CN206416155U - A kind of parallel institution device driven based on linear motion unit - Google Patents
A kind of parallel institution device driven based on linear motion unit Download PDFInfo
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- CN206416155U CN206416155U CN201621296048.2U CN201621296048U CN206416155U CN 206416155 U CN206416155 U CN 206416155U CN 201621296048 U CN201621296048 U CN 201621296048U CN 206416155 U CN206416155 U CN 206416155U
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Abstract
The utility model discloses a kind of parallel institution device driven based on linear motion unit, including flexible body part in parallel with rigidity, moving displacement detection part, vibration detecting part and vibration control part, every rigid rod and flexible link set single-axis acceleration sensors, piezoelectric actuator is pasted in every flexible link, each parallel-connection structure output end installs double-axel acceleration sensor, to detect the vibration signal of parallel institution output end in the horizontal direction, single shaft and double-axel acceleration sensor detection signal are output in computer by motion control card, operation algorithm obtains control signal, it is output in piezoelectric actuator and AC servo motor, control the motion and vibration of parallel institution.
Description
Technical field
The utility model be related to flexible vibration detection control field, and in particular to it is a kind of based on linear motion unit drive
Parallel institution device.
Background technology
Parallel institution possesses advantages below as the basis of parallel robot theoretical research and application：
(1) precision is high：From the point of view of kinematics, the arrangement of each kinematic chain of parallel-connection structure can limit the tired of this error
Accumulate big, the executing agency for making it be more suitable for high precision machines people；
(2) rigidity is big：Higher rigidity just can guarantee that mechanism has higher positioning precision and good interference free performance.
The motion platform of parallel institution is coupled by multiple kinematic chains with frame, adds overall structure rigidity；
(3) compact conformation：Parallel structure can be designed to more compact, take up space smaller.Small mechanism body size
Mean to be influenceed by the inertia force and surface force of very little；
(4) it is easy to the structure design of symmetry：Because the structure design of symmetry is easy to compensation processing or temperature change etc.
Error caused by factor, so as to improve the precision of mechanism on the whole.In addition, the structure of symmetry also implies that processing is simple,
It is easy to modularization；
(5) drive device is fixed：It is easy to drive device being put on support using parallel-connection structure, alleviates moving link
Quality, so as to reduce moving loads and system inertia, improve the dynamic property of mechanism, higher dynamics essence can be obtained
Degree；
(6) there is passive hinge：In parallel-connection structure the presence of passive hinge mechanism can be made to become compact conformation, it is overall small-sized
Change；The stressing conditions of mechanism can more importantly be improved, it is to avoid the buckling of rod member.
Therefore, study a kind of applicable line moving cell driving, can intuitively analyze rigid member and flexible member each
Rigidity and the flexible parallel mechanism vibration detection control device of advantage and disadvantage there is important research meaning.
Utility model content
In order to overcome the shortcoming and deficiency of prior art, the utility model, which is provided, a kind of to be driven based on linear motion unit
Parallel institution device.
The utility model is adopted the following technical scheme that：
A kind of parallel institution device driven based on linear motion unit, including flexible body part in parallel with rigidity, fortune
Dynamic displacement detecting part, vibration detecting part and vibration control part；
The flexible body part in parallel with rigidity：Including silent flatform, two interconnection flexible link and two mutually
The rigid rod of connection, the silent flatform be arranged in parallel two linear motion units, sets sliding block to connect on each linear motion unit
Connect block；Described two rigid rods and two flexible links are symmetrical arranged, and adjacent rigid rod and flexible link is connected by sliding block contiguous block
Connect；
The moving displacement detection part, including grating rule displacement sensor, quadruple and covert pulse-scaling circuit, fortune
Dynamic control card and computer, the grating rule displacement sensor are set in parallel on silent flatform with linear motion unit, and detection is straight
The sliding block information transfer of line moving cell is then output to motion control card to quadruple and covert pulse-scaling circuit, motion
Control card is output to computer；
The vibration detecting part, including single-axis acceleration sensors, double-axel acceleration sensor and A/D data acquisitions
The geometric center position of card, rigid rod and flexible link sets single-axis acceleration sensors, the double-axel acceleration sensor respectively
It is fixed on the vibration signal transmission of the junction of two rigid rods and two flexible links, single shaft and double-axel acceleration sensor detection
To motion control card, computer is further transferred to；
The vibration control part, including piezoelectric actuator, Piezoelectric Driving amplification power supply and D/A transition cards, the piezoelectricity
Driver is pasted onto in every flexible link, and computer obtains control signal and is transferred to pressure by motion control card and D/A transition cards
Electric drive amplifies power drives piezoelectric actuator.
