CN210667810U

CN210667810U - Piezoelectric ceramic driven single-shaft micro-positioning platform

Info

Publication number: CN210667810U
Application number: CN201921638848.1U
Authority: CN
Inventors: 刘正锋; 王瑾; 曹锋; 罗奇; 周成全; 路崧; 高云峰
Original assignee: Han s Laser Technology Industry Group Co Ltd
Current assignee: Han s Laser Technology Industry Group Co Ltd
Priority date: 2019-09-27
Filing date: 2019-09-27
Publication date: 2020-06-02
Anticipated expiration: 2029-09-27

Abstract

The utility model provides a little location platform of piezoceramics drive unipolar, including mount pad, piezoceramics, first mechanism of amplification, output ball and motion platform, first mechanism of amplification is fixed on the mount pad, motion platform swing joint is in on the mount pad, first mechanism of amplification encloses to be located piezoceramics, piezoceramics fixes in the first mechanism of amplification, the output ball is connected on the output of first mechanism of amplification with on the motion platform, make piezoceramics be difficult for receiving shear stress.

Description

Piezoelectric ceramic driven single-shaft micro-positioning platform

Technical Field

The utility model belongs to the technical field of the micro-drive, more specifically say, relate to a little location platform of piezoceramics drive unipolar.

Background

The nanometer micro-positioning technology is one of the technological trends in the 21 st century, and the conventional nanometer micro-positioning technology usually adopts a positioning platform consisting of a servo motor and a precise screw rod to carry out transmission. Due to the fact that the screw rod of the precise lead screw is in threaded fit with the nut, and friction exists between the screw rod and the nut in the transmission process, the precision of the precise lead screw can only reach the micron level at the highest level, the use process is unstable, and the requirement of high-precision use occasions cannot be met. With the rapid development of the biological industry and the microelectronic (semiconductor) industry, the positioning platform is required to have positioning accuracy exceeding the micrometer level.

Piezoelectric ceramics are adopted as power drive, the piezoelectric ceramics have small volume and large generated thrust, can reach resolution ratio of nanometer level, and are ideal drive for realizing high-precision micro displacement. However, since the displacement generated by the piezoelectric ceramic is only about one thousandth of the length of the ceramic, a displacement amplification mechanism needs to be added in practical application. Usually, the displacement amplification mechanism is directly connected with the motion platform, so that the piezoelectric ceramic is easily subjected to shear stress, and the piezoelectric ceramic is easily caused to be incapable of being normally used.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a little location platform of piezoceramics drive unipolar to solve the common displacement amplification mechanism that exists among the prior art and directly be connected with motion platform, make piezoceramics receive shear stress easily, lead to piezoceramics technical problem that can not normal use easily.

In order to achieve the above object, the utility model adopts the following technical scheme: the utility model provides a little location platform of piezoceramics drive unipolar, including mount pad, piezoceramics, first amplification mechanism, output ball and motion platform, first amplification mechanism is fixed on the mount pad, piezoceramics fixes in the first amplification mechanism, first amplification mechanism encloses to be located piezoceramics, motion platform swing joint is in on the mount pad, the output ball is connected on the output of first amplification mechanism with on the motion platform, the output ball with piezoceramics's removal end sets up relatively.

Further, the output ball is in point contact with the motion platform.

Further, the motion platform includes a second amplification mechanism and an output, the second amplification mechanism being connected to the output ball and the output.

Further, the first amplification mechanism, the second amplification mechanism, the output ball and the piezoelectric ceramic are located in the mounting seat, and the output piece penetrates through the mounting seat.

Further, still include the connecting rod, first mechanism of amplification passes through the connecting rod is fixed on the mount pad, the connecting rod wears to locate the mount pad, piezoceramics is located the connecting rod with between the output ball.

Furthermore, a plurality of mounting holes are formed in the output piece.

Further, the output ball is a flexible ball.

Further, still include protective layer and dead lever, piezoceramics be adjacent to the both sides face that removes the end all is fixed with the protective layer just is provided with the dead lever, the dead lever is worn to locate first amplification mechanism and one end are contradicted on the protective layer.

Further, the first amplification mechanism is a bridge flexible hinge or a differential lever.

Further, the second amplification mechanism is a stacked flexible hinge.

The utility model provides a pair of little location platform of piezoceramics drive unipolar has beneficial effect: compared with the prior art, the utility model discloses an output ball is little with the area of motion platform contact, can effectively reduce piezoceramics and receive shear stress to guarantee piezoceramics's normal use. The first amplifying mechanism amplifies the output displacement of the piezoelectric ceramics, and the piezoelectric ceramics stably controls the movement of the output ball. The piezoelectric ceramic is positioned in the first amplifying mechanism, and the piezoelectric ceramic is ensured to enable the first amplifying mechanism to generate micro displacement under the inverse piezoelectric effect.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments or the prior art descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive labor.

Fig. 1 is a schematic structural view of a piezoelectric ceramic driven single-axis micro-positioning platform according to an embodiment of the present invention;

fig. 2 is an internal structure schematic diagram of a piezoelectric ceramic driven single-axis micro-positioning platform provided by the embodiment of the present invention.

Wherein, in the figures, the respective reference numerals:

1. a mounting seat; 2. piezoelectric ceramics; 3. a first amplification mechanism; 4. outputting the ball; 5. a motion platform; 51. a second amplification mechanism; 52. an output member; 6. a connecting rod; 7. mounting holes; 8. a protective layer; 9. and (5) fixing the rod.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1 and fig. 2, a piezoelectric ceramic driven single-axis micro-positioning platform according to the present invention will now be described. The utility model provides a little location platform of piezoceramics drive unipolar, including mount pad 1, piezoceramics 2, first mechanism 3 of amplifying, output ball 4 and motion platform 5, first mechanism 3 of amplifying is fixed on mount pad 1, piezoceramics 2 is fixed in first mechanism 3 of amplifying, first mechanism 3 of amplifying encloses and locates piezoceramics 2, motion platform 5 swing joint is on mount pad 1, output ball 4 is connected on the output of first mechanism 3 of amplifying and on motion platform 5, output ball 4 sets up with piezoceramics 2's removal end relatively.

The utility model provides a pair of little location platform of piezoceramics drive unipolar compares with prior art, and the area of

output ball

4 and 5 contacts of motion platform is little, can effectively reduce piezoceramics 2 and receive shear stress to guarantee piezoceramics 2's normal use. The first amplifying mechanism 3 amplifies the output displacement of the piezoelectric ceramic 2, and the piezoelectric ceramic 2 stably controls the movement of the output ball 4. The piezoelectric ceramic 2 is positioned in the first amplifying mechanism 3, and the piezoelectric ceramic 2 is ensured to enable the first amplifying mechanism 3 to generate micro displacement under the inverse piezoelectric effect.

Further, referring to fig. 1 and fig. 2, as an embodiment of the piezoelectric ceramic driven single-axis micro-positioning platform of the present invention, the output ball 4 is in point contact with the motion platform 5.

The contact area of the output ball 4 and the motion platform 5 is the minimum, so that the shear stress on the piezoelectric ceramic 2 can be effectively applied, and the normal use of the piezoelectric ceramic 2 is ensured. The output ball 4 is abutted to the motion platform 5, and the connection structure of the output ball 4 and the motion platform 5 is simple and very practical.

Specifically, the output ball 4 is hemispherical.

Further, referring to fig. 1 and fig. 2, as a specific embodiment of the piezoelectric ceramic driven single-shaft micro-positioning platform provided in the present invention, the motion platform 5 includes a second amplifying mechanism 51 and an output element 52, and the second amplifying mechanism 51 is connected to the output ball 4 and the output element 52.

The second amplification mechanism 51 provides a high precision and consistent displacement of the output member 52.

Specifically, the second amplification mechanism 51 and the output member 52 are integrally provided.

Further, please refer to fig. 1 and fig. 2 together, as a specific embodiment of the piezoelectric ceramic driven single-axis micro-positioning platform provided by the present invention, the first amplifying mechanism 3, the second amplifying mechanism 51, the output ball 4 and the piezoelectric ceramic 2 are located in the mounting base 1, and the output element 52 is inserted into the mounting base 1.

The first amplification mechanism 3, the second amplification mechanism 51, the output ball 4 and the piezoelectric ceramics 2 are positioned in the mounting base 1, and the mounting base 1 plays a role in protecting the first amplification mechanism 3, the second amplification mechanism 51, the output ball 4 and the piezoelectric ceramics 2, so that the first amplification mechanism 3, the second amplification mechanism 51, the output ball 4 and the piezoelectric ceramics 2 are not easily damaged. The output member 52 can be telescopically moved in the mounting base 1, so that the output member 52 is not easy to be directly separated from the mounting base 1, and the movement stability of the output member 52 is improved.

Further, please refer to fig. 1 and fig. 2 together, as the utility model provides a specific implementation of a piezoelectric ceramic driven single-shaft micro-positioning platform, further includes a connecting rod 6, the first amplifying mechanism 3 is fixed on the mounting base 1 through the connecting rod 6, the connecting rod 6 is inserted into the mounting base 1, and the piezoelectric ceramic 2 is located between the connecting rod 6 and the output ball 4.

The connecting rod 6 enables the first amplification mechanism 3 to be stably connected to the mounting base 1, and the output displacement of the output ball 4 to the motion platform 5 is not influenced.

Specifically, the connecting rod 6 is screwed to the mount 1 and the first amplification mechanism 3. The connecting rod 6, the mounting seat 1 and the first amplifying mechanism 3 are detachably connected, and the structure is simple and very practical.

