CN210560692U - Cooling device for high-vacuum coating machine of capacitor - Google Patents
Cooling device for high-vacuum coating machine of capacitor Download PDFInfo
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- CN210560692U CN210560692U CN201921580279.XU CN201921580279U CN210560692U CN 210560692 U CN210560692 U CN 210560692U CN 201921580279 U CN201921580279 U CN 201921580279U CN 210560692 U CN210560692 U CN 210560692U
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- water
- coating machine
- guide pipe
- cooling
- vacuum coating
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- 238000001816 cooling Methods 0.000 title claims abstract description 55
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 31
- 239000003990 capacitor Substances 0.000 title claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 97
- 238000005057 refrigeration Methods 0.000 claims abstract description 36
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 31
- 239000004065 semiconductor Substances 0.000 claims abstract description 20
- 238000009434 installation Methods 0.000 claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 6
- 239000007888 film coating Substances 0.000 claims description 3
- 238000009501 film coating Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract description 10
- 238000000576 coating method Methods 0.000 abstract description 10
- 239000004411 aluminium Substances 0.000 abstract description 6
- 235000017166 Bambusa arundinacea Nutrition 0.000 abstract description 4
- 235000017491 Bambusa tulda Nutrition 0.000 abstract description 4
- 241001330002 Bambuseae Species 0.000 abstract description 4
- 235000015334 Phyllostachys viridis Nutrition 0.000 abstract description 4
- 239000011425 bamboo Substances 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 abstract description 4
- 230000009471 action Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Abstract
The utility model discloses a condenser is cooling device for high vacuum coating machine, including storage water tank, suction pump, drain pipe, installation section of thick bamboo, fixed block, cooling pipe, aluminium system heat conduction section of thick bamboo, gear circle, cylindrical gear, step motor, semiconductor refrigeration piece, inlet tube, water valve, first aqueduct, refrigeration case, ice cube box, second aqueduct, ice cube layer and coating machine main part. The utility model can better make the aluminum heat conducting cylinder fully contact with the cooling conduit, so that the cooling conduit can better and more comprehensively refrigerate the aluminum heat conducting cylinder, thereby better cooling the vacuum coating machine and greatly improving the cooling speed; better carry out the cooling of secondary different degree to vacuum coating machine, avoided being too big to cause the influence to vacuum coating machine cooling temperature difference, very big improvement vacuum coating machine's life, also strengthened the practicality simultaneously.
Description
Technical Field
The utility model relates to a cooling device specifically is a condenser cooling device for high vacuum coating machine belongs to vacuum coating machine technical field.
Background
The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, and the vacuum coating machine can generate a large amount of heat during working and needs to be timely and effectively cooled to ensure normal working of the vacuum coating machine.
When present dispel the heat to vacuum coating machine, the pipe is welded at vacuum coating machine cavity outside surface mostly, cools off through cooling water in the pipe, so because the pipe is more limited with the scope of vacuum coating machine contact to the speed is more slow down in the cooling, and the cooling is untimely, leads to vacuum coating machine very easily to damage because of the high temperature. Therefore, the cooling device for the high vacuum coating machine of the capacitor is provided for solving the problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the above problems and provide a cooling device for a high vacuum coating machine of a capacitor.
The utility model realizes the above purpose by the following technical proposal, a cooling device for a capacitor high vacuum coating machine comprises a water storage tank, the top end of the water storage tank is fixedly connected with an installation cylinder, the installation cylinder is rotationally connected with an aluminum heat conduction cylinder through a bearing arranged at the top end of the inner cavity of the installation cylinder, the surface of the inner side wall of the aluminum heat conduction cylinder is in sliding contact with a coating machine main body, and the coating machine main body is in contact with the top end of the water storage tank, the installation cylinder is fixedly connected with a cooling conduit through a fixed block arranged on the inner wall of the installation cylinder, the surface of the cooling conduit is in sliding contact with the surface of the aluminum heat conduction cylinder, the bottom end of the cooling conduit is fixedly connected with a drain pipe, the bottom end of the drain pipe penetrates through the top end of the water storage tank and extends to the inner cavity of the water, and the power input end of the transmission assembly is connected with the driving shaft on the driving end of the stepping motor, the water suction pump is installed in the inner cavity of the water storage tank, the second water guide pipe is fixedly connected with the second water guide pipe through a three-way pipe installed on the surface of the second water guide pipe, water valves are arranged on the surfaces of the first water guide pipe and the second water guide pipe, one end of the water storage tank is fixedly connected with a refrigeration box, the first water guide pipe and the second water guide pipe penetrate through the inner cavity of the refrigeration box and are connected with a three-way pipe installed on the surface of the water inlet pipe, and a refrigeration mechanism for refrigerating the first water guide pipe and the second water guide pipe is installed in the inner cavity of the refrigeration box.
