CN210546647U - Device cleaning device of semiconductor equipment - Google Patents
Device cleaning device of semiconductor equipment Download PDFInfo
- Publication number
- CN210546647U CN210546647U CN201921462802.9U CN201921462802U CN210546647U CN 210546647 U CN210546647 U CN 210546647U CN 201921462802 U CN201921462802 U CN 201921462802U CN 210546647 U CN210546647 U CN 210546647U
- Authority
- CN
- China
- Prior art keywords
- cleaning
- semiconductor equipment
- pond
- reposition
- wash
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 56
- 239000004065 semiconductor Substances 0.000 title claims abstract description 38
- 239000007921 spray Substances 0.000 claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 238000003466 welding Methods 0.000 claims abstract description 4
- 238000005406 washing Methods 0.000 claims description 4
- 238000005201 scrubbing Methods 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000010865 sewage Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Cleaning In General (AREA)
Abstract
The utility model discloses a device belt cleaning device of semiconductor equipment, including wasing pond, loading board and reposition of redundant personnel spray tube, it is rectangle box structure to wash the pond, just it has all welded the supporting legs to wash pond bottom face four corners, it has the supporting shoe to wash pond both sides inner wall symmetry welding, and two sets of supporting shoe top face installs the loading board that is used for placing the semiconductor equipment device through bolt thread fixed mounting, be provided with metal elasticity filter screen in the middle of the loading board bottom face, and metal elasticity filter screen runs through to loading board bottom face, it is provided with the reposition of redundant personnel spray tube that is used for wasing the semiconductor equipment device between the inner wall to wash pond both sides symmetry, just a side symmetry of reposition of redundant personnel spray tube orientation loading board is provided with N group's shower nozzle, a side intermediate position of. The device cleaning device of the semiconductor equipment can facilitate the overturning cleaning of the device and improve the cleaning efficiency.
Description
Technical Field
The utility model belongs to the technical field of semiconductor equipment, concretely relates to device belt cleaning device of semiconductor equipment.
Background
Semiconductor devices are electronic devices that have electrical conductivity between a good electrical conductor and an insulator, and that use the special electrical properties of semiconductor materials to perform specific functions, and can be used to generate, control, receive, convert, amplify signals, and perform energy conversion. The semiconductor material of the semiconductor device is silicon, germanium or gallium arsenide, and can be used as a material for a rectifier, an oscillator, a light emitter, an amplifier, a photodetector, or the like. For the purpose of distinction from integrated circuits, they are sometimes also referred to as discrete devices. The basic structure of most two-terminal devices (i.e., crystal diodes) is a PN junction.
With the characteristics of miniaturization and high integration of electronic devices, residual impurity particles on semiconductor devices are usually small, and the existing direct water flow washing mode cannot meet the cleaning requirement of semiconductor equipment devices and can meet the cleaning requirement only when the devices are cleaned in motion.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor equipment's device belt cleaning device to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the device cleaning device for the semiconductor equipment comprises a cleaning pool, a bearing plate and a shunting spray pipe, wherein the cleaning pool is of a rectangular box structure, supporting legs are welded at four corners of the bottom end surface of the cleaning pool, supporting blocks are symmetrically welded on the inner walls of two sides of the cleaning pool, and the bearing plate for placing the semiconductor equipment device is fixedly installed on the top end surfaces of the two groups of supporting blocks through bolt threads;
be provided with metal elasticity filter screen in the middle of the loading board bottom face, and metal elasticity filter screen runs through to loading board bottom face, it is provided with the reposition of redundant personnel spray tube that is used for wasing the semiconductor equipment device to wash between the pond bilateral symmetry inner wall, just the reposition of redundant personnel spray tube is provided with N group's shower nozzle towards a side symmetry of loading board, a side intermediate position of reposition of redundant personnel spray tube shower nozzle dorsad runs through there is the connecting pipe, it has step motor to wash a pond side through bolt screw thread fixed mounting, step motor's output shaft runs through to wash in the pond and has the pivot through retarder connection, the pivot is located under the loading board is perpendicular, and N group's eccentric wheel has been cup jointed in pivot week side, the eccentric end.
Preferably, it is provided with first electronic slide rail to wash the equal symmetry of pond both sides inner wall, and two sets of equal sliding connection has the slider in the first electronic slide rail, slider and reposition of redundant personnel spray tube both ends fixed connection, just be located and wash the pond inner wall and all have the electronic slide rail of second through bolt screw thread fixed mounting under the reposition of redundant personnel spray tube is perpendicular, sliding connection has the slide between the electronic slide rail of second, slide bottom face is provided with the brush that is used for scrubbing the semiconductor equipment device.
