CN210560707U - Quick-cooling type planar cathode - Google Patents
Quick-cooling type planar cathode Download PDFInfo
- Publication number
- CN210560707U CN210560707U CN201921114592.4U CN201921114592U CN210560707U CN 210560707 U CN210560707 U CN 210560707U CN 201921114592 U CN201921114592 U CN 201921114592U CN 210560707 U CN210560707 U CN 210560707U
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- China
- Prior art keywords
- cooling device
- quick
- pipe
- outlet pipe
- side plate
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- Expired - Fee Related
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- 238000001816 cooling Methods 0.000 title claims abstract description 43
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 43
- 239000004519 grease Substances 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model discloses a quick-cooling type plane cathode, which comprises a base and a cathode body arranged above the base; the lower surface of the cathode body is connected with a quick cooling device; the quick cooling device is formed by splicing an upper cover, a water inlet pipe, a water outlet pipe, a lower plate, a first side plate and a second side plate, and a cavity is formed inside the quick cooling device; the water inlet pipe and the water outlet pipe are respectively positioned at two ends of the quick cooling device, the water inlet pipe and the water outlet pipe are connected through a plurality of connecting pipes, the connecting pipes are positioned in the cavity, one ends of the connecting pipes are connected with the side wall of the water inlet pipe, the other ends of the connecting pipes are connected with the side wall of the water outlet pipe, and a plurality of micropores are formed in the side wall of each connecting pipe; through hollow quick cooling device, can be quick absorb the heat that the negative pole body produced, compare with traditional water cooling plant, its heat absorption capacity is stronger, and the radiating effect is more excellent.
Description
Technical Field
The utility model relates to a quick-cooling type plane negative pole.
Background
Vacuum coating is a technique for preparing a film layer in vacuum to generate a film material, and has three forms, namely evaporation coating, sputtering coating and ion plating. The sputtering coating is the main method in vacuum coating, and the technology is to bombard the surface of a target by using energetic particles in vacuum so as to deposit the bombarded particles on a substrate. In the magnetron sputtering coating process, the quality requirement on magnetron sputtering coating equipment is high, and in the magnetron sputtering coating equipment, the setting of a magnetic field is particularly important. At present, a planar magnetron sputtering cathode (referred to as a planar cathode) is generally adopted, and the planar cathode obtains an accelerating magnetic field by a method of mounting a magnet in a magnetic shoe.
After the planar cathode is used for a long time, the temperature on the surface of the planar cathode can rise, so that the film coating effect is influenced, the traditional water cooling mode can only reduce the temperature in a short time, and after the cathode body is used for a period of time, when the temperature rises to a certain degree, the heat dissipation capacity of the traditional water cooling device is very good.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects of the prior art, and provides a quick-cooling type planar cathode.
A quick-cooling type plane cathode comprises a base and a cathode body arranged above the base; the lower surface of the cathode body is connected with a quick cooling device; the quick cooling device is formed by splicing an upper cover, a water inlet pipe, a water outlet pipe, a lower plate, a first side plate and a second side plate, and a cavity is formed inside the quick cooling device; the surface of the first side plate is provided with a plurality of air inlet holes, the inner wall of the first side plate is connected with a plurality of fans, and the surface of the second side plate is provided with an exhaust groove; the inlet tube and the outlet pipe be located the both ends of rapid cooling device respectively, link to each other through a plurality of connecting pipe between inlet tube and the outlet pipe, the connecting pipe be located the cavity, the one end of connecting pipe links to each other with the lateral wall of inlet tube, the other end of connecting pipe links to each other with the lateral wall of outlet pipe, is equipped with a plurality of micropore on the lateral wall of connecting pipe.
Preferably, heat-conducting silicone grease is smeared between the lower surface of the cathode body and the upper cover of the quick cooling device.
Preferably, the number of the fans is two.
Preferably, the inlet of the water inlet pipe and the outlet of the water outlet pipe are both connected with rotary joints.
Preferably, the diameter of the micropores is 0.1 to 0.5 mm.
Has the advantages that:
1. liquid water is firstly atomized through micropores in the connecting pipe, atomized water drops are blown out from the exhaust groove through the fan, and the surface area of the atomized water drops is far larger than that of the liquid water, so that the heat absorption capacity of the device is stronger, heat generated on the surface of the cathode body can be rapidly discharged, and the phenomenon of overheating of the cathode body is prevented.
2. Through hollow quick cooling device, can be quick absorb the heat that the negative pole body produced, compare with traditional water cooling plant, its heat absorption capacity is stronger, and the radiating effect is more excellent.
