CN110398167A - A kind of trunk type support column soaking plate - Google Patents
A kind of trunk type support column soaking plate Download PDFInfo
- Publication number
- CN110398167A CN110398167A CN201910616807.0A CN201910616807A CN110398167A CN 110398167 A CN110398167 A CN 110398167A CN 201910616807 A CN201910616807 A CN 201910616807A CN 110398167 A CN110398167 A CN 110398167A
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- support column
- plate
- type support
- level
- tree
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- 238000002791 soaking Methods 0.000 title claims abstract description 32
- 238000001704 evaporation Methods 0.000 claims abstract description 49
- 230000008020 evaporation Effects 0.000 claims abstract description 48
- 230000003247 decreasing effect Effects 0.000 claims description 5
- 230000002209 hydrophobic effect Effects 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000017525 heat dissipation Effects 0.000 abstract description 4
- 238000004377 microelectronic Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 238000010992 reflux Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 230000007812 deficiency Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
- F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
- H05K7/20336—Heat pipes, e.g. wicks or capillary pumps
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Sustainable Development (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The present invention relates to the technical field of heat dissipation of high-power microelectronic device, more particularly, to a kind of trunk type support column soaking plate.A kind of trunk type support column soaking plate, including evaporation plate, cold plate and the connecting plate being connected between the evaporation plate and the cold plate, airtight cavity is surrounded between the evaporation plate, connecting plate and cold plate, filled with evaporation working medium in the airtight cavity, several tree-shaped type support columns are provided in the airtight cavity, the tree-shaped type support column is for connecting the evaporation plate and the cold plate.Tree-shaped type support column is provided in the present invention in airtight cavity, tree-shaped type support column is connected on evaporation plate and cold plate, the bifurcated of tree-shaped type support column enables to the working medium of cold plate to be from all directions back in evaporation plate rapidly, solves the problems, such as that working medium back-flow velocity is slow in soaking plate.
Description
Technical field
The present invention relates to the technical field of heat dissipation of high-power microelectronic device, more particularly, to a kind of trunk type branch
Dagger soaking plate.
Background technique
With electronic device high speed, high frequency development, high-power electronic device using more and more extensive, electronic device towards
Miniaturization, densification and high performance direction are developed, and the integrated level of electronic chip is also higher and higher, leads to the calorific value day of chip
Benefit increases, especially the excessively high problem of local heat flux, has seriously affected the performance of chip, the heat flux of unit area all exists every year
Increase, in practice it has proved that, as the crash rate of the rising of electronic device own temperature, itself equipment is exponentially increased, temperature rise 50
DEG C when the service life when there was only 25 DEG C of temperature rise 1/6, adjust difference the result shows that the temperature of single semiconductor element increases 10 DEG C, system can
50% is reduced by property;In addition, electronic device has very high requirement to temperature uniformity, non-uniform Temperature Distribution will lead to electronics
Device generates thermal deformation, and temperature is excessively high to will cause electronic device fatigue damage.
In order to solve the problems, such as dissipation from electronic devices uniform temperature and working medium quick backflow, conventional radiating mode have liquid cooling,
The certain methods such as air-cooled, free convection is cooling, heat sinking mode have that semiconductor is cooling, synthesizing jet-flow is cooling, liquid metal is cold
But, the certain methods such as carbon fiber cooling.However these methods are difficult to meet the radiating requirements of present electronic device, and therefore, heat dissipation
Technology also needs developmental research, carries out towards better direction.
Soaking plate is the vacuum cavity that an inner wall has capillary structure, and cavity is evacuated and is filled with working medium, works as heat
When by heat source to evaporating area, liquid gasification phenomenon occurs in the environment of rough vacuum for the intracorporal working medium of chamber, and working medium absorbs
Thermal energy and rapid spatial expansion, gas-phase working medium is full of entire cavity quickly, when touching condensation end, will coagulate existing
As to release thermal energy, the liquid refrigerant after condensation is since the effect of capillary structure flows back into evaporation ends, this process is in cavity
Inside in cycles, to reach radiating requirements.The reflux of soaking plate working medium provides capillary force or liquid refrigerant by night core is inhaled
Gravity, however there are capillary limitation and liquid refrigerant gravitional force is not enough to allow liquid refrigerant total reflux to evaporation plate,
Cause soaking plate heat radiation sam effect bad again.
Therefore, it improves working medium back-flow velocity quickening dissipation from electronic devices uniform temperature and working medium quick backflow is that soaking plate is badly in need of
It solves the problems, such as.