Preferably, transmission assembly comprises gear circle and cylindrical gear, the gear circle is installed on aluminium system heat-conducting cylinder surface, cylindrical gear installs in the drive shaft on the step motor drive end, and gear circle and cylindrical gear meshing.
Preferably, refrigerating mechanism comprises semiconductor refrigeration piece, ice-cube box and ice-cube layer, the semiconductor refrigeration piece is installed on refrigeration incasement lateral wall, the heat absorption end of semiconductor refrigeration piece is located refrigeration incasement chamber, and the end of giving out heat of semiconductor refrigeration piece is located refrigeration incasement portion, ice-cube box one end is connected with refrigeration incasement lateral wall, the ice-cube layer is filled in the ice-cube box.
Preferably, one section of the second water guide pipe is of a folded structure, and the folded structure section of the second water guide pipe is located in the inner cavity of the ice cube box.
Preferably, the cooling conduit is of a spiral structure, and the cooling conduit of the spiral structure is wound on the surface of the aluminum heat-conducting cylinder.
The utility model has the advantages that:
1. through setting up mutually supporting between cooling conduit, aluminium system heat-conducting cylinder, gear circle and the cylindrical gear, messenger aluminium system heat-conducting cylinder that can be better and cooling conduit fully contact, make cooling conduit better, more comprehensive refrigerate aluminium system heat-conducting cylinder to can be better cool off vacuum coating machine, very big improvement the cooling rate.
2. Through setting up mutually supporting between first aqueduct, second aqueduct, ice-cube layer and the semiconductor refrigeration piece, better carry out the cooling of the different degree of secondary to vacuum coating machine, avoided being the too big influence that causes of temperature difference to vacuum coating machine cooling, very big improvement vacuum coating machine's life, also strengthened the practicality simultaneously.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic overall top view of the present invention;
fig. 3 is a schematic view of the connection between the aluminum heat conducting tube and the cooling duct of the present invention.
In the figure: 1. the device comprises a water storage tank, 2, a water suction pump, 3, a water discharge pipe, 4, an installation cylinder, 5, a fixing block, 6, a cooling guide pipe, 7, an aluminum heat conduction cylinder, 8, a gear ring, 9, a cylindrical gear, 10, a stepping motor, 11, a semiconductor refrigeration sheet, 12, a water inlet pipe, 13, a water valve, 14, a first water guide pipe, 15, a refrigeration box, 16, an ice cube box, 17, a second water guide pipe, 18, an ice cube layer, 19 and a film coating machine main body.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the embodiments described below are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Referring to fig. 1-3, a cooling device for a high vacuum coating machine of a capacitor comprises a water storage tank 1, wherein a mounting cylinder 4 is fixedly connected to the top end of the water storage tank 1, the mounting cylinder 4 is rotatably connected with an aluminum heat conduction cylinder 7 through a bearing mounted at the top end of the inner cavity of the mounting cylinder 4, a coating machine main body 19 is in sliding contact with the surface of the inner side wall of the aluminum heat conduction cylinder 7, the coating machine main body 19 is in contact with the top end of the water storage tank 1, the mounting cylinder 4 is fixedly connected with a cooling conduit 6 through a fixing block 5 mounted on the inner wall of the mounting cylinder 4, the surface of the cooling conduit 6 is in sliding contact with the surface of the aluminum heat conduction cylinder 7, the bottom end of the cooling conduit 6 is fixedly connected with a drain pipe 3, the bottom end of the drain pipe 3 penetrates through the top end of the, the utility model discloses a refrigerator, including installation section of thick bamboo 4, suction pump 2, water discharge end fixedly connected with second aqueduct 17, second aqueduct 17 is through installing first aqueduct 14 of three-way pipe fixedly connected with on second aqueduct 17 surface, first aqueduct 14 and second aqueduct 17 surface all are equipped with water valve 13, 1 one end fixedly connected with refrigeration case 15 of storage water tank, and first aqueduct 14 and second aqueduct 17 run through refrigeration case 15 inner chamber and are connected with the three-way pipe of installing on inlet tube 12 surface, refrigeration mechanism that refrigerates first aqueduct 14 and second aqueduct 17 is installed to refrigeration case 15 inner chamber, drive aluminium system heat conduction section of thick bamboo 7 and carry out the pivoted drive assembly, and drive assembly's power input end and step motor 10 drive shaft connection on the drive end, water storage water tank 1 inner chamber is installed with water pump.
