CN210657115U

CN210657115U - Automatic feeding device of PVD vacuum ion plating machine

Info

Publication number: CN210657115U
Application number: CN201921776146.XU
Authority: CN
Inventors: 王骏; 费永强; 徐侨
Original assignee: Zhejiang Baohong New Material Co ltd
Current assignee: Zhejiang Baohong New Material Co ltd
Priority date: 2019-10-22
Filing date: 2019-10-22
Publication date: 2020-06-02
Anticipated expiration: 2029-10-22

Abstract

The embodiment of the application discloses an automatic feeding device of a PVD vacuum ion plating machine, which comprises a workpiece loading unit and a loading mechanical arm, wherein the workpiece loading unit comprises a main mounting shaft capable of rotating and two or more fixing frames mounted through the main mounting shaft, the fixing frames are used for fixedly placing workpieces, and the upper parts of the fixing frames are provided with upper access grooves for the workpieces to pass through; the loading mechanical arm comprises a mechanical arm support, a rotating stand column installed on the mechanical arm support, a lifting unit installed through the rotating stand column, a connecting arm installed on the lifting unit in a rotating mode at a first end, a vertical installation shaft installed at a second end of the connecting arm in a rotating mode, a loading frame fixedly installed through the vertical installation shaft, an operating handle fixedly installed through the vertical installation shaft, and a control system, wherein the loading frame is used for loading materials to the fixing frame through an upper access groove. The technical scheme at least has the advantages of low labor intensity, relatively high feeding working efficiency and relatively low working energy consumption.

Description

Automatic feeding device of PVD vacuum ion plating machine

Technical Field

The application relates to the technical field of feeding equipment, in particular to an automatic feeding device of a PVD vacuum ion plating machine.

Background

Vacuum ion plating is a coating treatment process of stainless steel plates and is realized by a vacuum ion coating machine which is a tank type device and is mostly in a top opening type. In the prior art, a stainless steel plate is manually placed into a vacuum tank of a vacuum ion plating machine from an upper opening by an operator and is fixed by a workpiece loading unit, so that the stainless steel plate is supported and erected in the vacuum tank of the vacuum ion plating machine. However, the stainless steel plate has a large mass, is easy to bend, and is difficult to operate manually, so that the labor intensity is high, and the working efficiency is low.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a PVD vacuum ion plating machine's automatic feeding device, its basic automatic feeding that can realize corrosion resistant plate to can reduce operator's intensity of labour, improve material loading work efficiency.

In order to achieve the purpose, the utility model provides an automatic feeding device of a PVD vacuum ion plating machine, which comprises a workpiece loading unit and a loading mechanical arm, wherein the workpiece loading unit comprises a rotatable main mounting shaft and two or more fixed frames mounted through the main mounting shaft, the fixed frames are used for fixedly placing workpieces, and the upper parts of the fixed frames are provided with upper access grooves for the workpieces to pass through; the loading mechanical arm comprises a mechanical arm support, a rotary stand column installed on the mechanical arm support, a lifting unit installed through the rotary stand column, a connecting arm with a first end installed on the lifting unit in a rotating mode, a vertical installation shaft installed at a second end of the connecting arm in a rotating mode, a loading frame fixedly installed through the vertical installation shaft, an operating handle fixedly installed through the vertical installation shaft, and a control system, wherein the loading frame is used for loading materials to the fixing frame through the upper access groove.

By means of the structure, through the arrangement of the loading mechanical arm, an operator can complete the feeding of the fixed frame by the loading mechanical arm through the operation of the operating handle and the control system, the basic automation of the feeding work of the stainless steel plate can be realized, the labor intensity of the operator is relatively effectively reduced, and the feeding work efficiency is improved; furthermore, the first end of the connecting arm can be rotatably installed on the lifting unit, the vertical installation shaft can be rotatably installed at the second end, an operator can control the movement of the loading frame in the same horizontal height through an operation handle fixedly installed on the vertical installation shaft, and therefore the loading frame can be adjusted flexibly relative to the fixed frame, and meanwhile the working energy consumption of the automatic feeding device of the PVD vacuum ion plating machine can be reduced.

Preferably, the loading frame comprises a mullion vertical beam, a first cross beam capable of being arranged on the mullion vertical beam in a lifting mode, and a second cross beam fixedly arranged on the mullion vertical beam, wherein the first cross beam is provided with a pair of workpiece clamping heads, the second cross beam is provided with a pair of vertically-arranged plate installing guide grooves, and the clamping heads and the plate installing guide grooves form a clamping limiting space for a workpiece.