Preferably, the inner bottom end surface of the cleaning pool is provided with an inclined slope body, a drain pipe is vertically arranged between the inclined slope bodies on the two sides, and a ball valve is arranged in the drain pipe.
Preferably, the side welding that step motor was kept away from in the washing pond has the triangular supports frame, wash the pond inner wall and be located loading board one end and seted up the export, and be provided with the protection piece that drives the pull ring in the export, protection piece and triangular supports frame parallel and level.
Preferably, the rotating shaft is circumferentially arranged and positioned on two sides of the eccentric wheel, fixed sleeves are fixedly installed on the two sides of the eccentric wheel through fastening bolts in a threaded mode, and the two ends of the rotating shaft are connected with the cleaning pool through bearings.
The utility model discloses a technological effect and advantage: according to the device cleaning device of the semiconductor equipment, the shunting spray pipe, the bearing plate, the metal elastic filter screen and the eccentric wheel are arranged, the semiconductor equipment device is placed on the metal elastic filter screen, the stepping motor drives the rotating shaft and the eccentric wheel to rotate, and the eccentric wheel collides with the metal elastic filter screen, so that the device on the metal elastic filter screen is turned over and cleaned by the shunting spray pipe, the device is convenient to turn over and clean, and the cleaning efficiency is improved; the first electric slide rail drives the shunt spray pipe to move through the slide block so as to clean devices at different positions, and the second electric slide rail drives the slide plate and the hairbrush to move so as to clean impurity particles of the devices conveniently; the slope body and the drain pipe are arranged, so that sewage can be conveniently discharged from the drain pipe; the device cleaning device of the semiconductor equipment can facilitate the overturning cleaning of the device and improve the cleaning efficiency.
Drawings
FIG. 1 is a cross-sectional view of a cleaning tank of the present invention;
FIG. 2 is a partial cross-sectional view of the cleaning tank of the present invention;
fig. 3 is a schematic view of the fixing sleeve structure of the present invention.
In the figure: the device comprises a cleaning pool 1, a bearing plate 2, a flow dividing spray pipe 3, supporting legs 4, supporting blocks 5, a second electric slide rail 6, a sliding plate 7, a sliding block 8, a first electric slide rail 9, a hairbrush 10, a stepping motor 11, an eccentric wheel 12, a fixed sleeve 13, a drain pipe 14, a protective block 15, a triangular supporting frame 16, a fastening bolt 17 and a rotating shaft 18.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a device cleaning device of semiconductor equipment as shown in figures 1-3, which comprises a cleaning pool 1, a bearing plate 2 and a shunting spray pipe 3, wherein the cleaning pool 1 is of a rectangular box structure, supporting legs 4 are welded at four corners of the bottom end surface of the cleaning pool 1, supporting blocks 5 are symmetrically welded on the inner walls at two sides of the cleaning pool 1, and the top end surfaces of the two groups of supporting blocks 5 are fixedly provided with the bearing plate 2 for placing semiconductor equipment devices through bolt threads;
a metal elastic filter screen is arranged in the middle of the bottom end face of the bearing plate 2 and penetrates through the bearing plate 2, a shunt spray pipe 3 for cleaning semiconductor equipment devices is arranged between the symmetrical inner walls at two sides of the cleaning pool 1, N groups of spray heads are symmetrically arranged on one side face of the shunt spray pipe 3 facing the bearing plate 2, a connecting pipe penetrates through the middle position of one side face of the shunt spray pipe 3 opposite to the spray heads, a stepping motor 11 is fixedly arranged on one side face of the cleaning pool 1 through bolt threads, an output shaft of the stepping motor 11 penetrates into the cleaning pool 1 and is connected with a rotating shaft 18 through a speed reducer, the rotating shaft 18 is positioned under the bearing plate 2 vertically, N groups of eccentric wheels 12 are sleeved on the periphery of the rotating shaft 18, the eccentric ends of the eccentric wheels 12 are in contact with the metal elastic filter screen of the bearing plate 2, and the semiconductor equipment devices are placed, the stepping motor 11 drives the rotating shaft 18 and the eccentric wheel 12 to rotate, and the eccentric wheel 12 collides with the metal elastic filter screen, so that the device on the metal elastic filter screen is turned over and cleaned by the shunting spray pipe 3, the device is convenient to turn over and clean, and the cleaning efficiency is improved.
