CN210560868U - Crystal growing furnace - Google Patents
Crystal growing furnace Download PDFInfo
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- CN210560868U CN210560868U CN201921252027.4U CN201921252027U CN210560868U CN 210560868 U CN210560868 U CN 210560868U CN 201921252027 U CN201921252027 U CN 201921252027U CN 210560868 U CN210560868 U CN 210560868U
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- temperature
- cooling
- crystal growth
- heat
- inner cylinder
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Abstract
The utility model provides a crystal growth furnace, the induction cooker comprises a cooker bod, the furnace body includes the casing, interior barrel and at least one thermal-insulated felt, interior barrel adopts insulating insulation material to make, thermal-insulated felt sets up in the inner tube internally and separates into a plurality of temperature zones with interior barrel, every thermal-insulated felt middle part all is equipped with the through-hole that is used for holding seed rod and crystal and passes through, every temperature zone is equipped with the temperature sensor who is used for measuring this district's temperature, the interior barrel inboard of every temperature zone all is equipped with the heating element who is used for heating this temperature zone, be equipped with the cooling module who is used for cooling this temperature zone between barrel and the casing in every temperature zone corresponds, be equipped with at least one heat conduction pole in every temperature zone, barrel and cooling module fixed connection in the heat conduction pole passed. The utility model discloses but the temperature in the different temperature zones of automatically regulated forms and is fit for the required temperature gradient of crystal growth, improves the crystal quality.
Description
Technical Field
The utility model relates to a crystal growth technical field, concretely relates to crystal growth furnace.
Background
When different crystals are produced by using the crystal growth furnace, different temperature fields are needed, and the temperature field of a common crystal growth furnace is generally fixed and cannot be adjusted according to the crystals to be grown.
SUMMERY OF THE UTILITY MODEL
Based on the technical problem that the background art exists, the utility model provides a crystal growing furnace to automatically regulated temperature gradient.
The utility model provides a crystal growth furnace, including the furnace body, the furnace body includes casing, inner barrel, at least one thermal-insulated felt and controller, and inner barrel adopts insulating insulation material to make, and the thermal-insulated felt sets up in inner barrel and separates inner barrel into a plurality of temperature areas, and every thermal-insulated felt middle part all is equipped with the through-hole that is used for holding seed crystal pole and crystal to pass through, and every temperature area is equipped with the temperature sensor that is used for measuring the temperature of this district;
the inner side of the inner cylinder body of each temperature area is provided with a heating assembly for heating the temperature area, a cooling assembly for cooling the temperature area is arranged between the shell corresponding to each temperature area and the inner cylinder body, at least one heat conducting rod is arranged in each temperature area, and the heat conducting rod penetrates through the inner cylinder body and is fixedly connected with the cooling assembly;
the temperature sensor is in signal connection with a controller, and the controller respectively controls and connects the heating assembly and the cooling assembly of each temperature zone.
Preferably, the heating assembly comprises a heating body annularly arranged on the inner side of the inner barrel and an induction heating ring annularly arranged between the heating body and the inner wall of the inner barrel, and the controller is connected with the induction heating ring in a control mode.
Preferably, cooling unit includes cooling tube, and the cooling tube bottom is equipped with the inlet, and the cooling tube upper end is equipped with the liquid outlet, is equipped with the heating panel on the cooling tube, heat conduction pole and heating panel fixed connection.
Preferably, still include the circulation subassembly, the circulation subassembly includes cold water storage cistern, circulating pump and condenser, and cold water storage cistern, circulating pump and inlet loop through the pipe connection, and liquid outlet, condenser and cold water storage cistern loop through the pipe connection, are equipped with the feed liquor valve on the pipeline between circulating pump and the inlet, and the pipeline between liquid outlet and the condenser is equipped with out the liquid valve, and circulating pump, feed liquor valve, play liquid valve, condenser are controlled respectively to the controller.
Preferably, a flow regulating valve is arranged on a pipeline between the liquid outlet valve and the liquid inlet, and the controller is in control connection with the flow regulating valve.
Preferably, the inner side of the shell is sequentially provided with a first heat preservation layer and a second heat preservation layer, and the liquid inlet end of the cold water pipeline of each cooling assembly is arranged between the first heat preservation layer and the second heat preservation layer.
Preferably, the cooling pipe is a metal pipe with high thermal conductivity, and the corrugated pipe is sleeved outside the cooling pipe.
Preferably, the insulation blanket is a hard graphite carbon blanket.