Preferably, the loading robot arm further comprises an alignment unit for aligning the clamping and limiting space with the upper access slot.

Preferably, the plate mounting guide groove is formed by a pair of spacing blocks arranged at intervals; the alignment unit comprises a longitudinal limiting plate formed by extending downwards from the front end wall of the limiting block and a transverse limiting plate formed by extending downwards from the outer side wall of one limiting block; and when the pair of longitudinal limiting plates and the one transverse limiting plate respectively abut against the two outer side walls of the fixed frame, the clamping limiting space is aligned with the upper access groove.

Preferably, the abutting working surfaces of the longitudinal limiting plate and the transverse limiting plate are provided with pressure sensors, and the pressure sensors are in signal connection with the control system.

Preferably, the first cross beam is driven by a chain and chain wheel driving structure and performs lifting movement along the mullion vertical beam.

Preferably, the fixed frame comprises an upper beam, a lower beam, a first vertical beam and a second vertical beam, the first vertical beam and the second vertical beam are used for connecting the upper beam and the lower beam, the upper access groove penetrates through the upper beam, an upper clamping groove communicated with the upper access groove is formed in the lower portion of the upper beam, and a lower clamping groove matched with the upper clamping groove is formed in the lower beam.

Preferably, the inner walls of the first vertical beam and the second vertical beam are provided with side guide grooves which are vertically arranged.

Preferably, the lift unit includes first long connecting rod and the long connecting rod of second, the first short connecting rod and the short connecting rod of second, flexible gas pole that the level set up each other, the both ends of first short connecting rod are articulated respectively to be connected first long connecting rod the first end of the long connecting rod of second, the one end of the short connecting rod of second is articulated to be connected be close to second department on the first long connecting rod portion, the other end of the short connecting rod of second is articulated to be connected the second end of the long connecting rod of second, the stiff end of flexible gas pole articulate install in on the arm support, the flexible end of flexible gas pole is articulated to be connected the second end of first long connecting rod.

Preferably, the first end of the connecting arm is rotatably mounted to the first end of the second long link through a damping bearing, and the vertical mounting shaft is rotatably mounted to the second end of the connecting arm through a damping bearing.

According to the utility model discloses an automatic feeding device of PVD vacuum ion coating machine, through the setting that loads the arm to the operator can be through the operation to operating handle, control system, utilizes to load the arm and accomplishes the material loading to fixed frame, enough realizes the basic automation of corrosion resistant plate material loading work, thereby has reduced operator's intensity of labour, has improved the efficiency of material loading work relatively effectively.

Furthermore, through the arrangement of the aligning unit, an operator can easily align the clamping limiting space formed on the loading frame with the upper access groove through the operating handle and the lifting unit, and the workpiece enters the fixed frame through the upper access groove through the descending of the first cross beam, so that the efficiency of loading work is further improved.

Furthermore, the first end of the connecting arm can be rotatably installed on the lifting unit through the damping bearing, the vertical installation shaft can be rotatably installed at the second end through the damping bearing, an operator can control the loading frame to move in the same horizontal height through an operation handle fixedly installed on the vertical installation shaft, and therefore the loading frame can be adjusted flexibly relative to the fixed frame, and meanwhile the working energy consumption of the automatic feeding device of the PVD vacuum ion plating machine can be reduced.

To sum up, the automatic feeding device of the PVD vacuum ion plating machine in the technical scheme at least has the advantages of low labor intensity, relatively high feeding work efficiency and relatively low work energy consumption.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.

Fig. 1 is a schematic structural view of a workpiece loading unit according to an embodiment of the present invention;

fig. 2 is a schematic structural view of a loading robot according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a fixing frame according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a loading frame according to an embodiment of the present invention.

Reference numerals of the above figures:

110-main mounting shaft, 120-fixed frame, 130-fixed shaft, 140-road wheel, 121-upper access slot, 122-upper beam, 123-lower beam, 124-first vertical beam, 125-second vertical beam, 126-upper clamping slot, 127-lower clamping slot, 128-side guide slot, 210-mechanical arm support, 220-lifting unit, 230-connecting arm, 240-vertical mounting shaft, 250-loading frame, 260-operating handle, 280-rotating upright, 221-first long connecting rod, 222-second long connecting rod, 223-first short connecting rod, 224-second short connecting rod, 225-telescopic air rod, 251-middle stile vertical beam, 252-first cross beam, 253-second cross beam, 254-workpiece clamping head, 255-mounting guide slot, 256-limiting blocks, 271-longitudinal limiting plates, 272-transverse limiting plates, 300-vacuum tanks, 400-workpieces and 500-touch displays.