Summary of the invention
The present invention is to overcome the problems, such as that working medium back-flow velocity is slow in above-mentioned soaking plate in the prior art, provides a kind of trunk type
Support column soaking plate.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: a kind of trunk type support column soaking plate, including
Evaporation plate, cold plate and the connecting plate being connected between the evaporation plate and the cold plate, the evaporation plate, connecting plate with
And airtight cavity is surrounded between cold plate, filled with evaporation working medium in the airtight cavity, if being provided in the airtight cavity
Dry tree-shaped type support column, the tree-shaped type support column is for connecting the evaporation plate and the cold plate.
In the technical scheme, tree-shaped type support column is provided in airtight cavity, tree-shaped type support column is connected to evaporation plate
On cold plate, the bifurcated of tree-shaped type support column enables to the working medium of cold plate to be from all directions back in evaporation plate rapidly,
Solve the problems, such as that working medium back-flow velocity is slow in soaking plate.
Preferably, several tree-shaped type support columns are uniformly set in the airtight cavity, outside the tree-shaped type support column
Surface has capillary structure.In the technical scheme, tree-shaped type support column is uniformly set in airtight cavity, can be made from condensation
Plate is back to the working medium in evaporation plate through tree-shaped type support column and is evenly distributed on airtight cavity everywhere, to solve soaking plate
Uniform temperature problem.In addition, the capillary structure that the surface of tree-shaped type support column is arranged makes the working medium of gravity deficiency, by with capillary
The tree-shaped type support column of structure is drained in evaporation plate, solves the problems, such as that working medium is difficult to flow back.
Preferably, the tree-shaped type support column includes the first order support column being set in evaporation plate, several second level branch
Dagger and several third level support columns;One end of the second level support column is connected with first order support column, and described second
The other end of grade support column is connected with one end of third level support column, the other end and the cold plate of the third level support column
It is connected.In the technical scheme, the setting of several second level support columns and several third level support columns can increase cold plate
The range of circulating flow of upper working medium.
Preferably, the second level support column and vertical direction pass through the connection of second level support column and first order support column
The angle of the center line at place is 30 ° -80 °.In the technical scheme, second level support column can increase third level support column pair
The range of circulating flow of working medium on cold plate.
Preferably, the second level support column and vertical direction pass through the connection of second level support column and first order support column
The angle of the center line at place is 45 °.
Preferably, the third level support column and vertical direction pass through the connection of third level support column and second level support column
The angle of the center line at place is 30 ° -80 °.Third level support column increases the reflux model of working medium on cold plate in the technical program
It encloses.
Preferably, three-level support column and vertical direction pass through in the junction of third level support column and second level support column
The angle of heart line is 45 °.
Preferably, the second level support column is four, and the third level support column is four.
Preferably, the first order support column, second level support column and the length of third level support column are successively successively decreased.At this
In technical solution, first order support column, second level support column and the length of third level support column are successively successively decreased, and can accelerate to be located at
On working medium quick backflow to evaporation plate on cold plate.
Preferably, it is provided with hydrophobic layer on the cold plate inner surface, is provided with hydrophilic painting on the evaporation plate inner surface
Layer.In the technical scheme, the hydrophobic layer being arranged on cold plate is conducive to condense in the working medium on cold plate and mutually takes off with cold plate
From;The hydrophilic layer being arranged in evaporation plate can increase the time that working medium rests in evaporation plate, convenient for working medium in evaporation process band
Walk more heats.
Compared with prior art, beneficial effect is:
Tree-shaped type soaking plate purpose provided by the invention is to accelerate heat dissipation of the working medium back-flow velocity increase to electronic device
Rate, its main feature is that tree-shaped type support column surface has the capillary structure of microchannel and support column at different levels can make cold plate four sides
The working medium in all directions is back to rapidly evaporation plate, and working medium is made to be evenly distributed on airtight cavity everywhere, to solve soaking plate samming
Property problem;Tree-shaped another advantage of type support column is that the capillary structure on surface makes the working medium of gravity deficiency, by with capillary force
Tree-shaped type support column is drained to evaporation plate, solves the problems, such as that working medium is difficult to flow back, improves radiating efficiency.
Detailed description of the invention
Fig. 1 is soaking plate exploded view of the present invention;
Fig. 2 is the structural schematic diagram of tree-shaped type support column in the present invention;
Fig. 3 is the structural schematic diagram of evaporation plate in the present invention.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent;In order to better illustrate this embodiment, attached
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product;To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
The same or similar label correspond to the same or similar components in the attached drawing of the embodiment of the present invention;It is retouched in of the invention
In stating, it is to be understood that if the orientation or positional relationship for having the instructions such as term " on ", "lower", "left", "right" " length " " short " is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore describes position in attached drawing
The term for setting relationship only for illustration, should not be understood as the limitation to this patent, for the ordinary skill people of this field
For member, the concrete meaning of above-mentioned term can be understood as the case may be.