It is specific, it is provided with first electronic slide rail 9 to wash 1 both sides inner wall of pond equal symmetry, and two sets of equal sliding connection has slider 8 in the first electronic slide rail 9, slider 8 and 3 both ends fixed connection of reposition of redundant personnel spray tube, just be located under 3 perpendicular of reposition of redundant personnel spray tube and wash 1 inner wall in pond and all install the electronic slide rail 6 of second through bolt thread fixed mounting, sliding connection has slide 7 between the electronic slide rail 6 of second, 7 bottom faces of slide are provided with the brush 10 that is used for scrubbing semiconductor equipment device, and first electronic slide rail 9 drives reposition of redundant personnel spray tube 3 through slider 8 and removes, satisfies the washing of different positions device, and the electronic slide rail 6 of second drives slide 7 and brush 10 and removes, is convenient for wash the foreign particles of device.
Specifically, the inner bottom end face of the cleaning pool 1 is provided with an inclined slope body, a drain pipe 14 is vertically arranged between the inclined slope bodies on the two sides, a ball valve is arranged in the drain pipe 14, and sewage is conveniently discharged from the drain pipe 14 due to the arrangement of the inclined slope body.
It is specific, wash a side welding that 1 keeps away from step motor 11 in pond and have triangular supports frame 16, wash 1 inner wall in pond and be located 2 one ends of loading board and seted up the export, and be provided with the protection piece 15 that drives the pull ring in the export, protection piece 15 and the 16 parallel and level of triangular supports frame pull out protection piece 15 through the pull ring, and the device is taken out to triangular supports frame 16 from the export on.
Specifically, the fixed sleeve 13 is fixedly installed on the periphery of the rotating shaft 18 and positioned on two sides of the eccentric wheel 12 through the threads of the fastening bolt 17, the two ends of the rotating shaft 18 are connected with the cleaning pool 1 through the bearing, and the fastening bolt 17 penetrates through the fixed sleeve 13.
Specifically, this semiconductor equipment's device belt cleaning device, place the semiconductor equipment device on metal elastic filter screen, step motor 11 drives pivot 18 and eccentric wheel 12 and rotates, eccentric wheel 12 collides metal elastic filter screen, make the device on the metal elastic filter screen turn and is washd by reposition of redundant personnel spray tube 3, first electronic slide rail 9 drives reposition of redundant personnel spray tube 3 through slider 8 and removes, electronic slide rail 6 of second drives slide 7 and brush 10 and removes, the setting of the slope body is convenient for sewage and is discharged from drain pipe 14. The device cleaning device of the semiconductor equipment can facilitate the overturning cleaning of the device and improve the cleaning efficiency.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.
Claims (5)
1. The utility model provides a device belt cleaning device of semiconductor equipment, includes washing pond (1), loading board (2) and reposition of redundant personnel spray tube (3), its characterized in that: the cleaning tank (1) is of a rectangular box structure, supporting legs (4) are welded at four corners of the bottom end face of the cleaning tank (1), supporting blocks (5) are symmetrically welded on the inner walls of two sides of the cleaning tank (1), and bearing plates (2) used for placing semiconductor equipment devices are fixedly mounted on the top end faces of the two groups of supporting blocks (5) through bolt threads;
the device is characterized in that a metal elastic filter screen is arranged in the middle of the bottom end face of the bearing plate (2), the metal elastic filter screen penetrates through the bottom end face of the bearing plate (2), a shunt spray pipe (3) used for cleaning semiconductor equipment devices is arranged between the symmetrical inner walls of two sides of the cleaning pool (1), N groups of spray heads are symmetrically arranged on one side face, facing the bearing plate (2), of the shunt spray pipe (3), a connecting pipe penetrates through the middle position of one side face, opposite to the spray heads, of the shunt spray pipe (3), a stepping motor (11) is fixedly installed on one side face of the cleaning pool (1) through bolt threads, an output shaft of the stepping motor (11) penetrates through the cleaning pool (1) and is connected with a rotating shaft (18) through a speed reducer, the rotating shaft (18) is located under the bearing plate (2) in a vertical mode, and, the eccentric end of the eccentric wheel (12) is in contact with the metal elastic filter screen of the bearing plate (2).
2. The device cleaning apparatus for a semiconductor apparatus according to claim 1, wherein: wash pond (1) both sides inner wall equal symmetry and be provided with first electronic slide rail (9), and two sets of equal sliding connection has slider (8) in first electronic slide rail (9), slider (8) and reposition of redundant personnel spray tube (3) both ends fixed connection, just be located under reposition of redundant personnel spray tube (3) perpendicular and wash pond (1) inner wall and all install electronic slide rail of second (6) through bolt screw thread fixed mounting, sliding connection has slide (7) between electronic slide rail of second (6), slide (7) bottom face is provided with brush (10) that are used for scrubbing the semiconductor equipment device.