Preferably, the liquid inlet valve and the liquid outlet valve are both electromagnetic valves.
The utility model provides a pair of crystal growth stove through setting up a plurality of temperature districts, and the controller can heat and/or cool off the temperature district that corresponds according to the temperature of the temperature district that temperature sensor detected, control heating element and/or cooling element work to the temperature in the different temperature districts of automatically regulated forms the required temperature gradient of suitable crystal growth, improves crystal quality.
Drawings
Fig. 1 is a schematic structural view of a crystal growth furnace according to the present invention.
Detailed Description
Referring to fig. 1, the utility model provides a crystal growth furnace, including the furnace body, the furnace body includes casing 1, inner cylinder 8, at least one heat insulating felt 4 and controller, inner cylinder 8 adopts insulating insulation material to make, heat insulating felt 4 sets up in inner cylinder 8 and separates inner cylinder 8 into a plurality of temperature areas, the middle part of every heat insulating felt 4 all is equipped with the through-hole that is used for holding seed rod and crystal to pass through, each temperature area is equipped with the temperature sensor that is used for measuring the temperature in this area;
the inner side of the inner cylinder 8 of each temperature area is provided with a heating assembly for heating the temperature area, a cooling assembly for cooling the temperature area is arranged between the shell 1 and the inner cylinder 8 corresponding to each temperature area, at least one heat conducting rod 7 is arranged in each temperature area, and the heat conducting rod 7 penetrates through the inner cylinder 8 and is fixedly connected with the cooling assembly;
the temperature sensor is in signal connection with a controller, and the controller respectively controls and connects the heating assembly and the cooling assembly of each temperature zone.
The utility model discloses a set up a plurality of temperature districts, the controller can heat and/or cool off the temperature district that corresponds according to the temperature in the temperature district that temperature sensor detected, control heating element and/or cooling element work to the temperature in the different temperature districts of automatically regulated forms the required temperature gradient of suitable crystal growth, improves the crystal quality.
In the present embodiment, the heating assembly includes a heating element 10 disposed around the inner side of the inner cylinder 8 and an induction heating coil 9 disposed around the heating element 10 and the inner wall of the inner cylinder 8, and the controller controls and connects the induction heating coil 9. Carry out induction heating through induction heating circle 9, convenient and fast can heat required temperature very fast, easily control.
In this embodiment, cooling unit includes cooling tube 5, and 5 bottoms of cooling tube are equipped with the inlet, and 5 upper ends of cooling tube are equipped with the liquid outlet, are equipped with heating panel 6 on the cooling tube 5, and heat conduction pole 7 and heating panel fixed connection. The heat conducting rod 7 conducts out the heat of the corresponding temperature area, the heat is dispersed to the cooling pipeline 5 through the heat dissipation plate 6, and the flowing cooling liquid takes away the heat.
In this embodiment, still include the circulation subassembly, the circulation subassembly includes cold water storage cistern, circulating pump and condenser, and cold water storage cistern, circulating pump and inlet loop through the pipe connection, and liquid outlet, condenser and cold water storage cistern loop through the pipe connection, are equipped with the feed liquor valve on the pipeline between circulating pump and the inlet, are equipped with out the liquid valve on the pipeline between liquid outlet and the condenser, and circulating pump, feed liquor valve, play liquid valve, condenser are controlled respectively to the controller. A circulating cooling system is formed by the cold water tank, the circulating pump, the cold water pipeline and the condenser, so that the corresponding temperature area can be cooled, the waste of water is effectively avoided, and water resources are saved.
In this embodiment, be equipped with flow control valve on the pipeline between play liquid valve and the inlet, controller control connection flow control valve to adjust the velocity of flow of cooling liquid, thereby adjust cooling rate and cooling degree.
In this embodiment, the casing inboard is equipped with first heat preservation 2 and second heat preservation 3 in proper order, and the feed liquor end setting of each cooling water pipeline of cooling module is between first heat preservation 2 and second heat preservation 3, and the coolant liquid that is convenient for make to be located the feed liquor end keeps at lower temperature, and the heat is taken away fast in the follow-up of being convenient for.
In the present embodiment, the cooling pipe 5 is a metal pipe having high thermal conductivity, and a corrugated pipe is fitted around the outside thereof. The heat dissipation is convenient.
In this embodiment, the heat insulation felt 4 is a hard graphite carbon felt, which has a good heat insulation capability, so as to stabilize the temperature of each temperature zone.
