CN210543993U - Semiconductor device dust removing device - Google Patents
Semiconductor device dust removing device Download PDFInfo
- Publication number
- CN210543993U CN210543993U CN201921462771.7U CN201921462771U CN210543993U CN 210543993 U CN210543993 U CN 210543993U CN 201921462771 U CN201921462771 U CN 201921462771U CN 210543993 U CN210543993 U CN 210543993U
- Authority
- CN
- China
- Prior art keywords
- water storage
- dust
- pipe
- storage tank
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000428 dust Substances 0.000 title claims abstract description 49
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 50
- 238000010521 absorption reaction Methods 0.000 claims abstract description 23
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims description 20
- 239000008399 tap water Substances 0.000 claims description 9
- 235000020679 tap water Nutrition 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 3
- 239000006096 absorbing agent Substances 0.000 claims 3
- 230000000694 effects Effects 0.000 abstract description 6
- 238000007599 discharging Methods 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 9
- 239000010865 sewage Substances 0.000 description 9
- 239000007787 solid Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model discloses a semiconductor equipment dust remove device, including the dust absorption body, air duct and water storage box, the dust absorption body is including absorption tube, plastic tubing and manual tensile pole, install the fan in the inner chamber of plastic tubing, the top of its lateral wall is fixed to be bonded has the cushion, be equipped with the accent axle of being connected with it transmission on the cushion, the lateral wall of manual tensile pole and the outer wall fixed bonding of accent axle, the plastic tubing is kept away from one side of absorption tube and the one end fixed bonding of air duct, the vertical pipe that stretches into that is provided with in the inner chamber of water storage box contains the running water in its inner chamber. This semiconductor device dust remove device through having set up water storage box, feed liquor pipe, stretching into pipe and running water, through the feed liquor pipe with the running water add the water storage box in, when the air is taking the dust and is discharging into the water storage box, the dust in the air can be absorbed by the running water, prevents that the dust that absorbs from spilling over to external environment again, makes the effect of getting rid of the dust better.
Description
Technical Field
The utility model belongs to the technical field of semiconductor equipment, concretely relates to semiconductor equipment dust remove device.
Background
The semiconductor refers to a material having a conductivity between a conductor and an insulator at normal temperature. Semiconductors are used in consumer electronics, communication systems, medical instruments and other fields, for example, diodes are devices made of semiconductors, and the importance of semiconductors is very great from the viewpoint of technological or economic development. With the development of technology, semiconductor devices are more and more widely used, and the range of the semiconductor devices is wider.
After a semiconductor device is operated for a long time, a large amount of dust remains in the semiconductor device, and therefore, a related dust removing device is required. The existing dust removing device mostly sucks dust into the containing tank, and when the containing tank is cleaned, the accumulated dust in the dust removing device can overflow to the external environment again, so that the effect of removing the dust is not good.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor equipment dust remove device to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a semiconductor equipment dust removing device comprises a dust collection body, an air guide pipe and a water storage tank, wherein the dust collection body comprises an absorption pipe, a plastic pipe and a manual stretching rod, a fan is installed in an inner cavity of the plastic pipe, a cushion block is fixedly bonded to the top of the outer side wall of the plastic pipe, a direction adjusting shaft in transmission connection with the cushion block is arranged on the cushion block, the side wall of the manual stretching rod is fixedly bonded to the outer wall of the direction adjusting shaft, one side, far away from the absorption pipe, of the plastic pipe is fixedly bonded to one end of the air guide pipe, and the other end of the air guide pipe is fixedly connected with the;
the dust collector is characterized in that a stretching pipe is vertically arranged in an inner cavity of the water storage tank, tap water is filled in the inner cavity of the water storage tank, a discharging pipe communicated with the inner cavity is fixedly welded on the outer side wall of one side, away from the air guide pipe, of the water storage tank, a mounting groove is formed in the outer side wall of the discharging pipe, a connecting strip and a metal filter screen are arranged in the inner cavity of the discharging pipe, an embedded block fixed with the water storage tank in a clamped mode is arranged in the mounting groove, jacks are formed in two sides of the embedded block, inserting blocks are fixedly welded at two ends of the embedded block, the inserting blocks are fixedly spliced with the two sets of jacks respectively.
