CN210692501U

CN210692501U - Wafer carrier linkage transmission device capable of measuring number of wafers

Info

Publication number: CN210692501U
Application number: CN201921939816.5U
Authority: CN
Inventors: 邓信甫; 庄海云; 王雪松; 徐铭
Original assignee: Zhiwei Semiconductor Shanghai Co Ltd
Current assignee: Zhiwei Semiconductor Shanghai Co Ltd
Priority date: 2019-11-08
Filing date: 2019-11-08
Publication date: 2020-06-05
Anticipated expiration: 2029-11-08

Abstract

The utility model discloses a realize wafer carrier linkage transmission device of measurable wafer piece number, it includes linkage transmission device, locates the basket supporting seat on the linkage transmission device, be equipped with wafer count sensor and drive in the basket supporting seat the flexible sensor elevating system of wafer count sensor. The utility model has the advantages of count in the linkage transmission process of wafer carrier not only makes equipment structure compacter, has still improved the manufacturing efficiency of semiconductor product to can realize the nimble configuration to semiconductor process equipment.

Description

Wafer carrier linkage transmission device capable of measuring number of wafers

Technical Field

The utility model belongs to the technical field of semiconductor process equipment, especially, relate to a wafer carrier linkage transmission device.

Background

In semiconductor processing equipment, it is often necessary to construct a wafer carrier (or called wafer carrier, wafer cassette) transfer mechanism in the equipment for transferring to a designated process zone, and after the wafer carrier is loaded with wafers, it is necessary to count the number of wafers in the loading zone of the processing equipment. Usually, a Wafer counting sensor (Wafer counter) is used for counting the number of wafers, the sensor is used in various types, and the sensor is directly fixed and loaded on a fixed end face of the process equipment or a beam of a framework, so that the number of wafers is counted in situ.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that a wafer carrier linkage transmission device that realizes measurable wafer piece number is provided to overcome the not enough of prior art existence.

In order to solve the technical problem, the utility model adopts the following technical scheme:

the utility model provides a realize wafer carrier linkage transmission device of measurable wafer piece number, its includes linkage transmission mechanism, locates the basket supporting seat on the linkage transmission mechanism, its characterized in that: and a wafer counting sensor and a sensor lifting mechanism for driving the wafer counting sensor to stretch are arranged in the basket supporting seat.

The utility model discloses a be equipped with wafer count sensor in the basket supporting seat, like this when the load has the wafer support basket of wafer to shift to the basket supporting seat on the back, sensor elevating system drive wafer count sensor stretch out with the wafer in the wafer support basket wafer contact in order to realize the wafer count to the wafer support basket, realized the count promptly in wafer carrier linkage transmission process, not only make equipment structure compacter, still improved the manufacturing efficiency of semiconductor product, and can realize the nimble configuration to semiconductor process equipment.

The linkage transmission mechanism is one of a horizontal moving mechanism, a vertical moving mechanism and a rotary moving mechanism, or the combination of two mechanisms or the combination of three mechanisms.

Wafer among the wafer support basket can some offset at the transmission removal in-process, adopts a wafer count sensor to listen and can lead to some wafer to listen not to and can cause the wafer harm the utility model discloses an among the preferred embodiment, wafer count sensor adopts two, and two wafer count sensor intervals set up and two wafers count sensor's detection piece vertically align.

In a specific embodiment of the present invention, the basket support seat is disposed on the rotary moving mechanism, the rotary moving mechanism is disposed on the vertical moving mechanism, and the vertical moving mechanism is disposed on the horizontal moving mechanism. The linkage transmission mechanism can realize three motion modes of horizontal movement, vertical movement and rotation of the wafer support basket.

The utility model discloses an among the concrete implementation mode, the basket supporting seat is by supporting baseplate, and the interval sets up symmetrically two supports on the supporting baseplate erect the frame and constitute, the top of supporting the frame of erecting is fixed with the basket locating piece, the location bearing has on the basket locating piece the location step of the spike of wafer basket, the step plane center of location step has the triangle-shaped location protruding, the upper portion edge of the step vertical plane of location step has the inclined plane chamfer. The structure can ensure that the position of the wafer supporting basket is accurately located on the basket supporting seat and does not deviate.

The utility model discloses an among the concrete implementation mode, support and erect the frame and include inboard fixed plate, outside fixed plate, horizontal barrier plate, locating piece fixed plate, inboard fixed plate with the equal vertical fixing of outside fixed plate is in on the supporting baseplate, outside fixed plate interval is located the outside of inboard fixed plate, horizontal barrier plate transverse connection is fixed the top of outside fixed plate and with the lateral surface of inboard fixed plate is connected, the top fixed connection level of inboard fixed plate is placed the locating piece fixed plate, hold in the palm the basket locating piece and fix and place on the locating piece fixed plate. The structure ensures that the basket supporting seat structure is stable, and the phenomenon of shaking and offsetting can not occur when the wafer supporting basket fully loaded with wafers is carried.