In this embodiment, the liquid inlet valve and the liquid outlet valve are both solenoid valves, and the controller controls the liquid inlet valve and the liquid outlet valve respectively. The electromagnetic valve is convenient for controlling the inlet and outlet of cooling liquid through the controller, thereby being convenient for controlling the cooling degree so as to adjust the temperature of different temperature areas to change the temperature gradient to adapt to the growth requirements of different crystals.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (9)
1. The crystal growth furnace is characterized by comprising a furnace body, wherein the furnace body comprises a shell (1), an inner cylinder (8), at least one heat insulation felt (4) and a controller, the inner cylinder (8) is made of an insulation material, the heat insulation felt (4) is arranged in the inner cylinder (8) and divides the inner cylinder (8) into a plurality of temperature zones, a through hole for accommodating a seed rod and a crystal to pass through is formed in the middle of each heat insulation felt (4), and each temperature zone is provided with a temperature sensor for measuring the temperature of the zone;
the inner side of the inner cylinder (8) of each temperature area is provided with a heating assembly for heating the temperature area, a cooling assembly for cooling the temperature area is arranged between the inner cylinder (8) corresponding to each temperature area and the shell (1), at least one heat conducting rod (7) is arranged in each temperature area, and the heat conducting rod (7) penetrates through the inner cylinder (8) and is fixedly connected with the cooling assembly;
the temperature sensor is in signal connection with a controller, and the controller respectively controls and connects the heating assembly and the cooling assembly of each temperature zone.
2. The crystal growth furnace according to claim 1, characterized in that the heating assembly comprises a heating element (10) arranged around the inner side of the inner cylinder (8) and an induction heating coil (9) arranged around the heating element (10) and the inner wall of the inner cylinder (8), and the controller is connected with the induction heating coil (9) in a control mode.
3. The crystal growth furnace according to claim 1, characterized in that the cooling assembly comprises a cooling pipeline (5), a liquid inlet is arranged at the bottom of the cooling pipeline (5), a liquid outlet is arranged at the upper end of the cooling pipeline (5), a heat dissipation plate (6) is arranged on the cooling pipeline (5), and the heat conducting rod (7) is fixedly connected with the heat dissipation plate (6).
4. The crystal growth furnace of claim 3, further comprising a circulation assembly, wherein the circulation assembly comprises a cold water tank, a circulation pump and a condenser, the cold water tank, the circulation pump and the liquid inlet are sequentially connected through a pipeline, the liquid outlet, the condenser and the cold water tank are sequentially connected through a pipeline, a liquid inlet valve is arranged on the pipeline between the circulation pump and the liquid inlet, a liquid outlet valve is arranged on the pipeline between the liquid outlet and the condenser, and the controller is respectively in control connection with the circulation pump, the liquid inlet valve, the liquid outlet valve and the condenser.
5. The crystal growth furnace of claim 4, wherein a flow control valve is arranged on the pipeline between the liquid outlet valve and the liquid inlet, and the controller is in control connection with the flow control valve.
6. The crystal growth furnace according to claim 3, characterized in that the inside of the shell is provided with a first heat-insulating layer (2) and a second heat-insulating layer (3) in sequence, and the liquid inlet end of the cold water pipe (5) of each cooling assembly is arranged between the first heat-insulating layer (2) and the second heat-insulating layer (3).
7. Crystal growth furnace according to claim 3, characterized in that the cooling pipe (5) is a metal pipe of high thermal conductivity, externally sheathed with a bellows.
8. Crystal growth furnace according to claim 1, characterized in that the heat insulation felt (4) is a hard graphite carbon felt.
9. The crystal growth furnace of claim 1, wherein the inlet valve and the outlet valve are solenoid valves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921252027.4U CN210560868U (en) | 2019-08-02 | 2019-08-02 | Crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921252027.4U CN210560868U (en) | 2019-08-02 | 2019-08-02 | Crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210560868U true CN210560868U (en) | 2020-05-19 |
Family
ID=70627301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921252027.4U Expired - Fee Related CN210560868U (en) | 2019-08-02 | 2019-08-02 | Crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210560868U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110512272A (en) * | 2019-08-02 | 2019-11-29 | 合肥嘉东光学股份有限公司 | A kind of crystal growing furnace |
-
2019
- 2019-08-02 CN CN201921252027.4U patent/CN210560868U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110512272A (en) * | 2019-08-02 | 2019-11-29 | 合肥嘉东光学股份有限公司 | A kind of crystal growing furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200519 Termination date: 20210802 |