CN210654281U - Substrate carrier container - Google Patents

Substrate carrier container Download PDF

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Publication number
CN210654281U
CN210654281U CN201921525576.4U CN201921525576U CN210654281U CN 210654281 U CN210654281 U CN 210654281U CN 201921525576 U CN201921525576 U CN 201921525576U CN 210654281 U CN210654281 U CN 210654281U
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China
Prior art keywords
carrier
identification data
positioning
data carrier
substrate carrier
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CN201921525576.4U
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Chinese (zh)
Inventor
邱铭隆
杨宗益
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Chung King Enterprise Co ltd
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Chung King Enterprise Co ltd
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Priority to CN201921525576.4U priority Critical patent/CN210654281U/en
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Abstract

A substrate carrier container includes at least one identification data carrier and a housing. The identification data carrier is used to set identification data and has a body and a combination unit. The shell comprises a main shell body, a sealing cover and a carrier mounting unit. The cover is detachably combined with the main shell to jointly define an accommodating space. The main shell is provided with an outer wall surface, and the carrier seat installation unit is arranged on the outer wall surface and correspondingly combined with the combination unit. At least one of the combination unit and the carrier mounting unit is arranged or extends along the first direction, and the combination unit and the carrier mounting unit are combined in a variable way according to the relative positions of the combination unit and the carrier mounting unit in the first direction, so that the identification data carrier can be arranged on the outer wall surface of the main shell in an operable way at different positions in the first direction to meet different use requirements.

Description

Substrate carrier container
Technical Field
The present invention relates to a carrying container, and more particularly to a substrate carrying container.
Background
In general, a semiconductor process requires a plurality of processes on a substrate, and different processes are performed at different workstations. Since the semiconductor substrate is fragile and particle contamination is to be avoided, the substrate needs to be stored and protected by a special carrying container during the process of transporting the substrate between different stations, and the requirement of highly automated operation in a semiconductor factory is also met.
In order to reliably grasp and manage the process status of the substrates carried in each carrier container, a process data Card (Run Card) is usually attached to the carrier container to record the processing procedures of the substrates in the carrier container. With the rapid development of information and communication technology, in addition to the conventional paper manufacturing data card, a method for performing process progress control by using identification technologies such as radio frequency identification Tag (RFID Tag) and one-dimensional or two-dimensional bar code has appeared.
However, existing shipping containers typically only have one or two forms of identification at a fixed location on the container. If some stations in the process use different identification techniques due to equipment update, or other factors, the carrier container carrying the substrate needs to face and be compatible with various different identification techniques during the whole process, so that the carrier container needs to be provided with various types of identification data, and the identification devices are arranged at different positions on the carrier container according to the reading positions of different equipment. However, the conventional carrying container lacks flexibility to adjust in response to these changes.
Disclosure of Invention
One of the objects of the present invention is to provide a substrate carrying container capable of solving the above-mentioned problems.
The substrate carrier container of the present invention, in some embodiments, includes at least one identification data holder and a housing for mounting identification data. The identification data carrier has a body and a coupling unit. The housing includes a main housing, a cover, and a carrier mounting unit. The cover is detachably combined with the main shell to jointly define an accommodating space. The main shell is provided with an outer wall surface, and the carrier mounting unit is arranged on the outer wall surface and correspondingly combined with the combining unit. The combination unit and the carrier mounting unit are variably combined at relative positions in the first direction, so that the identification carrier can be operatively arranged on the outer wall surface of the main housing at different positions in the first direction.
In some embodiments, one of the combining unit and the carrier mounting unit further includes a sliding slot and the other further includes a sliding rail, the sliding rail is engaged with the sliding slot to allow the identification carrier to be slidably moved along the first direction.
In some embodiments, the sliding groove is defined by a plurality of buckling parts.
In some embodiments, the identification carrier includes at least a first positioning portion, and the main housing includes a plurality of second positioning portions for positioning the first positioning portion, the second positioning portions being arranged along the first direction so that the identification carrier is operably disposed on the outer wall of the main housing at different positions in the first direction.
In some embodiments, the cover is located at the front side of the main housing, the first direction is a vertical direction, the outer wall surface of the rear side of the main housing is formed with a recess extending from the top side to the bottom side of the main housing in the first direction, and the carrier mounting unit is located at the recess.
In some embodiments, the combination unit further includes a plurality of hooking portions to define a sliding slot, and the carrier mounting unit further includes a sliding rail formed by a rectangular boss, and the sliding rail and the sliding slot cooperate to allow the identification carrier to be slidably moved along the first direction.
In some embodiments, the combination unit of the identification data carrier includes at least one first positioning portion, and the carrier mounting unit of the housing includes a plurality of second positioning portions for positioning the first positioning portions, the second positioning portions being arranged along the first direction so that the identification data carrier can be operatively disposed on the outer wall surface of the main housing at different positions in the first direction.
In some embodiments, the slide rail has two side flanges extending in the first direction, and at least one of the side flanges is provided with the second positioning portion, each of the second positioning portions is a slot, and the first positioning portion of the combination unit is elastically movably clamped in one of the second positioning portions.
In some embodiments, a side of the body of the identification data carrier facing the main housing is defined as a front side and a side facing away from the main housing is defined as a rear side, the hooking portions are protruded from the front side of the body, each of the hooking portions has a side standing section extending from a left side end or a right side end of the body to the front side and a tail section extending from the side standing section and opposite to and spaced from the body, and gaps are respectively formed between the flanges at two sides of the slide rail and the main housing to form sliding spaces for the hooking portions to slide.
In some embodiments, the first positioning portion of the combination unit has at least one spring arm section and a rib, each spring arm section extends from one of the side standing sections and inclines towards the center of the body, and the rib protrudes from the end of the spring arm section towards the center of the body to be engaged with one of the second positioning portions.
