed along an inclined direction parallel to the substrate 2, coating distances of all the coating devices 3 in the same coating group are the same, taking fig. 3 as an example, a forward position T of the furnace mouth of the top coating device 3 in the same coating group extending to the right side is the largest, and the forward position T of the coating devices 3 in the coating group decreases from top to bottom. The tray 1 is provided with the hollow grooves matched with the base plates 2 in shape, the tray 1 is obliquely conveyed, the base plates 2 are positioned in the hollow grooves by means of gravity, a complex base plate 2 fixing structure is not needed, the film surface can be expanded to the whole base plates 2 during front film coating, the film coating area on the base plates 2 is maximized, and the quality and the production efficiency of the base plates 2 are improved. The range of θ is preferably 10 ° to 89 °, and the substrate 2 is positioned in the tray 1 relatively stably.

Both sides of the vertical transportation section are provided with coating film groups, the coating film group on one side of the vertical transportation section projects a coating film for the front surface of the substrate 2, the coating film group on the other side of the vertical transportation section projects a coating film for the back surface of the substrate 2, taking fig. 4 as an example, the coating film group on the left side of the vertical transportation section projects a coating film for the front surface of the substrate 2, and the coating film group on the right side of the vertical transportation section projects a coating film for the back surface of the substrate 2. When the positions of the coating groups on the two sides of the vertical transportation section are aligned, the substrate 2 passes through the two coating groups, the front and the back of the substrate 2 are coated simultaneously, when the positions of the coating groups on the two sides of the vertical transportation section are staggered, the substrate 2 sequentially passes through the two coating groups, and the front and the back of the substrate 2 are coated sequentially.

The utility model discloses the length and the inclination of well upright transportation section are decided by mechanical properties, and the transfer rate of tray 1 and coating film device 3's opening angle all can design according to specific technological requirement, and coating film device 3's opening can be followed the horizontal direction and thrown the coating film or personally submit the contained angle slope with the level and throw the coating film, and coating film device 3's quantity sets up according to specific technological requirement, and coating film device 3 can set up in same cavity or separately independent setting.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims

1. A plating apparatus comprising: the conveying track is used for placing a tray of a substrate and conveying the tray and is characterized by comprising an upright conveying section, wherein at least one side of the upright conveying section is provided with a coating film group, and the coating film group consists of at least two coating devices arranged from top to bottom;

when the vertical transportation section transports the tray, an included angle theta is formed between the tray and the vertical plane, and the coating film group projects a coating film for the substrate in the tray.

2. The plating equipment according to claim 1, wherein the substrate has an effective plating area with the same height as the plating device during the transportation, and the distance from the furnace mouth of the plating device to the corresponding effective plating area in the horizontal direction is a plating distance; and the coating distances of all coating devices in the same coating group are the same.

3. The plating equipment as claimed in claim 1, wherein when θ =0 °, the furnace mouths of all the plating devices in the plating group are aligned up and down.

4. The plating equipment according to claim 1, wherein when θ is less than 0 ° < 90 °, the furnace mouths of all the plating devices in the plating group are sequentially arranged in a staggered manner along the direction parallel to the inclination direction of the substrate.

5. The plating device according to claim 1, wherein plating groups are provided on both sides of the vertical transport section; the coating group on one side of the vertical transportation section projects a coating film on the front surface of the substrate, and the coating group on the other side of the vertical transportation section projects a coating film on the back surface of the substrate.

6. The plating device according to claim 5, wherein the plating film groups on both sides of the vertical transport section simultaneously plate the substrates.

7. The plating device according to claim 5, wherein the plating film groups on both sides of the vertical transport section sequentially plate the substrates.

8. The plating apparatus according to claim 1, wherein the furnace mouth of the plating device projects a plating film in a horizontal direction or obliquely at an angle to the horizontal plane.

9. The plating apparatus according to claim 1, wherein a hollow groove that is in shape fit with the substrate is arranged on the tray, and the substrate is positioned in the hollow groove by gravity when the vertical transport section transports the tray.

10. The plating device according to claim 1, wherein θ is in a range of 10 ° to 89 °.