The transmission assembly consists of a gear ring 8 and a cylindrical gear 9, the gear ring 8 is installed on the surface of the aluminum heat conducting cylinder 7, the cylindrical gear 9 is installed on a driving shaft on the driving end of the stepping motor 10, and the gear ring 8 is meshed with the cylindrical gear 9; the refrigerating mechanism comprises a semiconductor refrigerating sheet 11, an ice cube box 16 and an ice cube layer 18, the semiconductor refrigerating sheet 11 is installed on the inner side wall of the refrigerating box 15, the heat absorbing end of the semiconductor refrigerating sheet 11 is located in the inner cavity of the refrigerating box 15, the heat releasing end of the semiconductor refrigerating sheet 11 is located outside the refrigerating box 15, one end of the ice cube box 16 is connected with the inner side wall of the refrigerating box 15, and the ice cube layer 18 is filled in the ice cube box 16; one section of the second water guide pipe 17 is of a folded structure, and the folded structure section of the second water guide pipe 17 is positioned in the inner cavity of the ice cube box 16, so that the cooling time of the second water guide pipe 17 is prolonged; the cooling conduit 6 is of a spiral structure, and the cooling conduit 6 of the spiral structure is wound on the surface of the aluminum heat-conducting cylinder 7, so that the cooling conduit is in full contact with the rotating aluminum heat-conducting cylinder 7.
When the utility model is used, the electrical components in the application are externally connected with a power supply and a control switch, when the coating machine is cooled and radiated, firstly, the stepping motor 10 is started, the drive end of the stepping motor 10 drives the cylindrical gear 9 to rotate through the drive shaft, the cylindrical gear 9 drives the aluminum heat conducting cylinder 7 to rotate through the gear ring 8, then the water valve 13 on the first water guide pipe 14, the semiconductor refrigerating sheet 11 and the water pump 2 are started, the water in the water storage tank 1 is guided into the first water guide pipe 14 through the second water guide pipe 17 by the water pump 2, when the water in the first water guide pipe 14 is refrigerated through the box 15, the water in the first water guide pipe 14 is refrigerated under the action of the semiconductor refrigerating sheet 11, so that the refrigerated water in the first water guide pipe 14 is guided into the cooling guide pipe 6 through the water inlet pipe 12, and the cold water in the cooling guide pipe 6 fully refrigerates the rotating aluminum heat conducting cylinder 7, so that the refrigerated aluminum heat conducting cylinder 7 can carry out primary buffer refrigeration on the coating machine main body 19, after one end of refrigeration time, then the water valve 13 on the first water guiding pipe 14 is closed, and simultaneously the water valve 13 on the second water guiding pipe 17 is opened, so that the water in the water storage tank 1 is guided into the second water guide pipe 17 by the water suction pump 2, the water in the second water guide pipe 17 is highly refrigerated under the action of the semiconductor refrigeration sheet 11 and the ice block layer 18, the highly refrigerated water in the second water guide pipe 17 is guided into the cooling guide pipe 6 through the water inlet pipe 12, the cold water in the cooling guide pipe 6 performs high refrigeration of the components on the rotating aluminum heat conduction cylinder 7, and the refrigerated aluminum heat conduction cylinder 7 performs high refrigeration on the coating machine main body 19, therefore, the vacuum coating machine is cooled twice at different degrees, and the influence of overlarge temperature difference on the cooling of the vacuum coating machine is avoided, so that the cooling and heat dissipation of the coating machine are completed.
The stepping motors 10 are all YVP90L-4 stepping motors manufactured by Suma motors of Nanjing, and supporting circuits thereof can be provided by merchants.
The water pump 2 adopts a ZB-400A water pump produced by Yidihao electromechanical Limited liability company of Nanning and a related matched power supply and circuit thereof.
The semiconductor refrigerating piece 11 adopts a TEC-12703 semiconductor refrigerating piece produced by Shenzhen thermoelectric New energy science and technology Limited company and a related matched power supply and circuit thereof.