Below by specific embodiment, and in conjunction with attached drawing, technical scheme of the present invention is further described:
Embodiment 1
As shown in Figure 1 to Figure 3, a kind of trunk type support column soaking plate, including evaporate 1, cold plate 2 and be connected to evaporation
Connecting plate 3 between plate 1 and cold plate 2 surrounds airtight cavity, airtight cavity between evaporation plate 1, connecting plate 3 and cold plate 2
Interior that several tree-shaped type support columns 4 are provided in airtight cavity filled with working medium is evaporated, tree-shaped type support column 4 is steamed for connecting
Send out plate 1 and cold plate 2.Tree-shaped type support column is provided in airtight cavity, tree-shaped type support column 4 is connected to evaporation plate 1 and condensation
On plate 2, the bifurcated of tree-shaped type support column 4 enables to the working medium of cold plate 2 to be from all directions back to rapidly in evaporation plate 1, solution
The slow problem of working medium back-flow velocity in soaking plate of having determined.
Wherein, several tree-shaped type support columns 4 are uniformly set in airtight cavity, and tree-shaped 4 outer surface of type support column has capillary
Structure.Tree-shaped type support column 4 can make uniform from cold plate 2, the working medium being back in evaporation plate 1 through tree-shaped type support column 4
Airtight cavity is distributed in everywhere, to solve the problems, such as soaking plate uniform temperature.In addition, what the surface of tree-shaped type support column 4 was arranged
Capillary structure makes the working medium of gravity deficiency, is drained in evaporation plate 1 by the tree-shaped type support column 4 with capillary structure, solves
Working medium is difficult to the problem of flowing back.It should be noted that several grooves 5 can be set in evaporation plate 1, tree-shaped type support column 4 can
To be set in evaporation plate 1 by groove 5.
In addition, tree-shaped type support column 4 includes the first order support column 41 being set in evaporation plate 1, the support of several second level
Column 42 and several third level support columns 43;One end of second level support column 42 is connected with first order support column 41, the second level
The other end of support column 42 is connected with one end of third level support column 43, the other end and 2 phase of cold plate of third level support column 43
Even.The setting of several second level support columns 42 and several third level support columns 43 can increase the reflux of working medium on cold plate 2
Range.Proportionate relationship between 43 three of first order support column 41, second level support column 42 and third level support column can be by
The overall thickness of soaking plate determines.
Wherein, second level support column 42 and vertical direction pass through the connection of second level support column 42 and first order support column 41
The angle of the center line at place is 30 ° -80 °.Second level support column 42 and vertical direction pass through second level support column 42 and the first order
The angle of the center line of the junction of support column 41 is that 45 ° of second level support columns 42 can increase 43 pairs of third level support column condensations
The range of circulating flow of working medium on plate 2.
In addition, third level support column 43 and vertical direction pass through the connection of third level support column 43 and second level support column 42
The angle of the center line at place is 30 ° -80 °.Third level support column 43 and vertical direction pass through third level support column 43 and the second level
The angle of the center line of the junction of support column 42 is 45 °.Third level support column 43 increases the reflux model of working medium on cold plate 2
It encloses.
Wherein, second level support column 42 is four, and third level support column 43 is four.
In addition, first order support column 41, second level support column 42 and the length of third level support column 43 are successively successively decreased.First
Grade support column 41, second level support column 42 and the length of third level support column 43 are successively successively decreased, and can accelerate to be located on cold plate 2
Working medium quick backflow to evaporation plate 1 on.
Wherein, it is provided with hydrophobic layer on 2 inner surface of cold plate, is provided with hydrophilic coating on 1 inner surface of evaporation plate.Cold plate
The hydrophobic layer being arranged on 2 is conducive to the working medium condensed on cold plate 2 and is separated with cold plate 2;What is be arranged in evaporation plate 1 is hydrophilic
Layer can increase the time that working medium rests in evaporation plate 1, take away more heats in evaporation process convenient for working medium.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (10)
1. a kind of trunk type support column soaking plate, including evaporation plate (1), cold plate (2) and be connected to the evaporation plate (1) with
Connecting plate (3) between the cold plate (2) surrounds closed between the evaporation plate (1), connecting plate (3) and cold plate (2)
Cavity, the airtight cavity are interior filled with evaporation working medium, it is characterised in that: several tree-shaped types are provided in the airtight cavity
Support column (4), the tree-shaped type support column (4) is for connecting the evaporation plate (1) and the cold plate (2).