In some embodiments, the body of the identification data carrier has a display surface located at the rear side for providing at least one identification data.
In some embodiments, the identification data holder further has a carrying frame disposed at the rear side of the body, and the carrying frame and the body together form a sheet slot.
In some embodiments, an insertion space for inserting a data card is formed between the main body of the identification data carrier and the main housing.
In some embodiments, the body of the identification data carrier also has a mounting mechanism for a radio frequency identification tag.
In some embodiments, the length of the carrier mounting unit in the first direction is at least twice as long as the length of the identification data carrier in the first direction, so as to provide a space for mounting a plurality of the identification data carriers.
The utility model discloses have following efficiency: the carrier mounting unit provides space for expanding and setting a plurality of identification data carriers, and has the flexibility of selectively setting different types of identification data; the position of the identification data carrier can be adjusted on the carrier mounting unit to meet different requirements.
Drawings
Other features and advantages of the present invention will become apparent from the following detailed description of the preferred embodiments with reference to the accompanying drawings, in which:
fig. 1 is a perspective view of a first embodiment of a substrate carrier container of the present invention;
FIG. 2 is another perspective view of the first embodiment;
FIG. 3 is an enlarged view of a portion of FIG. 2;
FIG. 4 is an exploded perspective view illustrating the identification data carrier and a card of the first embodiment;
FIG. 5 is a perspective view of the identification data carrier from another perspective;
FIG. 6 is a rear view illustrating the adjustable position of the identification data carrier according to the first embodiment;
FIG. 7 is a rear view illustrating that only one identification data carrier can be provided in the first embodiment;
fig. 8 is a perspective view illustrating an identification data carrier according to a second embodiment of the substrate carrier container of the present invention;
FIG. 9 is a perspective view of an identification data carrier according to the second embodiment from another perspective;
fig. 10 is a fragmentary perspective view illustrating a third embodiment of the substrate carrier container of the present invention; and
fig. 11 is a fragmentary top schematic view illustrating the third embodiment.
Detailed Description
Before the present invention is described in detail, it should be noted that in the following description, like elements are represented by like reference numerals.
Referring to fig. 1 to 3, a first embodiment of a substrate carrier container 100 of the present invention includes an identification data carrier 1 and a housing 2. The identification data carrier 1 is used to set identification data, and the identification data carrier 1 has a main body 11 and a combination unit 12.
The housing 2 includes a main housing 21, a cover 22 and a carrier mounting unit 23. The cover 22 is detachably combined with the main housing 21 to define a receiving space S for receiving a substrate (not shown).
In this embodiment, the housing 2 further includes a base 24 connected to the bottom side of the main housing 21, two handles 25 connected to the left and right sides of the main housing 21, and a machine handle 26 connected to the top side of the main housing 21 for the robot to grip and carry.
The main housing 21 has an outer wall 211, and the holder mounting unit 23 is disposed on the outer wall 211 and correspondingly coupled to the coupling unit 12, so as to dispose at least one identification holder 1 on the outer wall 211 of the main housing 21.
The cover 22 is located at the front side of the main housing 21, and the first direction D1 is a vertical direction. The outer wall 211 of the rear side of the main housing 21 is formed with a recess 212, the recess 212 extends from the top side to the bottom side of the main housing 21 in the first direction D1, and the mount mounting unit 23 is disposed at the recess 212.
At least one of the coupling unit 12 and the carrier mounting unit 23 is disposed or extended along a first direction D1, and the coupling unit 12 and the carrier mounting unit 23 are coupled in a manner that the relative position of the two units in the first direction D1 can be changed, so that the identification data carrier 1 can be operatively disposed on the outer wall surface 211 of the main housing 21 at different positions in the first direction D1 as shown in fig. 2, 3 and 6.
Further, one of the combination unit 12 and the carrier mounting unit 23 further includes a sliding slot and the other one of the combination unit and the carrier mounting unit further includes a sliding rail, the sliding rail is engaged with the sliding slot to allow the identification carrier 1 to be slidably moved along the first direction D1.
In the present embodiment, a carrier mounting unit 23 extending in the first direction D1 is exemplified. In more detail, the carriage mounting unit 23 in this embodiment includes a slide rail 231 formed by a rectangular boss extending in the first direction D1, and the slide rail 231 has two side flanges 232 extending in the first direction D1.
In a preferred embodiment, the carrier mounting unit 23 extends in the first direction D1 for a length at least twice as long as the identification data carrier 1 in the first direction D1, so as to provide space for mounting more than two identification data carriers 1, i.e. to allow the number of identification data carriers 1 to be expanded.
In fig. 2, 3 and 6, two identification data carriers 1 are provided on the outer wall 211 of the main housing 21, and it is apparent from the above figures that there is still room for adding the identification data carriers 1 on the carrier mounting unit 23. On the other hand, however, the number of identification data carriers 1 may be only one as shown in fig. 7. This embodiment is not limited to this.
Referring to fig. 3 to 5, since the two identification data carriers 1 disposed on the outer wall 211 of the main housing 21 have the same structure in the present embodiment, for convenience of description, only one identification data carrier 1 is taken as an example.