Drawings
FIG. 1 is a schematic view of the general structure of a rapid-cooling type planar cathode;
FIG. 2 is a schematic view of a rapid cooling device;
FIG. 3 is a schematic view of the internal structure of the quick cooling device;
1. the cathode body 2, the quick cooling device 21, the upper cover 22, the first side plate 23, the second side plate 24, the water outlet pipe 25, the water inlet pipe 26, the connecting pipe 27 and the fan.
Detailed Description
In order to deepen the understanding of the present invention, the present invention will be further described in detail with reference to the following embodiments and the attached drawings, and the embodiments are only used for explaining the present invention, and do not constitute the limitation to the protection scope of the present invention.
As shown in fig. 1 to 3, a rapid cooling type flat cathode includes a base (not shown) and a cathode body 1 disposed above the base; the lower surface of the cathode body 1 is connected with a quick cooling device 2; the quick cooling device 2 is formed by splicing an upper cover 21, a water inlet pipe 25, a water outlet pipe 24, a lower plate, a first side plate 22 and a second side plate 23, and a cavity is formed inside the quick cooling device 2; a plurality of air inlet holes are formed in the surface of the first side plate 22, two fans 27 are connected to the inner wall of the first side plate 22, and an exhaust slot is formed in the surface of the second side plate 23; the water inlet pipe 25 and the water outlet pipe 24 are respectively positioned at two ends of the quick cooling device 2, and the inlet of the water inlet pipe 25 and the outlet of the water outlet pipe 24 are both connected with rotary joints.
The water inlet pipe 25 is connected with the water outlet pipe 24 through a plurality of connecting pipes 26, the connecting pipes 26 are located in the cavities, one ends of the connecting pipes 26 are connected with the side wall of the water inlet pipe 25, the other ends of the connecting pipes 26 are connected with the side wall of the water outlet pipe 24, a plurality of micropores are formed in the side wall of each connecting pipe 26, and the diameter of each micropore is 0.1-0.5 mm.
And heat-conducting silicone grease is coated between the lower surface of the cathode body 1 and the upper cover 21 of the quick cooling device 2.
The use method comprises the following steps:
1. the quick cooling device 2 is arranged below the cathode body 1, a rotary joint at the end part of a water inlet pipe 25 is connected with a cold water inlet pipe, and a rotary joint at the end part of a water outlet pipe 24 is connected with a cold water outlet pipe;
2. connecting the exhaust groove on the second side plate 23 with the exhaust gas outlet;
3. opening a cold water inlet pipe, wherein the cooling water flows into a water outlet pipe 24 from a water inlet pipe 25 through a connecting pipe 26;
4. cooling water flows out from the micropores on the pipe wall of the connecting pipe 26 and is atomized, and the atomized cooling water absorbs heat on the upper cover;
5. the fan 27 discharges the atomized and vaporized cooling water in the cavity of the rapid cooling device 2 from the exhaust slot.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A quick-cooling type planar cathode is characterized by comprising a base and a cathode body arranged above the base; the lower surface of the cathode body is connected with a quick cooling device; the quick cooling device is formed by splicing an upper cover, a water inlet pipe, a water outlet pipe, a lower plate, a first side plate and a second side plate, and a cavity is formed inside the quick cooling device; the surface of the first side plate is provided with a plurality of air inlet holes, the inner wall of the first side plate is connected with a plurality of fans, and the surface of the second side plate is provided with an exhaust groove; the inlet tube and the outlet pipe be located the both ends of rapid cooling device respectively, link to each other through a plurality of connecting pipe between inlet tube and the outlet pipe, the connecting pipe be located the cavity, the one end of connecting pipe links to each other with the lateral wall of inlet tube, the other end of connecting pipe links to each other with the lateral wall of outlet pipe, is equipped with a plurality of micropore on the lateral wall of connecting pipe.
2. A rapid-cooling type planar cathode according to claim 1, wherein a heat-conductive silicone grease is applied between the lower surface of the cathode body and the upper cover of the rapid-cooling device.
3. A rapid-cooling type planar cathode according to claim 1, wherein the number of said fans is two.
4. A rapid-cooling type planar cathode according to claim 1, wherein the inlet of the water inlet pipe and the outlet of the water outlet pipe are connected with rotary joints.
5. A rapid-cooling type planar cathode according to claim 1, wherein the diameter of said micro-holes is 0.1-0.5 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921114592.4U CN210560707U (en) | 2019-07-17 | 2019-07-17 | Quick-cooling type planar cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921114592.4U CN210560707U (en) | 2019-07-17 | 2019-07-17 | Quick-cooling type planar cathode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210560707U true CN210560707U (en) | 2020-05-19 |
Family
ID=70676211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921114592.4U Expired - Fee Related CN210560707U (en) | 2019-07-17 | 2019-07-17 | Quick-cooling type planar cathode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210560707U (en) |
-
2019
- 2019-07-17 CN CN201921114592.4U patent/CN210560707U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200519 |