CN110398167A - A kind of trunk type support column soaking plate - Google Patents

A kind of trunk type support column soaking plate Download PDF

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Publication number
CN110398167A
CN110398167A CN201910616807.0A CN201910616807A CN110398167A CN 110398167 A CN110398167 A CN 110398167A CN 201910616807 A CN201910616807 A CN 201910616807A CN 110398167 A CN110398167 A CN 110398167A
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CN
China
Prior art keywords
support column
plate
type support
level
tree
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Pending
Application number
CN201910616807.0A
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Chinese (zh)
Inventor
王长宏
王雪
赵雨亭
罗天成
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Guangdong University of Technology
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Guangdong University of Technology
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Priority to CN201910616807.0A priority Critical patent/CN110398167A/en
Publication of CN110398167A publication Critical patent/CN110398167A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • F28D15/046Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • H05K7/20336Heat pipes, e.g. wicks or capillary pumps

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Sustainable Development (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

The present invention relates to the technical field of heat dissipation of high-power microelectronic device, more particularly, to a kind of trunk type support column soaking plate.A kind of trunk type support column soaking plate, including evaporation plate, cold plate and the connecting plate being connected between the evaporation plate and the cold plate, airtight cavity is surrounded between the evaporation plate, connecting plate and cold plate, filled with evaporation working medium in the airtight cavity, several tree-shaped type support columns are provided in the airtight cavity, the tree-shaped type support column is for connecting the evaporation plate and the cold plate.Tree-shaped type support column is provided in the present invention in airtight cavity, tree-shaped type support column is connected on evaporation plate and cold plate, the bifurcated of tree-shaped type support column enables to the working medium of cold plate to be from all directions back in evaporation plate rapidly, solves the problems, such as that working medium back-flow velocity is slow in soaking plate.