Technical scheme more than adopting, the utility model has the advantages of count in the linkage transmission course of wafer carrier not only makes equipment structure compacter, has still improved the manufacturing efficiency of semiconductor product to can realize the nimble configuration to semiconductor process equipment, simultaneously the utility model discloses a structure is firm, bears the wafer and holds in the palm the phenomenon that the basket can not have offset.

Drawings

The present invention will be described in detail with reference to the accompanying drawings and specific embodiments:

fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a schematic side view of the present invention;

FIG. 3 is a schematic view of a basket support;

FIG. 4 is a schematic view of a wafer basket fully loaded with wafers positioned on a basket support.

Detailed Description

As shown in fig. 1 and 2, the wafer carrier linkage transmission device for realizing the measurable wafer number of the present invention includes a basket supporting base 110, a horizontal moving mechanism 120, a rotating mechanism 130, a vertical moving mechanism 140, a wafer counting sensor 150 and a counter lifting mechanism 160.

The basket support base 110 includes a support base plate 111 and two support vertical frames 112 symmetrically disposed on the support base plate 111 at intervals. The supporting vertical frame 112 is composed of an inner fixing plate 1121, an outer fixing plate 1122, a lateral blocking plate 1123, a basket positioning block 1124 and a positioning block fixing plate 1125. The inner fixing plate 1121 and the outer fixing plate 1122 are vertically fixed on the supporting base plate 111, and the outer fixing plate 1122 is shorter than the inner fixing plate 1121 and is spaced outside the inner fixing plate 1121. The lateral blocking plate 1123 is fixed on the top of the outer fixing plate 1122 and connected to the outer side of the inner fixing plate 1121. The top of the inner fixing plate 1121 is fixedly connected to a positioning block fixing plate 1125 horizontally disposed, and the basket positioning block 1124 is fixedly disposed on the positioning block fixing plate 1125. To avoid interference with the movement of the wafer count sensor 150, the inner support plate 1121 and the lateral blocking plate 1123 are hollow plates, and the outer support plate 1122 is also hollowed out to further reduce the weight of the basket supporting vertical frame 110. The basket support base 110 with such a structure has sufficient strength, and the inner support plate 1121 and the positioning block fixing plate 1125 do not deviate and rotate due to the full loading of the wafer in the wafer basket.

As shown in fig. 3, the basket positioning block 1124 has a strip-shaped step structure, and a triangular protrusion 1127 (correspondingly, a corresponding triangular groove is formed on the supporting leg of the wafer basket) is formed in the middle of the step face 1126, and an inclined chamfer 1128 is formed on the inner edge of the top face, so that the wafer basket 10 (as shown in fig. 4, the wafer basket 10 is fully loaded with the wafer 11) can be accurately seated thereon. The material of the basket positioning block 1124 is selected from engineering plastics, preferably PVDF (polyvinylidene fluoride), which can meet the requirements of rigidity and strength required for carrying the wafer basket, has impact-resistant toughness to the impact phenomenon of improper use, and is suitable for different chemical resistance environments.

As shown in fig. 2 and 3, the counter lifting mechanism 160 includes a counter lifting cylinder 161 and a counter fixing plate 162. The counter lifting cylinder 161 is a double-guide rod cylinder, and is vertically fixed on the support base plate 111 and located between the two inner fixing plates 1121. The top end of the piston rod of the counter lifting cylinder 161 is connected with a counter fixing plate 162. The counter fixing plate 162 is provided with a kidney-shaped hole, and the two wafer count sensors 150 are fixed to the kidney-shaped hole at intervals. The arrangement of the kidney-shaped holes enables the distance between the two wafer counting sensors to be conveniently adjusted so as to adapt to wafers of different sizes. In the arrangement, it is required that the detection pieces of the two wafer count sensors 150 are longitudinally aligned. Through setting up two wafer count sensors, compare and detect in single wafer ware, can avoid causing the damage of wafer when surveying because partial wafer position skew easily for wafer is surveyed more perfectly. The wafer count sensor 150 is an ASW-SG series wafer count sensor of japan bamboo center (TAKEX Cor).

The utility model discloses in, the linkage transmission device combines to adopt horizontal migration mechanism 120, rotary mechanism 130 and vertical migration mechanism 140, and basket supporting seat 110 sets up on rotary mechanism 130 promptly, and rotary mechanism 130 sets up on vertical migration mechanism 140, and vertical migration mechanism 130 finally sets up on horizontal migration mechanism 120.

The horizontal movement mechanism 120 employs a single-axis robot 121, and the single-axis robot 121 has a horizontal slide plate 122 thereon. Besides a single-shaft robot, the horizontal moving mechanism can be matched with an X-Y platform device or a 3-shaft moving gantry system device for configuration so as to effectively adapt to different devices applied to process equipment to meet specific requirements.