Preferably, the side wall of the absorption tube is fixedly bonded with the side wall of the plastic tube, the inner cavities of the absorption tube and the plastic tube are communicated, a metal grating is arranged at an opening of the inner cavity of the absorption tube, which is far away from one side of the plastic tube, and the outer wall of the metal grating is fixedly bonded with the side wall of the inner cavity of the absorption tube.
Preferably, one end of the extension pipe penetrates through the top wall of the water storage tank and is fixedly bonded with the air guide pipe, and the other end of the extension pipe extends to the bottom of the inner cavity of the water storage tank.
Preferably, the central fixed welding of water storage box roof has the communicating feed liquor pipe of its inner chamber, all install the valve that its control opened and shut on feed liquor pipe and the delivery pipe.
Preferably, two ends of the connecting strip are respectively fixedly welded with the inner side wall of the embedding block and the outer wall of the metal filter screen, a supporting sheet is fixedly welded on the outer side wall of the embedding block, and a handle fixedly bonded with the supporting sheet is arranged on the supporting sheet.
The utility model discloses a technological effect and advantage: according to the semiconductor equipment dust removing device, the water storage tank, the liquid inlet pipe, the extending pipe and the tap water are arranged, the tap water is added into the water storage tank through the liquid inlet pipe, when air carries dust and is discharged into the water storage tank, the dust in the air can be absorbed by the tap water, the absorbed dust is prevented from overflowing to the external environment again, and the dust removing effect is better; the manual stretching rod, the direction-adjusting shaft and the cushion block are arranged, the manual stretching rod and the plastic pipe are held by hands, the manual stretching rod rotates along the direction-adjusting shaft, the offset angle of the manual stretching rod and the plastic pipe can be adjusted, and a person can move the absorption pipe to each corner in the semiconductor equipment by holding the manual stretching rod by hands, so that the dust absorption effect is better; through having set up delivery pipe, gomphosis piece, linking strip and metal filter screen, when sewage discharge, the bold solid impurity of condensing in it can be blocked by metal filter screen, and sewage (and tiny particle impurity) can directly be discharged for sewage and bold solid impurity are separately and handle respectively, make the effect of handling better.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a vertical cross-sectional view of the plastic tube of the present invention;
figure 3 is a vertical cross-section of the discharge tube of the present invention;
fig. 4 is a vertical sectional view of the water storage tank of the present invention.
In the figure: 1 dust collector, 2 gas-guide tubes, 3 water storage tanks, 4 absorption tubes, 5 plastic tubes, 6 metal grids, 7 fans, 8 cushion blocks, 9 direction-adjusting shafts, 10 manual stretching rods, 11 liquid inlet tubes, 12 extending tubes, 13 tap water, 14 discharge tubes, 15 embedded blocks, 16 connecting strips, 17 metal filter screens, 18 support sheets, 19 jacks, 20 inserted blocks and 21 rollers.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a dust removing device for semiconductor equipment as shown in figures 1-4, which is applicable to wafer processing equipment, IC sealing equipment and the like, and comprises a dust collector 1, an air duct 2 and a water storage tank 3, the dust collector 1 comprises an absorption tube 4, a plastic tube 5 and a manual stretching rod 10, the stretching principle of the manual stretching rod 10 is the same as that of a selfie stick, a fan 7 is arranged in the inner cavity of the plastic pipe 5, the fan 7 is electrically connected with an external power supply to ensure the normal work of the plastic pipe, the top of the outer side wall is fixedly bonded with a cushion block 8, the cushion block 8 is provided with a direction adjusting shaft 9 in transmission connection with the cushion block 8, the side wall of the manual stretching rod 10 is fixedly bonded with the outer wall of the direction-adjusting shaft 9, one side of the plastic tube 5, which is far away from the absorption tube 4, is fixedly bonded with one end of the air guide tube 2, and the other end of the air guide tube 2 is fixedly connected with the top wall of the water storage tank 3;
the dust collector is characterized in that an extending pipe 12 is vertically arranged in an inner cavity of the water storage tank 3, tap water 13 is filled in the inner cavity of the water storage tank, a discharge pipe 14 communicated with the inner cavity is fixedly welded on the outer side wall of one side, away from the air guide pipe 2, of the water storage tank 3, a mounting groove is formed in the outer side wall of the discharge pipe 14, a connecting strip 16 and a metal filter screen 17 are arranged in the inner cavity of the discharge pipe, an embedded block 15 fixed in a clamping mode with the mounting groove is arranged in the mounting groove, jacks 19 are formed in two sides of the embedded block 15, inserting blocks 20 are fixedly welded at two ends of the embedded block 15, the two inserting blocks 20 are fixedly connected with the two groups of jacks 19 in an inserting mode respectively, rubber pads are fixedly bonded on the outer side wall of the two groups of inserting blocks, rollers 21 are mounted at four corners of the bottom wall of the.