The linear motion unit includes guide rod, sliding block and AC servo motor, and the AC servo motor passes through shaft coupling
Device is connected driving sliding block with guide rod and slided, and sliding block drives rigid rod and flexible link to translate and rotate by sliding block contiguous block, exchange
Servomotor receives output signal of the computer by motion control card by motor servo amplifier and D/A transition cards.
Piezoelectric actuator is made up of four piezoelectric ceramic pieces, double faced adhesive, per face two panels, is connected in parallel, and on flexibility
Bar Central Symmetry is pasted.
The grating rule displacement sensor and quadruple and covert pulse-scaling circuit are two, the grating scale displacement
The outside that sensor parallel is arranged on linear motion unit is used for the displacement for measuring sliding block.
Also include bending part, the double-axel acceleration sensor is arranged on two rigid rods and two flexibilities by bending part
The junction of bar.
The distance between described two linear motion units are 500mm.
The thickness of rigid rod is more than the thickness of flexible link.
A kind of control method of the parallel institution device driven based on linear motion unit, is comprised the following steps：
The predetermined trace information of parallel institution is transferred to by first step computer by motion control card and D/A transition cards
Motor servo amplifier driving sliding block is slided on guide rod, is driven rigid rod and flexible link translation and is rotated；
The moving displacement of second step grating rule displacement sensor detection of straight lines moving cell top shoe passes through quadruple and change
Data signal is obtained after the processing of phase pulse-scaling circuit, motion control card is transferred to, computer is then input to and carries out at algorithm
Reason；
3rd step double-axel acceleration sensor detects rigid rod and flexible link output end X, Y-axis in the horizontal direction respectively
Acceleration information and vibration signal, four single-axis acceleration sensors detect rigid rod and flexible link in the horizontal direction respectively
Acceleration information and vibration signal, then will detection signal by A/D data collecting cards carry out analog-to-digital conversion after, obtain numeral
Signal is transferred to fluorine retention reaction and handled, and is then input to computer and carries out algorithm process, by resolving, obtains phase
The feedback control signal answered；
Four-step calculation machine is according to above-mentioned detection signal, according to feedback signal running control algolithm, calculates vibration control
The control signal of system, then from motion control card analog output module after D/A transition cards are converted to analog signal toward
Motor servo amplifier is transferred to outside, after motor servo amplifier amplification, oscillation control signal is delivered to exchange
Servomotor, adjusts the positive and reverse steering and slewing rate of AC servo motor, realizes the real-time vibration to parallel institution output end
Active control；
5th step calculates the control signal of vibration control, then by moving according to feedback signal running control algolithm
The analog output module of control card is transferred to Piezoelectric Driving amplification electricity outward after D/A transition cards are converted to analog signal
Source, after the amplification that Piezoelectric Driving amplifies power supply, piezoelectric actuator is delivered to by oscillation control signal, is realized to flexibility
The real-time Active Vibration Control of parallel institution output end.
The beneficial effects of the utility model：
(1) the utility model is used as driver driven Parallel Kinematic Manipulator, linear motion unit structure using linear motion unit
Simply, lightweight, fast response time, sensitive can realize and accelerate and slow down, be equipped with grating scale sensor as the position of workbench
Measuring cell, positioning precision is high；
(2) the utility model vibration detecting part and control section use electrical control, compared to Pneumatic control circuit
Say, electric control loop has the advantages that signal is simple, control object is few, control logic is simple, dynamic response is fast, and analog quantity is
Electric current or voltage are low on field requirement and will not produce influence to surrounding environment；
(3) the utility model rigidity can be detected with installing double-axel acceleration sensor in flexible parallel mechanism output end
The information of two frees degree of parallel institution output end, to the dynamic analysis and feedback of rigidity and flexible parallel mechanism output end
Control provides good measurement means.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of Fig. 1 linear movements unit and flexible body part in parallel with rigidity.