As mentioned above, the relative positions and orientations of the main housing 21 and the cover 22 are defined, the side of the body 11 of the identification data carrier 1 facing the main housing 21 is defined as the front side, and the side facing away from the main housing 21 is defined as the rear side.
The combining unit 12 includes a plurality of hooking portions 122, each hooking portion 122 has a side standing section 122a extending from the left side end or the right side end of the body 11 to the front side, and a tail section 122b extending from the side standing section 122a and opposite to and spaced apart from the body 11. The hooking portions 122 together define a sliding slot 123. The slide rail 231 is engaged with and engaged with the slide groove 123, so that the identification data carrier 1 can be operated to slide along the first direction D1.
Since the carrier mounting unit 23 in this embodiment is disposed in the recess 212 at the rear side of the main housing 21, in order to allow the identification carrier 1 to smoothly slide along the first direction D1, a gap is respectively formed between the two side flanges 232 of the slide rail 231 of the carrier mounting unit 23 and the main housing 21 to respectively form a sliding space 233 at two sides of the slide rail 231 for the hook portion 122 to slide.
Regardless of whether the identification data carried on the identification data carrier 1 is a radio frequency identification tag or a one-dimensional or two-dimensional bar code, since the reading device for reading the identification data on the machine or the automation equipment generally has a fixed installation position, when the identification data carrier 1 slides to a position corresponding to the reading device along the first direction D1, it needs to be fixed at the position.
Although the position of the identification data carrier 1 can be easily fixed by the tight fit between the slide rail 231 and the slide groove 123, it is preferable that the identification data carrier 1 includes at least one first positioning portion 121, and the main housing 21 includes a plurality of second positioning portions 234 arranged along the first direction D1 for positioning the first positioning portion 121.
By such a design, the identification data carrier 1 can be operated and firmly installed at different positions on the outer wall surface 211 of the main housing 21 in the first direction D1 without worrying that the installed identification data carrier 1 will be separated from its proper installation position due to various unexpected factors.
The identification data carrier 1 in this embodiment includes two first positioning portions 121 respectively located at the left and right sides of the main body 11. The main housing 21 is provided with a plurality of second positioning portions 234 respectively arranged along the first direction D1 on the two side flanges 232 of the slide rail 231.
Specifically, the two first positioning portions 121 respectively have at least one elastic arm segment 121a and a rib 121b, and each of the second positioning portions 234 is a slot.
The at least one elastic arm segment 121a of each first positioning portion 121 extends from one side standing segment 122a and inclines toward the center of the body 11, and the rib 121b protrudes from the end of the elastic arm segment 121a toward the center of the body 11. Each elastic arm segment 121a can elastically displace to make each convex rib 121b be clamped on one of the second positioning portions 234 on the corresponding side flange 232, so as to position the identification data carrier 1 at the position corresponding to the second positioning portion 234.
Although each first positioning portion 121 only needs to have one elastic arm segment 121a to achieve the above-mentioned effect, each first positioning portion 121 in the present embodiment has two elastic arm segments 121 a. The two spring arm segments 121a are connected at the ends, and the rib 121b protrudes from the connection of the ends of the two spring arm segments 121 a. With such a configuration, the stress of the first positioning portions 121 can be equally shared by the two elastic arm segments 121a, thereby increasing the lifetime of the parts and achieving smooth operation.
In the present embodiment, each of the combining units 12 has four hooking portions 122, two of which are respectively located at the left and right sides of the main body 11. The two hooking portions 122 of the same group are located outside the first positioning portion 121 in the first direction D1. That is, each first positioning portion 121 is connected between two hook portions 122 of the same group.
In addition, in the embodiment, the side flanges 232 at both sides of the sliding rail 231 are both provided with a plurality of second positioning portions 234, and both sides of the combining unit 12 are both provided with the first positioning portions 121, so as to achieve better operation and positioning effects. However, generally speaking, the above-mentioned effect of selectively positioning the identification data carrier 1 can be achieved by providing one of the side flanges 232 with the second positioning portion 234 and providing one of the first positioning portions 121 on the side corresponding to the combining unit 12.
In other words, in a modified embodiment, the coupling unit 12 may have only one first positioning portion 121 on one side thereof, as long as a plurality of second positioning portions 234 are disposed on one side flange 232 of the slide rail 231.
When the identification data carrier 1 and the housing 2 are assembled, the hook portion 122 of the coupling unit 12 of the identification data carrier 1 is first inserted into the sliding spaces 233 on both sides of the sliding rail 231 from the top of the carrier mounting unit 23 to the bottom, and the sliding rail 231 is then inserted into the sliding groove 123 of the identification data carrier 1.
Then, the identification data carrier 1 can slide along the slide rail 231 according to the requirement of use. In the moving process, the protruding ribs 121b of the pair of first positioning portions 121 of the combining unit 12 are pressed by the slide rail 231 and elastically displaced to the left and right outer sides of the body 11 through the two elastic arm sections 121a, and when encountering the second positioning portion (engaging groove) 234, the protruding ribs can be elastically restorably engaged with the second positioning portion (engaging groove) 234.