Specifically, the side wall of the absorption tube 4 is fixedly bonded with the side wall of the plastic tube 5, the inner cavities of the absorption tube and the plastic tube are communicated, a metal grating 6 is arranged at an opening of the inner cavity of the absorption tube 4, which is far away from one side of the plastic tube 5, the metal grating 6 is arranged to prevent large solid particles outside from entering the air duct 2 to cause blockage, small particles such as dust can penetrate through the metal grating 6, and the outer wall of the metal grating 6 is fixedly bonded with the side wall of the inner cavity of the absorption tube 4.
Specifically, one end of the extension pipe 12 penetrates through the top wall of the water storage tank 3 and is fixedly bonded with the air guide pipe 2, the other end of the extension pipe extends to the bottom of the inner cavity of the water storage tank 3, and when the device is actually used, the water level of the tap water 13 is required to be extended to the bottom of the extension pipe 12, so that the tap water can be used for absorbing dust.
Specifically, the central fixed welding of 3 roof of water storage tank has its communicating feed liquor pipe 11 of inner chamber, all install its valve that opens and shuts of control on feed liquor pipe 11 and the delivery pipe 14.
Specifically, two ends of the connecting strip 16 are respectively fixedly welded with the inner side wall of the embedding block 15 and the outer wall of the metal filter screen 17, the outer side wall of the embedding block 15 is fixedly welded with a supporting sheet 18, a handle fixedly bonded with the supporting sheet 18 is arranged on the supporting sheet 18, the handle is held by hands to stretch outwards, the embedding block 15 can be driven to be separated from the discharge pipe 14, and therefore solid particle impurities condensed in the discharge pipe 14 are discharged.
Specifically, when the dust removing device for the semiconductor equipment is used, firstly, a valve on a liquid inlet pipe 11 is opened, running water is added into an inner cavity of a water storage tank 3 through the liquid inlet pipe 11, the volume of the running water is kept to be about 80% of the volume of the inner cavity of the water storage tank 3, a person pushes the water storage tank 3 and enables the water storage tank to move along the rolling of four groups of rollers 21, when the water storage tank 3 is close to the semiconductor equipment, the hand-operated stretching rod 10 is held and enables the water storage tank to rotate along a direction adjusting shaft 9, when an included angle between the hand-operated stretching rod 10 and a plastic pipe 5 is adjusted, the hand-operated stretching rod 10 is far away from one side of the plastic pipe 5 and drives the plastic pipe 5 to be close to a position where dust needs to be cleaned, a fan 7 is driven to work, external air can be sucked into an air guide pipe 2 and brings the dust into, gaseous final follow feed liquor pipe 11 discharge, after the dust absorption is accomplished, with water storage tank 3 remove to the position that can discharge sewage, open the valve on the delivery pipe 14, make sewage flow, and the massive solid particle impurity that condenses into in the sewage can be blocked by metal filter screen 17 (metal filter screen 17 is the same with the intensive degree of dust screen, its surface is opened has the hole that the diameter is less than 1mm, sewage and tiny particle impurity accessible, and the solid impurity of large granule can not pass through), after sewage discharges, hand handle and tensile gomphosis piece 15, can make gomphosis piece 15 separate with delivery pipe 14, can make remaining massive solid particle impurity discharge in the delivery pipe 14 this moment, thereby realize sewage (including tiny particle impurity) and the separate processing of bold solid particle impurity.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.