3. The device cleaning apparatus for a semiconductor apparatus according to claim 1, wherein: the cleaning pool is characterized in that an inclined slope body is arranged on the inner bottom end face of the cleaning pool (1), a drain pipe (14) is vertically arranged between the inclined slope bodies on the two sides, and a ball valve is arranged in the drain pipe (14).
4. The device cleaning apparatus for a semiconductor apparatus according to claim 1, wherein: wash a side welding that step motor (11) was kept away from in pond (1) and have triangular supports frame (16), wash pond (1) inner wall and be located loading board (2) one end and seted up the export, and be provided with in the export and drive protection piece (15) of pull ring, protection piece (15) and triangular supports frame (16) parallel and level.
5. The device cleaning apparatus for a semiconductor apparatus according to claim 1, wherein: the side of the rotating shaft (18) is arranged on the periphery and is provided with a fixed sleeve (13) on two sides of the eccentric wheel (12) through a fastening bolt (17) in a thread fixed manner, and two ends of the rotating shaft (18) are connected with the cleaning pool (1) through bearings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921462802.9U CN210546647U (en) | 2019-09-04 | 2019-09-04 | Device cleaning device of semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921462802.9U CN210546647U (en) | 2019-09-04 | 2019-09-04 | Device cleaning device of semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210546647U true CN210546647U (en) | 2020-05-19 |
Family
ID=70669313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921462802.9U Expired - Fee Related CN210546647U (en) | 2019-09-04 | 2019-09-04 | Device cleaning device of semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210546647U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112570362A (en) * | 2020-11-25 | 2021-03-30 | 湖南金三星煤机制造有限公司 | Cleaning pool for scrap steel recovery |
| CN114602843A (en) * | 2022-03-29 | 2022-06-10 | 陈宗萍 | Part processing system and method for intelligent equipment manufacturing |
-
2019
- 2019-09-04 CN CN201921462802.9U patent/CN210546647U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112570362A (en) * | 2020-11-25 | 2021-03-30 | 湖南金三星煤机制造有限公司 | Cleaning pool for scrap steel recovery |
| CN112570362B (en) * | 2020-11-25 | 2022-10-21 | 宝鸡市丰茂物资再生利用有限责任公司 | Cleaning pool for scrap steel recovery |
| CN114602843A (en) * | 2022-03-29 | 2022-06-10 | 陈宗萍 | Part processing system and method for intelligent equipment manufacturing |
| CN114602843B (en) * | 2022-03-29 | 2024-02-20 | 广东象力机械制造有限公司 | Part processing system and processing method for intelligent equipment manufacturing |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210546647U (en) | Device cleaning device of semiconductor equipment | |
| CN211209648U (en) | Photovoltaic board cleaning device | |
| CN209787115U (en) | Green building solar panel energy-saving cleaning system | |
| CN209077280U (en) | A kind of full automatic solar solar panel cleaning device | |
| CN211630119U (en) | Can prevent wind husky solar photovoltaic fixed bolster | |
| CN219287455U (en) | Solar cell panel sprays cleaning device | |
| CN210327462U (en) | Solar photovoltaic panel with self-cleaning function | |
| CN218697329U (en) | Steel sheet surface dirt clearing machine | |
| CN106824884A (en) | A kind of silicon wafer turnover flusher | |
| CN210497359U (en) | Semiconductor processing equipment | |
| CN210133090U (en) | Cleaning device for coal transport vehicle for large power plant | |
| CN210386192U (en) | Electrostatic dust removal device for industrial paint spraying | |
| CN108296185A (en) | A kind of environment-friendly materials production cleaning machine convenient for adjusting cleaning height | |
| CN112039421A (en) | Photovoltaic cell panel cleans equipment | |
| CN112427394A (en) | Ultrasonic cleaning equipment for photovoltaic silicon wafers | |
| CN111953272B (en) | Size-adjustable clamping device for solar photovoltaic panel and using method | |
| CN216655453U (en) | Semiconductor chip carrier band dust collecting equipment | |
| CN108543755A (en) | A kind of cleaning structure of blade of wind-driven generator | |
| CN206854154U (en) | A kind of crystal silicon solar bank cleaner tool | |
| CN215798569U (en) | Circulating environmental protection mechanical grid scrubbing | |
| CN213326779U (en) | Sewage treatment device convenient to clean | |
| CN210490791U (en) | Photovoltaic solar cleaning device | |
| CN210474798U (en) | Solar photovoltaic board cleaning equipment | |
| CN213026052U (en) | Novel diversified cleaning equipment for semiconductor chip | |
| CN209750940U (en) | Microbubble floor mopping machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200519 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |