CN210605454U - A Surface Force Control Contour Following Device Based on XYZ Axis Slider - Google Patents

A Surface Force Control Contour Following Device Based on XYZ Axis Slider Download PDF

Info

Publication number
CN210605454U
CN210605454U CN201921610315.2U CN201921610315U CN210605454U CN 210605454 U CN210605454 U CN 210605454U CN 201921610315 U CN201921610315 U CN 201921610315U CN 210605454 U CN210605454 U CN 210605454U
Authority
CN
China
Prior art keywords
sliding table
ball screw
servo
force
following device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201921610315.2U
Other languages
Chinese (zh)
Inventor
邱志成
唐华杰
张宪民
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
South China University of Technology SCUT
Original Assignee
South China University of Technology SCUT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by South China University of Technology SCUT filed Critical South China University of Technology SCUT
Priority to CN201921610315.2U priority Critical patent/CN210605454U/en
Application granted granted Critical
Publication of CN210605454U publication Critical patent/CN210605454U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

本实用新型公开了一种基于XYZ轴滑台的曲面力控制轮廓跟随装置,包括跟随装置本体部分、视觉检测部分及控制部分;所述跟随装置本体部分包括三个相同的伺服滚珠丝杠直线滑台构成XYZ轴三向滑台,本实用新型通过六维力/力矩传感器以及工业相机组成检测反馈部分,既要末端在不规则曲面执行预定的运动轨迹,又要控制末端探头与曲面的接触力在可控范围,而且探头的姿态时刻保持与曲面的切面垂直。该装置能够高速精确进给移动,而且运动自由度有沿xyz轴以及绕z轴旋转,满足大多数情况下的曲面跟随移动,并能精确控制与曲面的接触力。

Figure 201921610315

The utility model discloses a curved surface force control contour following device based on an XYZ axis sliding table, which comprises a following device body part, a visual detection part and a control part; the following device body part comprises three identical servo ball screws linearly sliding The stage constitutes an XYZ axis three-way sliding stage. The utility model uses a six-dimensional force/torque sensor and an industrial camera to form a detection and feedback part, which not only requires the end to execute a predetermined motion trajectory on the irregular curved surface, but also controls the contact force between the end probe and the curved surface. In the controllable range, and the attitude of the probe is always kept perpendicular to the tangent plane of the curved surface. The device can feed and move at high speed and accurately, and the freedom of movement includes rotation along the xyz axis and around the z axis, which satisfies the follow-up movement of the curved surface in most cases, and can precisely control the contact force with the curved surface.