Claims (5)
1. The utility model provides a semiconductor equipment dust remove device, includes the dust absorption body (1), air duct (2) and water storage box (3), its characterized in that: the dust collector (1) comprises an absorption tube (4), a plastic tube (5) and a manual stretching rod (10), a fan (7) is installed in an inner cavity of the plastic tube (5), a cushion block (8) is fixedly bonded to the top of the outer side wall of the plastic tube, a direction adjusting shaft (9) in transmission connection with the cushion block (8) is arranged on the cushion block (8), the side wall of the manual stretching rod (10) is fixedly bonded to the outer wall of the direction adjusting shaft (9), one side, far away from the absorption tube (4), of the plastic tube (5) is fixedly bonded to one end of an air guide tube (2), and the other end of the air guide tube (2) is fixedly connected to the top wall of a water storage tank (3;
the dust collector is characterized in that an extending pipe (12) is vertically arranged in an inner cavity of the water storage tank (3), tap water (13) is contained in the inner cavity of the water storage tank, a discharge pipe (14) communicated with the inner cavity is fixedly welded on the outer side wall of one side, away from the air guide pipe (2), of the water storage tank (3), a mounting groove is formed in the outer side wall of the discharge pipe (14), a connecting strip (16) and a metal filter screen (17) are arranged in the inner cavity of the water storage tank, embedded blocks (15) fixed with the water storage tank in a clamped mode are arranged in the mounting groove, inserting holes (19) are formed in two sides of the mounting groove, inserting blocks (20) are fixedly welded at two ends of each embedded block (15), the inserting blocks (20) are fixedly connected with the two groups of inserting holes (19) respectively.
2. The dust removing device for semiconductor equipment according to claim 1, wherein: the lateral wall of absorber tube (4) and the lateral wall fixed bonding of plastic tubing (5), the inner chamber of the two communicates with each other, the opening part that plastic tubing (5) one side was kept away from to absorber tube (4) inner chamber is equipped with metal grid (6), the outer wall of metal grid (6) and the lateral wall fixed bonding of absorber tube (4) inner chamber.
3. The dust removing device for semiconductor equipment according to claim 1, wherein: one end of the extension pipe (12) penetrates through the top wall of the water storage tank (3) and is fixedly bonded with the air duct (2), and the other end of the extension pipe extends to the bottom of the inner cavity of the water storage tank (3).
4. The dust removing device for semiconductor equipment according to claim 1, wherein: the central fixed welding of water storage box (3) roof has communicating feed liquor pipe (11) of its inner chamber, all install the valve that its control opened and shut on feed liquor pipe (11) and delivery pipe (14).
5. The dust removing device for semiconductor equipment according to claim 1, wherein: the two ends of the connecting strip (16) are respectively fixedly welded with the inner side wall of the embedding block (15) and the outer wall of the metal filter screen (17), a supporting sheet (18) is fixedly welded on the outer side wall of the embedding block (15), and a handle fixedly bonded with the supporting sheet (18) is arranged on the supporting sheet (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921462771.7U CN210543993U (en) | 2019-09-04 | 2019-09-04 | Semiconductor device dust removing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921462771.7U CN210543993U (en) | 2019-09-04 | 2019-09-04 | Semiconductor device dust removing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210543993U true CN210543993U (en) | 2020-05-19 |
Family
ID=70665668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921462771.7U Expired - Fee Related CN210543993U (en) | 2019-09-04 | 2019-09-04 | Semiconductor device dust removing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210543993U (en) |
-
2019
- 2019-09-04 CN CN201921462771.7U patent/CN210543993U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200519 |