Description

A kind of trunk type support column soaking plate
Technical field
The present invention relates to the technical field of heat dissipation of high-power microelectronic device, more particularly, to a kind of trunk type branch Dagger soaking plate.
Background technique
With electronic device high speed, high frequency development, high-power electronic device using more and more extensive, electronic device towards Miniaturization, densification and high performance direction are developed, and the integrated level of electronic chip is also higher and higher, leads to the calorific value day of chip Benefit increases, especially the excessively high problem of local heat flux, has seriously affected the performance of chip, the heat flux of unit area all exists every year Increase, in practice it has proved that, as the crash rate of the rising of electronic device own temperature, itself equipment is exponentially increased, temperature rise 50 DEG C when the service life when there was only 25 DEG C of temperature rise 1/6, adjust difference the result shows that the temperature of single semiconductor element increases 10 DEG C, system can 50% is reduced by property;In addition, electronic device has very high requirement to temperature uniformity, non-uniform Temperature Distribution will lead to electronics Device generates thermal deformation, and temperature is excessively high to will cause electronic device fatigue damage.
In order to solve the problems, such as dissipation from electronic devices uniform temperature and working medium quick backflow, conventional radiating mode have liquid cooling, The certain methods such as air-cooled, free convection is cooling, heat sinking mode have that semiconductor is cooling, synthesizing jet-flow is cooling, liquid metal is cold But, the certain methods such as carbon fiber cooling.However these methods are difficult to meet the radiating requirements of present electronic device, and therefore, heat dissipation Technology also needs developmental research, carries out towards better direction.
Soaking plate is the vacuum cavity that an inner wall has capillary structure, and cavity is evacuated and is filled with working medium, works as heat When by heat source to evaporating area, liquid gasification phenomenon occurs in the environment of rough vacuum for the intracorporal working medium of chamber, and working medium absorbs Thermal energy and rapid spatial expansion, gas-phase working medium is full of entire cavity quickly, when touching condensation end, will coagulate existing As to release thermal energy, the liquid refrigerant after condensation is since the effect of capillary structure flows back into evaporation ends, this process is in cavity Inside in cycles, to reach radiating requirements.The reflux of soaking plate working medium provides capillary force or liquid refrigerant by night core is inhaled Gravity, however there are capillary limitation and liquid refrigerant gravitional force is not enough to allow liquid refrigerant total reflux to evaporation plate, Cause soaking plate heat radiation sam effect bad again.
Therefore, it improves working medium back-flow velocity quickening dissipation from electronic devices uniform temperature and working medium quick backflow is that soaking plate is badly in need of It solves the problems, such as.
Summary of the invention
The present invention is to overcome the problems, such as that working medium back-flow velocity is slow in above-mentioned soaking plate in the prior art, provides a kind of trunk type Support column soaking plate.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: a kind of trunk type support column soaking plate, including Evaporation plate, cold plate and the connecting plate being connected between the evaporation plate and the cold plate, the evaporation plate, connecting plate with And airtight cavity is surrounded between cold plate, filled with evaporation working medium in the airtight cavity, if being provided in the airtight cavity Dry tree-shaped type support column, the tree-shaped type support column is for connecting the evaporation plate and the cold plate.
In the technical scheme, tree-shaped type support column is provided in airtight cavity, tree-shaped type support column is connected to evaporation plate On cold plate, the bifurcated of tree-shaped type support column enables to the working medium of cold plate to be from all directions back in evaporation plate rapidly, Solve the problems, such as that working medium back-flow velocity is slow in soaking plate.
Preferably, several tree-shaped type support columns are uniformly set in the airtight cavity, outside the tree-shaped type support column Surface has capillary structure.In the technical scheme, tree-shaped type support column is uniformly set in airtight cavity, can be made from condensation Plate is back to the working medium in evaporation plate through tree-shaped type support column and is evenly distributed on airtight cavity everywhere, to solve soaking plate Uniform temperature problem.In addition, the capillary structure that the surface of tree-shaped type support column is arranged makes the working medium of gravity deficiency, by with capillary The tree-shaped type support column of structure is drained in evaporation plate, solves the problems, such as that working medium is difficult to flow back.
Preferably, the tree-shaped type support column includes the first order support column being set in evaporation plate, several second level branch Dagger and several third level support columns;One end of the second level support column is connected with first order support column, and described second The other end of grade support column is connected with one end of third level support column, the other end and the cold plate of the third level support column It is connected.In the technical scheme, the setting of several second level support columns and several third level support columns can increase cold plate The range of circulating flow of upper working medium.
Preferably, the second level support column and vertical direction pass through the connection of second level support column and first order support column The angle of the center line at place is 30 ° -80 °.In the technical scheme, second level support column can increase third level support column pair The range of circulating flow of working medium on cold plate.
Preferably, the second level support column and vertical direction pass through the connection of second level support column and first order support column The angle of the center line at place is 45 °.
Preferably, the third level support column and vertical direction pass through the connection of third level support column and second level support column The angle of the center line at place is 30 ° -80 °.Third level support column increases the reflux model of working medium on cold plate in the technical program It encloses.
Preferably, three-level support column and vertical direction pass through in the junction of third level support column and second level support column The angle of heart line is 45 °.
Preferably, the second level support column is four, and the third level support column is four.
Preferably, the first order support column, second level support column and the length of third level support column are successively successively decreased.At this In technical solution, first order support column, second level support column and the length of third level support column are successively successively decreased, and can accelerate to be located at On working medium quick backflow to evaporation plate on cold plate.