Embodiment
With reference to embodiment and accompanying drawing, the utility model is described in further detail, but reality of the present utility model
Apply mode not limited to this.
Embodiment
As shown in Figures 1 and 2, silent flatform hides display, a kind of parallel institution driven based on linear motion unit in Fig. 1
Device, including
Flexible body part in parallel with rigidity, including a silent flatform, a rigid parallel-connection structure and a flexible parallel connection
Structure, the aluminium section bar and substrate that silent flatform is differed by some length is constituted；The rigid parallel-connection structure is by rigid parallel outputs
With two rigidity and branch of company composition, each rigidity parallel branch is made up of a rigid rod, and the flexible parallel connection structure is by soft
Property parallel outputs and Liang Ge flexible parallel connections branch constitute, each flexible parallel connection branch is made up of a flexible link, two rigidity
Bar 7,12 and two flexible links 4,11 are symmetrical arranged, and two neighboring rigid rod and two flexible links are connected using rotating shaft 8, as defeated
Go out end.
Adjacent rigid rod and flexible link is connected by sliding block contiguous block 3, the sliding block contiguous block 3 by pin and screw thread with
Linear motion unit 2 is connected, and the linear motion unit is specially two, is set in parallel on silent flatform, including guide rod, sliding block
And AC servo motor, AC servo motor is connected by shaft coupling with guide rod, and sliding block is connected with each other with guide rod, AC servo electricity
Machine 13 receives output signal of the computer 20 by motion control card 19 by motor servo amplifier 17 and D/A transition cards 18,
The driving servomotor of motor servo amplifier 17 is rotated.
AC servo machinery driving sliding block moves back and forth on guide rod, so as to drive rigid rod and flexible link to translate and turn
It is dynamic, rigidity is navigated to objectives position by desired track and position with flexible parallel mechanism output end；
Single shaft driver-LX45- the standard types for the linear motion unit MISUMI companies production that the present embodiment is used are straight
Line moving cell, model LX4520C-B1-A4538-590, stroke is 590mm, respectively with a distance of 500mm, parallel to each other
Mode, which is connected through a screw thread, to be fixed on silent flatform.
In this implementation example, the dimensional parameters of silent flatform are 1000 × 1000 × 600mm, wherein, the dimensional parameters of substrate
For 1000 × 1000 × 15mm, aluminium section bar is 80 × 80mm from cross-sectional sizes, and aluminium section bar constitutes silent flatform length
Length is 840mm, 840mm, 500mm.The dimensional parameters of rigid rod 7 are 300 × 12 × 25mm, using aluminum alloy materials, to make
Rod member surface insulation to it, it is necessary to carry out oxidation processes；The dimensional parameters of flexible link 4 are 300 × 3 × 25mm, using asphalt mixtures modified by epoxy resin
Fat material.Rigidity is designed as 40 × 30 × 30mm with flexible parallel mechanism output end, and thickness is 3mm bending part, is closed using aluminium
Golden material, to make rod member surface insulation, it is necessary to carry out oxidation processes to it.
Moving displacement detection part, including grating rule displacement sensor 1, quadruple and covert pulse-scaling circuit 15, fortune
Dynamic control card 19 and computer 20, the grating rule displacement sensor 1 are connected with supply voltage for+5V dc source, altogether
There are two, be respectively parallel to two linear motion units, and be fixed on positioned at its outside on silent flatform, grating rule displacement sensor
Measurement sliding block and the sliding block of linear motion unit mechanically connect, grating rule displacement sensor detects on linear motion unit sliding
The displacement digital pulse signal of block is transferred to quadruple, covert pulse-scaling circuit, and quadruple and covert pulse-scaling circuit can
From being integrated on motion control card, computer is then communicated to；
Vibration detecting part, including single-axis acceleration sensors 6, double-axel acceleration sensor 10 and A/D data collecting cards
16, the single-axis acceleration sensors 6 one have four, are separately mounted to the geometric center position of rigid rod and flexible link, inspection
Every rigid rod or the vibration signal of flexible link are measured, the double-axel acceleration sensor 10 is arranged on two by bending part 9
In the rotating shaft of individual flexible link and two rigid rods rotating shaft.The double-axel acceleration sensor, which is connected through a screw thread, is fixed on bending
Part, bending part is threadedly secured in rotating shaft 8.Double-axel acceleration sensor detects rigidity and flexible parallel mechanism output end
Vibration signal in the horizontal direction is transferred to A/D data collecting cards, and A/D data collecting cards 16 sense each individual axis acceleration
Signal detected by device and double-axel acceleration sensor is transferred to motion control card, and motion control card is mutually interconnected with computer
Connect.