Detailed Description

In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Example (b): referring to fig. 1 and 2, the automatic loading device of the PVD vacuum ion plating machine includes a workpiece loading unit and a loading robot. The workpiece loading unit is rotatably and fixedly installed in a vacuum tank 300 of the PVD vacuum ion coater, and is used for supporting a workpiece 400 (stainless steel plate) to be coated in the vacuum tank 300. The workpiece loading unit includes a main mounting shaft 110 capable of rotating, two or more fixing frames 120 mounted through the main mounting shaft 110, the fixing frames 120 being used for fixedly placing the workpiece, and having an upper access groove 121 at an upper portion thereof through which the workpiece 400 passes. The loading mechanical arm comprises a mechanical arm support 210, a rotating upright post 280 mounted on the mechanical arm support 210, a lifting unit 220 mounted through the rotating upright post 280, a connecting arm 230 with a first end rotatably mounted on the lifting unit 220, a vertical mounting shaft 240 rotatably mounted at a second end of the connecting arm 230, a loading frame 250 fixedly mounted through the vertical mounting shaft 240, an operating handle 260 fixedly mounted through the vertical mounting shaft 240, and a control system, wherein the loading frame 250 is used for loading materials to the fixed frame 120 through the upper access groove 121. Wherein, the control system is any one of the prior art, such as a PLC controller, and the touch display 500 for controlling the operation and display of the system is installed on the operation handle 260.

By means of the structure, through the arrangement of the loading mechanical arm, an operator can complete the feeding of the fixed frame 120 through the operation of the operating handle 260 and the control system by using the loading mechanical arm, the basic automation of the feeding work of the stainless steel plate can be realized, the labor intensity of the operator is effectively reduced, and the feeding work efficiency is improved.

Specifically, referring to fig. 1 and 3, a fixing shaft 130 is welded or screwed to the bottom of the vacuum tank 300, and the main mounting shaft 110 is rotatably mounted on the fixing shaft 130 through a bearing. In the present embodiment, the workpiece loading unit includes 4 sets of fixing frames 120 arranged in a circular array centered on the main mounting shaft 110. The fixing frame 120 includes an upper beam 122, a lower beam 123, a first vertical beam 124 and a second vertical beam 125 connecting the upper beam 122 and the lower beam 123, and the fixing frame 120 is welded or screw-mounted on the shaft side of the main mounting shaft 110 through an outer side portion of the second vertical beam 125. The upper beam 122 is vertically provided with an upper access groove 121 penetrating through the thickness direction thereof, and the workpiece 400 can enter a loading space formed by the upper beam 122, the lower beam 123, the first vertical beam 124 and the second vertical beam 125 through the upper access groove 121. Further, the lower portion of the upper beam 122 is provided with an upper clamping groove 126 communicated with the upper access groove 121, the upper clamping groove 126 is formed by a pair of clamping limiting plates arranged at intervals, the pair of clamping limiting plates are fixedly installed at the bottom of the upper beam 122 through welding or screwing, and a gap between the pair of clamping limiting plates is communicated with the upper access groove 121. Preferably, the upper catching groove 126 has a groove width (i.e., a gap between the pair of catching limit plates) smaller than that of the upper opening groove 121, for example, the upper catching groove 126 has a groove width 1/2 that is the width of the upper opening groove 121. The lower beam 123 is provided with a lower clamping groove 127 matched with the upper clamping groove 126. Similarly, the lower clamping groove 127 is formed by a pair of clamping limiting plates arranged at intervals, the pair of clamping limiting plates are fixedly arranged at the top of the lower beam 123 through welding or screwing, and the groove width of the lower clamping groove 127 is equal to that of the upper clamping groove 126. The inner walls of the first vertical beam 124 and the second vertical beam 125 are provided with vertically arranged side guide slots 128, and in this embodiment, the inner walls of the first vertical beam 124 and the second vertical beam 125 are provided with two sets of paired side guide slots 128. The side guide grooves 128 have a groove width equal to that of the lower catching grooves 127 of the upper catching grooves 126. Thus, the workpiece 400 is held in the fixed frame 120 by the upper and lower

catching grooves

126 and 127 and the pair of side guide grooves 128 with a support. Preferably, a road wheel 140 is threadably mounted to the bottom of the lower beam 123 at a location remote from the main mounting axle 110 to facilitate rotation of the fixed frame 120 about the main mounting axle 110.