Figure 201921610315

Description

Curved surface force control contour following device based on XYZ-axis sliding table
Technical Field
The utility model relates to a flexible control field, concretely relates to curved surface force control contour following device based on XYZ axle slip table.
Background
The following movement of the irregular curved surface is often applied in industrial production, for example, the polishing and grinding of the surface of a vehicle body, the grinding head regularly moves and simultaneously grinds along with the surface of the vehicle body, or the shape of the irregular curved surface is measured, a probe moves along with the curved surface, and the like. The following moving device is required to move on a preset track of the curved surface, and the contact force between the following moving device and the curved surface is required to be kept constant, so that the deformation and even damage of the measured curved surface are avoided. In practical application, the following moving device adopts position control, and extra force or moment is required to be introduced as feedback quantity to control output quantity, namely mixed force/position control, and belongs to one of compliance control. At the end of the following movement of the device, accurate force/torque of the following movement in real time is required, so that a multi-dimensional force/torque sensor is adopted.
The electric sliding table usually adopts a ball screw as a transmission part, because the ball screw is in contact with the point of a ball, the rolling friction force is small, the whole transmission efficiency is high, the precision is high, the axial rigidity is high, the high-speed feeding and the micro-feeding can be realized, and the feeding motion of the device can be accurately controlled by matching with a high-precision servo motor. Three electric sliding tables form a mobile platform with three axes of an xyz shaft through splicing of reasonable components, so that the omnibearing mobility is ensured.
SUMMERY OF THE UTILITY MODEL
In order to overcome the shortcoming and the deficiency that prior art exists, the utility model provides a curved surface force control profile following device based on XYZ axle slip table.
The utility model discloses the application gentle and agreeable control has guaranteed that the mutual contact of device and curved surface is accurate controllable, adopts the servo electronic slip table of high accuracy to wind the rotatory servo motor of z axle in addition simultaneously, assists with visual system in the device, can real-time supervision follow the contact condition of device and curved surface, guarantees probe and curved surface tangent plane vertical contact.
The utility model adopts the following technical scheme:
a curved surface force control contour following device based on an XYZ-axis sliding table comprises a following device body part, a visual detection part and a control part;
the following device comprises a following device body and is characterized in that the following device body comprises an experiment platform, the experiment platform is provided with three identical servo ball screw linear sliding tables to form an XYZ-axis three-way sliding table, sliding blocks of the three servo ball screw linear sliding tables are all connected with a driving motor, the servo motor is fixed on the sliding block of the ball screw sliding table for realizing Z-axis direction movement, an axis parallel key of the servo motor is connected with a force sensor connecting rod, the force sensor connecting rod is connected with one end of a six-dimensional force/torque sensor, the other end of the six-dimensional force/torque sensor is connected with a probe, and a curved plate is arranged;
the visual inspection part comprises an industrial camera which is fixed above the curved plate through a camera fixing frame, observes the contact condition of the probe and the curved plate and transmits the contact condition to an industrial computer;
the control part comprises a servo motor driver, a charge amplifier, a motion control card and an industrial computer, wherein the industrial computer is connected with the motion control card, the servo motor driver is connected with the motion control card, the driving motor and the servo motor are connected with the servo motor driver, the six-dimensional force/torque sensor detects the contact force when the probe is in contact with the curved plate, and the contact force is input into the motion control card through the charge amplifier.
Experiment platform sets up three the same servo ball screw sharp slip table and constitutes XYZ axle three-way slip table, specifically is: three same servo ball screw linear sliding tables are respectively a first servo ball screw linear sliding table, a second servo ball screw linear sliding table and a third servo ball screw linear sliding table, the first servo ball screw linear sliding table is fixed on the experiment platform and is used as an X-axis moving sliding table, the second servo ball screw linear sliding table and the first servo ball screw linear sliding table are vertically arranged to be a Y-axis moving sliding table, a slide block of the Y-axis moving sliding table is connected with the third servo ball screw sliding table through a Z-axis connecting piece, and the third servo ball screw sliding table is used as a Z-axis moving sliding table.
The utility model discloses the guide rail side of well three same servo ball straight line slip table sets up photoelectricity limit switch, and the slider side sets up the limit switch separation blade.
The camera fixing frame is composed of three aluminum profiles.
The Z-axis connecting piece is T-shaped.
The working process of the embodiment:
the contact force of the probe and the curved plate when in contact is detected by using a six-dimensional force/torque sensor, amplified by a charge amplifier, input to a motion control card and further transmitted to an industrial computer; simultaneously, the industrial camera records the posture of the probe when the probe is contacted with the curved plate and inputs the image into the industrial computer in real time;