Vibration control part, including piezoelectric actuator 5, Piezoelectric Driving amplification power supply 14 and D/A transition cards 18, the piezoelectricity
Driver is pasted onto in every flexible link, and computer obtains control signal and is transferred to pressure by motion control card and D/A transition cards
Electric drive amplifies power drives piezoelectric actuator.
Piezoelectric actuator is made up of four piezoelectric ceramic pieces, is fixed on the two ends of flexible link, double faced adhesive, per face two panels,
Be connected in parallel, on flexible link Central Symmetry, the computer obtained control signal of operation algorithm computing by D/A converting transmissions to
Piezoelectric Driving amplifies power supply, and Piezoelectric Driving amplification power drives piezoelectric ceramic piece driver acts on flexible link.
The parallel robot is made up of rigid parallel institution and flexible parallel mechanism two parts；In rigid parallel institution,
Two by lever size in a thickness direction than larger, in flexible parallel mechanism, two by lever in a thickness direction
Size is smaller, so embodying flexible link characteristic；When linear motion unit drives rigid rod and flexible link motion, parallel institution
Output end will embody vibration characteristics.
In this implementation example, the model that grating rule displacement sensor 1 is supplied from Weihai San Feng Electronic Science and Technology Co., Ltd.s
For GBC-Q grating rule displacement sensor, range is 700mm, and pitch is 0.02mm, and output two-way differs 90 ° of TTL square waves letter
Number；Supporting digital display meter parameter is with the model grating rule displacement sensor：Quadruple, allow input TTL square-wave signals, allow
Frequency input signal is more than 1000kHz etc.；Because linear motion unit 2 is quiet to be arranged at a distance of 500mm, mode parallel to each other
On platform, therefore present apparatus requirement has two 2 identical grating rule displacement sensors and two sets of separate quadruples
And covert pulse-scaling circuit 15；In moving displacement detection part, motion control card 9 receives the institute of grating rule displacement sensor 1
The signal of the process step-by-step counting processing detected, therefore it is required that motion control card has 2 road Analog input mModules.
In this implementation example, single-axis acceleration sensors 6 can select the model 8310B2 of Kistler companies of Switzerland production
Type low frequency capacitive formula acceleration transducer, weight is about 17g, and detection frequency response range is 0~250Hz, for detecting just
The acceleration information and vibration signal of property bar and flexible link in the horizontal direction, double-axel acceleration sensor 10 select model
CS-2LAS-01 X, Y-axis twin-axis accelerometer, appearance and size is 48mm × 38mm × 18mm, and weight is about 30g, and analog quantity is defeated
Go out mode for RS485V, data output format is 16 complement of two's two's complements, exported for detecting rigidity with flexible parallel mechanism
Hold X, the acceleration information and vibration signal of Y-axis in the horizontal direction；A/D data collecting cards 16 are to single-axis acceleration sensors 6
And the signal detected by double-axel acceleration sensor 10 carries out analog-to-digital conversion, therefore it is required that A/D data collecting cards have 6 road moulds
Analog quantity input module and 6 road analog output modules, you can the solid height changed from integrated multi-channel A/D data acquisitions and D/A
Motion control card；In vibration detecting part, motion control card receives single-axis acceleration sensors 6 and double-axel acceleration sensor
The signal after analog-to-digital conversion detected by 10, therefore it is required that motion control card has multi-analog input module.
In this implementation example, the substantially piezoelectric ceramic piece of piezoelectric actuator 5, physical dimension is 50 × 25 × 2mm.Piezoelectricity
Drive amplification power supply 14 can select the DW-D201-100-AC type high-voltage suppling powers of Tianjin Dongwen High Voltage Power Supply Factory's production, put
Big device chip model is APEX-PA241DW or APEX-PA240CX amplifiers；In vibration control part, motion control cartoon
Cross any piezoelectric actuator 5 that control signal is transferred in every flexible link 4 by D/A transition cards 18.
