CN210609830U - Microwave plasma generator - Google Patents
Microwave plasma generator Download PDFInfo
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- CN210609830U CN210609830U CN201921813363.1U CN201921813363U CN210609830U CN 210609830 U CN210609830 U CN 210609830U CN 201921813363 U CN201921813363 U CN 201921813363U CN 210609830 U CN210609830 U CN 210609830U
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Abstract
The utility model relates to a microwave plasma generator, the load simulator comprises a case, the output of gas control valve links to each other with the input of flow valve, the output of flow valve links to each other with the input of high-pressure valve, the output of high-pressure valve links to each other with the input of microwave plasma shower nozzle mechanism, the machine incasement still is provided with microwave generator, microwave generator's output links to each other with the input of circulator, the circulator passes through load device and microwave plasma shower nozzle mechanism sets up, the machine incasement is provided with PLC the control unit and signal control panel unit, the signal end of flow valve links to each other with the input of signal control panel unit, the feedback end of signal control panel unit links to each other with PLC the input of control unit, PLC the control unit's control end passes through the signal control panel unit and links to each other with the controlled end of high-pressure. The utility model discloses can reach the cleanliness factor to the product within 10, low-power simultaneously, low live voltage, the consumptive material accessory is close to zero consumption.
Description
Technical Field
The utility model relates to a microwave plasma generator.
Background
In the semiconductor industry, TFT liquid crystal and OLED flexible display manufacturing industry. As the demand of consumers on products is higher and higher, the quality of the products is required to be controlled more strictly by factories.
In the liquid crystal industry, customers have a requirement on the cleanliness of a water drop angle of an attachment surface of a liquid crystal display screen within 15 degrees, and the current common method is that a microwave plasma gun head device is used for carrying out microwave cleaning on the attachment position of a chip of a liquid crystal glass panel and then transmitting the chip to a lower-stage process for attachment. But the high power, high live voltage and high consumption of consumable parts. Change different gas sources (air, argon gas, nitrogen gas), need to change interior parts, reduced work efficiency.
In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a new microwave plasma generator with a new structure, so that the microwave plasma generator has a higher industrial utility value.
SUMMERY OF THE UTILITY MODEL
To solve the above technical problem, an object of the present invention is to provide a microwave plasma generator.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a microwave plasma generator comprises a case, wherein a gas regulating valve, a flow valve and a high-pressure valve are arranged in the case and positioned on the side edge of the case, the input end of the gas regulating valve is connected with the output end of an external gas tank, the output end of the gas regulating valve is connected with the input end of the flow valve, the output end of the flow valve is connected with the input end of the high-pressure valve, the output end of the high-pressure valve is connected with the input end of a microwave plasma spray head mechanism, a microwave generator is further arranged in the case, the output end of the microwave generator is connected with the input end of a circulator, the circulator is arranged with the microwave plasma spray head mechanism through a load device, a PLC control unit and a signal control panel unit are arranged in the case, the signal end of the flow valve is connected with the input end of the signal control panel unit, and the feedback end, and the control end of the PLC control unit is connected with the controlled end of the high-pressure valve through a signal control panel unit, and the control end of the PLC control unit is connected with the controlled end of the microwave generator.
Preferably, in the microwave plasma generator, a fan is arranged in the chassis and is fixed to the side of the chassis.
Preferably, the microwave plasma generator, microwave plasma shower nozzle mechanism include the casing, the upper end of casing is provided with air inlet joint, air inlet joint is linked together with nozzle assembly through communicating pipe, still be provided with cable joint on the casing, cable joint links to each other with the one end of microwave cable line, and the other end links to each other with nozzle assembly, be provided with ignition in the casing, ignition's controlled end passes through transmission cable and links to each other with PLC control unit's control end, ignition's ignition end links to each other with nozzle assembly.
Preferably, the nozzle assembly of the microwave plasma generator comprises a nozzle, wherein an electrode is arranged in the nozzle, is arranged at the central axis and is in contact with a discharge needle on the ignition device.
Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:
the utility model discloses a microwave plasma generator can reach within 10 after to the product is clean, low-power simultaneously, low electrified voltage, and the consumptive material accessory is close to zero consumption. The utility model discloses can also reach the gaseous requirement of quick replacement according to the demand of difference to realize efficient work efficiency.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is a side view of the present invention;
FIG. 3 is a schematic structural diagram of the microwave plasma showerhead mechanism of the present invention;
fig. 4 is a schematic structural view of the nozzle assembly of the present invention.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
As shown in figures 1 and 2 of the drawings,
a microwave plasma generator comprises a case 1, wherein a gas regulating valve 2, a flow valve 3 and a high-pressure valve 4 are arranged in the case 1 and are positioned on the side edge of the case 1, the input end of the gas regulating valve 2 is connected with the output end of an external gas tank, the output end of the gas regulating valve 2 is connected with the input end of the flow valve 3, the output end of the flow valve 3 is connected with the input end of the high-pressure valve 4, the output end of the high-pressure valve 4 is connected with the input end of a microwave plasma sprayer mechanism 5, a microwave generator 10 is also arranged in the case 1, the output end of the microwave generator is connected with the input end of a circulator 6, the circulator 6 is arranged with the microwave plasma sprayer mechanism 5 through a load device 11, a PLC control unit 7 and a signal control panel unit 8 are arranged in the case 1, and the signal end of the flow valve 3 is connected with the, the feedback end of the signal control panel unit 8 is connected with the input end of the PLC control unit 7, the control end of the PLC control unit 7 is connected with the controlled end of the high-pressure valve 4 through the signal control panel unit 8, and the control end of the PLC control unit 7 is connected with the controlled end of the microwave generator.