Preferably, it is provided with hydrophobic layer on the cold plate inner surface, is provided with hydrophilic painting on the evaporation plate inner surface Layer.In the technical scheme, the hydrophobic layer being arranged on cold plate is conducive to condense in the working medium on cold plate and mutually takes off with cold plate From;The hydrophilic layer being arranged in evaporation plate can increase the time that working medium rests in evaporation plate, convenient for working medium in evaporation process band Walk more heats.
Compared with prior art, beneficial effect is:
Tree-shaped type soaking plate purpose provided by the invention is to accelerate heat dissipation of the working medium back-flow velocity increase to electronic device Rate, its main feature is that tree-shaped type support column surface has the capillary structure of microchannel and support column at different levels can make cold plate four sides The working medium in all directions is back to rapidly evaporation plate, and working medium is made to be evenly distributed on airtight cavity everywhere, to solve soaking plate samming Property problem;Tree-shaped another advantage of type support column is that the capillary structure on surface makes the working medium of gravity deficiency, by with capillary force Tree-shaped type support column is drained to evaporation plate, solves the problems, such as that working medium is difficult to flow back, improves radiating efficiency.
Detailed description of the invention
Fig. 1 is soaking plate exploded view of the present invention;
Fig. 2 is the structural schematic diagram of tree-shaped type support column in the present invention;
Fig. 3 is the structural schematic diagram of evaporation plate in the present invention.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent;In order to better illustrate this embodiment, attached Scheme certain components to have omission, zoom in or out, does not represent the size of actual product;To those skilled in the art, The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing Illustrate, should not be understood as the limitation to this patent.
The same or similar label correspond to the same or similar components in the attached drawing of the embodiment of the present invention;It is retouched in of the invention In stating, it is to be understood that if the orientation or positional relationship for having the instructions such as term " on ", "lower", "left", "right" " length " " short " is It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore describes position in attached drawing The term for setting relationship only for illustration, should not be understood as the limitation to this patent, for the ordinary skill people of this field For member, the concrete meaning of above-mentioned term can be understood as the case may be.
Below by specific embodiment, and in conjunction with attached drawing, technical scheme of the present invention is further described:
Embodiment 1
As shown in Figure 1 to Figure 3, a kind of trunk type support column soaking plate, including evaporate 1, cold plate 2 and be connected to evaporation Connecting plate 3 between plate 1 and cold plate 2 surrounds airtight cavity, airtight cavity between evaporation plate 1, connecting plate 3 and cold plate 2 Interior that several tree-shaped type support columns 4 are provided in airtight cavity filled with working medium is evaporated, tree-shaped type support column 4 is steamed for connecting Send out plate 1 and cold plate 2.Tree-shaped type support column is provided in airtight cavity, tree-shaped type support column 4 is connected to evaporation plate 1 and condensation On plate 2, the bifurcated of tree-shaped type support column 4 enables to the working medium of cold plate 2 to be from all directions back to rapidly in evaporation plate 1, solution The slow problem of working medium back-flow velocity in soaking plate of having determined.
Wherein, several tree-shaped type support columns 4 are uniformly set in airtight cavity, and tree-shaped 4 outer surface of type support column has capillary Structure.Tree-shaped type support column 4 can make uniform from cold plate 2, the working medium being back in evaporation plate 1 through tree-shaped type support column 4 Airtight cavity is distributed in everywhere, to solve the problems, such as soaking plate uniform temperature.In addition, what the surface of tree-shaped type support column 4 was arranged Capillary structure makes the working medium of gravity deficiency, is drained in evaporation plate 1 by the tree-shaped type support column 4 with capillary structure, solves Working medium is difficult to the problem of flowing back.It should be noted that several grooves 5 can be set in evaporation plate 1, tree-shaped type support column 4 can To be set in evaporation plate 1 by groove 5.
In addition, tree-shaped type support column 4 includes the first order support column 41 being set in evaporation plate 1, the support of several second level Column 42 and several third level support columns 43;One end of second level support column 42 is connected with first order support column 41, the second level The other end of support column 42 is connected with one end of third level support column 43, the other end and 2 phase of cold plate of third level support column 43 Even.The setting of several second level support columns 42 and several third level support columns 43 can increase the reflux of working medium on cold plate 2 Range.Proportionate relationship between 43 three of first order support column 41, second level support column 42 and third level support column can be by The overall thickness of soaking plate determines.
Wherein, second level support column 42 and vertical direction pass through the connection of second level support column 42 and first order support column 41 The angle of the center line at place is 30 ° -80 °.Second level support column 42 and vertical direction pass through second level support column 42 and the first order The angle of the center line of the junction of support column 41 is that 45 ° of second level support columns 42 can increase 43 pairs of third level support column condensations The range of circulating flow of working medium on plate 2.
In addition, third level support column 43 and vertical direction pass through the connection of third level support column 43 and second level support column 42 The angle of the center line at place is 30 ° -80 °.Third level support column 43 and vertical direction pass through third level support column 43 and the second level The angle of the center line of the junction of support column 42 is 45 °.Third level support column 43 increases the reflux model of working medium on cold plate 2 It encloses.
Wherein, second level support column 42 is four, and third level support column 43 is four.
In addition, first order support column 41, second level support column 42 and the length of third level support column 43 are successively successively decreased.First Grade support column 41, second level support column 42 and the length of third level support column 43 are successively successively decreased, and can accelerate to be located on cold plate 2 Working medium quick backflow to evaporation plate 1 on.
Wherein, it is provided with hydrophobic layer on 2 inner surface of cold plate, is provided with hydrophilic coating on 1 inner surface of evaporation plate.Cold plate The hydrophobic layer being arranged on 2 is conducive to the working medium condensed on cold plate 2 and is separated with cold plate 2;What is be arranged in evaporation plate 1 is hydrophilic Layer can increase the time that working medium rests in evaporation plate 1, take away more heats in evaporation process convenient for working medium.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention Protection scope within.