2. a kind of trunk type support column soaking plate according to claim 1, it is characterised in that: several tree-shaped type supports
Column (4) is uniformly set in the airtight cavity, and tree-shaped type support column (4) outer surface has capillary structure.
3. a kind of trunk type support column soaking plate according to claim 1 or 2, it is characterised in that: the tree-shaped type support
Column (4) include first order support column (41) on evaporation plate (1), several second level support columns (42) and several the
Three-level support column (43);One end of the second level support column (42) is connected with first order support column (41), the second level branch
The other end of dagger (42) is connected with one end of third level support column (43), the other end of the third level support column (43) and institute
Cold plate (2) are stated to be connected.
4. a kind of trunk type support column soaking plate according to claim 3, it is characterised in that: the second level support column
(42) second level support column (42) are passed through with vertical direction and the angle of the center line of the junction of first order support column (41) is
30°—80°。
5. a kind of trunk type support column soaking plate according to claim 4, it is characterised in that: the second level support column
(42) second level support column (42) are passed through with vertical direction and the angle of the center line of the junction of first order support column (41) is
45°。
6. a kind of trunk type support column soaking plate according to claim 3, it is characterised in that: the third level support column
(43) third level support column (43) are passed through with vertical direction and the angle of the center line of the junction of second level support column (42) is
30°—80°。
7. a kind of trunk type support column soaking plate according to claim 6, it is characterised in that: the third level support column
(43) third level support column (43) are passed through with vertical direction and the angle of the center line of the junction of second level support column (42) is
45°。
8. a kind of trunk type support column soaking plate according to claim 3, it is characterised in that: the second level support column
It (42) is four, the third level support column (43) is four.
9. a kind of trunk type support column soaking plate according to claim 8, it is characterised in that: the first order support column
(41), second level support column (42) and the length of third level support column (43) are successively successively decreased.
10. a kind of trunk type support column soaking plate according to claim 1, it is characterised in that: the interior table of the cold plate (2)
It is provided with hydrophobic layer on face, is provided with hydrophilic coating on evaporation plate (1) inner surface.
Priority Applications (1)
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CN201910616807.0A CN110398167A (en) | 2019-07-09 | 2019-07-09 | A kind of trunk type support column soaking plate |
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CN201910616807.0A CN110398167A (en) | 2019-07-09 | 2019-07-09 | A kind of trunk type support column soaking plate |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111380389A (en) * | 2020-03-25 | 2020-07-07 | 中国科学院理化技术研究所 | Vapor chamber |
CN113141752A (en) * | 2020-09-29 | 2021-07-20 | 昆山品岱电子有限公司 | Blowing-expanding type soaking structure capable of resisting gravity |
CN113154922A (en) * | 2021-04-27 | 2021-07-23 | 西安交通大学 | Bionic phase-change energy-storage steam cavity module |
CN114599203A (en) * | 2022-01-29 | 2022-06-07 | 联想(北京)有限公司 | Heat dissipation device and electronic equipment |
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CN108105734A (en) * | 2017-12-18 | 2018-06-01 | 苏州亿拓光电科技有限公司 | LED component soaking plate and LED component |
CN108119882A (en) * | 2017-12-19 | 2018-06-05 | 苏州亿拓光电科技有限公司 | LED component soaking plate and LED component based on biomimetic features |
CN210602935U (en) * | 2019-07-09 | 2020-05-22 | 广东工业大学 | Trunk type support column soaking plate |
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2019
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US20070258213A1 (en) * | 2006-05-03 | 2007-11-08 | International Business Machines Corporation | Apparatuses for dissipating heat from semiconductor devices |
CN106152846A (en) * | 2016-07-09 | 2016-11-23 | 南京艾科美热能科技有限公司 | A kind of circulating gas-liquid two-phase flow phase change heat exchanger |
CN108105734A (en) * | 2017-12-18 | 2018-06-01 | 苏州亿拓光电科技有限公司 | LED component soaking plate and LED component |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN111380389A (en) * | 2020-03-25 | 2020-07-07 | 中国科学院理化技术研究所 | Vapor chamber |
CN113141752A (en) * | 2020-09-29 | 2021-07-20 | 昆山品岱电子有限公司 | Blowing-expanding type soaking structure capable of resisting gravity |
CN113154922A (en) * | 2021-04-27 | 2021-07-23 | 西安交通大学 | Bionic phase-change energy-storage steam cavity module |
CN113154922B (en) * | 2021-04-27 | 2022-12-30 | 西安交通大学 | Bionic phase-change energy-storage steam cavity module |
CN114599203A (en) * | 2022-01-29 | 2022-06-07 | 联想(北京)有限公司 | Heat dissipation device and electronic equipment |
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