When the protruding rib 121b first encounters the second positioning portion (engaging groove) 234, which is clamped in parallel, and does not correspond to the position of the identification data carrier 1, the identification data carrier 1 must be moved to the correct second positioning portion (engaging groove) 234 along the sliding rail 231. Regardless of the upward or downward movement of the identification data carrier 1, the elastic arm segment 121a of each first positioning portion 121 is pressed to guide the protruding rib 121b to move outward to disengage from the second positioning portion (engaging groove) 234.
Through the above-mentioned structural design and mechanism, the operator can move the identification carrier 1 relative to the carrier mounting unit 23 in the first direction D1 and can selectively position the identification carrier 1 at a position corresponding to one of the second positioning portions 234 and having a suitable height, so as to correspond to various installation positions of the identification reader.
The rear side of the body 11 is further provided with a carrying frame 13. The carrying frame 13 and the main body 11 together form a sheet slot 131 for inserting a process recording card of paper or a card 3. The card 3 can be a carrier of identification data for setting at least one of identification data such as one-dimensional bar code, two-dimensional bar code, magnetic stripe, radio frequency identification Tag (RFID Tag). Alternatively, the card 3 itself may be a radio frequency identification tag.
The body 11 of the identification data carrier 1 may also be provided with a mounting mechanism for a radio frequency identification tag. In the present embodiment, a mounting groove 14 is provided at the front side of the body 11 for mounting a cylindrical rfid tag 4, as an example of the mounting mechanism.
In addition, an insertion space 16 can be formed between the main body 11 of the identification data carrier 1 and the slide rail 231 on the main housing 21 for inserting a data card (not shown), such as a paper-made data card (RunCard) or the aforementioned card (not shown) for manual reading and writing.
In other words, the identification data carrier 1 can be provided with machine-readable identification data and can also be inserted with a data card for manual reading and writing. The machine-readable identification data or the manual read-write data card can be inserted into the insertion space 16 between the front side of the main body 11 of the identification data carrier 1 and the main housing 21, or can be inserted into the sheet insertion slot 131 at the rear side of the identification data carrier 1.
Referring to fig. 8 and 9, a second embodiment of the substrate carrier container 100 of the present invention is shown. The difference between this embodiment and the first embodiment is that the structure of the identification data carrier 1 is simplified.
In this embodiment, the identification data carrier 1 is not provided with a mounting mechanism for the RFID tag and the carrying frame 13. The main body 11 has a display surface 111 at the rear side for directly setting identification data, for example, a one-dimensional bar code or a two-dimensional bar code can be directly engraved or printed on the display surface 111.
Similarly, in the present embodiment, an insertion space 16 (refer to fig. 3) is formed between the main body 11 of the identification data carrier 1 and the main housing 21 for installing a data card or a card. Meanwhile, the various identification data carriers 1 shown in the first and second embodiments can also be used in combination, which is not limited in the embodiments.
Referring to fig. 10 and 11, a third embodiment of the substrate carrier container 100 according to the present invention is a variation of the combination unit 12 of the identification data carrier 1 and the carrier mounting unit 23 of the housing 2 according to the first embodiment.
As mentioned above, one of the combining unit 12 and the carrier mounting unit 23 further includes a sliding slot and the other further includes a sliding rail. In the first embodiment, the slide groove is provided in the coupling unit 12, and the slide rail is provided in the carrier mounting unit 23. In the third embodiment, the slide rail is reversely provided to the coupling unit 12, and the slide groove is provided to the carriage mounting unit 23.
As shown in fig. 10 and 11, the combining unit 12 includes a slide rail 124, and the carriage mounting unit 23 includes a slide groove 236, and the slide groove 236 is defined by a plurality of hook portions 235. The sliding slot 236 and the sliding rail 124 cooperate to allow the identification data carrier 1 to be slidably moved along the first direction D1.
In addition, the slide rail 124 of the combination unit 12 is provided with a plurality of first positioning portions 121, and each hook 235 is elastically displaceable and provided at the end with a second positioning portion 234 cooperating with the first positioning portion 121 to position the identification data carrier 1. In the third embodiment, each first positioning portion 121 is a ball-and-socket slot, and each second positioning portion 234 is a hemispherical bump.
With such a structure, the operator can move the identification carrier 1 relative to the carrier mounting unit 23 in the first direction D1, and can select a position with an appropriate height for positioning the identification carrier 1 to correspond to different installation positions of the identification reader.
In summary, the carrier mounting unit 23 provides a space for expanding and installing a plurality of identification data carriers 1, and has flexibility for selectively installing different types of identification data; and the position of the identification data carrier 1 can be adjusted on the carrier mounting unit 23 to meet different requirements.
The above description is only an example of the present invention, and the scope of the present invention should not be limited thereby, and all the simple equivalent changes and modifications made according to the claims and the description of the present invention are still within the scope of the present invention.