Claims (10)

1. a kind of trunk type support column soaking plate, including evaporation plate (1), cold plate (2) and be connected to the evaporation plate (1) with Connecting plate (3) between the cold plate (2) surrounds closed between the evaporation plate (1), connecting plate (3) and cold plate (2) Cavity, the airtight cavity are interior filled with evaporation working medium, it is characterised in that: several tree-shaped types are provided in the airtight cavity Support column (4), the tree-shaped type support column (4) is for connecting the evaporation plate (1) and the cold plate (2).
2. a kind of trunk type support column soaking plate according to claim 1, it is characterised in that: several tree-shaped type supports Column (4) is uniformly set in the airtight cavity, and tree-shaped type support column (4) outer surface has capillary structure.
3. a kind of trunk type support column soaking plate according to claim 1 or 2, it is characterised in that: the tree-shaped type support Column (4) include first order support column (41) on evaporation plate (1), several second level support columns (42) and several the Three-level support column (43);One end of the second level support column (42) is connected with first order support column (41), the second level branch The other end of dagger (42) is connected with one end of third level support column (43), the other end of the third level support column (43) and institute Cold plate (2) are stated to be connected.
4. a kind of trunk type support column soaking plate according to claim 3, it is characterised in that: the second level support column (42) second level support column (42) are passed through with vertical direction and the angle of the center line of the junction of first order support column (41) is 30°—80°。
5. a kind of trunk type support column soaking plate according to claim 4, it is characterised in that: the second level support column (42) second level support column (42) are passed through with vertical direction and the angle of the center line of the junction of first order support column (41) is 45°。
6. a kind of trunk type support column soaking plate according to claim 3, it is characterised in that: the third level support column (43) third level support column (43) are passed through with vertical direction and the angle of the center line of the junction of second level support column (42) is 30°—80°。
7. a kind of trunk type support column soaking plate according to claim 6, it is characterised in that: the third level support column (43) third level support column (43) are passed through with vertical direction and the angle of the center line of the junction of second level support column (42) is 45°。
8. a kind of trunk type support column soaking plate according to claim 3, it is characterised in that: the second level support column It (42) is four, the third level support column (43) is four.
9. a kind of trunk type support column soaking plate according to claim 8, it is characterised in that: the first order support column (41), second level support column (42) and the length of third level support column (43) are successively successively decreased.
10. a kind of trunk type support column soaking plate according to claim 1, it is characterised in that: the interior table of the cold plate (2) It is provided with hydrophobic layer on face, is provided with hydrophilic coating on evaporation plate (1) inner surface.
CN201910616807.0A 2019-07-09 2019-07-09 A kind of trunk type support column soaking plate Pending CN110398167A (en)

Priority Applications (1)

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CN201910616807.0A CN110398167A (en) 2019-07-09 2019-07-09 A kind of trunk type support column soaking plate

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Application Number Priority Date Filing Date Title
CN201910616807.0A CN110398167A (en) 2019-07-09 2019-07-09 A kind of trunk type support column soaking plate

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111380389A (en) * 2020-03-25 2020-07-07 中国科学院理化技术研究所 Vapor chamber
CN113141752A (en) * 2020-09-29 2021-07-20 昆山品岱电子有限公司 Blowing-expanding type soaking structure capable of resisting gravity
CN113154922A (en) * 2021-04-27 2021-07-23 西安交通大学 Bionic phase-change energy-storage steam cavity module
CN114599203A (en) * 2022-01-29 2022-06-07 联想(北京)有限公司 Heat dissipation device and electronic equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070258213A1 (en) * 2006-05-03 2007-11-08 International Business Machines Corporation Apparatuses for dissipating heat from semiconductor devices
CN106152846A (en) * 2016-07-09 2016-11-23 南京艾科美热能科技有限公司 A kind of circulating gas-liquid two-phase flow phase change heat exchanger
CN108105734A (en) * 2017-12-18 2018-06-01 苏州亿拓光电科技有限公司 LED component soaking plate and LED component
CN108119882A (en) * 2017-12-19 2018-06-05 苏州亿拓光电科技有限公司 LED component soaking plate and LED component based on biomimetic features
CN210602935U (en) * 2019-07-09 2020-05-22 广东工业大学 Trunk type support column soaking plate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070258213A1 (en) * 2006-05-03 2007-11-08 International Business Machines Corporation Apparatuses for dissipating heat from semiconductor devices
CN106152846A (en) * 2016-07-09 2016-11-23 南京艾科美热能科技有限公司 A kind of circulating gas-liquid two-phase flow phase change heat exchanger
CN108105734A (en) * 2017-12-18 2018-06-01 苏州亿拓光电科技有限公司 LED component soaking plate and LED component
CN108119882A (en) * 2017-12-19 2018-06-05 苏州亿拓光电科技有限公司 LED component soaking plate and LED component based on biomimetic features
CN210602935U (en) * 2019-07-09 2020-05-22 广东工业大学 Trunk type support column soaking plate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111380389A (en) * 2020-03-25 2020-07-07 中国科学院理化技术研究所 Vapor chamber
CN113141752A (en) * 2020-09-29 2021-07-20 昆山品岱电子有限公司 Blowing-expanding type soaking structure capable of resisting gravity
CN113154922A (en) * 2021-04-27 2021-07-23 西安交通大学 Bionic phase-change energy-storage steam cavity module
CN113154922B (en) * 2021-04-27 2022-12-30 西安交通大学 Bionic phase-change energy-storage steam cavity module
CN114599203A (en) * 2022-01-29 2022-06-07 联想(北京)有限公司 Heat dissipation device and electronic equipment

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