In this implementation example, the optional Mitsubishi's servomotor of AC servo motor 13, model HC-KFS43, the servo of motor
Driver 17 is MR-J2S-40A, and power is 400W, because linear motion unit 2 in mode parallel to each other is arranged on silent flatform
On, therefore present apparatus requirement is by controlling two servomotors to be preset to make rigidity be reached with flexible parallel mechanism output end
Destination locations, and control signal is transferred to servo electricity by motion control card by motor servo amplifier and D/A transition cards
Machine, that is, require that D/A transition cards have 2 road Analog input mModules and 2 road analog output modules, and motion control card has 2
Road analog output module.
A kind of control method of the parallel institution device driven based on linear motion unit of this implementation example, including step：
First step servomotor drives sliding block to be slided along guide rail by guide rod, so as to drive rigid rod and flexible link flat
Move and rotate, and cause rigidity to navigate to objectives position by desired track and position with flexible parallel mechanism output end；
The moving displacement of second step grating rule displacement sensor detection of straight lines moving cell top shoe, then believes detection
Number after quadruple, covert pulse-scaling circuit carry out step-by-step counting processing, obtain digital data transmission and controlled to solid high motion
Device processed is handled, and is then input to computer and is carried out algorithm process；
3rd step double-axel acceleration sensor detect respectively rigidity and flexible parallel mechanism output end in the horizontal direction X,
The acceleration information and vibration signal of Y-axis, four single-axis acceleration sensors detect rigid rod and flexible link in level side respectively
Upward acceleration information and vibration signal, then will detect that signal after A/D data collecting cards carry out analog-to-digital conversion, is obtained
Digital data transmission is handled to fluorine retention reaction, is then input to computer and is carried out algorithm process, by resolving, obtains
To corresponding feedback control signal；
Four-step calculation machine is according to above-mentioned detection signal, according to feedback signal running control algolithm, calculates vibration control
The control signal of system, then from motion control card analog output module after D/A transition cards are converted to analog signal toward
Motor servo amplifier is transferred to outside, after motor servo amplifier amplification, oscillation control signal is delivered to servo
Motor, adjusts the positive and reverse steering and slewing rate of servomotor, so that control slide block is along guide rail motion state, reduce rigidity with
Vibrated caused by flexible parallel mechanism output end motion, realize the real-time Active Vibration Control to parallel institution output end；
5th step calculates the control signal of vibration control according to feedback signal running control algolithm, then by solid height
The analog output module of motion controller is transferred to Piezoelectric Driving amplification outward after D/A transition cards are converted to analog signal
Power supply, after the amplification that Piezoelectric Driving amplifies power supply, is delivered to piezoelectric actuator, to flexible link by oscillation control signal
Controling power effect is produced, the vibration of flexible parallel mechanism output end is offset, shaking in real time to flexible parallel mechanism output end is realized
Dynamic active control.
In this implementation example, according to the vibration monitoring control method of apparatus above, D/A transition cards have multi-analog defeated
Enter module, therefore fluorine retention reaction selects the GTS-400-PV-PCI movement sequence controllers that Gu Gao companies produce, the fortune
Movement controller has 8 axle chnnels of resources, and (each axis signal carries 1 road analog output, and incremental encoder input, motor control is defeated
Go out and ann reset function), the input of light-coupled isolation general-purpose digital signal and output Ge You 16 tunnels, 4 tunnel quadruple increment type auxiliary
Encoder is inputted, 8 road A/D analog quantitys sampling inputs, and the voltage range of analog input and output is：- 10V~+10V.Computer
From CPU models I7 computer.
Above-described embodiment is the utility model preferably embodiment, but embodiment of the present utility model is not by described
The limitation of embodiment, it is other it is any without departing from Spirit Essence of the present utility model with made under principle change, modify, replace
Generation, combination, simplification, should be equivalent substitute mode, are included within protection domain of the present utility model.