To illustrate the structure of the loading robot, and referring back to FIG. 2, the robot arm support 210 is a column structure that supports the overall structure of the loading robot. The rotary upright 280 can be rotatably mounted on the mechanical arm support 210 through a damping bearing, an air rod mounting seat is screwed or welded on the shaft side of the rotary upright 280, the fixed end (namely, a cylinder part) of the telescopic air rod 225 is pivoted on the air rod mounting seat, and the telescopic air rod 225 is controlled by a control system. The lifting unit 220 is composed of a link mechanism and a telescopic air lever 225. The link mechanism comprises a first long link 221 and a second long link 222 which are horizontally arranged, a first short link 223 and a second short link 224 which are horizontally arranged, two ends of the first short link 223 are respectively hinged with the first ends of the first long link 221 and the second long link 222, one end of the second short link 224 is hinged with the part, close to the second end, of the first long link 221, the other end of the second short link 224 is hinged with the second end of the second long link 222, and the second short link 224 is vertically arranged and fixedly arranged at the top of the rotating upright post 280 through screwing. The telescopic end of the telescopic gas rod 225 is hingedly connected to the second end of the first long link 221. Thus, the lifting unit 220 can be rotated with the rotation of the rotating post 280, and the lifting unit 220 serves to drive the lifting of the connecting arm 230. A first end of the connecting arm 230 is rotatably mounted to a lower portion of a first end of the second long link 222 or a lower portion of the first short link 223 through a damping bearing; the lower portion of the second end of the connecting arm 230 is rotatably mounted with a vertical mounting shaft 240 through a damping bearing. The loading frame 250 is fixedly mounted on the vertical mounting shaft 240 by means of screw coupling, and on the other side of the vertical mounting shaft 240, an operating handle 260 is screw-coupled.

Referring to fig. 4, the loading frame 250 includes a mullion vertical beam 251, a first cross beam 252 elevatably disposed on the mullion vertical beam 251, and a second cross beam 253 fixedly disposed on the mullion vertical beam 251. Specifically, the first cross member 252 is drivingly mounted to the mullion vertical beam 251 through any one of the chain and sprocket drive mechanisms known in the art, such that it is capable of lifting and lowering along the mullion vertical beam 251. For example, the mullion vertical beam 251 comprises a pair of metal vertical beams which are arranged in parallel and at intervals, a lifting rail groove is formed on the pair of metal vertical beams, and a pair of sliding blocks matched with the pair of lifting rail grooves are fixedly installed on the first cross beam 252 in a welding or screwing manner; a chain and sprocket driving structure (not shown) is installed between the pair of metal vertical beams in a threaded manner, and a chain link on the chain is fixedly connected with a part between the pair of sliding blocks of the first cross beam 252 in a threaded manner, so that the first cross beam 252 is driven to move up and down along the mullion vertical beam 251, and the chain and sprocket driving structure is controlled by a control system. The first beam 252 is provided with a pair of workpiece holding heads 254, and the workpiece holding heads 254 may be any one of the prior art clamps, such as an electromagnetic chuck, and are controlled by a control system to control the clamping and releasing states of the clamp by turning on and off the power supply. The second cross member 253 is fixedly installed at the lower end of the mullion vertical beam 251 by screwing or welding. Two ends or near ends of the second beam 253 are vertically extended in a horizontal plane to form a pair of extending sections, the ends of the extending sections are provided with a pair of spacing stoppers 256, gaps between the pair of stoppers 256 form plate loading guide grooves 255, the jaw openings of the pair of plate loading guide grooves 255 are opposite, and the pair of workpiece clamping heads 254 and the pair of plate loading guide grooves 255 together form a clamping and limiting space of the workpiece 400.

As a preferred embodiment, the loading robot further includes an alignment unit for aligning the grip limiting space with the upper access slot 121. The alignment unit comprises a longitudinal limiting plate 271 and a transverse limiting plate 272, wherein the longitudinal limiting plate 271 is formed by extending downwards from the front end wall of one limiting block 256, the transverse limiting plate 272 is formed by extending downwards from the outer side wall of one limiting block 256, and the longitudinal limiting plate 271 and the transverse limiting plate 272 are fixedly installed on the bottom of the limiting block 256 through welding. As will be understood by those skilled in the art, the distance between the bottoms of the pair of plate loading guide grooves 255 is set to be equal to the length of the upper access groove 121, and when the pair of longitudinal position limiting plates 271 and the one of the transverse position limiting plates 272 abut against the two outer sidewalls of the fixed frame, respectively, the clamping position limiting space is aligned with the upper access groove 121.