the industrial computer runs a corresponding compliance control algorithm to obtain a control output quantity, the control output quantity is output through a D/A module of the motion control card and is transmitted to a servo motor driver, and a driving motor of each servo ball screw linear sliding table and the servo motor are driven to correspondingly rotate in response, so that a sliding block connected with the ball screw moves; the rotation of the servo motor drives the sensor connecting rod to rotate; the slide block of each servo ball screw linear sliding table moves and the rotation of the servo motor drives the tail end probe to move along the curved plate, the slide block and the servo motor are contacted along the normal line of the curved surface constantly, and the contact force is constant;
if the sliding block of the servo ball screw linear sliding table moves beyond the stroke, the limit switch blocking piece connected to the side face of the sliding block can trigger the photoelectric limit switch fixed to the side face of the sliding rail, signals of the photoelectric limit switch can be transmitted to the charge amplifier and transmitted to the industrial computer through the motion control card, and the control quantity is timely output to the servo motor driver through computer processing, so that the corresponding servo ball screw linear sliding table locking sliding block is controlled to continuously move and return to a safe position.
The utility model has the advantages that:
(1) the utility model adopts a high-precision servo ball screw linear sliding table with 2 μm resolution ratio and high rigidity to form an xyz-axis three-way moving sliding table, which can realize the feeding motion of the following device with high efficiency and high precision and can feed at high speed or slightly;
(2) the utility model discloses assisting vision system as a part that detects, real-time recording contact gesture, through the image processing of computer, guarantee that probe and curved surface contact keep the gesture of vertical curved surface at all times, the prospect of using is bigger, for example the polishing is polished and is required to polish the head and need keep the vertical tangent plane contact with irregular curved surface, and such contact force is more controllable invariable;
(3) the utility model discloses a six-dimensional power/torque sensor not only small, the quality is light, and measurement accuracy is high, response frequency is high moreover, can real-time measuring probe and the all direction contact force of curved surface to more be favorable to gentle and agreeable control, when the control moves the orbit, keep specific direction of contact's contact force at the requirement within range.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
FIG. 2 is a schematic structural view of a main body of the following device of the present invention;
fig. 3 is a schematic structural diagram of the servo ball screw sliding table of the present invention;
FIG. 4 is a front view of FIG. 1;
FIG. 5 is a right side view of FIG. 1;
fig. 6 is a top view of fig. 1.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, but the present invention is not limited thereto.
Examples
As shown in fig. 1 to 6, a curved surface force control contour following device based on an XYZ-axis sliding table includes a following device body portion, a visual inspection portion, and a control portion.
The following device body portion includes:
the stabilizer blade that can height-adjusting is all installed at four angles of experiment platform 1, wholly is set up by 30x 30's aluminium alloy and angle steel and forms, and it has a plurality of screw thread through-holes to reserve on the mounting surface for whole experimental apparatus is fixed in the installation.
Set up three the same servo ball linear sliding table 2 on experiment platform 1, specifically include first servo ball linear sliding table, second servo ball linear sliding table and third servo ball linear sliding table, three slip table constitutes XYZ axle three-way slip table, first servo ball linear sliding table passes through 8 fix with screws on experiment platform, the guide rail of its slider direct screwed connection second servo ball linear sliding table, and the two presents the vertically cross and constitutes xy axle motion platform, and the Z axle connecting piece of T font is installed to the slider of second servo ball linear sliding table and is connected, and Z axle connecting piece passes through 6 screw connections with the vertical third servo ball sliding table of putting, constitutes XYZ axle three-way removal slip table.
The servo motor 6 is fixed on a servo motor fixing seat 7, and the servo motor seat is fixed on a sliding block of a third servo ball screw sliding table through 8 screws, so that the servo motor can move up and down along the z axis along with the sliding block; a photoelectric limit switch 5 is arranged on the side surface of the guide rail of each servo ball screw linear sliding table, a limit switch blocking piece 4 is arranged on the side surface of the sliding block, the sliding block is about to exceed the stroke, the blocking piece can trigger the photoelectric limit switch 5, and the servo ball screw linear sliding table is stopped to continue to operate immediately; a shaft flat key of the servo motor 6 is connected with a force sensor connecting rod 8 by a fastening screw, the force sensor connecting rod is connected with a six-dimensional force/torque sensor 9 by a flange plate, and similarly, a probe 10 is connected with the input end of the six-dimensional force/torque sensor by the flange plate; the experiment platform is also provided with a curved plate for simulating the movement along with the curved surface during actual work.
The visual inspection section includes:
a camera mount 12 and an industrial camera 13; the camera fixing frame is formed by three 20x20 aluminum profiles into an n shape, connected by angle steel and fixed above the curved plate 11; and the industrial camera 13 is fixed on the camera fixing frame and positioned right above the curved plate and used for observing the contact condition of the probe and the curved plate in real time, and transmitting an image to the industrial computer 17 to be processed and analyzed through a specific algorithm, so that the probe (10) is fed back and controlled to be vertically contacted with the curved plate at any time.
The control section includes:
connecting a driving motor and a servo motor of the servo ball screw linear sliding table to a servo motor driver 16, connecting the servo motor driver 16 to a motion control card 15, and connecting the motion control card 15 and an industrial computer 17; the drive motor of the servo ball screw linear sliding table and the magnetoelectric encoder of the servo motor can feed back the information of the rotation angular displacement, the angular speed and the like of the motor to the servo motor driver, and then the information is transmitted to the motion control card and further transmitted to the industrial computer through the motion control card; the six-dimensional force/torque sensor detects contact force and torque signals, the contact force and the torque signals are transmitted to the computer through the charge amplifier, then the industrial computer runs a corresponding algorithm according to feedback information and sends corresponding control quantity, the control quantity is transmitted to the servo motor driver through the motion control card, the driving of the driving motor is used for controlling the movement of the servo ball screw linear sliding table sliding block and the posture of the force sensor connecting rod 8, and therefore the posture of the tail end probe 10 contacting with the curved surface is controlled;
the motion direction of the connecting rod of the force sensor has an xyz shaft three-way direction and rotates around a z shaft, and then the connecting rod of the force sensor is connected with the probe through the six-dimensional force/torque sensor, so that the probe can realize the following movement with an irregular curved surface, and the constant controllable contact force with the curved surface is ensured through the measured contact force of the force/torque sensor.
The utility model discloses a working process:
the method comprises the following steps that firstly, a six-dimensional force/torque sensor is used for detecting the contact force of a probe when the probe is in contact with a curved plate, and meanwhile, an industrial camera records a posture real-time image of the probe when the probe is in contact with the curved plate;
secondly, amplifying the contact force and the moment signal of the six-dimensional force/moment sensor acquired in the first step through a charge amplifier 14, converting an analog signal into a digital signal through an A/D conversion module in the motion control card and inputting the digital signal into an industrial computer; meanwhile, the industrial camera inputs the attitude image of the probe when in contact with the curved plate into an industrial computer;
thirdly, according to the detection signals and the images obtained in the second step, the industrial computer runs a corresponding compliance control algorithm, the obtained control output is output through a D/A module of the motion control card and is output to a servo motor driver, the servo motor of each servo ball screw linear sliding table and the response corresponding rotation of the servo motor are driven, the servo motor of each servo ball screw linear sliding table rotates to drive the ball screw to rotate, and therefore the sliding block connected with the ball screw moves; the rotation of the servo motor drives the sensor connecting rod to rotate; the slide block of each servo ball screw linear sliding table moves and the rotation of the servo motor drives the tail end probe to move along the curved plate, the slide block and the servo motor are contacted along the normal line of the curved surface constantly, and the contact force is constant;
and fourthly, if the sliding block of the servo ball screw linear sliding table moves beyond the stroke, the limit switch separation blade connected to the side surface of the sliding block can trigger the photoelectric limit switch fixed to the side surface of the sliding rail, a signal of the photoelectric limit switch can be transmitted to the charge amplifier and then transmitted to the industrial computer through the motion control card, and the photoelectric limit switch is processed by the computer to output a control quantity to the servo motor driver in time, so that the corresponding servo ball screw linear sliding table is controlled to lock the sliding block to move continuously and return to a safe position.
The dashed lines in fig. 1 indicate the wiring relationships between the various devices, and the directional arrows indicate the direction of propagation of the detection and control signal streams.
In this embodiment, the experimental platform is assembled by two 30mmx30mm aluminum profiles with the lengths of 350mm and 340mm respectively, the table top is a stainless steel plate with the length of 400mm x 5mm, the stainless steel plate is connected with the profiles through M6 screws, and each connection position of the profiles is fixed by angle steel.
The servo ball screw linear sliding table adopts a high-precision linear ball sliding table of Ningmi company, the model is XYVLC 675-2-1-C-N, the stroke is 100mm, the resolution is 2 mu m, the material is SUS440C, the slide block is subjected to surface treatment of electrolytic nickel plating, the length of the slide block is 60mm, the width of a table top is 60mm, and the bearing load is 98N.
The photoelectric limit switch can adopt an EE-SX47/67 series groove-shaped micro photoelectric sensor of the Japan ohm dragon company, the slit width is 6mm, and the working voltage is 24V.
The servo motor is an AKMAKM series synchronous servo motor of Corrman company of America, the model is AKM11X _ AKCN1_00, the rated power is 140w, and the rated torque is 0.61 N.m.
The six-dimensional force/moment sensor is an FT series six-dimensional force sensor of the German Xiongke company, the model is FTN-Nano-25 SI-125-3, the weight is 63g, the geometric dimension phi is 25mmX21.6mm, the measuring range Fx and Fy are +/-125N, the measuring range Fz is +/-500N, the measuring ranges Mx, My and Mz are +/-3 Nm, the resolution ratio Fx and Fy are 0.025N, the resolution ratio Fz is 0.065N, and the resolution ratios Mx, My and Mz are 0.001 Nmm.
The industrial camera is an HX series industrial camera of the Bay union company of Switzerland, the model is HXG20, the geometric dimension is 52mm multiplied by 55mm, the weight is 232g, the sensor is CMV2000, the resolution is 2048 multiplied by 1088 pixels, and the maximum acquisition frame rate is 337 fps.
The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited by the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and all are included in the scope of the present invention.