The vertical moving mechanism 140 employs a vertical elevating cylinder 141, and the vertical elevating cylinder 141 is fixed to the horizontal sliding plate 122 by a vertical connecting plate 142. The vertical lift cylinder 141 preferably uses a cylinder with dual guide rods to provide a stable lift stroke, thereby effectively performing a vertical lift operation on the whole device. In order to avoid the deviation caused by long-term movement and improve the structural strength, a blocking reinforcing rib 143 for supporting the vertical connecting plate 142 is fixedly connected to the horizontal sliding plate 122 at the outer side of the vertical connecting plate 142.

The rotating mechanism 130 employs the rotating cylinder 131, and can adapt to different relative orientation angles required by the transfer mechanism of the wafer carrier, so that the selection of the rotating cylinder can be pre-configured with the relevant angle selections such as 0-90 °, 0-180 °, 0-270 °, 0-360 ° and the like, and further configure with a barrier buffer (Handle stop) for the cylinder with more configuration angles. The bottom of the rotary cylinder 131 is fixed to a rotary support plate 132, and the rotary support plate 132 is fixed to the top end of a piston rod of the vertical elevating cylinder 141. The top of the rotary cylinder 131 is fixedly connected to the support bottom plate 111 of the basket support base 110.

Through linking together horizontal migration mechanism, vertical migration mechanism and rotary motion mechanism, make the utility model discloses a linkage conveyer has possessed horizontal migration, vertical migration and rotation function simultaneously, can satisfy different relative position of wafer support basket and relative motion demand. Of course, only one or a combination of both may be used as necessary.

However, those skilled in the art should realize that the above embodiments are only used for illustrating the present invention and not used as a limitation of the present invention, and that the changes and modifications to the above embodiments are all within the scope of the appended claims as long as they are within the true spirit of the present invention.

Claims

1. The utility model provides a realize wafer carrier linkage transmission device of measurable wafer piece number, its includes linkage transmission mechanism, locates the basket supporting seat on the linkage transmission mechanism, its characterized in that: and a wafer counting sensor and a sensor lifting mechanism for driving the wafer counting sensor to stretch are arranged in the basket supporting seat.

2. The linkage transmission device for wafer carriers capable of realizing the wafer number metering of claim 1, wherein: the linkage transmission mechanism is one of a horizontal moving mechanism, a vertical moving mechanism and a rotary moving mechanism, or the combination of two mechanisms or the combination of three mechanisms.

3. The linkage transmission device for wafer carriers capable of realizing the wafer number metering of claim 1, wherein: the wafer counting sensors are two, the two wafer counting sensors are arranged at intervals, and the detecting pieces of the two wafer counting sensors are longitudinally aligned.

4. The linkage transmission device for wafer carriers capable of realizing the wafer number metering of claim 2, wherein: the basket supporting seat is arranged on the rotary moving mechanism, the rotary moving mechanism is arranged on the vertical moving mechanism, and the vertical moving mechanism is arranged on the horizontal moving mechanism.

5. The linkage transmission device for wafer carriers capable of realizing the wafer number metering of claim 1, wherein: the basket supporting seat is composed of a supporting base plate and two supporting vertical frames symmetrically arranged on the supporting base plate at intervals, a basket supporting positioning block is fixed at the top end of each supporting vertical frame, and a positioning step for supporting the supporting leg of the wafer basket in a positioning mode is arranged on each basket supporting positioning block.

6. The linkage transmission device for wafer carriers capable of realizing the wafer number metering of claim 5, wherein: the center of the step plane of the positioning step is provided with a triangular positioning protrusion, and the edge of the upper part of the step vertical surface of the positioning step is provided with an inclined chamfer.

7. The linkage transmission device for wafer carriers capable of realizing the wafer number metering of claim 5, wherein: the support is erected the frame and is included inboard fixed plate, outside fixed plate, horizontal barrier plate, locating piece fixed plate, inboard fixed plate with the equal vertical fixing of outside fixed plate is in on the supporting baseplate, outside fixed plate interval is located the outside of inboard fixed plate, horizontal barrier plate transverse connection is fixed the top of outside fixed plate and with the lateral surface of inboard fixed plate is connected, the top fixed connection level of inboard fixed plate is placed the locating piece fixed plate, the basket locating piece is fixed to be placed on the locating piece fixed plate.

8. The linkage transmission device for wafer carriers capable of realizing the wafer number metering of claim 4, wherein: the horizontal moving mechanism is a single-shaft robot, a horizontal sliding plate is arranged on the single-shaft robot, the vertical moving mechanism is a vertical lifting cylinder, the cylinder is fixed on the horizontal sliding plate through a vertical connecting plate, the horizontal moving mechanism further comprises a rotary cylinder, the bottom of the rotary cylinder is fixed on a rotary supporting plate, the rotary supporting plate is fixed at the top end of a piston rod of the vertical lifting cylinder, and the top of the rotary cylinder is connected with the basket supporting seat.