Further, referring to fig. 1 and fig. 2, as a specific embodiment of the piezoelectric ceramic driven single-shaft micro-positioning platform of the present invention, the output member 52 is provided with a plurality of mounting holes 7.

The mounting hole 7 facilitates the output member 52 to be connected with other mechanisms, so that the output member 52 can stably drive the other mechanisms to move.

Further, referring to fig. 1 and fig. 2 together, as an embodiment of the piezoelectric ceramic driven single-axis micro-positioning platform provided by the present invention, the output ball 4 is a flexible ball.

The flexible ball is not easy to deform, and the output ball 4 is ensured to be in point contact with the motion platform 5.

Further, please refer to fig. 1 and fig. 2 together, as a specific implementation manner of the piezoelectric ceramic driven single-shaft micro positioning platform provided by the present invention, the platform further includes a protection layer 8 and a fixing rod 9, both side surfaces of the piezoelectric ceramic 2 adjacent to the moving end are both fixed with the protection layer 8 and provided with the fixing rod 9, and the fixing rod 9 is disposed through the first amplifying mechanism 3 and one end of the fixing rod abuts against the protection layer 8.

The protective layer 8 makes the fixing rod 9 less likely to break the piezoelectric ceramics 2, while achieving stable connection between the piezoelectric ceramics 2 and the first amplification mechanism 3.

Specifically, the protective layer 8 is fixed on the piezoelectric ceramic 2 by glue.

Further, referring to fig. 1 and fig. 2 together, as an embodiment of the present invention, the first amplifying mechanism 3 is a bridge-type flexible hinge or a differential lever.

The output displacement of the output ball 4 is amplified by the bridge type flexible hinge and the differential type lever. The bridge type flexible hinge has high linearity and small radial deviation compared to a differential type lever. In order to ensure the rigidity of the positioning platform, the amplification factor of the bridge type flexible hinge is generally below 10 times.

Further, referring to fig. 1 and fig. 2, as an embodiment of the piezoelectric ceramic driven single-axis micro-positioning platform provided by the present invention, the second amplifying mechanism 51 is a stacked flexible hinge.

The second amplification mechanism 51 highly linearizes the displacement of the output member 52, thereby obtaining a displacement with high accuracy and high uniformity. Compared with a single flexible hinge, the laminated flexible hinge can greatly reduce the maximum stress at the hinge key of the single flexible hinge and provide high system rigidity, and meanwhile, the application resonance frequency of the moving platform 5 can be effectively improved.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims

1. The utility model provides a little location platform of piezoceramics drive unipolar, its characterized in that, includes mount pad, piezoceramics, first mechanism of amplification, output ball and motion platform, first mechanism of amplification is fixed on the mount pad, piezoceramics fixes in the first mechanism of amplification, first mechanism of amplification encloses to be located piezoceramics, motion platform swing joint is in on the mount pad, the output ball is connected on the output of first mechanism of amplification with on the motion platform, the output ball with piezoceramics's removal end sets up relatively.

2. A piezoceramic driven single axis micropositioning platform according to claim 1, wherein the output ball is in point contact with the motion platform.

3. The piezoceramic driven single-axis micropositioning platform of claim 1, wherein the motion platform comprises a second amplification mechanism and an output piece, the second amplification mechanism being connected to the output ball and the output piece.

4. The piezoceramic driven single-axis micropositioning platform of claim 3, wherein the first amplification mechanism, the second amplification mechanism, the output ball and the piezoceramic are located within the mounting seat, and the output element is arranged through the mounting seat.

5. The piezoceramic driving single-shaft micro positioning platform according to claim 4, further comprising a connecting rod, wherein the first amplifying mechanism is fixed on the mounting seat through the connecting rod, the connecting rod penetrates through the mounting seat, and the piezoceramic is positioned between the connecting rod and the output ball.

6. A piezoceramic driven uniaxial micropositioning platform according to claim 3, wherein the output member is provided with a plurality of mounting holes.

7. The piezoceramic driven uniaxial micropositioning platform of claim 1, wherein the output balls are flexible balls.

8. The piezoceramic driving single-shaft micro-positioning platform according to claim 1, further comprising a protective layer and a fixing rod, wherein the protective layer is fixed on both sides of the piezoceramic adjacent to the moving end and the fixing rod is arranged on both sides of the piezoceramic adjacent to the moving end, the fixing rod is arranged in the first amplifying mechanism in a penetrating manner, and one end of the fixing rod is abutted against the protective layer.

9. The piezoceramic driven uniaxial micropositioning platform of claim 1, wherein the first amplification mechanism is a bridge-type flexible hinge or differential lever.

10. A piezoceramic driven uniaxial micropositioning stage according to claim 3, wherein the second amplification mechanism is a laminated flexible hinge.