Claims (5)

1. A curved surface force control contour following device based on an XYZ-axis sliding table is characterized by comprising a following device body part, a visual detection part and a control part;
the following device comprises a following device body and is characterized in that the following device body comprises an experiment platform, the experiment platform is provided with three identical servo ball screw linear sliding tables to form an XYZ-axis three-way sliding table, sliding blocks of the three servo ball screw linear sliding tables are all connected with a driving motor, the servo motor is fixed on the sliding block of the ball screw sliding table for realizing Z-axis direction movement, an axis parallel key of the servo motor is connected with a force sensor connecting rod, the force sensor connecting rod is connected with one end of a six-dimensional force/torque sensor, the other end of the six-dimensional force/torque sensor is connected with a probe, and a curved plate is arranged;
the visual inspection part comprises an industrial camera which is fixed above the curved plate through a camera fixing frame, observes the contact condition of the probe and the curved plate and transmits the contact condition to an industrial computer;
the control part comprises a servo motor driver, a charge amplifier, a motion control card and an industrial computer, wherein the industrial computer is connected with the motion control card, the servo motor driver is connected with the motion control card, the driving motor and the servo motor are connected with the servo motor driver, the six-dimensional force/torque sensor detects the contact force when the probe is in contact with the curved plate, and the contact force is input into the motion control card through the charge amplifier.
2. The curved surface force control contour following device according to claim 1, wherein the experiment platform is provided with three identical servo ball screw linear sliding tables to form an XYZ-axis three-way sliding table, specifically: three same servo ball screw linear sliding tables are respectively a first servo ball screw linear sliding table, a second servo ball screw linear sliding table and a third servo ball screw linear sliding table, the first servo ball screw linear sliding table is fixed on the experiment platform and is used as an X-axis moving sliding table, the second servo ball screw linear sliding table and the first servo ball screw linear sliding table are vertically arranged to be a Y-axis moving sliding table, a slide block of the Y-axis moving sliding table is connected with the third servo ball screw sliding table through a Z-axis connecting piece, and the third servo ball screw sliding table is used as a Z-axis moving sliding table.
3. The curved surface force control contour following device as claimed in claim 2, wherein the side of the guide rail of three identical servo ball screw linear sliding tables is provided with a photoelectric limit switch, and the side of the sliding block is provided with a limit switch catch.
4. The curved force control contour following device of claim 1, wherein said camera mount is constructed of three aluminum profiles.
5. The curved force controlled profile following device of claim 2, wherein the Z-axis connection is T-shaped.
CN201921610315.2U 2019-09-25 2019-09-25 A Surface Force Control Contour Following Device Based on XYZ Axis Slider Expired - Fee Related CN210605454U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921610315.2U CN210605454U (en) 2019-09-25 2019-09-25 A Surface Force Control Contour Following Device Based on XYZ Axis Slider