Furthermore, pressure sensors are arranged on the abutting working surfaces of the longitudinal limiting plate 271 and the transverse limiting plate 272 and are in signal connection with the control system.

The working method of the automatic feeding device of the PVD vacuum ion plating machine comprises the following steps: a first operator vertically places the workpiece 400, a second operator controls the first cross beam 252 to ascend along the mullion vertical beam 251 and clamp the workpiece 400 through the control system by using the touch display 500 on the operating handle 260, the first cross beam 252 continuously ascends to lift the workpiece 400 off the ground, and then the first cross beam 252 slowly descends along the mullion vertical beam 251, at the moment, the first operator assists in descending the workpiece 400, so that the lower end of the workpiece 400 enters between the jaws of the pair of plate loading guide grooves 255, and the loading of the workpiece 400 in the clamping limit space is completed; secondly, a second operator rotates the loading frame 250 by using the operating handle 260, and controls the telescopic air rods 225 to extend out by using the touch display 500 through the control system so as to enable the loading frame 250 to descend simultaneously, thereby completing the primary positioning of the loading frame 250; thirdly, a second operator continuously utilizes the operating handle 260 to enable the longitudinal limiting plate 271 and the transverse limiting plate 272 on the limiting block 256 on one side to be sequentially abutted against the short side wall and the adjacent long side wall on one side of the top of the fixed frame 120, and then enable the longitudinal limiting plate 271 on the limiting block 256 on the other side to be abutted against the same long side wall, so that the clamping limiting space is aligned with the upper access groove 121; finally, the second operator controls the chain and sprocket driving structure through the control system by using the touch display 500, so that the first beam 252 carries the workpiece 400 to descend and enter the supporting and fixing space of the fixing frame 120 through the upper access slot 121, and after the first beam 252 descends to the lowest position, the workpiece clamping head 254 is released to enable the workpiece 400 to completely descend. The loading arm is repositioned and rotated to bring the next fixed frame 120 into the loading station, and the above-described loading operation is repeated.

According to the utility model discloses a PVD vacuum ion plating machine's automatic feeding device, through the setting that loads the arm to the operator can be through the operation to operating handle 260, control system, utilizes to load the arm and accomplishes the material loading to fixed frame 120, enough realizes the basic automation of corrosion resistant plate material loading work, thereby has reduced operator's intensity of labour relatively effectively, has improved the efficiency of material loading work.

Further, through the arrangement of the aligning unit, an operator can easily align the clamping limiting space formed on the loading frame 250 with the upper access groove 121 through the operating handle 260 and the lifting unit 220, and the workpiece 400 enters the fixing frame through the upper access groove 121 through the descending of the first cross beam 252, so that the efficiency of the loading work is further improved.

Furthermore, the first end of the connecting arm 230 can be rotatably mounted on the lifting unit 220 through a damping bearing, and the second end of the connecting arm can be rotatably mounted on the vertical mounting shaft 240 through a damping bearing, so that an operator can control the loading frame 250 to move within the same horizontal height through the operating handle 260 fixedly mounted on the vertical mounting shaft 240, and the loading frame 250 can be relatively flexibly adjusted to the relative position with the fixed frame 120, and meanwhile, the working energy consumption of the automatic feeding device of the PVD vacuum ion plating machine in the technical scheme of the present application can be reduced.

The foregoing description is for the purpose of illustration and is not for the purpose of limitation. Many embodiments and many applications other than the examples provided will be apparent to those of skill in the art upon reading the above description. The scope of the present teachings should, therefore, be determined not with reference to the above description, but should instead be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled. The disclosures of all articles and references, including patent applications and publications, are hereby incorporated by reference for all purposes. The omission in the foregoing claims of any aspect of subject matter that is disclosed herein is not intended to forego the subject matter and should not be construed as an admission that the applicant does not consider such subject matter to be part of the disclosed subject matter.