The utility model discloses in be provided with fan 9 in the quick-witted case 1, the side that is located quick-witted case 1 is fixed.
As shown in fig. 3 and 4, in the utility model discloses microwave plasma shower nozzle mechanism 5 includes casing 51, the upper end of casing 51 is provided with air inlet joint 52, air inlet joint 52 is linked together through communicating pipe and nozzle assembly 53, still be provided with cable joint 56 on the casing 51, cable joint 56 links to each other with microwave cable line 54's one end, and the other end links to each other with nozzle assembly 53, be provided with ignition 55 in the casing 51, ignition 55's controlled end passes through transmission cable and links to each other with PLC the control end of control unit 7, ignition 55's the ignition end links to each other with nozzle assembly 53, wherein, nozzle assembly 53 includes nozzle 531, be provided with electrode 532 in the nozzle 531, be located the setting of axis department, touch the setting with the discharge needle on the ignition 55.
The nozzle unit 53 is provided with an insulating sealing cap through which the discharge needle is inserted to contact the electrode 532.
The signal control board unit, the PLC control unit and the microwave circulator are all known to those skilled in the art, and will not be described in detail herein.
The working principle of the utility model is as follows:
when the device works, the PLC control unit controls the power output by the microwave generator, the microwave output by the microwave generator is transmitted to the electrode of the spray head assembly through the circulator, the load device and the microwave cable, the PLC control unit controls signals to trigger the ignition device, simultaneously, the generated positive ions and negative ions carry out instantaneous energy release of positive and negative charge neutralization in the air, simultaneously, the PLC control unit controls the gas regulating valve, the flow valve and the high pressure valve to enable gas to enter the nozzle assembly, and after the three are started simultaneously, the decomposed gas source is sprayed out from the nozzle.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (4)
1. A microwave plasma generator characterized by: comprises a case (1), a gas regulating valve (2), a flow valve (3) and a high-pressure valve (4) are arranged in the case (1), the three are arranged at the side of the case (1), the input end of the gas regulating valve (2) is connected with the output end of an external gas tank, the output end of the gas regulating valve (2) is connected with the input end of the flow valve (3), the output end of the flow valve (3) is connected with the input end of the high-pressure valve (4), the output end of the high-pressure valve (4) is connected with the input end of a microwave plasma spray head mechanism (5), a microwave generator (10) is further arranged in the case (1), the output end of the microwave generator is connected with the input end of a circulator (6), the circulator (6) is arranged with the microwave plasma spray head mechanism (5) through a load device (11), a PLC control unit (7) and a signal control panel unit (8) are arranged in the case (1, the signal end of flow valve (3) links to each other with the input of signal control panel unit (8), the feedback end of signal control panel unit (8) links to each other with the input of PLC the control unit (7), the control end of PLC the control unit (7) passes through the controlled end of signal control panel unit (8) and high-pressure valve (4) and links to each other, the control end of PLC the control unit (7) links to each other with microwave generator's controlled end.
2. The microwave plasma generator according to claim 1, wherein: a fan (9) is arranged in the case (1), and the side edge of the case (1) is fixed.
3. The microwave plasma generator according to claim 1, wherein: microwave plasma shower nozzle mechanism (5) includes casing (51), the upper end of casing (51) is provided with air inlet joint (52), air inlet joint (52) are linked together through communicating pipe and nozzle assembly (53), still be provided with cable joint (56) on casing (51), cable joint (56) link to each other with the one end of microwave cable line (54), and the other end links to each other with nozzle assembly (53), be provided with ignition (55) in casing (51), the controlled end of ignition (55) passes through the transmission cable and links to each other with the control end of PLC the control unit (7), the ignition end of ignition (55) links to each other with nozzle assembly (53).
4. A microwave plasma generator according to claim 3, wherein: the nozzle assembly (53) comprises a nozzle (531), an electrode (532) is arranged in the nozzle (531), is positioned at the middle shaft and is in contact with a discharge needle on the ignition device (55).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921813363.1U CN210609830U (en) | 2019-10-25 | 2019-10-25 | Microwave plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921813363.1U CN210609830U (en) | 2019-10-25 | 2019-10-25 | Microwave plasma generator |
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| Publication Number | Publication Date |
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| CN210609830U true CN210609830U (en) | 2020-05-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921813363.1U Active CN210609830U (en) | 2019-10-25 | 2019-10-25 | Microwave plasma generator |
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| CN (1) | CN210609830U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113727508A (en) * | 2020-05-26 | 2021-11-30 | 上海大学 | Novel vacuum microwave plasma ion source |
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2019
- 2019-10-25 CN CN201921813363.1U patent/CN210609830U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113727508A (en) * | 2020-05-26 | 2021-11-30 | 上海大学 | Novel vacuum microwave plasma ion source |
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