It is well within the skill of those in the art to implement, without undue experimentation, the present invention does not relate to software and process improvements, as related to circuits and electronic components and modules.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (5)
1. The utility model provides a condenser is cooling device for high vacuum coating machine, includes storage water tank (1), its characterized in that: the water storage tank is characterized in that an installation cylinder (4) is fixedly connected to the top end of the water storage tank (1), the installation cylinder (4) is connected with an aluminum heat conduction cylinder (7) through a bearing installed on the top end of an inner cavity of the installation cylinder (4) in a rotating mode, a film coating machine main body (19) is in surface sliding contact with the inner side wall of the aluminum heat conduction cylinder (7), the film coating machine main body (19) is in top contact with the water storage tank (1), the installation cylinder (4) is fixedly connected with a cooling guide pipe (6) through a fixing block (5) installed on the inner wall of the installation cylinder (4), the surface of the cooling guide pipe (6) is in surface sliding contact with the aluminum heat conduction cylinder (7), a drain pipe (3) is fixedly connected to the bottom end of the cooling guide pipe (6), the bottom end of the drain pipe (3) penetrates through the, the water-cooling type water heater is characterized in that a stepping motor (10) is installed at the top end of the installation cylinder (4), a transmission assembly for driving an aluminum heat conduction cylinder (7) to rotate is installed in the inner cavity of the installation cylinder (4), the power input end of the transmission assembly is connected with a driving shaft on the driving end of the stepping motor (10), a water suction pump (2) is installed in the inner cavity of the water storage tank (1), a second water guide pipe (17) is fixedly connected with the water discharge end of the water suction pump (2), a first water guide pipe (14) is fixedly connected with the second water guide pipe (17) through a three-way pipe installed on the surface of the second water guide pipe (17), water valves (13) are arranged on the surfaces of the first water guide pipe (14) and the second water guide pipe (17), a refrigeration box (15) is fixedly connected with one end of the water storage tank (1), and the first water guide pipe (14) and the second water guide pipe (17, and a refrigerating mechanism for refrigerating the first water guide pipe (14) and the second water guide pipe (17) is arranged in the inner cavity of the refrigerating box (15).
2. The cooling device for the high vacuum coating machine of the capacitor as claimed in claim 1, wherein: the transmission assembly comprises a gear ring (8) and a cylindrical gear (9), the gear ring (8) is installed on the surface of the aluminum heat conducting cylinder (7), the cylindrical gear (9) is installed on a driving shaft on the driving end of the stepping motor (10), and the gear ring (8) is meshed with the cylindrical gear (9).
3. The cooling device for the high vacuum coating machine of the capacitor as claimed in claim 1, wherein: refrigeration mechanism comprises semiconductor refrigeration piece (11), ice-cube box (16) and ice cube layer (18), semiconductor refrigeration piece (11) are installed on refrigeration case (15) inside wall, the heat absorption end of semiconductor refrigeration piece (11) is located refrigeration case (15) inner chamber, and the end of giving out heat of semiconductor refrigeration piece (11) is located refrigeration case (15) outside, ice cube box (16) one end is connected with refrigeration case (15) inside wall, ice cube layer (18) are filled in ice cube box (16).
4. The cooling device for the high vacuum coating machine of the capacitor as claimed in claim 1, wherein: one section of the second water guide pipe (17) is of a folded structure, and the folded structure section of the second water guide pipe (17) is positioned in the inner cavity of the ice cube box (16).
5. The cooling device for the high vacuum coating machine of the capacitor as claimed in claim 1, wherein: the cooling conduit (6) is of a spiral structure, and the cooling conduit (6) of the spiral structure is wound on the surface of the aluminum heat-conducting cylinder (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921580279.XU CN210560692U (en) | 2019-09-21 | 2019-09-21 | Cooling device for high-vacuum coating machine of capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921580279.XU CN210560692U (en) | 2019-09-21 | 2019-09-21 | Cooling device for high-vacuum coating machine of capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210560692U true CN210560692U (en) | 2020-05-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921580279.XU Active CN210560692U (en) | 2019-09-21 | 2019-09-21 | Cooling device for high-vacuum coating machine of capacitor |
Country Status (1)
| Country | Link |
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| CN (1) | CN210560692U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113061848A (en) * | 2021-03-25 | 2021-07-02 | 南京昀光科技有限公司 | Evaporation source |
-
2019
- 2019-09-21 CN CN201921580279.XU patent/CN210560692U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113061848A (en) * | 2021-03-25 | 2021-07-02 | 南京昀光科技有限公司 | Evaporation source |
| CN113061848B (en) * | 2021-03-25 | 2023-03-10 | 南京昀光科技有限公司 | Evaporation source |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A cooling device for high vacuum coating machine of capacitor Effective date of registration: 20230224 Granted publication date: 20200519 Pledgee: Anhui Nanling Rural Commercial Bank Co.,Ltd. Huimin Road Sub branch Pledgor: Wuhu Xinguo Electronic Technology Co.,Ltd. Registration number: Y2023980033319 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20200519 Pledgee: Anhui Nanling Rural Commercial Bank Co.,Ltd. Huimin Road Sub branch Pledgor: Wuhu Xinguo Electronic Technology Co.,Ltd. Registration number: Y2023980033319 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |