CN210543960U

CN210543960U - Crystal growth waste gas filter vat

Info

Publication number: CN210543960U
Application number: CN201921314219.3U
Authority: CN
Inventors: 王鹏; 陶飞
Original assignee: Wafer Works (yangzhou) Corp
Current assignee: Wafer Works (yangzhou) Corp
Priority date: 2019-08-14
Filing date: 2019-08-14
Publication date: 2020-05-19
Anticipated expiration: 2029-08-14

Abstract

The utility model discloses a long brilliant waste gas filter vat, include the staving and fix the bung at the staving top, the inside filter element group spare that is equipped with of staving, the bung inside with the passageway intercommunication after straining of filter element group spare, the air inlet has been seted up globally to the staving, gas outlet and blowback mouth have been seted up on the bung, the staving is global still to be equipped with the dust absorption mouth, the dust absorption mouth is equipped with stifle board. The utility model discloses need not to dismantle the dust on can effectively cleaning the filter core, labour saving and time saving reduces the human cost to can effectively avoid clean in-process dust diffusion.

Description

Crystal growth waste gas filter vat

Technical Field

The utility model relates to a semiconductor manufacturing technical field, concretely relates to long brilliant waste gas filter vat.

Background

The crystal growth technology is called KY method for short, also called kyropoulos method, and the principle is similar to that of the Czochralski crystal pulling method. The method comprises the following steps: the raw materials are heated to a melting point and then melted to form molten soup, the seed crystal of the single crystal is contacted with the surface of the molten soup, the single crystal with the same crystal structure as the seed crystal begins to grow on a solid-liquid interface of the seed crystal and the molten soup, the seed crystal is upwards pulled at a certain speed and simultaneously rotates, the seed crystal is upwards pulled for a period of time to form a crystal neck, after the solidification rate of the molten soup and the seed crystal interface is stable, the seed crystal is continuously pulled upwards and simultaneously rotates, the single crystal is gradually solidified downwards from the upper part in a cooling rate control mode until the diameter reaches a desired value, the seed crystal is continuously pulled upwards at a certain pulling speed, and finally the seed crystal is solidified into a whole single crystal rod.

In order to avoid the influence of outside air on the growth of internal crystals, inert shielding gas needs to be continuously introduced during the crystal growth process, a large amount of oxides and dust are doped during the discharge of the shielding gas, the environment is seriously polluted by directly discharging the shielding gas into the air, and therefore, the waste gas is required to be filtered by a waste gas filtering barrel and then discharged into the air. The existing waste gas filter barrel needs to be completely disassembled to be cleaned after crystal growth operation is finished each time, and the operation is very troublesome; and in the clean process, the filter vat is all opened, and the dust on the inside filter core has the diffusion of certain degree, can influence operational environment, is unfavorable for the field management.

Therefore, it is necessary to develop a new crystal growth waste gas filtering barrel.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a long brilliant waste gas filter vat, this filter vat need not to dismantle the dust on can effectively cleaning the filter core, and labour saving and time saving reduces the human cost to can effectively avoid clean in-process dust diffusion.

In order to realize the purpose, the technical scheme of the utility model is that:

the utility model provides a long brilliant waste gas filter vat, includes the staving and fixes the bung at the staving top, the inside filter element group spare that is equipped with of staving, the bung inside with the passageway intercommunication after straining of filter element group spare, the air inlet has been seted up globally to the staving, gas outlet and blowback have been seted up on the bung, the staving is global still to be equipped with the dust absorption mouth, the dust absorption mouth is equipped with stifle board.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model can blow air directly through the back blowing port, blow off dust on the surface of the filter element assembly, suck out the dust through the dust suction port, quickly finish cleaning the filter element, and does not need to disassemble the filter barrel, thereby saving time and labor and reducing labor cost;

2. the utility model cleans dust on the surface of the filter element through back-blowing, has good cleaning effect, and can effectively avoid filter element blockage;

3. the utility model discloses the clean in-process of filter core, the dust is direct to be absorbed away by the dust absorption mouth and is stored, can not cause the dust diffusion phenomenon, can effectively avoid polluting the operation environment.

The utility model discloses a further improvement scheme as follows:

furthermore, the dust absorption opening is arranged at the bottom of the circumferential surface of the barrel body, and the air inlet and the dust absorption opening are respectively arranged at two sides of the circumferential surface of the barrel body.

By adopting the scheme, dust is prevented from being accumulated at the air inlet and the bottom of the barrel body.

Further, the filter element group spare includes the mounting panel, the mounting panel bottom surface is evenly fixed with the filter core of the vertical setting of a plurality of, and set up the air vent that communicates with the post-filtration passageway one-to-one of filter core on the mounting panel, the bung bottom is equipped with the turn-ups, the staving top is equipped with down the turn-ups, the mounting panel outer fringe is placed on the turn-ups down, it compresses tightly to go up the turn-ups the mounting panel, go up turn-ups, mounting panel and turn-ups down pass through the bolt fastening.

By adopting the scheme, the interior of the barrel cover is communicated with the internal channel of the filter element through the vent hole on the mounting plate; the mounting plate is clamped and fixed by the upper flanging and the lower flanging, and the stability of the whole structure is ensured.

Furthermore, the upper surface and the lower surface of the mounting plate are both provided with a circle of annular bulges, and the upper flanging and the lower flanging are provided with grooves matched with the annular bulges.

Through adopting above-mentioned scheme, the annular of two sides is protruding and go up turn-ups and turn-ups recess cooperation joint on surface down about the mounting panel, and the quick alignment installation of filter element group spare of being convenient for further guarantees simultaneously that filter element group spare is fixed stable.

Furthermore, sealing rubber strips are arranged between the upper flanging and the lower flanging and the outer edge of the mounting plate.

Furthermore, a pull rod convenient for lifting the filter element assembly is fixed on the top surface of the mounting plate.

By adopting the scheme, the pull rod is convenient for lifting the mounting plate to replace the filter element.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.

Fig. 1 is a schematic structural diagram of an embodiment of the present invention.

Fig. 2 is a schematic sectional structure view of fig. 1.

Shown in the figure:

1. a barrel body; 101. a dust suction port; 102. a blank board; 103. an air inlet; 104. downward flanging;

2. a barrel cover; 201. an air outlet; 202. a back flushing port; 203. upward flanging;

3. mounting a plate; 301. a vent hole; 302. a ring-shaped bulge;

4. a filter element;

5. sealing rubber strips;

6. a pull rod;

7. and (4) a groove.

Detailed Description

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.

It is to be noted that unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the present invention belongs.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience of description and simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting.

Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

As shown in fig. 1 and fig. 2, the crystal growth waste gas filtering barrel provided in this embodiment includes a barrel body 1 and a barrel cover 2 fixed on the top of the barrel body 1.

Staving 1 is inside to be equipped with filter element group spare, 2 inside and filter element group spare's passageway intercommunication after straining of bung, and the air inlet 103 has been seted up globally to staving 1, has seted up gas outlet 201 and blowback 202 on bung 2, and 1 is global still to be equipped with dust absorption mouth 101 of staving 1, and dust absorption mouth 101 is equipped with vexed board 102.

Dust absorption mouth 101 is seted up in 1 global bottom of staving, and air inlet 103 and dust absorption mouth 101 are set up respectively in 1 global both sides of staving, avoid the dust to pile up in air inlet 103 and 1 bottoms of staving.

The filter element group spare includes mounting

panel

3, and 3 bottom surfaces of mounting panel evenly are fixed with the filter core 4 of the vertical setting of a plurality of, and set up on the mounting panel 3 with the air vent 301 of the passageway one-to-one intercommunication after straining of filter core 4, 2 bottoms of bung are equipped with turn-ups 203, 1 top of staving is equipped with turn-ups 104 down, and 3 outer fringe of mounting panel are placed down on turn-ups 104, and turn-ups 203 compresses tightly mounting panel 3 on, and turn-ups 203, mounting panel 3 and turn-ups 104 down pass through the bolt fastening.

The interior of the barrel cover 2 is communicated with the inner channel of the filter element 4 through a vent hole 301 on the mounting plate 3; the mounting plate 3 is clamped and fixed by the upper flange 203 and the lower flange 104, and the stability of the whole structure is ensured.

The upper surface and the lower surface of the mounting plate 3 are both provided with a circle of annular bulges 302, and the upper flange 203 and the lower flange 104 are provided with grooves 7 matched with the annular bulges 302.

The annular protrusions 302 on the upper surface and the lower surface of the mounting plate 3 are matched and clamped with the grooves 7 on the surfaces of the upper flange 203 and the lower flange 104, so that the filter element assembly can be conveniently and quickly aligned and mounted, and the filter element assembly is further fixed and stable.

Sealing rubber strips 5 are arranged between the upper flange 203 and the outer edge of the mounting plate 3 and between the lower flange 104 and the outer edge of the mounting plate 3.

The top surface of the mounting plate 3 is also fixed with a pull rod 6 which is convenient for pulling the filter element assembly, and the pull rod 6 is convenient for pulling the mounting plate 3 to replace the filter element 4.

In the embodiment, air can be blown through the back blowing port 202 directly to blow off dust on the surface of the filter element assembly, and the dust is sucked out through the dust suction port 101, so that the cleaning of the filter element 4 is completed quickly, a filter barrel does not need to be disassembled, time and labor are saved, and the labor cost is reduced;

in the embodiment, the dust on the surface of the filter element 4 is cleaned through back blowing, the cleaning effect is good, and the filter element 4 can be effectively prevented from being blocked;

in the cleaning process of the filter element 4, dust is directly sucked away and stored through the dust suction port 101, the dust diffusion phenomenon cannot be caused, and the pollution to the operating environment can be effectively avoided.

In the specification of the present invention, a large number of specific details are explained. It is understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures and techniques have not been shown in detail in order not to obscure an understanding of this description.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the scope of the embodiments of the present invention, and are intended to be covered by the claims and the specification.

Claims

1. The utility model provides a long brilliant waste gas filter vat, its characterized in that includes the staving and fixes the bung at the staving top, the inside filter element group spare that is equipped with of staving, the bung inside with the passageway intercommunication after straining of filter element group spare, the air inlet has been seted up globally to the staving, gas outlet and blowback mouth have been seted up on the bung, the staving is global still to be equipped with the dust absorption mouth, the dust absorption mouth is equipped with stifle board.

2. The crystal growth waste gas filter vat according to claim 1, wherein said dust suction port is provided at the bottom of the peripheral surface of said vat body, and said air inlet and said dust suction port are provided at both sides of the peripheral surface of said vat body.

3. The crystal growth waste gas filter vat according to claim 1, wherein the filter element assembly comprises a mounting plate, a plurality of vertically arranged filter elements are uniformly fixed on the bottom surface of the mounting plate, the mounting plate is provided with vent holes which are communicated with the filtered channels of the filter elements in a one-to-one correspondence manner, the bottom end of the vat cover is provided with an upper flanging, the top end of the vat body is provided with a lower flanging, the outer edge of the mounting plate is placed on the lower flanging, the upper flanging compresses the mounting plate, and the upper flanging, the mounting plate and the lower flanging are fixed through bolts.

4. The crystal growth waste gas filter vat according to claim 3, wherein a circle of annular protrusion is arranged on both upper and lower surfaces of the mounting plate, and grooves matched with the annular protrusion are arranged on the upper flange and the lower flange.

5. The crystal growth waste gas filter vat according to claim 3, wherein sealing rubber strips are arranged between the upper flange and the lower flange and the outer edge of the mounting plate.

6. The crystal growth waste gas filter vat according to claim 3, wherein a pull rod for conveniently pulling the filter element assembly is further fixed on the top surface of the mounting plate.