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921610315.2U CN210605454U (en) 2019-09-25 2019-09-25 A Surface Force Control Contour Following Device Based on XYZ Axis Slider

Publications (1)

Publication Number Publication Date
CN210605454U true CN210605454U (en) 2020-05-22

Family

ID=70695480

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921610315.2U Expired - Fee Related CN210605454U (en) 2019-09-25 2019-09-25 A Surface Force Control Contour Following Device Based on XYZ Axis Slider

Country Status (1)

Country Link
CN (1) CN210605454U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110658781A (en) * 2019-09-25 2020-01-07 华南理工大学 A surface force control contour following device and method based on XYZ axis slide table
CN111940773A (en) * 2020-08-26 2020-11-17 山东理工大学 Omnidirectional Constant Torque Machining Auxiliary Device for Machining
CN112775993A (en) * 2021-01-25 2021-05-11 上海应用技术大学 Three-degree-of-freedom translation force feedback type hand controller

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110658781A (en) * 2019-09-25 2020-01-07 华南理工大学 A surface force control contour following device and method based on XYZ axis slide table
CN111940773A (en) * 2020-08-26 2020-11-17 山东理工大学 Omnidirectional Constant Torque Machining Auxiliary Device for Machining
CN111940773B (en) * 2020-08-26 2022-11-29 山东理工大学 Omnidirectional constant-torque machining auxiliary device for cutting machining
CN112775993A (en) * 2021-01-25 2021-05-11 上海应用技术大学 Three-degree-of-freedom translation force feedback type hand controller

Similar Documents

Publication Publication Date Title
CN210605454U (en) A Surface Force Control Contour Following Device Based on XYZ Axis Slider
CN112756959B (en) Flexible multi-degree-of-freedom butt joint posture adjusting mechanism
CN110658781A (en) A surface force control contour following device and method based on XYZ axis slide table
CN103308404B (en) In-situ nano-indentation tester based on adjustable stretching-bending preload
CN110434835A (en) A kind of macro micro- precisely locating platform device of two degrees of freedom and control method
CN106426089B (en) Flexible three-freedom parallel institution vibration detection control device and control method
CN100579716C (en) Spherical articulated three-coordinate flexible attitude adjustment unit
US20200124510A1 (en) System and method for in-situ testing of mechanical properties of materials in static and dynamic load spectra
CN102248430B (en) Multi-shaft precise linkage feeding equipment
CN108817391B (en) Double-cladding-head laser cladding metal additive manufacturing equipment
CN107883885A (en) A kind of High Precision Stereo curved face object measurer for thickness
CN110243524B (en) Triaxial force performance testing device of high-thrust superconducting linear motor
CN206105840U (en) Three flexible degree of freedom parallel mechanism vibration detection controlling means
CN107421627B (en) Vibration form visual measurement device and method based on speed reducer driving flexible beam
US20230339060A1 (en) Processing machine, processing system, and method for manufacturing processed object
CN119238180B (en) Long-stroke fast tool servo system with integrated axial cutting force detection actuator
CN107796433B (en) Piezoelectric actuator dynamic contact process testing device and method based on parasitic motion principle
CN206416155U (en) A kind of parallel institution device driven based on linear motion unit
CN106363296B (en) Laser scanning inspection and servo-drive system positioning adjustment workbench
CN110421567A (en) A kind of multirobot process unit of complexity surface parts
CN106625586B (en) A parallel mechanism device driven by a linear motion unit and its control method
CN209945667U (en) A multi-flexible piezoelectric beam coupled vibration analysis and control device
CN108858145B (en) A dual flexible robot synchronous motion control device and method
CN111250972A (en) Automatic screw-driving robot
CN109129427A (en) A kind of the plane parallel mechanism device and control method of double five-rod drivings

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200522

CF01 Termination of patent right due to non-payment of annual fee