Claims

The automatic feeding device of the PVD vacuum ion plating machine is characterized by comprising a workpiece loading unit and a loading mechanical arm, wherein the workpiece loading unit comprises a main mounting shaft (110) capable of rotating and two or more fixed frames (120) mounted through the main mounting shaft (110), the fixed frames (120) are used for fixedly placing workpieces, and the upper parts of the fixed frames are provided with upper access grooves (121) for allowing the workpieces to pass through; the loading mechanical arm comprises a mechanical arm support (210), a rotating upright post (280) installed on the mechanical arm support (210), a lifting unit (220) installed through the rotating upright post (280), a connecting arm (230) with a first end rotatably installed on the lifting unit (220), a vertical installation shaft (240) rotatably installed at a second end of the connecting arm (230), a loading frame (250) fixedly installed through the vertical installation shaft (240), an operating handle (260) fixedly installed through the vertical installation shaft (240), and a control system, wherein the loading frame (250) is used for loading the fixed frame (120) through the upper access groove (121).
2. The automatic feeding device of the PVD vacuum ion plating machine as claimed in claim 1, wherein the loading frame (250) comprises a mullion vertical beam (251), a first beam (252) arranged on the mullion vertical beam (251) in a lifting manner, and a second beam (253) fixedly arranged on the mullion vertical beam (251), a pair of workpiece clamping heads (254) is arranged on the first beam (252), a pair of vertically-arranged plate loading guide grooves (255) is arranged on the second beam (253), and the pair of clamping heads (254) and the pair of plate loading guide grooves (255) jointly form a clamping limit space of a workpiece.
3. The automatic loading apparatus of PVD vacuum ion coater of claim 2, wherein said loading robot further comprises an alignment unit for aligning said clamping limit space with said upper access slot (121).
4. The automatic feeding device of PVD vacuum ion coater of claim 3, wherein the loading guide slot (255) is formed by a pair of spacing stoppers (256); the alignment unit comprises a longitudinal limiting plate (271) formed by extending downwards from the front end wall of the limiting blocks (256), and a transverse limiting plate (272) formed by extending downwards from the outer side wall of one limiting block (256); when the pair of longitudinal limiting plates (271) and the one of the transverse limiting plates (272) are respectively abutted against two outer side walls of the fixed frame (120), the clamping limiting space is aligned with the upper access groove (121).
5. The automatic feeding device of the PVD vacuum ion plating machine as claimed in claim 4, wherein pressure sensors are arranged on the abutting working surfaces of the longitudinal limiting plate (271) and the transverse limiting plate (272) and are in signal connection with the control system.
6. The automatic feeding device of PVD vacuum ion coater of claim 2, wherein said first beam (252) is driven by a chain and sprocket driving structure to move up and down along said mullion vertical beam (251).
7. The automatic feeding device of the PVD vacuum ion plating machine as claimed in claim 1, wherein the fixed frame (120) comprises an upper beam (122), a lower beam (123), a first vertical beam (124) and a second vertical beam (125) connecting the upper beam (122) and the lower beam (123), the upper access groove (121) penetrates through the upper beam (122) to be opened, an upper clamping groove (126) communicated with the upper access groove (121) is arranged at the lower part of the upper beam (122), and a lower clamping groove (127) matched with the upper clamping groove (126) is arranged on the lower beam (123).
8. The automatic feeding device of PVD vacuum ion coater according to claim 7, characterized in that the inner walls of the first vertical beam (124) and the second vertical beam (125) are provided with vertically arranged side guide grooves (128).
9. The automatic feeding device of PVD vacuum ion plating machine as claimed in claim 1, the lifting unit (220) comprises a first long connecting rod (221) and a second long connecting rod (222) which are horizontally arranged, a first short connecting rod (223) and a second short connecting rod (224) which are horizontally arranged, and a telescopic air rod (225), two ends of the first short connecting rod (223) are respectively hinged with the first ends of the first long connecting rod (221) and the second long connecting rod (222), one end of the second short connecting rod (224) is hinged with the rod part of the first long connecting rod (221) near the second end, the other end of the second short connecting rod (224) is hinged with the second end of the second long connecting rod (222), the fixed end of the telescopic air rod (225) is hinged and installed on the mechanical arm bracket (210), the telescopic end of the telescopic air rod (225) is hinged with the second end of the first long connecting rod (221).
10. The automatic loading device of PVD vacuum ion coater of claim 9, wherein a first end of said connecting arm (230) is rotatably mounted to a first end of said second long link (222) by a damping bearing, and said vertical mounting shaft (240) is rotatably mounted to a second end of said connecting arm (230) by a damping bearing.