Claims (15)

1. A substrate carrier container, characterized by: comprises the following steps:
at least one identification data carrier for setting identification data, the identification data carrier having a body and a combination unit; and
a housing including a main housing, a cover detachably combined with the main housing to define an accommodating space, and a carrier mounting unit disposed on the outer wall and correspondingly combined with the combining unit,
the combination unit and the carrier mounting unit are variably combined at relative positions in the first direction, so that the identification carrier can be operatively arranged on the outer wall surface of the main housing at different positions in the first direction.
2. A substrate carrier according to claim 1, wherein: one of the combination unit and the carrier mounting unit further comprises a sliding slot and the other one further comprises a sliding rail, wherein the sliding rail is clamped in the sliding slot in a matching manner so that the identification carrier can slide along the first direction in an operable manner.
3. A substrate carrier container according to claim 2, wherein: the sliding groove is defined by a plurality of buckling parts together.
4. A substrate carrier according to claim 1, wherein: the identification data carrier comprises at least one first positioning part, the main shell comprises a plurality of second positioning parts for positioning the first positioning parts, and the second positioning parts are arranged along the first direction so that the identification data carrier can be arranged on the outer wall surface of the main shell in different positions in the first direction in an operable manner.
5. A substrate carrier according to claim 1, wherein: the cover is located on the front side of the main shell, the first direction is a vertical direction, a concave part is formed on the outer wall surface of the rear side of the main shell, the concave part extends from the top side to the bottom side of the main shell in the first direction, and the carrier mounting unit is arranged at the concave part.
6. A substrate carrier according to claim 5, wherein: the combination unit further comprises a plurality of hooking parts for defining a sliding slot together, the carrier mounting unit further comprises a sliding rail formed by a rectangular boss, and the sliding rail is matched with the sliding slot so that the identification carrier can slide along the first direction in an operable manner.
7. A substrate carrier according to claim 6, wherein: the combination unit of the identification data carrier comprises at least one first positioning part, the carrier mounting unit of the shell comprises a plurality of second positioning parts for positioning the first positioning parts, and the second positioning parts are arranged along the first direction so that the identification data carrier can be arranged on the outer wall surface of the main shell body in different positions in the first direction in an operable manner.
8. A substrate carrier container according to claim 7, wherein: the slide rail is provided with two side flanges extending in the first direction, at least one of the side flanges is provided with the second positioning part, each second positioning part is a clamping groove, and the first positioning part of the combination unit can be clamped in one of the second positioning parts in an elastic displacement manner.
9. A substrate carrier container according to claim 8, wherein: the body of the identification data carrier seat is defined to be a front side facing the main shell and a rear side facing away from the main shell, the hooking parts are convexly arranged on the front side of the body, each hooking part is provided with a side vertical section extending from the left side end or the right side end of the body to the front side and a tail section extending from the side vertical section and opposite to the body and spaced from the body, and gaps are respectively arranged between the flanges at the two sides of the slide rail and the main shell to form sliding spaces for the hooking parts to slide.
10. A substrate carrier container according to claim 9, wherein: the first positioning part of the combination unit is provided with at least one elastic arm section and a convex rib, each elastic arm section extends from one side standing section and deflects towards the center of the body, and the convex rib protrudes from the tail end of the elastic arm section towards the center of the body so as to be matched and clamped in one of the second positioning parts.
11. A substrate carrier container according to claim 9, wherein: the body of the identification data carrier has a display surface located at the rear side for installing at least one identification data.
12. A substrate carrier container according to claim 9, wherein: the identification data carrier also has a carrier frame arranged at the rear side of the body, and the carrier frame and the body together form a sheet slot.
13. A substrate carrier according to claim 1, wherein: an insertion space for inserting a data card is formed between the main body of the identification data carrier and the main housing.
14. A substrate carrier according to claim 1, wherein: the body of the identification data carrier is also provided with a mounting mechanism of a radio frequency identification tag.
15. A substrate carrier according to claim 1, wherein: the length of the carrier mounting unit in the first direction is at least twice as long as the length of the identification data carrier in the first direction, so as to provide a space for mounting a plurality of identification data carriers.
CN201921525576.4U 2019-09-12 2019-09-12 Substrate carrier container Active CN210654281U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921525576.4U CN210654281U (en) 2019-09-12 2019-09-12 Substrate carrier container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921525576.4U CN210654281U (en) 2019-09-12 2019-09-12 Substrate carrier container

Publications (1)

Publication Number Publication Date
CN210654281U true CN210654281U (en) 2020-06-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921525576.4U Active CN210654281U (en) 2019-09-12 2019-09-12 Substrate carrier container

Country Status (1)

Country Link
CN (1) CN210654281U (en)

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