Claims (7)
1. a kind of parallel institution device driven based on linear motion unit, it is characterised in that including flexible sheet in parallel with rigidity
Body portion, moving displacement detection part, vibration detecting part and vibration control part；
The flexible body part in parallel with rigidity：The flexible link being connected with each other including silent flatform, two and two interconnections
Rigid rod, be arranged in parallel on the silent flatform two linear motion units, sets sliding block to connect on each linear motion unit
Block；Described two rigid rods and two flexible links are symmetrical arranged, and adjacent rigid rod and flexible link is connected by sliding block contiguous block；
The moving displacement detection part, including grating rule displacement sensor, quadruple and covert pulse-scaling circuit, motion control
Fabrication and computer, the grating rule displacement sensor are set in parallel on silent flatform with linear motion unit, detection of straight lines fortune
The sliding block information transfer of moving cell is then output to motion control card, motion control to quadruple and covert pulse-scaling circuit
Card is output to computer；
The vibration detecting part, including single-axis acceleration sensors, double-axel acceleration sensor and A/D data collecting cards, just
Property bar and the geometric center position of flexible link single-axis acceleration sensors are set, the double-axel acceleration sensor is fixed on two
The vibration signal of the junction of rigid rod and two flexible links, single shaft and double-axel acceleration sensor detection is transferred to motion control
Card, is further transferred to computer；
The vibration control part, including piezoelectric actuator, Piezoelectric Driving amplification power supply and D/A transition cards, the Piezoelectric Driving
Device is pasted onto in every flexible link, and computer obtains control signal and is transferred to piezoelectricity drive by motion control card and D/A transition cards
Dynamic amplification power drives piezoelectric actuator.
2. parallel institution device according to claim 1, it is characterised in that the linear motion unit includes guide rod, cunning
Block and AC servo motor, the AC servo motor are connected driving sliding block with guide rod by shaft coupling and slided, and sliding block passes through cunning
Block contiguous block drives rigid rod and flexible link translation and rotated, and AC servo motor is changed by motor servo amplifier and D/A
Output signal of the computer by motion control card is received in clamping.
3. parallel institution device according to claim 1, it is characterised in that piezoelectric actuator is by four piezoelectric ceramic piece structures
Into double faced adhesive, per face two panels, is connected in parallel, and is pasted on flexible link Central Symmetry.
4. parallel institution device according to claim 1, it is characterised in that the grating rule displacement sensor and quadruple
And covert pulse-scaling circuit is two, the outside that the grating rule displacement sensor is set in parallel in linear motion unit is used
In the displacement of measurement sliding block.
5. parallel institution device according to claim 1, it is characterised in that also including bending part, the two-axis acceleration
Sensor is arranged on the junction of two rigid rods and two flexible links by bending part.
6. parallel institution device according to claim 1, it is characterised in that between described two linear motion units away from
From for 500mm.
7. parallel institution device according to claim 1, it is characterised in that the thickness of rigid rod is more than flexible link
Thickness.
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| CN201621296048.2U CN206416155U (en) | 2016-11-30 | 2016-11-30 | A kind of parallel institution device driven based on linear motion unit |
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| CN201621296048.2U CN206416155U (en) | 2016-11-30 | 2016-11-30 | A kind of parallel institution device driven based on linear motion unit |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106625586A (en) * | 2016-11-30 | 2017-05-10 | 华南理工大学 | Parallel mechanism device based on driving of linear motion units and control method |
| CN107356391A (en) * | 2017-08-29 | 2017-11-17 | 华南理工大学 | One kind can linear telescopic flexible structure vibration measurement device and method |
| CN109100106A (en) * | 2018-09-04 | 2018-12-28 | 上海莫戈纳机电科技有限公司 | A kind of electric linear shaking platform |
-
2016
- 2016-11-30 CN CN201621296048.2U patent/CN206416155U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106625586A (en) * | 2016-11-30 | 2017-05-10 | 华南理工大学 | Parallel mechanism device based on driving of linear motion units and control method |
| CN107356391A (en) * | 2017-08-29 | 2017-11-17 | 华南理工大学 | One kind can linear telescopic flexible structure vibration measurement device and method |
| CN107356391B (en) * | 2017-08-29 | 2023-04-21 | 华南理工大学 | Vibration measuring device and method for linearly telescopic flexible structure |
| CN109100106A (en) * | 2018-09-04 | 2018-12-28 | 上海莫戈纳机电科技有限公司 | A kind of electric linear shaking platform |
| CN109100106B (en) * | 2018-09-04 | 2024-04-19 | 苏州盛拓半导体科技有限公司 | Electric linear vibration platform |
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Granted publication date: 20170818 Termination date: 20191130 |